Condensed Matter > Mesoscale and Nanoscale Physics
[Submitted on 22 Apr 2024]
Title:Ultralow Dissipation Nanomechanical Devices from Monocrystalline Silicon Carbide
View PDF HTML (experimental)Abstract:Due to their low mass and long coherence times, nanomechanical resonators have many applications, from biomolecule mass sensing to hybrid quantum interfaces. In many instances the performance is limited by internal material dam**. Crystalline materials promise lower material dissipation, however due to fabrication challenges, amorphous materials are more commonly utilized. Crystalline silicon carbide (SiC) is particularly appealing due to its exquisite mechanical, electrical and optical properties, but to-date exhibits higher nanomechanical dissipation than both amorphous and other crystalline materials. To address this, we fabricate nanomechanical resonators thinned from bulk monocrystalline 4H-SiC. Characterization of multiple resonators of different sizes and thicknesses, allows us to discern the surface and volumetric contributions to dissipation. We measure mechanical dissipation rates as low as 2.7 mHz, more than an order-of-magnitude lower than any previous crystalline SiC resonator, yielding quality factors as high as 20 million at room temperature. We also quantify the nonlinear dissipation of SiC nanomechanical resonators for the first time, finding that it is lower than other materials. This promises higher sensitivity in applications such as mass sensing. By achieving exceptionally low dissipation in SiC resonators, our work provides a path towards improved performance in sensing and other applications.
Current browse context:
cond-mat.mes-hall
Change to browse by:
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
Connected Papers (What is Connected Papers?)
CORE Recommender (What is CORE?)
IArxiv Recommender
(What is IArxiv?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.