Electrical Engineering and Systems Science > Systems and Control
[Submitted on 6 Feb 2021]
Title:Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems
View PDFAbstract:In this paper, a practical fractional-order variable-gain super-twisting algorithm (PFVSTA) is proposed to improve the tracking performance of wafer stages for semiconductor manufacturing. Based on the sliding mode control (SMC), the proposed PFVSTA enhances the tracking performance from three aspects: 1) alleviating the chattering phenomenon via super-twisting algorithm and a novel fractional-order sliding surface~(FSS) design, 2) improving the dynamics of states on the sliding surface with fast response and small overshoots via the designed novel FSS and 3) compensating for disturbances via variable-gain control law. Based on practical conditions, this paper analyzes the stability of the controller and illustrates the theoretical principle to compensate for the uncertainties caused by accelerations. Moreover, numerical simulations prove the effectiveness of the proposed sliding surface and control scheme, and they are in agreement with the theoretical analysis. Finally, practice-based comparative experiments are conducted. The results show that the proposed PFVSTA can achieve much better tracking performance than the conventional methods from various perspectives.
Current browse context:
eess.SY
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
Connected Papers (What is Connected Papers?)
CORE Recommender (What is CORE?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.