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High-coherence superconducting qubits made using industry-standard, advanced semiconductor manufacturing
Authors:
Jacques Van Damme,
Shana Massar,
Rohith Acharya,
Tsvetan Ivanov,
Daniel Perez Lozano,
Yann Canvel,
Mael Demarets,
Diziana Vangoidsenhoven,
Yannick Hermans,
Ju-Geng Lai,
Vadiraj Rao,
Massimo Mongillo,
Danny Wan,
Jo De Boeck,
Anton Potocnik,
Kristiaan De Greve
Abstract:
The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers. As the complexity of quantum processors continues to grow, the need for stringent fabrication tolerances becomes increasingly critical. Utilizing advanced industrial fabrication processes could facilitate the necessary level of fabrication control to support the contin…
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The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers. As the complexity of quantum processors continues to grow, the need for stringent fabrication tolerances becomes increasingly critical. Utilizing advanced industrial fabrication processes could facilitate the necessary level of fabrication control to support the continued scaling of quantum processors. However, these industrial processes are currently not optimized to produce high coherence devices, nor are they a priori compatible with the commonly used approaches to make superconducting qubits. In this work, we demonstrate for the first time superconducting transmon qubits manufactured in a 300 mm CMOS pilot line, using industrial fabrication methods, with resulting relaxation and coherence times already exceeding 100 microseconds. We show across-wafer, large-scale statistics studies of coherence, yield, variability, and aging that confirm the validity of our approach. The presented industry-scale fabrication process, using exclusively optical lithography and reactive ion etching, shows performance and yield similar to the conventional laboratory-style techniques utilizing metal lift-off, angled evaporation, and electron-beam writing. Moreover, it offers potential for further upscaling by including three-dimensional integration and additional process optimization using advanced metrology and judicious choice of processing parameters and splits. This result marks the advent of more reliable, large-scale, truly CMOS-compatible fabrication of superconducting quantum computing processors.
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Submitted 22 April, 2024; v1 submitted 2 March, 2024;
originally announced March 2024.
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Argon milling induced decoherence mechanisms in superconducting quantum circuits
Authors:
J. Van Damme,
Ts. Ivanov,
P. Favia,
T. Conard,
J. Verjauw,
R. Acharya,
D. Perez Lozano,
B. Raes,
J. Van de Vondel,
A. M. Vadiraj,
M. Mongillo,
D. Wan,
J. De Boeck,
A. Potočnik,
K. De Greve
Abstract:
The fabrication of superconducting circuits requires multiple deposition, etch and cleaning steps, each possibly introducing material property changes and microscopic defects. In this work, we specifically investigate the process of argon milling, a potentially coherence limiting step, using niobium and aluminum superconducting resonators as a proxy for surface-limited behavior of qubits. We find…
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The fabrication of superconducting circuits requires multiple deposition, etch and cleaning steps, each possibly introducing material property changes and microscopic defects. In this work, we specifically investigate the process of argon milling, a potentially coherence limiting step, using niobium and aluminum superconducting resonators as a proxy for surface-limited behavior of qubits. We find that niobium microwave resonators exhibit an order of magnitude decrease in quality-factors after surface argon milling, while aluminum resonators are resilient to the same process. Extensive analysis of the niobium surface shows no change in the suboxide composition due to argon milling, while two-tone spectroscopy measurements reveal an increase in two-level system electrical dipole moments, indicating a structurally altered niobium oxide hosting larger two-level system defects. However, a short dry etch can fully recover the argon milling induced losses on niobium, offering a potential route towards state-of-the-art overlap Josephson junction qubits with niobium circuitry.
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Submitted 7 February, 2023;
originally announced February 2023.
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Manufacturing high-Q superconducting α-tantalum resonators on silicon wafers
Authors:
D. P. Lozano,
M. Mongillo,
X. Piao,
S. Couet,
D. Wan,
Y. Canvel,
A. M. Vadiraj,
Ts. Ivanov,
J. Verjauw,
R. Acharya,
J. Van Damme,
F. A. Mohiyaddin,
J. Jussot,
P. P. Gowda,
A. Pacco,
B. Raes,
J. Van de Vondel,
I. P. Radu,
B. Govoreanu,
J. Swerts,
A. Potočnik,
K. De Greve
Abstract:
The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric losses at different surfaces and interfaces. α-tantalum is a superconductor that has proven effective in reducing dielectric loss and improving device performance due to its thin low-loss oxide. However, without the use of a seed layer, this tantalum phase has so far only been realised…
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The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric losses at different surfaces and interfaces. α-tantalum is a superconductor that has proven effective in reducing dielectric loss and improving device performance due to its thin low-loss oxide. However, without the use of a seed layer, this tantalum phase has so far only been realised on sapphire substrates, which is incompatible with advanced processing in industry-scale fabrication facilities. Here, we demonstrate the fabrication of high-quality factor α-tantalum resonators directly on silicon wafers over a variety of metal deposition conditions and perform a comprehensive material and electrical characterization study. By comparing experiments with simulated resonator loss, we demonstrate that two-level-system loss is dominated by surface oxide contributions and not the substrate-metal interface. Our study paves the way to large scale manufacturing of low-loss superconducting circuits and to materials-driven advancements in superconducting circuit performance.
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Submitted 30 November, 2022; v1 submitted 29 November, 2022;
originally announced November 2022.
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Overcoming I/O bottleneck in superconducting quantum computing: multiplexed qubit control with ultra-low-power, base-temperature cryo-CMOS multiplexer
Authors:
Rohith Acharya,
Steven Brebels,
Alexander Grill,
Jeroen Verjauw,
Tsvetan Ivanov,
Daniel Perez Lozano,
Danny Wan,
Jacques van Damme,
A. M. Vadiraj,
Massimo Mongillo,
Bogdan Govoreanu,
Jan Craninckx,
I. P. Radu,
Kristiaan de Greve,
Georges Gielen,
Francky Catthoor,
Anton Potočnik
Abstract:
Large-scale superconducting quantum computing systems entail high-fidelity control and readout of large numbers of qubits at millikelvin temperatures, resulting in a massive input-output bottleneck. Cryo-electronics, based on complementary metal-oxide-semiconductor (CMOS) technology, may offer a scalable and versatile solution to overcome this bottleneck. However, detrimental effects due to cross-…
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Large-scale superconducting quantum computing systems entail high-fidelity control and readout of large numbers of qubits at millikelvin temperatures, resulting in a massive input-output bottleneck. Cryo-electronics, based on complementary metal-oxide-semiconductor (CMOS) technology, may offer a scalable and versatile solution to overcome this bottleneck. However, detrimental effects due to cross-coupling between the electronic and thermal noise generated during cryo-electronics operation and the qubits need to be avoided. Here we present an ultra-low power radio-frequency (RF) multiplexing cryo-electronics solution operating below 15 mK that allows for control and interfacing of superconducting qubits with minimal cross-coupling. We benchmark its performance by interfacing it with a superconducting qubit and observe that the qubit's relaxation times ($T_1$) are unaffected, while the coherence times ($T_2$) are only minimally affected in both static and dynamic operation. Using the multiplexer, single qubit gate fidelities above 99.9%, i.e., well above the threshold for surface-code based quantum error-correction, can be achieved with appropriate thermal filtering. In addition, we demonstrate the capability of time-division-multiplexed qubit control by dynamically windowing calibrated qubit control pulses. Our results show that cryo-CMOS multiplexers could be used to significantly reduce the wiring resources for large-scale qubit device characterization, large-scale quantum processor control and quantum error correction protocols.
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Submitted 26 September, 2022;
originally announced September 2022.
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Path toward manufacturable superconducting qubits with relaxation times exceeding 0.1 ms
Authors:
J. Verjauw,
R. Acharya,
J. Van Damme,
Ts. Ivanov,
D. Perez Lozano,
F. A. Mohiyaddin,
D. Wan,
J. Jussot,
A. M. Vadiraj,
M. Mongillo,
M. Heyns,
I. Radu,
B. Govoreanu,
A. Potočnik
Abstract:
As the superconducting qubit platform matures towards ever-larger scales in the race towards a practical quantum computer, limitations due to qubit inhomogeneity through lack of process control become apparent. To benefit from the advanced process control in industry-scale CMOS fabrication facilities, different processing methods will be required. In particular, the double-angle evaporation and li…
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As the superconducting qubit platform matures towards ever-larger scales in the race towards a practical quantum computer, limitations due to qubit inhomogeneity through lack of process control become apparent. To benefit from the advanced process control in industry-scale CMOS fabrication facilities, different processing methods will be required. In particular, the double-angle evaporation and lift-off techniques used for current, state-of-the art superconducting qubits are generally incompatible with modern day manufacturable processes. Here, we demonstrate a fully CMOS compatible qubit fabrication method, and show results from overlap Josephson junction devices with long coherence and relaxation times, on par with the state-of-the-art. We experimentally verify that Argon milling - the critical step during junction fabrication - and a subtractive etch process nevertheless result in qubits with average qubit energy relaxation times T1 reaching 70 $μ$s, with maximum values exceeding 100 $μ$s. Furthermore, we show that our results are still limited by surface losses and not, crucially, by junction losses. The presented fabrication process therefore heralds an important milestone towards a manufacturable 300 mm CMOS process for high-coherence superconducting qubits and has the potential to advance the scaling of superconducting device architectures.
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Submitted 21 February, 2022;
originally announced February 2022.
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Investigation of microwave loss induced by oxide regrowth in high-Q Nb resonators
Authors:
J. Verjauw,
A. Potočnik,
M. Mongillo,
R. Acharya,
F. Mohiyaddin,
G. Simion,
A. Pacco,
Ts. Ivanov,
D. Wan,
A. Vanleenhove,
L. Souriau,
J. Jussot,
A. Thiam,
J. Swerts,
X. Piao,
S. Couet,
M. Heyns,
B. Govoreanu,
I. Radu
Abstract:
The coherence of state-of-the-art superconducting qubit devices is predominantly limited by two-level-system defects, found primarily at amorphous interface layers. Reducing microwave loss from these interfaces by proper surface treatments is key to push the device performance forward. Here, we study niobium resonators after removing the native oxides with a hydrofluoric acid etch. We investigate…
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The coherence of state-of-the-art superconducting qubit devices is predominantly limited by two-level-system defects, found primarily at amorphous interface layers. Reducing microwave loss from these interfaces by proper surface treatments is key to push the device performance forward. Here, we study niobium resonators after removing the native oxides with a hydrofluoric acid etch. We investigate the reappearance of microwave losses introduced by surface oxides that grow after exposure to the ambient environment. We find that losses in quantum devices are reduced by an order of magnitude, with internal Q-factors reaching up to 7 $\cdot$ 10$^6$ in the single photon regime, when devices are exposed to ambient conditions for 16 min. Furthermore, we observe that Nb2O5 is the only surface oxide that grows significantly within the first 200 hours, following the extended Cabrera-Mott growth model. In this time, microwave losses scale linearly with the Nb$_2$O$_5$ thickness, with an extracted loss tangent tan$δ$ = 9.9 $\cdot$ 10$^{-3}$. Our findings are of particular interest for devices spanning from superconducting qubits, quantum-limited amplifiers, microwave kinetic inductance detectors to single photon detectors.
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Submitted 22 December, 2020; v1 submitted 19 December, 2020;
originally announced December 2020.
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Millikelvin temperature cryo-CMOS multiplexer for scalable quantum device characterisation
Authors:
Anton Potočnik,
Steven Brebels,
Jeroen Verjauw,
Rohith Acharya,
Alexander Grill,
Danny Wan,
Massimo Mongillo,
Ruoyu Li,
Tsvetan Ivanov,
Steven Van Winckel,
Fahd A. Mohiyaddin,
Bogdan Govoreanu,
Jan Craninckx,
I. P. Radu
Abstract:
Quantum computers based on solid state qubits have been a subject of rapid development in recent years. In current Noisy Intermediate-Scale Quantum (NISQ) technology, each quantum device is controlled and characterised though a dedicated signal line between room temperature and base temperature of a dilution refrigerator. This approach is not scalable and is currently limiting the development of l…
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Quantum computers based on solid state qubits have been a subject of rapid development in recent years. In current Noisy Intermediate-Scale Quantum (NISQ) technology, each quantum device is controlled and characterised though a dedicated signal line between room temperature and base temperature of a dilution refrigerator. This approach is not scalable and is currently limiting the development of large-scale quantum system integration and quantum device characterisation. Here we demonstrate a custom designed cryo-CMOS multiplexer operating at 32 mK. The multiplexer exhibits excellent microwave properties up to 10 GHz at room and millikelvin temperatures. We have increased the characterisation throughput with the multiplexer by measuring four high-quality factor superconducting resonators using a single input and output line in a dilution refrigerator. Our work lays the foundation for large-scale microwave quantum device characterisation and has the perspective to address the wiring problem of future large-scale quantum computers.
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Submitted 14 September, 2021; v1 submitted 23 November, 2020;
originally announced November 2020.
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Observation of the Crossover from Photon Ordering to Delocalization in Tunably Coupled Resonators
Authors:
Michele C. Collodo,
Anton Potočnik,
Simone Gasparinetti,
Jean-Claude Besse,
Marek Pechal,
Mahdi Sameti,
Michael J. Hartmann,
Andreas Wallraff,
Christopher Eichler
Abstract:
Networks of nonlinear resonators offer intriguing perspectives as quantum simulators for non-equilibrium many-body phases of driven-dissipative systems. Here, we employ photon correlation measurements to study the radiation fields emitted from a system of two superconducting resonators, coupled nonlinearly by a superconducting quantum interference device (SQUID). We apply a parametrically modulate…
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Networks of nonlinear resonators offer intriguing perspectives as quantum simulators for non-equilibrium many-body phases of driven-dissipative systems. Here, we employ photon correlation measurements to study the radiation fields emitted from a system of two superconducting resonators, coupled nonlinearly by a superconducting quantum interference device (SQUID). We apply a parametrically modulated magnetic flux to control the linear photon hop** rate between the two resonators and its ratio with the cross-Kerr rate. When increasing the hop** rate, we observe a crossover from an ordered to a delocalized state of photons. The presented coupling scheme is intrinsically robust to frequency disorder and may therefore prove useful for realizing larger-scale resonator arrays.
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Submitted 2 August, 2018;
originally announced August 2018.
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Rapid high-fidelity multiplexed readout of superconducting qubits
Authors:
Johannes Heinsoo,
Christian Kraglund Andersen,
Ants Remm,
Sebastian Krinner,
Theodore Walter,
Yves Salathé,
Simone Gasparinetti,
Jean-Claude Besse,
Anton Potočnik,
Christopher Eichler,
Andreas Wallraff
Abstract:
The duration and fidelity of qubit readout is a critical factor for applications in quantum information processing as it limits the fidelity of algorithms which reuse qubits after measurement or apply feedback based on the measurement result. Here we present fast multiplexed readout of five qubits in a single 1.2 GHz wide readout channel. Using a readout pulse length of 80 ns and populating readou…
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The duration and fidelity of qubit readout is a critical factor for applications in quantum information processing as it limits the fidelity of algorithms which reuse qubits after measurement or apply feedback based on the measurement result. Here we present fast multiplexed readout of five qubits in a single 1.2 GHz wide readout channel. Using a readout pulse length of 80 ns and populating readout resonators for less than 250 ns we find an average correct assignment probability for the five measured qubits to be $97\%$. The differences between the individual readout errors and those found when measuring the qubits simultaneously are within $1\%$. We employ individual Purcell filters for each readout resonator to suppress off-resonant driving, which we characterize by the dephasing imposed on unintentionally measured qubits. We expect the here presented readout scheme to become particularly useful for the selective readout of individual qubits in multi-qubit quantum processors.
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Submitted 24 January, 2018;
originally announced January 2018.
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Studying Light-Harvesting Models with Superconducting Circuits
Authors:
Anton Potočnik,
Arno Bargerbos,
Florian A. Y. N. Schröder,
Saeed A. Khan,
Michele C. Collodo,
Simone Gasparinetti,
Yves Salathé,
Celestino Creatore,
Christopher Eichler,
Hakan E. Türeci,
Alex W. Chin,
Andreas Wallraff
Abstract:
The process of photosynthesis, the main source of energy in the animate world, converts sunlight into chemical energy. The surprisingly high efficiency of this process is believed to be enabled by an intricate interplay between the quantum nature of molecular structures in photosynthetic complexes and their interaction with the environment. Investigating these effects in biological samples is chal…
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The process of photosynthesis, the main source of energy in the animate world, converts sunlight into chemical energy. The surprisingly high efficiency of this process is believed to be enabled by an intricate interplay between the quantum nature of molecular structures in photosynthetic complexes and their interaction with the environment. Investigating these effects in biological samples is challenging due to their complex and disordered structure. Here we experimentally demonstrate a new approach for studying photosynthetic models based on superconducting quantum circuits. In particular, we demonstrate the unprecedented versatility and control of our method in an engineered three-site model of a pigment protein complex with realistic parameters scaled down in energy by a factor of $10^5$. With this system we show that the excitation transport between quantum coherent sites disordered in energy can be enabled through the interaction with environmental noise. We also show that the efficiency of the process is maximized for structured noise resembling intramolecular phononic environments found in photosynthetic complexes.
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Submitted 20 October, 2017;
originally announced October 2017.
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Realization of a quantum random generator certified with the Kochen-Specker theorem
Authors:
Anatoly Kulikov,
Markus Jerger,
Anton Potočnik,
Andreas Wallraff,
Arkady Fedorov
Abstract:
Random numbers are required for a variety of applications from secure communications to Monte-Carlo simulation. Yet randomness is an asymptotic property and no output string generated by a physical device can be strictly proven to be random. We report an experimental realization of a quantum random number generator (QRNG) with randomness certified by quantum contextuality and the Kochen-Specker th…
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Random numbers are required for a variety of applications from secure communications to Monte-Carlo simulation. Yet randomness is an asymptotic property and no output string generated by a physical device can be strictly proven to be random. We report an experimental realization of a quantum random number generator (QRNG) with randomness certified by quantum contextuality and the Kochen-Specker theorem. The certification is not performed in a device-independent way but through a rigorous theoretical proof of each outcome being value-indefinite even in the presence of experimental imperfections. The analysis of the generated data confirms the incomputable nature of our QRNG.
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Submitted 12 September, 2017;
originally announced September 2017.
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Realizing Rapid, High-Fidelity, Single-Shot Dispersive Readout of Superconducting Qubits
Authors:
T. Walter,
P. Kurpiers,
S. Gasparinetti,
P. Magnard,
A. Potocnik,
Y. Salathe,
M. Pechal,
M. Mondal,
M. Oppliger,
C. Eichler,
A. Wallraff
Abstract:
The speed of quantum gates and measurements is a decisive factor for the overall fidelity of quantum protocols when performed on physical qubits with finite coherence time. Reducing the time required to distinguish qubit states with high fidelity is therefore a critical goal in quantum information science. The state-of-the-art readout of superconducting qubits is based on the dispersive interactio…
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The speed of quantum gates and measurements is a decisive factor for the overall fidelity of quantum protocols when performed on physical qubits with finite coherence time. Reducing the time required to distinguish qubit states with high fidelity is therefore a critical goal in quantum information science. The state-of-the-art readout of superconducting qubits is based on the dispersive interaction with a readout resonator. Here, we bring this technique to its current limit and demonstrate how the careful design of system parameters leads to fast and high-fidelity measurements without affecting qubit coherence. We achieve this result by increasing the dispersive interaction strength, by choosing an optimal linewidth of the readout resonator, by employing a Purcell filter, and by utilizing phase-sensitive parametric amplification. In our experiment, we measure 98.25% readout fidelity in only 48 ns, when minimizing read-out time, and 99.2% in 88 ns, when maximizing the fidelity, limited predominantly by the qubit lifetime of 7.6 us. The presented scheme is also expected to be suitable for integration into a multiplexed readout architecture.
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Submitted 25 January, 2017; v1 submitted 24 January, 2017;
originally announced January 2017.
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Superconducting Quantum Simulator for Topological Order and the Toric Code
Authors:
Mahdi Sameti,
Anton Potocnik,
Dan E. Browne,
Andreas Wallraff,
Michael J. Hartmann
Abstract:
Topological order is now being established as a central criterion for characterizing and classifying ground states of condensed matter systems and complements categorizations based on symmetries. Fractional quantum Hall systems and quantum spin liquids are receiving substantial interest because of their intriguing quantum correlations, their exotic excitations and prospects for protecting stored q…
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Topological order is now being established as a central criterion for characterizing and classifying ground states of condensed matter systems and complements categorizations based on symmetries. Fractional quantum Hall systems and quantum spin liquids are receiving substantial interest because of their intriguing quantum correlations, their exotic excitations and prospects for protecting stored quantum information against errors. Here we show that the Hamiltonian of the central model of this class of systems, the Toric Code, can be directly implemented as an analog quantum simulator in lattices of superconducting circuits. The four-body interactions, which lie at its heart, are in our concept realized via Superconducting Quantum Interference Devices (SQUIDs) that are driven by a suitably oscillating flux bias. All physical qubits and coupling SQUIDs can be individually controlled with high precision. Topologically ordered states can be prepared via an adiabatic ramp of the stabilizer interactions. Strings of qubit operators, including the stabilizers and correlations along non-contractible loops, can be read out via a capacitive coupling to read-out resonators. Moreover, the available single qubit operations allow to create and propagate elementary excitations of the Toric Code and to verify their fractional statistics. The architecture we propose allows to implement a large variety of many-body interactions and thus provides a versatile analog quantum simulator for topological order and lattice gauge theories.
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Submitted 17 March, 2017; v1 submitted 16 August, 2016;
originally announced August 2016.
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Contextuality without nonlocality in a superconducting quantum system
Authors:
Markus Jerger,
Yarema Reshitnyk,
Markus Oppliger,
Anton Potočnik,
Mintu Mondal,
Andreas Wallraff,
Kenneth Goodenough,
Stephanie Wehner,
Kristinn Juliusson,
Nathan K. Langford,
Arkady Fedorov
Abstract:
Classical realism demands that system properties exist independently of whether they are measured, while noncontextuality demands that the results of measurements do not depend on what other measurements are performed in conjunction with them. The Bell-Kochen-Specker theorem states that noncontextual realism cannot reproduce the measurement statistics of a single three-level quantum system (qutrit…
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Classical realism demands that system properties exist independently of whether they are measured, while noncontextuality demands that the results of measurements do not depend on what other measurements are performed in conjunction with them. The Bell-Kochen-Specker theorem states that noncontextual realism cannot reproduce the measurement statistics of a single three-level quantum system (qutrit). Noncontextual realistic models may thus be tested using a single qutrit without relying on the notion of quantum entanglement in contrast to Bell inequality tests. It is challenging to refute such models experimentally, since imperfections may introduce loopholes that enable a realist interpretation. Here we use a superconducting qutrit with deterministic, binary-outcome readouts to violate a noncontextuality inequality while addressing the detection, individual-existence and compatibility loopholes. This evidence of state-dependent contextuality also demonstrates the fitness of superconducting quantum circuits for fault-tolerant quantum computation in surface-code architectures, currently the most promising route to scalable quantum computing.
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Submitted 18 October, 2016; v1 submitted 1 February, 2016;
originally announced February 2016.
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Digital quantum simulation of spin models with circuit quantum electrodynamics
Authors:
Y. Salathé,
M. Mondal,
M. Oppliger,
J. Heinsoo,
P. Kurpiers,
A. Potočnik,
A. Mezzacapo,
U. Las Heras,
L. Lamata,
E. Solano,
S. Filipp,
A. Wallraff
Abstract:
Systems of interacting quantum spins show a rich spectrum of quantum phases and display interesting many-body dynamics. Computing characteristics of even small systems on conventional computers poses significant challenges. A quantum simulator has the potential to outperform standard computers in calculating the evolution of complex quantum systems. Here, we perform a digital quantum simulation of…
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Systems of interacting quantum spins show a rich spectrum of quantum phases and display interesting many-body dynamics. Computing characteristics of even small systems on conventional computers poses significant challenges. A quantum simulator has the potential to outperform standard computers in calculating the evolution of complex quantum systems. Here, we perform a digital quantum simulation of the paradigmatic Heisenberg and Ising interacting spin models using a two transmon-qubit circuit quantum electrodynamics setup. We make use of the exchange interaction naturally present in the simulator to construct a digital decomposition of the model-specific evolution and extract its full dynamics. This approach is universal and efficient, employing only resources which are polynomial in the number of spins and indicates a path towards the controlled simulation of general spin dynamics in superconducting qubit platforms.
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Submitted 24 February, 2015;
originally announced February 2015.
