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The 4D Camera: an 87 kHz direct electron detector for scanning/transmission electron microscopy
Authors:
Peter Ercius,
Ian J. Johnson,
Philipp Pelz,
Benjamin H. Savitzky,
Lauren Hughes,
Hamish G. Brown,
Steven E. Zeltmann,
Shang-Lin Hsu,
Cassio C. S. Pedroso,
Bruce E. Cohen,
Ramamoorthy Ramesh,
David Paul,
John M. Joseph,
Thorsten Stezelberger,
Cory Czarnik,
Matthew Lent,
Erin Fong,
Jim Ciston,
Mary C. Scott,
Colin Ophus,
Andrew M. Minor,
and Peter Denes
Abstract:
We describe the development, operation, and application of the 4D Camera -- a 576 by 576 pixel active pixel sensor for scanning/transmission electron microscopy which operates at 87,000 Hz. The detector generates data at approximately 480 Gbit/s which is captured by dedicated receiver computers with a parallelized software infrastructure that has been implemented to process the resulting 10 - 700…
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We describe the development, operation, and application of the 4D Camera -- a 576 by 576 pixel active pixel sensor for scanning/transmission electron microscopy which operates at 87,000 Hz. The detector generates data at approximately 480 Gbit/s which is captured by dedicated receiver computers with a parallelized software infrastructure that has been implemented to process the resulting 10 - 700 Gigabyte-sized raw datasets. The back illuminated detector provides the ability to detect single electron events at accelerating voltages from 30 - 300 keV. Through electron counting, the resulting sparse data sets are reduced in size by 10 - 300x compared to the raw data, and open-source sparsity-based processing algorithms offer rapid data analysis. The high frame rate allows for large and complex 4D-STEM experiments to be accomplished with typical STEM scanning parameters.
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Submitted 19 May, 2023;
originally announced May 2023.
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Disentangling multiple scattering with deep learning: application to strain map** from electron diffraction patterns
Authors:
Joydeep Munshi,
Alexander Rakowski,
Benjamin H Savitzky,
Steven E Zeltmann,
Jim Ciston,
Matthew Henderson,
Shreyas Cholia,
Andrew M Minor,
Maria KY Chan,
Colin Ophus
Abstract:
Implementation of a fast, robust, and fully-automated pipeline for crystal structure determination and underlying strain map** for crystalline materials is important for many technological applications. Scanning electron nanodiffraction offers a procedure for identifying and collecting strain maps with good accuracy and high spatial resolutions. However, the application of this technique is limi…
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Implementation of a fast, robust, and fully-automated pipeline for crystal structure determination and underlying strain map** for crystalline materials is important for many technological applications. Scanning electron nanodiffraction offers a procedure for identifying and collecting strain maps with good accuracy and high spatial resolutions. However, the application of this technique is limited, particularly in thick samples where the electron beam can undergo multiple scattering, which introduces signal nonlinearities. Deep learning methods have the potential to invert these complex signals, but previous implementations are often trained only on specific crystal systems or a small subset of the crystal structure and microscope parameter phase space. In this study, we implement a Fourier space, complex-valued deep neural network called FCU-Net, to invert highly nonlinear electron diffraction patterns into the corresponding quantitative structure factor images. We trained the FCU-Net using over 200,000 unique simulated dynamical diffraction patterns which include many different combinations of crystal structures, orientations, thicknesses, microscope parameters, and common experimental artifacts. We evaluated the trained FCU-Net model against simulated and experimental 4D-STEM diffraction datasets, where it substantially out-performs conventional analysis methods. Our simulated diffraction pattern library, implementation of FCU-Net, and trained model weights are freely available in open source repositories, and can be adapted to many different diffraction measurement problems.
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Submitted 31 January, 2022;
originally announced February 2022.
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Multibeam Electron Diffraction
Authors:
Xuhao Hong,
Steven E Zeltmann,
Benjamin H Savitzky,
Luis Rangel DaCosta,
Alexander Mueller,
Andrew M Minor,
Karen Bustillo,
Colin Ophus
Abstract:
One of the primary uses for transmission electron microscopy (TEM) is to measure diffraction pattern images in order to determine a crystal structure and orientation. In nanobeam electron diffraction (NBED) we scan a moderately converged electron probe over the sample to acquire thousands or even millions of sequential diffraction images, a technique that is especially appropriate for polycrystall…
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One of the primary uses for transmission electron microscopy (TEM) is to measure diffraction pattern images in order to determine a crystal structure and orientation. In nanobeam electron diffraction (NBED) we scan a moderately converged electron probe over the sample to acquire thousands or even millions of sequential diffraction images, a technique that is especially appropriate for polycrystalline samples. However, due to the large Ewald sphere of TEM, excitation of Bragg peaks can be extremely sensitive to sample tilt, varying strongly for even a few degrees of sample tilt for crystalline samples. In this paper, we present multibeam electron diffraction (MBED), where multiple probe forming apertures are used to create mutiple STEM probes, all of which interact with the sample simultaneously. We detail designs for MBED experiments, and a method for using a focused ion beam (FIB) to produce MBED apertures. We show the efficacy of the MBED technique for crystalline orientation map** using both simulations and proof-of-principle experiments. We also show how the angular information in MBED can be used to perform 3D tomographic reconstruction of samples without needing to tilt or scan the sample multiple times. Finally, we also discuss future opportunities for the MBED method.
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Submitted 18 September, 2020;
originally announced September 2020.
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py4DSTEM: a software package for multimodal analysis of four-dimensional scanning transmission electron microscopy datasets
Authors:
Benjamin H Savitzky,
Lauren A Hughes,
Steven E Zeltmann,
Hamish G Brown,
Shiteng Zhao,
Philipp M Pelz,
Edward S Barnard,
Jennifer Donohue,
Luis Rangel DaCosta,
Thomas C. Pekin,
Ellis Kennedy,
Matthew T Janish,
Matthew M Schneider,
Patrick Herring,
Chirranjeevi Gopal,
Abraham Anapolsky,
Peter Ercius,
Mary Scott,
Jim Ciston,
Andrew M Minor,
Colin Ophus
Abstract:
Scanning transmission electron microscopy (STEM) allows for imaging, diffraction, and spectroscopy of materials on length scales ranging from microns to atoms. By using a high-speed, direct electron detector, it is now possible to record a full 2D image of the diffracted electron beam at each probe position, typically a 2D grid of probe positions. These 4D-STEM datasets are rich in information, in…
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Scanning transmission electron microscopy (STEM) allows for imaging, diffraction, and spectroscopy of materials on length scales ranging from microns to atoms. By using a high-speed, direct electron detector, it is now possible to record a full 2D image of the diffracted electron beam at each probe position, typically a 2D grid of probe positions. These 4D-STEM datasets are rich in information, including signatures of the local structure, orientation, deformation, electromagnetic fields and other sample-dependent properties. However, extracting this information requires complex analysis pipelines, from data wrangling to calibration to analysis to visualization, all while maintaining robustness against imaging distortions and artifacts. In this paper, we present py4DSTEM, an analysis toolkit for measuring material properties from 4D-STEM datasets, written in the Python language and released with an open source license. We describe the algorithmic steps for dataset calibration and various 4D-STEM property measurements in detail, and present results from several experimental datasets. We have also implemented a simple and universal file format appropriate for electron microscopy data in py4DSTEM, which uses the open source HDF5 standard. We hope this tool will benefit the research community, helps to move the develo** standards for data and computational methods in electron microscopy, and invite the community to contribute to this ongoing, fully open-source project.
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Submitted 20 March, 2020;
originally announced March 2020.
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Patterned Probes for High Precision 4D-STEM Bragg Measurements
Authors:
Steven E Zeltmann,
Alexander Müller,
Karen C Bustillo,
Benjamin Savitzky,
Lauren Hughes,
Andrew M Minor,
Colin Ophus
Abstract:
Nanoscale strain map** by four-dimensional scanning transmission electron microscopy (4D-STEM) relies on determining the precise locations of Bragg-scattered electrons in a sequence of diffraction patterns, a task which is complicated by dynamical scattering, inelastic scattering, and shot noise. These features hinder accurate automated computational detection and position measurement of the dif…
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Nanoscale strain map** by four-dimensional scanning transmission electron microscopy (4D-STEM) relies on determining the precise locations of Bragg-scattered electrons in a sequence of diffraction patterns, a task which is complicated by dynamical scattering, inelastic scattering, and shot noise. These features hinder accurate automated computational detection and position measurement of the diffracted disks, limiting the precision of measurements of local deformation. Here, we investigate the use of patterned probes to improve the precision of strain map**. We imprint a "bullseye" pattern onto the probe, by using a binary mask in the probe-forming aperture, to improve the robustness of the peak finding algorithm to intensity modulations inside the diffracted disks. We show that this imprinting leads to substantially improved strain-map** precision at the expense of a slight decrease in spatial resolution. In experiments on an unstrained silicon reference sample, we observe an improvement in strain measurement precision from 2.7% of the reciprocal lattice vectors with standard probes to 0.3% using bullseye probes for a thin sample, and an improvement from 4.7% to 0.8% for a thick sample. We also use multislice simulations to explore how sample thickness and electron dose limit the attainable accuracy and precision for 4D-STEM strain measurements.
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Submitted 8 November, 2019; v1 submitted 11 July, 2019;
originally announced July 2019.
