Metal-Optic Nanophotonic Modulators in Standard CMOS Technology
Authors:
Mohamed ElKabbash,
Sivan Trajtenberg-Mills,
Isaac Harris,
Saumil Bandyopadhyay,
Mohamed I Ibrahim,
Archer Wang,
Xibi Chen,
Cole Brabec,
Hasan Z. Yildiz,
Ruonan Han,
Dirk Englund
Abstract:
Integrating nanophotonics with electronics promises revolutionary applications, from LiDAR to holographic displays. Although silicon photonics is maturing, realizing active nanophotonics in the ubiquitous bulk CMOS processes remains challenging. We introduce a fabless approach to embed active nanophotonics in bulk CMOS by co-designing the back-end-of-line metal layers for optical functionality. Us…
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Integrating nanophotonics with electronics promises revolutionary applications, from LiDAR to holographic displays. Although silicon photonics is maturing, realizing active nanophotonics in the ubiquitous bulk CMOS processes remains challenging. We introduce a fabless approach to embed active nanophotonics in bulk CMOS by co-designing the back-end-of-line metal layers for optical functionality. Using a 65nm CMOS process, we create plasmonic liquid crystal modulators with switching speeds 100x faster than commercial technologies. This zero-change nanophotonics method could equip mass-produced chips with optical communications, sensing and imaging. Embedding nanophotonics in the dominant electronics platform democratizes nanofabrication, spawning technologies from chip-scale LiDAR to holographic light-field displays.
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Submitted 16 November, 2023; v1 submitted 6 October, 2023;
originally announced October 2023.
