Showing 1–6 of 6 results for author: Weck, A

High detectivity terahertz radiation sensing using frequency-noise-optimized nanomechanical resonators

Authors: Chang Zhang, Eeswar K. Yalavarthi, Mathieu Giroux, Wei Cui, Michel Stephan, Ali Maleki, Arnaud Weck, Jean-Michel Ménard, Raphael St-Gelais

Abstract: We achieve high detectivity terahertz sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by striking a fine balance between the frequency stability of the resonator, and its responsivity to absorbed radiation. Using this approach, we demonstrate a detectivity $D^*=3.4\times10^9~\mathrm{cm\cdot\sqrt{Hz}/W}$ and a noise… ▽ More We achieve high detectivity terahertz sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by striking a fine balance between the frequency stability of the resonator, and its responsivity to absorbed radiation. Using this approach, we demonstrate a detectivity $D^*=3.4\times10^9~\mathrm{cm\cdot\sqrt{Hz}/W}$ and a noise equivalent power $\mathrm{NEP}=36~\mathrm{pW/\sqrt{Hz}}$ that outperform the best room-temperature on-chip THz detectors (i.e., pyroelectrics). Our optical absorber consists of a 1-mm diameter metasurface, which currently enables a 0.5-3 THz detection range but can easily be scaled to other frequencies in the THz and infrared ranges. In addition to demonstrating high-performance terahertz sensing, our work unveils an important fundamental trade-off between high frequency stability and high responsivity in thermal-based nanomechanical radiation sensors. △ Less

Submitted 29 January, 2024; originally announced January 2024.

High Q-Factor Silicon Nitride Nanomechanical Resonators Fabricated by Maskless Femtosecond Laser Micro-machining

Authors: Roghayeh Nikbakht, Xitong Xie, Arnaud Weck, Raphael St-Gelais

Abstract: Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for fabricating these devices often lack flexibility. While photolithography requires printing of an expensive photomask for each new design iteration, electron-beam l… ▽ More Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for fabricating these devices often lack flexibility. While photolithography requires printing of an expensive photomask for each new design iteration, electron-beam lithography is extremely slow and commands high equipment cost. Here we demonstrate maskless rapid prototy** of freestanding SiN nanomechanical resonators fabricated by femtosecond laser ablation of plain SiN membrane in ambient air. We fabricate microbeams with different widths from 7 to 100 um, and we characterize their resonance frequency and mechanical quality (Q) factors. We find that membrane cracking can be avoided during fabrication by carefully engineering the etch pattern, and that laser etching has a negligible effect on built-in tensile stress. For each beam, Q-factors are measured for several eigenmodes and are found to remain high after laser etching. All beams show quality factors greater than 105, while unetched plain membranes have Q > 106. Possible causes for Q-factor reduction are identified, along with future process improvement directions. △ Less

Submitted 1 October, 2022; originally announced October 2022.

Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation

Authors: Gengyang Mu, Nikaya Snell, Chang Zhang, Xitong Xie, Radin Tahvildari, Arnaud Weck, Michel Godin, Raphael St-Gelais

Abstract: We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon substrate. We develop first-principle models explaining this actuation mechanism by acoustic waves resulting from voltage-dependent electrostatic forces in the MDS capacitors. Models are developed for actuation in the ch… ▽ More We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon substrate. We develop first-principle models explaining this actuation mechanism by acoustic waves resulting from voltage-dependent electrostatic forces in the MDS capacitors. Models are developed for actuation in the charge accumulation (Ni-pSi) and charge depletion (Al-pSi) regimes. Experimental observations confirm our prediction that charge accumulation (Ni-pSi) is more efficient at actuation than charge depletion. For a 2 V actuation signal, Ni-pSi capacitors achieve 10 nm actuation amplitude in square (1.7 $\times$ 1.7 mm) low-stress (~100 MPa) SiN membrane resonators. In this case, electrical power dissipation in the chip is on the order of 0.1 $μ$W, and spurious heating is less than 1 mK. Both these values could be further reduced by do** the substrate to minimize resistive dissipation. The actuation method is remarkably simple and only requires attachment of wires to the chip with vacuum-compatible nickel paste, with no extra photolithography step. All the chips presented in this work are fabricated in-house, and a detailed fabrication procedure is provided. △ Less

Submitted 16 December, 2021; originally announced December 2021.

Plasmonic colours predicted by deep learning

Authors: Joshua Baxter, Antonino Calà Lesina, Jean-Michel Guay, Arnaud Weck, Pierre Berini, Lora Ramunno

Abstract: Picosecond laser pulses have been used as a surface colouring technique for noble metals, where the colours result from plasmonic resonances in the metallic nanoparticles created and redeposited on the surface by ablation and deposition processes. This technology provides two datasets which we use to train artificial neural networks, data from the experiment itself (laser parameters vs. colours) a… ▽ More Picosecond laser pulses have been used as a surface colouring technique for noble metals, where the colours result from plasmonic resonances in the metallic nanoparticles created and redeposited on the surface by ablation and deposition processes. This technology provides two datasets which we use to train artificial neural networks, data from the experiment itself (laser parameters vs. colours) and data from the corresponding numerical simulations (geometric parameters vs. colours). We apply deep learning to predict the colour in both cases. We also propose a method for the solution of the inverse problem -- wherein the geometric parameters and the laser parameters are predicted from colour -- using an iterative multivariable inverse design method. △ Less

Submitted 15 February, 2019; originally announced February 2019.

Enhanced plasmonic coloring of silver and formation of large laser-induced periodic surface structures using multi-burst picosecond pulses

Authors: J. -M. Guay, A. Calà Lesina, J. Baxter, M. Charron, G. Côté, L. Ramunno, P. Berini, A. Weck

Abstract: We report on the creation of angle-independent colors on silver using closely time-spaced laser bursts. The use of burst mode, compared to traditional non-burst is shown to increase the Chroma (color saturation) by ~50% and to broaden the lightness range by up to ~60%. Scanning electron microscope analysis of the surfaces created using burst mode, reveal the creation of 3 distinct sets of laser in… ▽ More We report on the creation of angle-independent colors on silver using closely time-spaced laser bursts. The use of burst mode, compared to traditional non-burst is shown to increase the Chroma (color saturation) by ~50% and to broaden the lightness range by up to ~60%. Scanning electron microscope analysis of the surfaces created using burst mode, reveal the creation of 3 distinct sets of laser induced periodic surface structures (LIPSS): low spatial frequency LIPSS (LSFL), high spatial frequency LIPSS (HSFL) and large laser-induced periodic surface structures (LLIPSS) that are 10 times the laser wavelength and parallel to the laser polarization. Nanoparticles are responsible for each plasmonic color and their distributions are observed to be similar for both burst and non-burst modes, indicating that the underlying structures (i.e. LIPSSs) are responsible for the increased Chroma and Lightness. Two-temperature model simulations of silver irradiated by laser bursts show significant increase in the electron-phonon coupling coefficient which is crucial for the creation of well-defined ripple structures. Finite difference time domain (FDTD) simulations of the colored surfaces show the increase in Chroma to be attributable to the HSFL arising in burst mode. △ Less

Submitted 15 September, 2016; originally announced September 2016.

Comments: 8 pages, 7 figures

Topographical coloured plasmonic coins

Authors: Jean-Michel Guay, Antonino Calà Lesina, Guillaume Côté, Martin Charron, Lora Ramunno, Pierre Berini, Arnaud Weck

Abstract: The use of metal nanostructures for colourization has attracted a great deal of interest with the recent developments in plasmonics. However, the current top-down colourization methods based on plasmonic concepts are tedious and time consuming, and thus unviable for large-scale industrial applications. Here we show a bottom-up approach where, upon picosecond laser exposure, a full colour palette i… ▽ More The use of metal nanostructures for colourization has attracted a great deal of interest with the recent developments in plasmonics. However, the current top-down colourization methods based on plasmonic concepts are tedious and time consuming, and thus unviable for large-scale industrial applications. Here we show a bottom-up approach where, upon picosecond laser exposure, a full colour palette independent of viewing angle can be created on noble metals. We show that colours are related to a single laser processing parameter, the total accumulated fluence, which makes this process suitable for high throughput industrial applications. Statistical image analyses of the laser irradiated surfaces reveal various distributions of nanoparticle sizes which control colour. Quantitative comparisons between experiments and large-scale finite-difference time-domain computations, demonstrate that colours are produced by selective absorption phenomena in heterogeneous nanoclusters. Plasmonic cluster resonances are thus found to play the key role in colour formation. △ Less

Submitted 9 September, 2016; originally announced September 2016.

Comments: 9 pages, 5 figures