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Flexoelectricity in Amorphous Hafnium Oxide (HfO$_2$)
Authors:
Daniel Moreno-Garcia,
Kaitlin M. Howell,
Luis Guillermo Villanueva
Abstract:
Flexoelectricity, inherent in all materials, offers a promising alternative to piezoelectricity for nanoscale actuation and sensing. However, its widespread application faces significant challenges: differentiating flexoelectric effects from those of piezoelectricity and other phenomena, verifying its universality across all material structures and thicknesses, and establishing a comprehensive dat…
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Flexoelectricity, inherent in all materials, offers a promising alternative to piezoelectricity for nanoscale actuation and sensing. However, its widespread application faces significant challenges: differentiating flexoelectric effects from those of piezoelectricity and other phenomena, verifying its universality across all material structures and thicknesses, and establishing a comprehensive database of flexoelectric coefficients across different materials. This work introduces a groundbreaking methodology that accurately isolates flexoelectricity from piezoelectric, electrostrictive and electrostatic effects, with a detection threshold extending below 1 fC/m. The robustness of this method is demonstrated through its application to amorphous hafnium oxide (HfO$_2$), successfully measuring a flexoelectric coefficient of 105 $\pm$ 10 pC/m. This measurement signifies the first measurement of flexoelectricity in hafnia, as well as in any amorphous material. Additionally, the study compiles a list of published flexoelectric coefficients, revealing an important insight. The relationship between the flexoelectric coefficient and the material's relative permittivity is better approximated by a quadratic proportionality. This challenges the traditional linear assumption proposed in Kogan's work and opens new avenues for future research in flexoelectric materials.
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Submitted 19 June, 2024;
originally announced June 2024.
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Ultraviolet astronomical spectrograph calibration with laser frequency combs from nanophotonic lithium niobate waveguides
Authors:
Markus Ludwig,
Furkan Ayhan,
Tobias M. Schmidt,
Thibault Wildi,
Thibault Voumard,
Roman Blum,
Zhichao Ye,
Fuchuan Lei,
François Wildi,
Francesco Pepe,
Mahmoud A. Gaafar,
Ewelina Obrzud,
Davide Grassani,
Olivia Hefti,
Sylvain Karlen,
Steve Lecomte,
François Moreau,
Bruno Chazelas,
Rico Sottile,
Victor Torres-Company,
Victor Brasch,
Luis G. Villanueva,
François Bouchy,
Tobias Herr
Abstract:
Astronomical precision spectroscopy underpins searches for life beyond Earth, direct observation of the expanding Universe and constraining the potential variability of physical constants across cosmological scales. Laser frequency combs can provide the critically required accurate and precise calibration to the astronomical spectrographs. For cosmological studies, extending the calibration with s…
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Astronomical precision spectroscopy underpins searches for life beyond Earth, direct observation of the expanding Universe and constraining the potential variability of physical constants across cosmological scales. Laser frequency combs can provide the critically required accurate and precise calibration to the astronomical spectrographs. For cosmological studies, extending the calibration with such astrocombs to the ultraviolet spectral range is highly desirable, however, strong material dispersion and large spectral separation from the established infrared laser oscillators have made this exceedingly challenging. Here, we demonstrate for the first time astronomical spectrograph calibrations with an astrocomb in the ultraviolet spectral range below 400 nm. This is accomplished via chip-integrated highly nonlinear photonics in periodically-poled, nano-fabricated lithium niobate waveguides in conjunction with a robust infrared electro-optic comb generator, as well as a chip-integrated microresonator comb. These results demonstrate a viable route towards astronomical precision spectroscopy in the ultraviolet and may contribute to unlocking the full potential of next generation ground- and future space-based astronomical instruments.
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Submitted 17 June, 2024; v1 submitted 23 June, 2023;
originally announced June 2023.
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Photostrictive actuators based on freestanding ferroelectric membranes
Authors:
Saptam Ganguly,
David Pesquera,
Daniel Moreno Garcia,
Umair Saeed,
Nona Mirzamohammadi,
José Santiso,
Jessica Padilla,
José Manuel Caicedo Roque,
Claire Laulhé,
Felisa Berenguer,
Luis Guillermo Villanueva,
Gustau Catalan
Abstract:
Complex oxides offer a wide range of functional properties, and recent advances in fabrication of freestanding membranes of these oxides are adding new mechanical degrees of freedom to this already rich functional ecosystem. Here, we demonstrate photoactuation in freestanding thin film resonators of ferroelectric Barium Titanate (BaTiO3) and paraelectric Strontium Titanate (SrTiO3). The free-stand…
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Complex oxides offer a wide range of functional properties, and recent advances in fabrication of freestanding membranes of these oxides are adding new mechanical degrees of freedom to this already rich functional ecosystem. Here, we demonstrate photoactuation in freestanding thin film resonators of ferroelectric Barium Titanate (BaTiO3) and paraelectric Strontium Titanate (SrTiO3). The free-standing films, transferred onto perforated supports, act as nano-drums, oscillating at their natural resonance frequency when illuminated by a frequency-modulated laser. The light-induced deflections in the ferroelectric BaTiO3 membranes are two orders of magnitude larger than in the paraelectric SrTiO3 ones. Time-resolved X-ray micro-diffraction under illumination and temperature-dependent and holographic interferometry provide combined evidence for the photostrictive strain in BaTiO3 originating from partial screening of ferroelectric polarization by photo-excited carriers, which decreases the tetragonality of the unit cell. These findings showcase the potential of photostrictive freestanding ferroelectric films as wireless actuators operated by light.
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Submitted 24 March, 2024; v1 submitted 4 May, 2023;
originally announced May 2023.
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Binary classification of spoken words with passive phononic metamaterials
Authors:
Tena Dubček,
Daniel Moreno-Garcia,
Thomas Haag,
Parisa Omidvar,
Henrik R. Thomsen,
Theodor S. Becker,
Lars Gebraad,
Christoph Bärlocher,
Fredrik Andersson,
Sebastian D. Huber,
Dirk-Jan van Manen,
Luis Guillermo Villanueva,
Johan O. A. Robertsson,
Marc Serra-Garcia
Abstract:
Mitigating the energy requirements of artificial intelligence requires novel physical substrates for computation. Phononic metamaterials have a vanishingly low power dissipation and hence are a prime candidate for green, always-on computers. However, their use in machine learning applications has not been explored due to the complexity of their design process: Current phononic metamaterials are re…
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Mitigating the energy requirements of artificial intelligence requires novel physical substrates for computation. Phononic metamaterials have a vanishingly low power dissipation and hence are a prime candidate for green, always-on computers. However, their use in machine learning applications has not been explored due to the complexity of their design process: Current phononic metamaterials are restricted to simple geometries (e.g. periodic, tapered), and hence do not possess sufficient expressivity to encode machine learning tasks. We design and fabricate a non-periodic phononic metamaterial, directly from data samples, that can distinguish between pairs of spoken words in the presence of a simple readout nonlinearity; hence demonstrating that phononic metamaterials are a viable avenue towards zero-power smart devices.
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Submitted 7 July, 2023; v1 submitted 14 November, 2021;
originally announced November 2021.
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Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications
Authors:
Xuge Fan,
Anderson D. Smith,
Fredrik Forsberg,
Stefan Wagner,
Stephan Schröder,
Sayedeh Shirin Afyouni Akbari,
Andreas C. Fischer,
Luis Guillermo Villanueva,
Mikael Östling,
Max C. Lemme,
Frank Niklaus
Abstract:
Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological…
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Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 micro meter to 110 micro meter and suspended proof masses consisting of solid silicon cubes that are from 5 micro meter multiply 5 micro meter multiply 16.4 micro meter to 100 micro meter multiply 100 micro meter multiply 16.4 micro meter in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were greater than 90%, with more than 70% of the graphene membranes having more than 90% graphene area without visible defects. The graphene membranes with suspended proof masses were extremely robust and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to ~7000 nN. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.
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Submitted 16 March, 2020;
originally announced March 2020.
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Shape Memory Polymer Resonators as Highly Sensitive Uncooled Infrared Detectors
Authors:
Ulas Adiyan,
Tom Larsen,
Juan Jose Zarate,
Luis Guillermo Villanueva,
Herbert Shea
Abstract:
Uncooled InfraRed (IR) detectors have enabled the rapid growth of thermal imaging applications. These detectors are predominantly bolometers, where the heating of pixel from incoming IR radiation is read out as a resistance change. Another uncooled sensing method is to transduce the IR radiation into the frequency shift of a mechanical resonator. We present here a highly sensitive, simple to fabri…
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Uncooled InfraRed (IR) detectors have enabled the rapid growth of thermal imaging applications. These detectors are predominantly bolometers, where the heating of pixel from incoming IR radiation is read out as a resistance change. Another uncooled sensing method is to transduce the IR radiation into the frequency shift of a mechanical resonator. We present here a highly sensitive, simple to fabricate resonant IR sensor, based on thermo-responsive Shape Memory Polymers (SMPs). By exploiting the phase-change polymer as the transduction mechanism, our approach provides 2 orders of magnitude improvement of the temperature coefficient of frequency (TCF). The SMP has very good absorption in IR wavelengths, obviating the need for an absorber layer. A Noise Equivalent Temperature Difference (NETD) of 22 mK in vacuum and 112 mK in air are obtained using f/2 optics. Such high performance in air eliminates the need for vacuum packaging, paving a path towards flexible IR sensors.
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Submitted 2 April, 2019;
originally announced April 2019.
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Effect of AlN Seed Layer on Crystallographic Characterization of Piezoelectric AlN
Authors:
Kaitlin M. Howell,
Waqas Bashir,
Annalisa de Pastina,
Ramin Matloub,
Paul Muralt,
Luis G. Villanueva
Abstract:
Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric response, x-ray diffraction has become an important metrology step. However, signals from layers deposited below the piezoelectric (PZE) AlN thin film may skew the crystallographic…
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Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric response, x-ray diffraction has become an important metrology step. However, signals from layers deposited below the piezoelectric (PZE) AlN thin film may skew the crystallographic analysis and give misleading results. In this work, we compare the use of a Ti or AlN seed layer on the crystallographic quality of PZE AlN. We also analyze the influence of several AlN seed layer thicknesses on the rocking curve FWHM of PZE AlN and demonstrate an larger effect of the AlN seed layer on the θ-2θ AlN <0002> crystallographic peak for increasing AlN seed layer thickness.
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Submitted 22 November, 2018;
originally announced November 2018.
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Optical detection of radio waves through a nanomechanical transducer
Authors:
T. Bagci,
A. Simonsen,
S. Schmid,
L. G. Villanueva,
E. Zeuthen,
J. Appel,
J. M. Taylor,
A. Sørensen,
K. Usami,
A. Schliesser,
E. S. Polzik
Abstract:
Low-loss transmission and sensitive recovery of weak radio-frequency (rf) and microwave signals is an ubiquitous technological challenge, crucial in fields as diverse as radio astronomy, medical imaging, navigation and communication, including those of quantum states. Efficient upconversion of rf-signals to an optical carrier would allow transmitting them via optical fibers dramatically reducing l…
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Low-loss transmission and sensitive recovery of weak radio-frequency (rf) and microwave signals is an ubiquitous technological challenge, crucial in fields as diverse as radio astronomy, medical imaging, navigation and communication, including those of quantum states. Efficient upconversion of rf-signals to an optical carrier would allow transmitting them via optical fibers dramatically reducing losses, and give access to the mature toolbox of quantum optical techniques, routinely enabling quantum-limited signal detection. Research in the field of cavity optomechanics has shown that nanomechanical oscillators can couple very strongly to either microwave or optical fields. An oscillator accommodating both functionalities would bear great promise as the intermediate platform in a radio-to-optical transduction cascade. Here, we demonstrate such an opto-electro-mechanical transducer utilizing a high-Q nanomembrane. A moderate voltage bias (<10V) is sufficient to induce strong coupling between the voltage fluctuations in a rf resonance circuit and the membrane's displacement, which is simultaneously coupled to light reflected off its metallized surface. The circuit acts as an antenna; the voltage signals it induces are detected as an optical phase shift with quantum-limited sensitivity. The half-wave voltage is in the microvolt range, orders of magnitude below that of standard optical modulators. The noise added by the membrane is suppressed by the electro-mechanical cooperativity C~6800 and has a temperature of 40mK, far below 300K where the entire device is operated. This corresponds to a sensitivity limit as low as 5 pV/Hz^1/2, or -210dBm/Hz in a narrow band around 1 MHz. Our work introduces an entirely new approach to all-optical, ultralow-noise detection of classical electronic signals, and sets the stage for coherent upconversion of low-frequency quantum signals to the optical domain.
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Submitted 2 August, 2013; v1 submitted 12 July, 2013;
originally announced July 2013.
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A Nanoscale Parametric Feedback Oscillator
Authors:
L. Guillermo Villanueva,
Rassul B. Karabalin,
Matthew H. Matheny,
Eyal Kenig,
Michael C. Cross,
Michael L. Roukes
Abstract:
We describe and demonstrate a new oscillator topology, the parametric feedback oscillator (PFO). The PFO paradigm is applicable to a wide variety of nanoscale devices, and opens the possibility of new classes of oscillators employing innovative frequency-determining elements, like such as nanoelectromechanical systems (NEMS), facilitating integration with circuitry, and reduction in cost and syste…
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We describe and demonstrate a new oscillator topology, the parametric feedback oscillator (PFO). The PFO paradigm is applicable to a wide variety of nanoscale devices, and opens the possibility of new classes of oscillators employing innovative frequency-determining elements, like such as nanoelectromechanical systems (NEMS), facilitating integration with circuitry, and reduction in cost and system size reduction. We show that the PFO topology can also improve nanoscale oscillator performance by circumventing detrimental effects that are otherwise imposed by the strong device nonlinearity in this size regime.
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Submitted 1 November, 2012;
originally announced November 2012.