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Nanofabrication of high Q, transferable, diamond resonators
Authors:
Blake Regan,
Aleksandra Trycz,
Johannes E. Fröch,
Otto Cranwell Schaeper,
Sejeong Kim,
Igor Aharonovich
Abstract:
Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components, including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silico…
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Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components, including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q factors) approaching 10$^$4. Finally, we show that the cavities can be picked up and transferred onto a trenched substrate to realise fully suspended diamond cavities. Our fabrication process demonstrates the capability of diamond membranes as modular components for broader diamond based quantum photonic circuitry.
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Submitted 15 January, 2021;
originally announced January 2021.
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Photonic devices fabricated from (111) oriented single crystal diamond
Authors:
Blake Regan,
Sejeong Kim,
Anh Tu Huy Ly,
Aleksandra Trycz,
Kerem Bray,
Kumaravelu Ganesan,
Milos Toth,
Igor Aharonovich
Abstract:
Diamond is a material of choice in the pursuit of integrated quantum photonic technologies. So far, the majority of photonic devices fabricated from diamond, are made from (100)-oriented crystals. In this work, we demonstrate a methodology for the fabrication of optically-active membranes from (111)-oriented diamond. We use a liftoff technique to generate membranes, followed by chemical vapour dep…
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Diamond is a material of choice in the pursuit of integrated quantum photonic technologies. So far, the majority of photonic devices fabricated from diamond, are made from (100)-oriented crystals. In this work, we demonstrate a methodology for the fabrication of optically-active membranes from (111)-oriented diamond. We use a liftoff technique to generate membranes, followed by chemical vapour deposition of diamond in the presence of silicon to generate homogenous silicon vacancy colour centers with emission properties that are superior to those in (100)-oriented diamond. We further use the diamond membranes to fabricate high quality microring resonators with quality factors exceeding ~ 3000. Supported by finite difference time domain calculations, we discuss the advantages of (111) oriented structures as building blocks for quantum nanophotonic devices.
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Submitted 9 September, 2019;
originally announced September 2019.
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Single crystal diamond membranes containing germanium vacancy color centers
Authors:
Kerem Bray,
Blake Regan,
Aleksandra Trycz,
Rodolfo Previdi,
Gediminas Seniutinas,
Kumaravelu Ganesan,
Mehran Kianinia,
Sejeong Kim,
Igor Aharonovich
Abstract:
Single crystal diamond membranes that host optically active emitters are highly attractive components for integrated quantum nanophotonics. In this work we demonstrate bottom-up synthesis of single crystal diamond membranes containing the germanium vacancy (GeV) color centers. We employ a lift-off technique to generate the membranes and perform chemical vapour deposition in a presence of germanium…
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Single crystal diamond membranes that host optically active emitters are highly attractive components for integrated quantum nanophotonics. In this work we demonstrate bottom-up synthesis of single crystal diamond membranes containing the germanium vacancy (GeV) color centers. We employ a lift-off technique to generate the membranes and perform chemical vapour deposition in a presence of germanium oxide to realize the insitu do**. Finally, we show that these membranes are suitable for engineering of photonic resonators such as microring cavities with quality factors of 1500. The robust and scalable approach to engineer single crystal diamond membranes containing emerging color centers is a promising pathway for realization of diamond integrated quantum nanophotonic circuits on a chip.
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Submitted 6 April, 2018;
originally announced April 2018.
