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Enantiospecificity in NMR Enabled by Chirality-Induced Spin Selectivity
Authors:
T. Georgiou,
J. L. Palma,
V. Mujica,
S. Varela,
M. Galante,
V. Santamarıa Garcıa,
L. Mboning,
R. N. Schwartz,
G. Cuniberti,
L. -S. Bouchard
Abstract:
Spin polarization in chiral molecules is a magnetic molecular response associated with electron transport and enantioselective bond polarization that occurs even in the absence of an external magnetic field. An unexpected finding by Santos and co-workers reported enantiospecific NMR responses in solid-state cross-polarization (CP) experiments, suggesting a possible additional contribution to the i…
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Spin polarization in chiral molecules is a magnetic molecular response associated with electron transport and enantioselective bond polarization that occurs even in the absence of an external magnetic field. An unexpected finding by Santos and co-workers reported enantiospecific NMR responses in solid-state cross-polarization (CP) experiments, suggesting a possible additional contribution to the indirect nuclear spin-spin coupling in chiral molecules induced by bond polarization in the presence of spin-orbit coupling. Herein we provide a theoretical treatment for this phenomenon, presenting an effective spin-Hamiltonian for helical molecules like DNA and density functional theory (DFT) results on amino acids that confirm the dependence of J-couplings on the choice of enantiomer. The connection between nuclear spin dynamics and chirality could offer insights for molecular sensing and quantum information sciences. These results establish NMR as a potential tool for chiral discrimination without external agents.
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Submitted 2 July, 2024; v1 submitted 30 June, 2024;
originally announced July 2024.
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MCTrans++: A 0-D Model for Centrifugal Mirrors
Authors:
Nick R. Schwartz,
Ian G. Abel,
Adil B. Hassam,
Myles Kelly,
Carlos A. Romero-Talamas
Abstract:
The centrifugal mirror confinement scheme incorporates supersonic rotation of a plasma into a magnetic mirror device. This concept has been shown experimentally to drastically decrease parallel losses and increase plasma stability as compared to prior axisymmetric mirrors. MCTrans++ is a 0D sco** tool which rapidly models experimental operating points in the Centrifugal Mirror Fusion Experiment…
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The centrifugal mirror confinement scheme incorporates supersonic rotation of a plasma into a magnetic mirror device. This concept has been shown experimentally to drastically decrease parallel losses and increase plasma stability as compared to prior axisymmetric mirrors. MCTrans++ is a 0D sco** tool which rapidly models experimental operating points in the Centrifugal Mirror Fusion Experiment (CMFX) at the University of Maryland. In the low-collisionality regime, parallel losses can be modeled analytically. A confining potential is set up that is partially ambipolar and partially centrifugal. Due to the stabilizing effects of flow-shear, the perpendicular losses can be modeled as classical. Radiation losses such as Bremsstrahlung and cyclotron emission are taken into account. A neutrals model is included, and, in some circumstances, charge-exchange losses are found to exceed all other loss mechanisms. We use the SUNDIALS ARKODE library to solve the underlying equations of this model; the resulting software is suitable for scanning large parameter spaces, and can also be used to model time-dependent phenomena such as a capacitive discharge. MCTrans++ has been used to verify results from prior centrifugal mirrors, create an experimental plan for CMFX, and find configurations for future reactor-scale fusion devices.
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Submitted 11 March, 2024; v1 submitted 3 April, 2023;
originally announced April 2023.
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High Throughput Multi-Channel Parallelized Diffraction Convolutional Neural Network Accelerator
Authors:
Zibo Hu,
Shurui Li,
Russell L. T. Schwartz,
Maria Solyanik-Gorgone,
Mario Miscuglio,
Puneet Gupta,
Volker J. Sorger
Abstract:
Convolutional neural networks are paramount in image and signal processing including the relevant classification and training tasks alike and constitute for the majority of machine learning compute demand today. With convolution operations being computationally intensive, next generation hardware accelerators need to offer parallelization and algorithmic-hardware homomorphism. Fortunately, diffrac…
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Convolutional neural networks are paramount in image and signal processing including the relevant classification and training tasks alike and constitute for the majority of machine learning compute demand today. With convolution operations being computationally intensive, next generation hardware accelerators need to offer parallelization and algorithmic-hardware homomorphism. Fortunately, diffractive display optics is capable of million-channel parallel data processing at low latency, however, thus far only showed tens of Hertz slow single image and kernel capability, thereby significantly underdelivering from its performance potential. Here, we demonstrate an operation-parallelized high-throughput Fourier optic convolutional neural network accelerator. For the first time simultaneously processing of multiple kernels in Fourier domain enabled by optical diffraction has been achieved alongside with already conventional in the field input parallelism. Additionally, we show an about one hundred times system speed up over existing optical diffraction-based processors and this demonstration rivals performance of modern electronic solutions. Therefore, this system is capable of processing large-scale matrices about ten times faster than state of art electronic systems.
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Submitted 7 July, 2022; v1 submitted 22 December, 2021;
originally announced December 2021.
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Scrutinizing the Debye plasma model: Rydberg excitons unravel the properties of low-density plasmas in semiconductors
Authors:
Heinrich Stolz,
Dirk Semkat,
Rico Schwartz,
Julian Heckötter,
Marc Aßmann,
Wolf-Dietrich Kraeft,
Holger Fehske,
Manfred Bayer
Abstract:
For low-density plasmas, the classical limit described by the Debye-Hückel theory is still considered as an appropriate description even though a clear experimental proof of this paradigm is lacking due to the problems in determining the plasma-induced shift of single-particle energies in atomic systems. We show that Rydberg excitons in states with a high principal quantum number are highly sensit…
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For low-density plasmas, the classical limit described by the Debye-Hückel theory is still considered as an appropriate description even though a clear experimental proof of this paradigm is lacking due to the problems in determining the plasma-induced shift of single-particle energies in atomic systems. We show that Rydberg excitons in states with a high principal quantum number are highly sensitive probes for their surrounding making it possible to unravel accurately the basic properties of low-density non-degenerate electron-hole plasmas. To this end, we accurately measure the parameters of Rydberg excitons such as energies and linewidths in absorption spectra of bulk cuprous oxide crystals in which a tailored electron-hole plasma has been generated optically. Since from the absorption spectra exciton energies, as well as the shift of the single-particle energies given by the band edge, can be directly derived, the measurements allow us to determine the plasma density and temperature independently, which has been a notoriously hard problem in semiconductor physics. Our analysis shows unambiguously that the impact of the plasma cannot be described by the classical Debye model, but requires a quantum many-body theory, not only for the semiconductor plasma investigated here, but in general. Furthermore, it reveals a new exciton scattering mechanism with coupled plasmon-phonon modes becoming important even at very low plasma densities.
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Submitted 24 November, 2021;
originally announced November 2021.
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A Diffusion-Based Embedding of the Stochastic Simulation Algorithm in Continuous Space
Authors:
Marcus Thomas,
Russell Schwartz
Abstract:
A variety of simulation methodologies have been used for modeling reaction-diffusion dynamics -- including approaches based on Differential Equations (DE), the Stochastic Simulation Algorithm (SSA), Brownian Dynamics (BD), Green's Function Reaction Dynamics (GFRD), and variations thereon -- each offering trade-offs with respect to the ranges of phenomena they can model, their computational tractab…
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A variety of simulation methodologies have been used for modeling reaction-diffusion dynamics -- including approaches based on Differential Equations (DE), the Stochastic Simulation Algorithm (SSA), Brownian Dynamics (BD), Green's Function Reaction Dynamics (GFRD), and variations thereon -- each offering trade-offs with respect to the ranges of phenomena they can model, their computational tractability, and the difficulty of fitting them to experimental measurements. Here, we develop a multiscale approach combining efficient SSA-like sampling suitable for well-mixed systems with aspects of the slower but space-aware GFRD model, assuming as with GFRD that reactions occur in a spatially heterogeneous environment that must be explicitly modeled. Our method extends the SSA approach in two major ways. First, we sample bimolecular association reactions following diffusive motion with a time-dependent reaction propensity. Second, reaction locations are sampled from within overlap** diffusion spheres describing the spatial probability densities of individual reactants. We show the approach to provide efficient simulation of spatially heterogeneous biochemistry in comparison to alternative methods via application to a Michaelis-Menten model.
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Submitted 20 May, 2021; v1 submitted 3 April, 2020;
originally announced April 2020.
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Self-guiding of long-wave infrared laser pulses mediated by avalanche ionization
Authors:
D. Woodbury,
A. Goffin,
R. M. Schwartz,
J. Isaacs,
H. M. Milchberg
Abstract:
Nonlinear self-guided propagation of intense long-wave infrared (LWIR) laser pulses is of significant recent interest owing to the high critical power for self-focusing collapse at long wavelengths. This promises transmission of very high power in a single filament as opposed to beam breakup and multi-filamentation. Here, using the most current picture of LWIR ionization processes in air, we prese…
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Nonlinear self-guided propagation of intense long-wave infrared (LWIR) laser pulses is of significant recent interest owing to the high critical power for self-focusing collapse at long wavelengths. This promises transmission of very high power in a single filament as opposed to beam breakup and multi-filamentation. Here, using the most current picture of LWIR ionization processes in air, we present extensive simulations showing that isolated avalanche sites centered on aerosols can arrest self-focusing, providing a route to self-guided propagation of moderate intensity LWIR pulses in outdoor environments.
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Submitted 25 March, 2020;
originally announced March 2020.
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Absolute measurement of laser ionization yield in atmospheric pressure range gases over 14 decades
Authors:
D. Woodbury,
R. M. Schwartz,
E. Rockafellow,
J. K. Wahlstrand,
H. M. Milchberg
Abstract:
Strong-field ionization is central to intense laser-matter interactions. However, standard ionization measurements have been limited to extremely low density gas samples, ignoring potential high density effects. Here, we measure strong-field ionization in atmospheric pressure range air, N2 and Ar over 14 decades of absolute yield, using mid-IR picosecond avalanche multiplication of single electron…
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Strong-field ionization is central to intense laser-matter interactions. However, standard ionization measurements have been limited to extremely low density gas samples, ignoring potential high density effects. Here, we measure strong-field ionization in atmospheric pressure range air, N2 and Ar over 14 decades of absolute yield, using mid-IR picosecond avalanche multiplication of single electrons. Our results are consistent with theoretical rates for isolated atoms and molecules and quantify the ubiquitous presence of ultra-low concentration gas contaminants that can significantly affect laser-gas interactions.
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Submitted 6 November, 2019;
originally announced November 2019.
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Laser wakefield acceleration with mid-IR laser pulses
Authors:
D. Woodbury,
L. Feder,
V. Shumakova,
C. Gollner,
R. Schwartz,
B. Miao,
F. Salehi,
A. Korolov,
A. Pugžlys,
A. Baltuška,
H. M. Milchberg
Abstract:
We report on the first results of laser plasma wakefield acceleration driven by ultrashort mid-infrared laser pulses (λ= 3.9 μm, 100 fs, 0.25 TW), which enable near- and above-critical density interactions with moderate-density gas jets. Relativistic electron acceleration up to ~12 MeV occurs when the jet width exceeds the threshold scale length for relativistic self-focusing. We present scaling t…
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We report on the first results of laser plasma wakefield acceleration driven by ultrashort mid-infrared laser pulses (λ= 3.9 μm, 100 fs, 0.25 TW), which enable near- and above-critical density interactions with moderate-density gas jets. Relativistic electron acceleration up to ~12 MeV occurs when the jet width exceeds the threshold scale length for relativistic self-focusing. We present scaling trends in the accelerated beam profiles, charge and spectra, which are supported by particle-in-cell simulations and time-resolved images of the interaction. For similarly scaled conditions, we observe significant increases in accelerated charge compared to previous experiments with near-infrared (λ=800 nm) pulses.
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Submitted 17 January, 2018; v1 submitted 16 January, 2018;
originally announced January 2018.
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Derivative-free optimization of rate parameters of capsid assembly models from bulk in vitro data
Authors:
Lu Xie,
Gregory R. Smith,
Russell Schwartz
Abstract:
The assembly of virus capsids from free coat proteins proceeds by a complicated cascade of association and dissociation steps, the great majority of which cannot be directly experimentally observed. This has made capsid assembly a rich field for computational models to attempt to fill the gaps in what is experimentally observable. Nonetheless, accurate simulation predictions depend on accurate mod…
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The assembly of virus capsids from free coat proteins proceeds by a complicated cascade of association and dissociation steps, the great majority of which cannot be directly experimentally observed. This has made capsid assembly a rich field for computational models to attempt to fill the gaps in what is experimentally observable. Nonetheless, accurate simulation predictions depend on accurate models and there are substantial obstacles to model inference for such systems. Here, we describe progress in learning parameters for capsid assembly systems, particularly kinetic rate constants of coat-coat interactions, by computationally fitting simulations to experimental data. We previously developed an approach to learn rate parameters of coat-coat interactions by minimizing the deviation between real and simulated light scattering data monitoring bulk capsid assembly in vitro. This is a difficult data-fitting problem, however, because of the high computational cost of simulating assembly trajectories, the stochastic noise inherent to the models, and the limited and noisy data available for fitting. Here we show that a newer classes of methods, based on derivative-free optimization (DFO), can more quickly and precisely learn physical parameters from static light scattering data. We further explore how the advantages of the approaches might be affected by alternative data sources through simulation of a model of time-resolved mass spectrometry data, an alternative technology for monitoring bulk capsid assembly that can be expected to provide much richer data. The results show that advances in both the data and the algorithms can improve model inference, with rich data leading to high-quality fits for all methods, but DFO methods showing substantial advantages over less informative data sources better representative of the current experimental practice.
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Submitted 7 July, 2015;
originally announced July 2015.
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Asteroid Surface Geophysics
Authors:
Naomi Murdoch,
Paul Sanchez,
Stephen R. Schwartz,
Hideaki Miyamoto
Abstract:
The regolith-covered surfaces of asteroids preserve records of geophysical processes that have occurred both at their surfaces and sometimes also in their interiors. As a result of the unique micro-gravity environment that these bodies posses, a complex and varied geophysics has given birth to fascinating features that we are just now beginning to understand. The processes that formed such feature…
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The regolith-covered surfaces of asteroids preserve records of geophysical processes that have occurred both at their surfaces and sometimes also in their interiors. As a result of the unique micro-gravity environment that these bodies posses, a complex and varied geophysics has given birth to fascinating features that we are just now beginning to understand. The processes that formed such features were first hypothesised through detailed spacecraft observations and have been further studied using theoretical, numerical and experimental methods that often combine several scientific disciplines. These multiple approaches are now merging towards a further understanding of the geophysical states of the surfaces of asteroids. In this chapter we provide a concise summary of what the scientific community has learned so far about the surfaces of these small planetary bodies and the processes that have shaped them. We also discuss the state of the art in terms of experimental techniques and numerical simulations that are currently being used to investigate regolith processes occurring on small-body surfaces and that are contributing to the interpretation of observations and the design of future space missions.
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Submitted 6 March, 2015;
originally announced March 2015.
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ECFA Detector R&D Panel, Review Report
Authors:
The FCAL Collaboration,
H. Abramowicz,
A. Abusleme,
K. Afanaciev,
J. Aguilar,
E. Alvarez,
P. Bambade,
L. Bortko,
I. Bozovic-Jelisavcic,
E. Castro,
G. Chelkov,
C. Coca,
W. Daniluk,
A. Dragone,
L. Dumitru,
K. Elsener,
I. Emeliantchik,
E. Firu,
J. Fischer,
T. Fiutowski,
V. Ghenescu,
M. Gostkin,
G. Grzelak,
G. Haller,
H. Henschel
, et al. (46 additional authors not shown)
Abstract:
Two special calorimeters are foreseen for the instrumentation of the very forward region of an ILC or CLIC detector; a luminometer (LumiCal) designed to measure the rate of low angle Bhabha scattering events with a precision better than 10$^{-3}$ at the ILC and 10$^{-2}$ at CLIC, and a low polar-angle calorimeter (BeamCal). The latter will be hit by a large amount of beamstrahlung remnants. The in…
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Two special calorimeters are foreseen for the instrumentation of the very forward region of an ILC or CLIC detector; a luminometer (LumiCal) designed to measure the rate of low angle Bhabha scattering events with a precision better than 10$^{-3}$ at the ILC and 10$^{-2}$ at CLIC, and a low polar-angle calorimeter (BeamCal). The latter will be hit by a large amount of beamstrahlung remnants. The intensity and the spatial shape of these depositions will provide a fast luminosity estimate, as well as determination of beam parameters. The sensors of this calorimeter must be radiation-hard. Both devices will improve the e.m. hermeticity of the detector in the search for new particles. Finely segmented and very compact electromagnetic calorimeters will match these requirements. Due to the high occupancy, fast front-end electronics will be needed. Monte Carlo studies were performed to investigate the impact of beam-beam interactions and physics background processes on the luminosity measurement, and of beamstrahlung on the performance of BeamCal, as well as to optimise the design of both calorimeters. Dedicated sensors, front-end and ADC ASICs have been designed for the ILC and prototypes are available. Prototypes of sensor planes fully assembled with readout electronics have been studied in electron beams.
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Submitted 19 November, 2014; v1 submitted 18 November, 2014;
originally announced November 2014.
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Low-speed Impact Simulations into Regolith in Support of Asteroid Sampling Mechanism Design I.: Comparison with 1-g Experiments
Authors:
Stephen R. Schwartz,
Patrick Michel,
Derek C. Richardson,
Hajime Yano
Abstract:
This study is carried out in the framework of sample-return missions to asteroids that use a low-speed projectile as the primary component of its sampling mechanism (e.g., JAXA's Hayabusa and Hayabusa2 missions). We perform numerical simulations of such impacts into granular materials using different projectile shapes under Earth's gravity. We then compare the amounts of ejected mass obtained in o…
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This study is carried out in the framework of sample-return missions to asteroids that use a low-speed projectile as the primary component of its sampling mechanism (e.g., JAXA's Hayabusa and Hayabusa2 missions). We perform numerical simulations of such impacts into granular materials using different projectile shapes under Earth's gravity. We then compare the amounts of ejected mass obtained in our simulations against what was found in experiments that used similar setups, which allows us to validate our numerical approach. For the targets, we consider 2 different monodisperse grain-diameter sizes: 5 mm and 3 mm. The impact speed of the projectile is 11 m s$^{-1}$ directed downward, perpendicular to the surface of the targets. Using an implementation of the soft-sphere discrete element method (SSDEM) in the $N$-Body gravity tree code PKDGRAV, previously validated in the context of low-speed impacts into sintered glass bead agglomerates, we find a noticeable dependence of the amount of ejected mass on the projectile shape. As found in experiments, in the case of the larger target grain size (5 mm), a conically shaped projectile ejects a greater amount of mass than do projectiles of other shapes, including disks and spheres. We then find that numerically the results are sensitive to the normal coefficient of restitution of the grains, especially for impacts into targets comprised of smaller grains (3 mm). We also find that static friction plays a more important role for impacts into targets comprised of the larger grains. As a preliminary demonstration, one of these considered setups is simulated in a microgravity environment. As expected, a reduction in gravity increases both the amount of ejected mass and the timescale of the impact process. Our methodology is also adaptable to the conditions of sampling mechanisms included in specific mission designs.
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Submitted 8 August, 2014;
originally announced August 2014.
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Simulation and Analysis of TE Wave Propagation as a Probe for Electron Clouds in Particle Accelerators
Authors:
Kiran G. Sonnad,
Kenneth Hammond,
Robert Schwartz,
Seth Veitzer
Abstract:
The use of transverse electric (TE) waves has proved to be a powerful, noninvasive method for estimating the densities of electron clouds formed in particle accelerators. Results from the plasma simulation program VORPAL have been a useful guide for experimental studies related to this method, which have been performed at various accelerator facilities. This paper provides results of the simulatio…
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The use of transverse electric (TE) waves has proved to be a powerful, noninvasive method for estimating the densities of electron clouds formed in particle accelerators. Results from the plasma simulation program VORPAL have been a useful guide for experimental studies related to this method, which have been performed at various accelerator facilities. This paper provides results of the simulation and modeling work done in conjunction with experimental efforts carried out at CesrTA. The discussion starts from the phase shift induced by electron clouds in the transmission of the wave, followed by the effect of reflections along the beam-pipe, the simulation of the resonant wave method and the effects of external magnetic fields, namely dipoles and wigglers. A derivation of the dispersion relationship of wave propagation for arbitrary geometries in field free regions with a uniform cloud density is also provided.
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Submitted 4 January, 2014; v1 submitted 22 November, 2013;
originally announced November 2013.
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TE Wave Measurement and Modeling
Authors:
John P. Sikora,
Robert M. Schwartz,
Kiran G. Sonnad,
David Alesini,
Stefano De Santis
Abstract:
In the TE wave method, microwaves are coupled into the beam-pipe and the effect of the electron cloud on these microwaves is measured. An electron cloud (EC) density can then be calculated from this measurement. There are two analysis methods currently in use. The first treats the microwaves as being transmitted from one point to another in the accelerator. The second more recent method, treats th…
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In the TE wave method, microwaves are coupled into the beam-pipe and the effect of the electron cloud on these microwaves is measured. An electron cloud (EC) density can then be calculated from this measurement. There are two analysis methods currently in use. The first treats the microwaves as being transmitted from one point to another in the accelerator. The second more recent method, treats the beam-pipe as a resonant cavity. This paper will summarize the reasons for adopting the resonant TE wave analysis as well as give examples from CESRTA and DAΦNE of resonant beam-pipe. The results of bead-pull bench measurements will show some possible standing wave patterns, including a cutoff mode (evanescent) where the field decreases exponentially with distance from the drive point. We will outline other recent developments in the TE wave method including VORPAL simulations of microwave resonances, as well as the simulation of transmission in the presence of both an electron cloud and magnetic fields.
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Submitted 16 July, 2013;
originally announced July 2013.
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Infrastructure for Detector Research and Development towards the International Linear Collider
Authors:
J. Aguilar,
P. Ambalathankandy,
T. Fiutowski,
M. Idzik,
Sz. Kulis,
D. Przyborowski,
K. Swientek,
A. Bamberger,
M. Köhli,
M. Lupberger,
U. Renz,
M. Schumacher,
Andreas Zwerger,
A. Calderone,
D. G. Cussans,
H. F. Heath,
S. Mandry,
R. F. Page,
J. J. Velthuis,
D. Attié,
D. Calvet,
P. Colas,
X. Coppolani,
Y. Degerli,
E. Delagnes
, et al. (252 additional authors not shown)
Abstract:
The EUDET-project was launched to create an infrastructure for develo** and testing new and advanced detector technologies to be used at a future linear collider. The aim was to make possible experimentation and analysis of data for institutes, which otherwise could not be realized due to lack of resources. The infrastructure comprised an analysis and software network, and instrumentation infras…
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The EUDET-project was launched to create an infrastructure for develo** and testing new and advanced detector technologies to be used at a future linear collider. The aim was to make possible experimentation and analysis of data for institutes, which otherwise could not be realized due to lack of resources. The infrastructure comprised an analysis and software network, and instrumentation infrastructures for tracking detectors as well as for calorimetry.
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Submitted 23 January, 2012;
originally announced January 2012.
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Near-field scanning microwave microscope for interline capacitance characterization of nanoelectronics interconnect
Authors:
Vladimir V. Talanov,
Andrew R. Schwartz
Abstract:
We have developed a noncontact method for measurement of the interline capacitance in Cu/low-k interconnect. It is based on a miniature test vehicle with net capacitance of a few femto-Farads formed by two 20-μm-long parallel wires (lines) with widths and spacings the same as those of the interconnect wires of interest. Each line is connected to a small test pad. The vehicle impedance is measured…
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We have developed a noncontact method for measurement of the interline capacitance in Cu/low-k interconnect. It is based on a miniature test vehicle with net capacitance of a few femto-Farads formed by two 20-μm-long parallel wires (lines) with widths and spacings the same as those of the interconnect wires of interest. Each line is connected to a small test pad. The vehicle impedance is measured at 4 GHz by a near-field microwave probe with 10 μm probe size via capacitive coupling of the probe to the vehicle's test pads. Full 3D finite element modeling at 4 GHz confirms that the microwave radiation is concentrated between the two wires forming the vehicle. An analytical lumped element model and a short/open calibration approach have been proposed to extract the interline capacitance value from the measured data. We have validated the technique on several test vehicles made with copper and low-k dielectric on a 300 mm wafer. The vehicles interline spacing ranges from 0.09 to 1 μm and a copper line width is 0.15 μm. This is the first time a near-field scanning microwave microscope has been applied to measure the lumped element impedance of a test vehicle.
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Submitted 10 August, 2011;
originally announced August 2011.
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Noncontact electrical metrology of Cu/low-k interconnect for semiconductor production wafers
Authors:
V. V. Talanov,
A. Scherz,
A. R. Schwartz
Abstract:
We have demonstrated a technique capable of in-line measurement of dielectric constant of low-k interconnect films on patterned wafers utilizing a test key of ~50x50 μm in size. The test key consists of a low-k film backed by a Cu grid with >50% metal pattern density and <250 nm pitch, which is fully compatible with the existing dual-damascene interconnect manufacturing processes. The technique is…
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We have demonstrated a technique capable of in-line measurement of dielectric constant of low-k interconnect films on patterned wafers utilizing a test key of ~50x50 μm in size. The test key consists of a low-k film backed by a Cu grid with >50% metal pattern density and <250 nm pitch, which is fully compatible with the existing dual-damascene interconnect manufacturing processes. The technique is based on a near-field scanned microwave probe and is noncontact, noninvasive, and requires no electrical contact to or grounding of the wafer under test. It yields <0.3% precision and 2% accuracy for the film dielectric constant.
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Submitted 10 August, 2011;
originally announced August 2011.
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Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe
Authors:
Vladimir V. Talanov,
André Scherz,
Robert L. Moreland,
Andrew R. Schwartz
Abstract:
We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-μm-thick blanket low-k interconnect films on up to 300 mm in diameter wafers. The method has about 10 micron sampling spot size, and provides <0.3% precision and <2% accuracy for k-value. It is based on a microfabricated near-field scanned microwave probe formed by a 4 GHz parallel strip trans…
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We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-μm-thick blanket low-k interconnect films on up to 300 mm in diameter wafers. The method has about 10 micron sampling spot size, and provides <0.3% precision and <2% accuracy for k-value. It is based on a microfabricated near-field scanned microwave probe formed by a 4 GHz parallel strip transmission line resonator tapered down to a few-micron tip size.
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Submitted 10 August, 2011;
originally announced August 2011.
