Showing 1–46 of 46 results for author: Mussenbrock, T

The role of flow field dynamics in enhancing volatile organic compound conversion in a surface dielectric barrier discharge system

Authors: Alexander Böddecker, Maximilian Passmann, Angie Natalia Torres Segura, Arisa Bodnar, Felix Awakowicz, Timothy Oppotsch, Martin Muhler, Peter Awakowicz, Andrew R. Gibson, Ihor Korolov, Thomas Mussenbrock

Abstract: This study investigates the correlation between flow fields induced by a surface dielectric barrier discharge (SDBD) system and its application for the volatile organic compound (VOC) gas conversion process. As a benchmark molecule, the conversion of n-butane is monitored using flame ionization detectors, while the flow field is analysed using planar particle image velocimetry. Two individual setu… ▽ More This study investigates the correlation between flow fields induced by a surface dielectric barrier discharge (SDBD) system and its application for the volatile organic compound (VOC) gas conversion process. As a benchmark molecule, the conversion of n-butane is monitored using flame ionization detectors, while the flow field is analysed using planar particle image velocimetry. Two individual setups are developed to facilitate both conversion measurement and investigation of induced fluid dynamics. Varying the gap distance between two SDBD electrode plates for three different n-butane mole fractions reveals local peaks in relative conversion around gap distances of 16 mm to 22 mm, indicating additional spatially dependent effects. The lowest n-butane mole fractions exhibit the highest relative conversion, while the highest n-butane mole fraction conversion yields the greatest number of converted molecules per unit time. Despite maintaining constant energy density, the relative conversion exhibits a gradual decrease with increasing distances. The results of the induced flow fields reveal distinct vortex structures at the top and bottom electrodes, which evolve in size and shape as the gap distances increase. These vortices exhibit gas velocity magnitudes approximately seven times higher than the applied external gas flow velocity. Vorticity and turbulent kinetic energy analyses provide insights into these structures' characteristics and their impact on gas mixing. A comparison of line profiles through the centre of the vortices shows peaks in the middle gap region for the same gap distances, correlating with the observed peaks in conversion. These findings demonstrate a correlation between induced flow dynamics and the gas conversion process, bridging plasma actuator studies with the domain of chemical plasma gas conversion. △ Less

Submitted 3 May, 2024; originally announced May 2024.

Comments: 16 pages, 10 figures

Plasma sheath tailoring by a magnetic field for three-dimensional plasma etching

Authors: E. Jüngling, S. Wilczek, T. Mussenbrock, M. Böke, A. von Keudell

Abstract: Three-dimensional (3D) etching of materials by plasmas is an ultimate challenge in microstructuring applications. A method is proposed to reach a controllable 3D structure by using masks in front of the surface in a plasma etch reactor in combination with local magnetic fields to steer the incident ions in the plasma sheath region towards the surface to reach 3D directionality during etching and d… ▽ More Three-dimensional (3D) etching of materials by plasmas is an ultimate challenge in microstructuring applications. A method is proposed to reach a controllable 3D structure by using masks in front of the surface in a plasma etch reactor in combination with local magnetic fields to steer the incident ions in the plasma sheath region towards the surface to reach 3D directionality during etching and deposition. This effect can be controlled by modifying the magnetic field and/or plasma properties to adjust the relationship between sheath thickness and mask feature size. Since the guiding length scale is the plasma sheath thickness, which for typical plasma densities is at least 10s of microns or larger, controlled directional etching and deposition target the field of microstructuring, e.g. of solids for sensors, optics, or microfluidics. In this proof-of-concept study, it is shown that $\vec{E}\times\vec{B}$ drifts tailor the local sheath expansion, thereby controlling the plasma density distribution and the transport when the plasma penetrates the mask during an RF cycle. This modified local plasma creates a 3D etch profile. This is shown experimentally as well as using 2d3v Particle-In-Cell/Monte Carlo collisions simulation. △ Less

Submitted 15 November, 2023; originally announced November 2023.

Interactions between flow fields induced by surface dielectric barrier discharge arrays

Authors: Alexander Böddecker, Maximilian Passmann, Sebastian Wilczek, Lars Schücke, Ihor Korolov, Romuald Skoda, Thomas Mussenbrock, Andrew R. Gibson, Peter Awakowicz

Abstract: This study investigates the flow field induced by a surface dielectric barrier discharge (SDBD) system, known for its efficient pollution remediation of volatile organic compounds (VOCs). We aim to understand the flow dynamics that contribute to the high conversion observed in similar systems. Experimental techniques, including schlieren imaging and particle image velocimetry (PIV), applied with h… ▽ More This study investigates the flow field induced by a surface dielectric barrier discharge (SDBD) system, known for its efficient pollution remediation of volatile organic compounds (VOCs). We aim to understand the flow dynamics that contribute to the high conversion observed in similar systems. Experimental techniques, including schlieren imaging and particle image velocimetry (PIV), applied with high temporal resolution, were used to analyse the flow field. Complementary, fluid simulations are employed to investigate the coupling between streamer and gas dynamics. Results show distinct fluid field behaviours for different electrode configurations, which differ in geometric complexity. The fluid field analysis of the most basic electrode design revealed behaviours commonly observed in actuator studies. The simulation results indicate the local information about the electron density as well as different temporal phases of the fluid flow. The electrode design with mostly parallel grid line structures exhibits confined vortices near the surface. In contrast, an electrode design also used in previous studies, is shown to promote strong gas transport through extended vortex structures, enhancing gas mixing and potentially explaining the high conversion observed. △ Less

Submitted 28 July, 2023; originally announced July 2023.

Comments: submitted to Plasma Chemistry and Plasma Processing by Springer Nature

Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges

Authors: Katharina Noesges, Maximilian Klich, Aranka Derzsi, Benedek Horváth, Julian Schulze, Ralf Peter Brinkmann, Thomas Mussenbrock, Sebastian Wilczek

Abstract: In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technological processes. One possible plasma-surface interaction is the generation of secondary electrons (SEs), which significantly influence the discharge when accelerated in the sheath electric field. However, SEs, in particu… ▽ More In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technological processes. One possible plasma-surface interaction is the generation of secondary electrons (SEs), which significantly influence the discharge when accelerated in the sheath electric field. However, SEs, in particular electron-induced SEs ($\updelta$-electrons), are frequently neglected in theory and simulations. Due to the relatively high threshold energy for the effective generation of $\updelta$-electrons at surfaces, their dynamics are closely connected and entangled with the dynamics of the ion-induced SEs ($\upgamma$-electrons). Thus, a fundamental understanding of the electron dynamics has to be achieved on a nanosecond timescale, and the effects of the different electron groups have to be segregated. This work utilizes $1d3v$ Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations of a symmetric discharge in the low-pressure regime ($p\,=\, 1\,\rm{Pa}$) with the inclusion of realistic electron-surface interactions for silicon dioxide. A diagnostic framework is introduced that segregates the electrons into three groups ("bulk-electrons", "$\upgamma$-electrons", and "$\updelta$-electrons") in order to analyze and discuss their dynamics. A variation of the electrode gap size $L_\mathrm{gap}$ is then presented as a control tool to alter the dynamics of the discharge significantly. It is demonstrated that this control results in two different regimes of low and high plasma density, respectively. The fundamental electron dynamics of both regimes are explained, which requires a complete analysis starting at global parameters (e.g., densities) down to single electron trajectories. △ Less

Submitted 27 March, 2023; originally announced March 2023.

Generation of energetic electrons by surface waves in VHF CCPs

Authors: D. Eremin, E. Kemaneci, M. Matsukuma, I. Kaganovich, T. Mussenbrock, R. P. Brinkmann

Abstract: Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is limited by the emergence of plasma radial nonuniformity detrimental for applications. The nonuniformity is caused by interactions of surface waves natural to the plasma-filled reactor with electrons of the plasma, leading… ▽ More Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is limited by the emergence of plasma radial nonuniformity detrimental for applications. The nonuniformity is caused by interactions of surface waves natural to the plasma-filled reactor with electrons of the plasma, leading to the complex electron energization and ionization dynamics. Using a self-consistent fully electromagnetic energy- and charge-conserving implicit particle-in-cell code ECCOPIC2M, we demonstrate that the electron energization and ionization profiles result from an involved interplay between different phenomena, demanding a kinetic and non-local description for the low pressures considered. Changes in the surface wave excitation with the driving frequency are discussed. △ Less

Submitted 2 March, 2023; v1 submitted 24 February, 2023; originally announced February 2023.

Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales

Authors: Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann

Abstract: Understanding and modeling plasma-surface interactions frame a multi-scale as well as multi-physics problem. Scale-bridging machine learning surface surrogate models have been demonstrated to perceive the fundamental atomic fidelity for the physical vapor deposition of pure metals. However, the immense computational cost of the data-generating simulations render a practical application with predic… ▽ More Understanding and modeling plasma-surface interactions frame a multi-scale as well as multi-physics problem. Scale-bridging machine learning surface surrogate models have been demonstrated to perceive the fundamental atomic fidelity for the physical vapor deposition of pure metals. However, the immense computational cost of the data-generating simulations render a practical application with predictions on relevant timescales impracticable. This issue is resolved in this work for the sputter deposition of AlN in Ar/N$_2$ discharges by develo** a scheme that populates the parameter spaces effectively. Hybrid reactive molecular dynamics / time-stamped force-bias Monte Carlo simulations of randomized plasma-surface interactions / diffusion processes are used to setup a physics-separating artificial neural network. The application of this generic machine learning model to a specific experimental reference case study enables the systematic analysis of the particle flux emission as well as underlying system state (e.g., composition, mass density, stress, point defect structure) evolution within process times of up to 45 minutes. △ Less

Submitted 9 January, 2023; originally announced January 2023.

Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

Authors: D. Eremin, E. Kemaneci, M. Matsukuma, T. Mussenbrock, R. P. Brinkmann

Abstract: Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully electromagnetic particle-in-cell / Monte Carlo code ECCOPIC2M. The code shows a good agreement with different cases having various collisionality and absorbed power. Although some aspects of the under… ▽ More Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully electromagnetic particle-in-cell / Monte Carlo code ECCOPIC2M. The code shows a good agreement with different cases having various collisionality and absorbed power. Although some aspects of the underlying physics were demonstrated in the previous literature with other models, the particle-in-cell method is advantageous for the predictive modeling due to a complex interplay between the surface mode excitations and the nonlocal physics of the corresponding type of plasma discharges operated at low pressures, which is hard to reproduce in other models realistically. △ Less

Submitted 27 December, 2022; v1 submitted 17 December, 2022; originally announced December 2022.

Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges

Authors: Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann

Abstract: Simulations of Al thin film sputter depositions rely on accurate plasma and surface interaction models. Establishing the latter commonly requires a higher level of abstraction and means to dismiss the fundamental atomic fidelity. Previous works on sputtering processes addressed this issue by establishing machine learning surrogate models, which include a basic surface state (i.e., stoichiometry) a… ▽ More Simulations of Al thin film sputter depositions rely on accurate plasma and surface interaction models. Establishing the latter commonly requires a higher level of abstraction and means to dismiss the fundamental atomic fidelity. Previous works on sputtering processes addressed this issue by establishing machine learning surrogate models, which include a basic surface state (i.e., stoichiometry) as static input. In this work, an evolving surface state and defect structure are introduced to jointly describe sputtering and growth with physics-separating artificial neural networks. The data describing the plasma-surface interactions stem from hybrid reactive molecular dynamics/time-stamped force bias Monte Carlo simulations of Al neutrals and Ar$^+$ ions im**ing onto Al(001) surfaces. It is demonstrated that the fundamental processes are comprehensively described by taking the surface state as well as defect structure into account. Hence, a machine learning plasma-surface interaction surrogate model is established that resolves the inherent kinetics with high physical fidelity. The resulting model is not restricted to input from modeling and simulation, but may similarly be applied to experimental input data. △ Less

Submitted 9 November, 2022; originally announced November 2022.

Physics inspired compact modelling of BiFeO$_3$ based memristors for hardware security applications

Authors: Sahitya Yarragolla, Nan Du, Torben Hemke, Xianyue Zhao, Ziang Chen, Ilia Polian, Thomas Mussenbrock

Abstract: With the advent of the Internet of Things, nanoelectronic devices or memristors have been the subject of significant interest for use as new hardware security primitives. Among the several available memristors, BiFe$\rm O_{3}$ (BFO)-based electroforming-free memristors have attracted considerable attention due to their excellent properties, such as long retention time, self-rectification, intrinsi… ▽ More With the advent of the Internet of Things, nanoelectronic devices or memristors have been the subject of significant interest for use as new hardware security primitives. Among the several available memristors, BiFe$\rm O_{3}$ (BFO)-based electroforming-free memristors have attracted considerable attention due to their excellent properties, such as long retention time, self-rectification, intrinsic stochasticity, and fast switching. They have been actively investigated for use in physical unclonable function (PUF) key storage modules, artificial synapses in neural networks, nonvolatile resistive switches, and reconfigurable logic applications. In this work, we present a physics-inspired 1D compact model of a BFO memristor to understand its implementation for such applications (mainly PUFs) and perform circuit simulations. The resistive switching based on electric field-driven vacancy migration and intrinsic stochastic behaviour of the BFO memristor are modelled using the cloud-in-a-cell scheme. The experimental current-voltage characteristics of the BFO memristor are successfully reproduced. The response of the BFO memristor to changes in electrical properties, environmental properties (such as temperature) and stress are analyzed and consistent with experimental results. △ Less

Submitted 7 October, 2022; originally announced October 2022.

Comments: 13 pages and 8 figures

Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions

Authors: Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann

Abstract: Plasma-surface interactions during AlN thin film sputter deposition could be studied by means of reactive molecular dynamics (RMD) methods. This requires an interaction potential that describes all species as well as wall interactions (e.g., particle emission, damage formation) appropriately. However, previous works focused on the establishment of AlN bulk potentials. Although for the third-genera… ▽ More Plasma-surface interactions during AlN thin film sputter deposition could be studied by means of reactive molecular dynamics (RMD) methods. This requires an interaction potential that describes all species as well as wall interactions (e.g., particle emission, damage formation) appropriately. However, previous works focused on the establishment of AlN bulk potentials. Although for the third-generation charge-optimized many-body (COMB3) potential at least a single reference surface was taken into account, surface interactions are subject to limited reliability only. The demand for a revised COMB3 AlN potential is met in two steps: First, the Ziegler-Biersack-Littmark potential is tapered and the variable charge model QTE$^+$ is implemented to account for high-energy collisions and distant charge transport, respectively. Second, the underlying parameterization is reworked by applying a self-adaptive evolution strategy implemented in the GARFfield software. Four wurtzite, three zinc blende and three rock salt surfaces are considered. An example study on the ion bombardment induced particle emission and point defect formation reveals that the revised COMB3 AlN potential is appropriate for the accurate investigation of plasma-surface interactions by means of RMD simulations. △ Less

Submitted 24 August, 2022; originally announced August 2022.

Validation of the smooth step model by particle-in-cell/Monte Carlo collisions simulations

Authors: Maximilian Klich, Jan Löwer, Sebastian Wilczek, Thomas Mussenbrock, Ralf Peter Brinkmann

Abstract: Bounded plasmas are characterized by a rapid but smooth transition from quasi-neutrality in the volume to electron depletion close to the electrodes and chamber walls. The thin non-neutral region, the boundary sheath, comprises only a small fraction of the discharge domain but controls much of its macroscopic behavior. Insights into the properties of the sheath and its relation to the plasma are o… ▽ More Bounded plasmas are characterized by a rapid but smooth transition from quasi-neutrality in the volume to electron depletion close to the electrodes and chamber walls. The thin non-neutral region, the boundary sheath, comprises only a small fraction of the discharge domain but controls much of its macroscopic behavior. Insights into the properties of the sheath and its relation to the plasma are of high practical and theoretical interest. The recently proposed smooth step model provides a closed analytical expression for the electric field in a planar, radio-frequency modulated sheath. It represents (i) the space charge field in the depletion zone, (ii) the generalized Ohmic and ambipolar field in the quasi-neutral zone, and (iii) a smooth interpolation for the transition in between. This investigation compares the smooth step model with the predictions of a more fundamental particle-in-cell/Monte Carlo collisions simulation and finds good quantitative agreement when the assumed length and time scale requirements are met. A second simulation case illustrates that the model remains applicable even when the assumptions are only marginally fulfilled △ Less

Submitted 20 September, 2021; v1 submitted 1 July, 2021; originally announced July 2021.

Kinetic simulation of electron cyclotron resonance assisted gas breakdown in split-biased waveguides for ITER collective Thomson scattering diagnostic

Authors: Jan Trieschmann, Axel Wright Larsen, Thomas Mussenbrock, Søren Bang Korsholm

Abstract: For the measurement of the dynamics of fusion-born alpha particles $E_α\leq 3.5$ MeV in ITER using collective Thomson scattering (CTS), safe transmission of a gyrotron beam at mm-wavelength (1 MW, 60 GHz) passing the electron cyclotron resonance (ECR) in the in-vessel tokamak `port plug' vacuum is a prerequisite. Depending on neutral gas pressure and composition, ECR-assisted gas breakdown may occ… ▽ More For the measurement of the dynamics of fusion-born alpha particles $E_α\leq 3.5$ MeV in ITER using collective Thomson scattering (CTS), safe transmission of a gyrotron beam at mm-wavelength (1 MW, 60 GHz) passing the electron cyclotron resonance (ECR) in the in-vessel tokamak `port plug' vacuum is a prerequisite. Depending on neutral gas pressure and composition, ECR-assisted gas breakdown may occur at the location of the resonance, which must be mitigated for diagnostic performance and safety reasons. The concept of a split electrically biased waveguide (SBWG) has been previously demonstrated in [C.P. Moeller, U.S. Patent 4,687,616 (1987)]. The waveguide is longitudinally split and a kV bias voltage applied between the two halves. Electrons are rapidly removed from the central region of high radio frequency electric field strength, mitigating breakdown. As a full scale experimental investigation of gas and electromagnetic field conditions inside the ITER equatorial port plugs is currently unattainable, a corresponding Monte Carlo simulation study is presented. Validity of the Monte Carlo electron model is demonstrated with a prediction of ECR breakdown and the mitigation pressure limits for the above quoted reference case with $^1$H$_2$ (and pollutant high $Z$ elements). For the proposed ITER CTS design with a 88.9 mm inner diameter SBWG, ECR breakdown is predicted to occur down to a pure $^1$H$_2$ pressure of 0.3 Pa, while mitigation is shown to be effective at least up to 10 Pa using a bias voltage of 1 kV. The analysis is complemented by results for relevant electric/magnetic field arrangements and limitations of the SBWG mitigation concept are addressed. △ Less

Submitted 5 August, 2021; v1 submitted 29 April, 2021; originally announced April 2021.

Journal ref: Physics of Plasmas 28, 082505 (2021)

Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N$_2$ mixtures

Authors: Ihor Korolov, Zoltán Donkó, Gerrit Hübner, Yue Liu, Thomas Mussenbrock, Julian Schulze

Abstract: Based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) measurements of the spatially averaged and peak helium metastable atom densities in a capacitively coupled micro atmospheric pressure plasma jet operated in He/N$_2$ mixtures, the energy efficiency of metastable species (He-I 2$^3$S$_1$) generation is compared for three different scenarios: single frequency operation at (i) 13.56 MHz and… ▽ More Based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) measurements of the spatially averaged and peak helium metastable atom densities in a capacitively coupled micro atmospheric pressure plasma jet operated in He/N$_2$ mixtures, the energy efficiency of metastable species (He-I 2$^3$S$_1$) generation is compared for three different scenarios: single frequency operation at (i) 13.56 MHz and (ii) 54.12 MHz, and Voltage Waveform Tailoring (VWT) at (iii) "valleys"-waveforms synthesized from four consecutive harmonics of 13.56 MHz. For each case, the dissipated power is measured based on a careful calibration procedure of voltage and current measurements. The results are compared to PIC/MCC simulation results and very good agreement is found. The computational results show that the choice of the surface coefficients in the simulation is important to reproduce the experimental data correctly. Due to the enhanced control of the spatio-temporal electron power absorption dynamics and, thus, of the electron energy distribution function by VWT, this approach does not only provide better control of the generation of excited and reactive species compared to single frequency excitation, but in case of helium metastables the energy efficiency is also shown to be significantly higher in case of VWT. △ Less

Submitted 14 April, 2021; originally announced April 2021.

Ion dynamics in capacitively coupled argon-xenon discharges

Authors: M. Klich, S. Wilczek, J. F. J. Janssen, R. P. Brinkmann, T. Mussenbrock, J. Trieschmann

Abstract: An argon-xenon (Ar/Xe) plasma is used as a model system for complex plasmas. Based on this system, symmetric low-pressure capacitively coupled radio-frequency discharges are examined utilizing Particle-In-Cell/Monte Carlo Collisions (PIC/MCC) simulations. In addition to the simulation, an analytical energy balance model fed with the simulation data is applied to analyze the findings further. This… ▽ More An argon-xenon (Ar/Xe) plasma is used as a model system for complex plasmas. Based on this system, symmetric low-pressure capacitively coupled radio-frequency discharges are examined utilizing Particle-In-Cell/Monte Carlo Collisions (PIC/MCC) simulations. In addition to the simulation, an analytical energy balance model fed with the simulation data is applied to analyze the findings further. This work focuses on investigating the ion dynamics in a plasma with two ion species and a gas mixture as background. By varying the gas composition and driving voltage of the single-frequency discharge, fundamental mechanics of the discharge, such as the evolution of the plasma density and the energy dispersion, are discussed. Thereby, close attention is paid to these measures' influence on the ion energy distribution functions at the electrode surfaces. The results show that both the gas composition and the driving voltage can significantly impact the ion dynamics. The mixing ratio of argon to xenon allows for shifting the distribution function for one ion species from collisionless to collision dominated. The mixing ratio serves as a control parameter for the ion flux and the im**ement energy of ions at the surfaces. Additionally, a synergy effect between the ionization of argon and the ionization of xenon is found and discussed. △ Less

Submitted 17 February, 2021; originally announced February 2021.

Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations

Authors: Q. Zhang, R. T. Nguyen-Smith, F. Beckfeld, Y. Liu, T. Mussenbrock, P. Awakowicz, J. Schulze

Abstract: The propagation mechanisms of plasma streamers have been observed and investigated in a surface dielectric barrier discharge (SDBD) using 2D particle in cell simulations. The investigations are carried out under a simulated air mixture, 80\% N$_2$ and 20\% O$_2$, at atmospheric pressure, 100$\,$kPa, under both DC conditions and a pulsed DC waveform that represent AC conditions. The simulated geome… ▽ More The propagation mechanisms of plasma streamers have been observed and investigated in a surface dielectric barrier discharge (SDBD) using 2D particle in cell simulations. The investigations are carried out under a simulated air mixture, 80\% N$_2$ and 20\% O$_2$, at atmospheric pressure, 100$\,$kPa, under both DC conditions and a pulsed DC waveform that represent AC conditions. The simulated geometry is a simplification of the symmetric and fully exposed SDBD resulting in the simultaneous ignition of both positive and negative streamers on either side of the Al$_2$O$_3$ dielectric barrier. In order to determine the interactivity of the two streamers, the propagation behavior for the positive and negative streamers are investigated both independently and simultaneously under identical constant voltage conditions. An additional focus is implored under a fast sub nanosecond rise time square voltage pulse alternating between positive and negative voltage conditions, thus providing insight into the dynamics of the streamers under alternating polarity switches. It is shown that the simultaneous ignition of both streamers, as well as using the pulsed DC conditions, provides both an enhanced discharge and an increased surface coverage. It is also shown that additional streamer branching may occur in a cross section that is difficult to experimentally observe. The enhanced discharge and surface coverage may be beneficial to many applications such as, but are not limited to: air purification, volatile organic compound removal, and plasma enhanced catalysis. △ Less

Submitted 18 February, 2021; v1 submitted 17 February, 2021; originally announced February 2021.

Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O$_{2}$: A fluid dynamics approach

Authors: Yue Liu, Ihor Korolov, Torben Hemke, Lena Bischoff, Gerrit Hübner, Julian Schulze, Thomas Mussenbrock

Abstract: A two-dimensional fluid model is used to investigate the electron heating dynamics and the production of neutral species in a capacitively coupled radio-frequency micro atmospheric pressure helium plasma jet -- specifically the COST jet -- with a small oxygen admixture. Electron heating mode transitions are found to be induced by varying the driving voltage amplitude and the O$_2$ concentration nu… ▽ More A two-dimensional fluid model is used to investigate the electron heating dynamics and the production of neutral species in a capacitively coupled radio-frequency micro atmospheric pressure helium plasma jet -- specifically the COST jet -- with a small oxygen admixture. Electron heating mode transitions are found to be induced by varying the driving voltage amplitude and the O$_2$ concentration numerically and experimentally. The helium metastable density, and the charged species densities are highly relevant to the electron heating dynamics. By analyzing the creation and destruction mechanisms of the negative ions, we find that the generation of negative ions strongly depends on the O$_2$ concentration. The increase of the electronegativity with the increasing O$_2$ concentration leads to an enhancement of the bulk drift electric field. The distributions of the different neutral species densities along the direction of the gas flow inside the jet, as well as in the effluent differ a lot due to the relevant chemical reaction rates and the effect of the gas flow. The simulated results show that a fluid model can be an effective tool for qualitative investigations of micro atmospheric pressure plasma jets. △ Less

Submitted 24 February, 2021; v1 submitted 7 February, 2021; originally announced February 2021.

A generic method for equip** arbitrary rf discharge simulation frameworks with external lumped element circuits

Authors: Frederik Schmidt, Jan Trieschmann, Tobias Gergs, Thomas Mussenbrock

Abstract: External electric circuits attached to radio-frequency plasma discharges are essential for the power transfer into the discharge and are, therefore, a key element for plasma operation. Many plasma simulations, however, simplify or even neglect the external network. This is because a solution of the circuit's auxiliary differential equations following Kirchhoff's laws is required, which can become… ▽ More External electric circuits attached to radio-frequency plasma discharges are essential for the power transfer into the discharge and are, therefore, a key element for plasma operation. Many plasma simulations, however, simplify or even neglect the external network. This is because a solution of the circuit's auxiliary differential equations following Kirchhoff's laws is required, which can become a tedious task especially for large circuits. This work proposes a method, which allows to include electric circuits in any desired radio-frequency plasma simulation. Conceptually, arbitrarily complex external networks may be incorporated in the form of a simple netlist. The suggested approach is based on the harmonic balance concept, which splits the whole system into the nonlinear plasma and the linear circuit contribution. A mathematical formulation of the influence of the applied voltage on the current for each specific harmonic is required and proposed. It is demonstrated that this method is applicable for both simple global plasma models as well as more complex spatially resolved Particle-in-Cell simulations. △ Less

Submitted 6 February, 2019; originally announced February 2019.

Multi frequency matching for voltage waveform tailoring

Authors: Frederik Schmidt, Julian Schulze, Erik Johnson, Jean-Paul Booth, Douglas Keil, David M. French, Jan Trieschmann, Thomas Mussenbrock

Abstract: Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribution functions, homogeneity of the ionflux or ionization dynamics. So far this technology, while being extensively studied in academia, has yet to be established in applications. One reason for this is the lack of a suit… ▽ More Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribution functions, homogeneity of the ionflux or ionization dynamics. So far this technology, while being extensively studied in academia, has yet to be established in applications. One reason for this is the lack of a suitable multi-frequency matching network that allows for maximum power absorption for each excitation frequency that is generated and transmitted via a single broadband amplifier. In this work, a method is introduced for designing such a network based on network theory and synthesis. Using this method, a circuit simulation is established that connects an exemplary matching network to an equivalent circuit plasma model of a capacitive radio-frequency discharge. It is found that for a range of gas pressures and number of excitation frequencies the matching conditions can be satisfied, which proves the functionality and feasibility of the proposed concept. Based on the proposed multi-frequency impedance matching, tailored voltage waveforms can be used at an industrial level. △ Less

Submitted 27 April, 2018; originally announced April 2018.

Journal ref: Plasma Sources Science and Technolology 27, 095012 (2018)

Consistent simulation of capacitive radio-frequency discharges and external matching networks

Authors: Frederik Schmidt, Thomas Mussenbrock, Jan Trieschmann

Abstract: External matching networks are crucial and necessary for operating capacitively coupled plasmas in order to maximize the absorbed power. Experiments show that external circuits in general heavily interact with the plasma in a nonlinear way. This interaction has to be taken into account in order to be able to design suitable networks, e.g., for plasma processing systems. For a complete understandin… ▽ More External matching networks are crucial and necessary for operating capacitively coupled plasmas in order to maximize the absorbed power. Experiments show that external circuits in general heavily interact with the plasma in a nonlinear way. This interaction has to be taken into account in order to be able to design suitable networks, e.g., for plasma processing systems. For a complete understanding of the underlying physics of this coupling, a nonlinear simulation approach which considers both the plasma and the circuit dynamics can provide useful insights. In this work, the coupling of an equivalent circuit plasma model and an electric external circuit composed of lumped elements is discussed. The plasma model itself is self-consistent in the sense that the plasma density and the electron temperature is calculated from the absorbed power based on a global plasma chemistry model. The approach encompasses all elements present in real plasma systems, i.e., the discharge itself, the matching network, the power generator as well as stray loss elements. While the main results of this work is the conceptual approach itself, at the example of a single-frequency capacitively coupled discharge its applicability is demonstrated. It is shown that it provides an effective and efficient way to analyze and understand the nonlinear dynamics of real plasma systems and, furthermore, may be applied to synthesize optimal matching networks. △ Less

Submitted 16 April, 2018; originally announced April 2018.

Journal ref: Plasma Sources Science and Technolology 27, 105017 (2018)

Integration of external electric fields in molecular dynamics simulation models for resistive switching devices

Authors: Tobias Gergs, Sven Dirkmann, Thomas Mussenbrock

Abstract: Resistive switching devices emerged a huge amount of interest as promising candidates for non-volatile memories as well as artificial synapses due to their memristive behavior. The main physical and chemical phenomena which define their functionality are driven by externally applied voltages, and the resulting electric fields. Although molecular dynamics simulations are widely used in order to des… ▽ More Resistive switching devices emerged a huge amount of interest as promising candidates for non-volatile memories as well as artificial synapses due to their memristive behavior. The main physical and chemical phenomena which define their functionality are driven by externally applied voltages, and the resulting electric fields. Although molecular dynamics simulations are widely used in order to describe the dynamics on the corresponding atomic length and time scales, there is a lack of models which allow for the actual driving force of the dynamics, i.e. externally applied electric fields. This is due to the restriction of currently applied models to either solely conductive, non-reactive or insulating materials, with thicknesses in the order of the potential cutoff radius, i.e., 10 Å. In this work, we propose a generic model, which can be applied in particular to describe the resistive switching phenomena of metal-insulator-metal systems. It has been shown that the calculated electric field and force distribution in case of the chosen example system Cu/a-SiO$_2$/Cu are in agreement with fundamental field theoretical expectations. △ Less

Submitted 28 May, 2018; v1 submitted 28 February, 2018; originally announced February 2018.

Kinetic Bandgap Analysis of Plasma Photonic Crystals

Authors: Jan Trieschmann, Thomas Mussenbrock

Abstract: The dispersion relation of plasma and plasma-dielectric photonic multilayer structures is approached in terms of a one-dimensional Particle-in-Cell simulation. For several plasma-dielectric configurations, the system response is obtained using a pulsed excitation and a subsequent two-dimensional frequency analysis. It is first shown that the dispersion relation of a single, homogeneous plasma slab… ▽ More The dispersion relation of plasma and plasma-dielectric photonic multilayer structures is approached in terms of a one-dimensional Particle-in-Cell simulation. For several plasma-dielectric configurations, the system response is obtained using a pulsed excitation and a subsequent two-dimensional frequency analysis. It is first shown that the dispersion relation of a single, homogeneous plasma slab is well described by the cold-plasma model even at low pressures of 1 Pa. The study is extended to the simulation of plasma photonic crystals with a variety of configurations, based on the work of Hojo and Mase [J. Plasma Fusion Res. 80, 89 (2004)]. Considering a one-dimensional plasma photonic crystal made from alternating layers of dielectric and homogeneous plasma slabs, it is shown that the assumption of a cold-plasma description is well justified also in this case. Moreover, in this work the results are reformatted and analyzed in a band diagram representation, in particular based on the lattice constant $a$. Based on these considerations a scaling invariant representation is presented, utilizing a generalized set of parameters. The study is completed with an exemplary comparison of three plasma-dielectric photonic crystal configurations and their corresponding band diagrams. △ Less

Submitted 6 September, 2018; v1 submitted 17 September, 2017; originally announced September 2017.

Journal ref: Journal of Applied Physics 124, 173302 (2018)

An Enhanced Lumped Element Electrical Model of a Double Barrier Memristive Device

Authors: Enver Solan, Sven Dirkmann, Mirko Hansen, Dietmar Schroeder, Hermann Kohlstedt, Martin Ziegler, Thomas Mussenbrock, Karlheinz Ochs

Abstract: The massive parallel approach of neuromorphic circuits leads to effective methods for solving complex problems. It has turned out that resistive switching devices with a continuous resistance range are potential candidates for such applications. These devices are memristive systems - nonlinear resistors with memory. They are fabricated in nanotechnology and hence parameter spread during fabricatio… ▽ More The massive parallel approach of neuromorphic circuits leads to effective methods for solving complex problems. It has turned out that resistive switching devices with a continuous resistance range are potential candidates for such applications. These devices are memristive systems - nonlinear resistors with memory. They are fabricated in nanotechnology and hence parameter spread during fabrication may aggravate reproducible analyses. This issue makes simulation models of memristive devices worthwhile. Kinetic Monte-Carlo simulations based on a distributed model of the device can be used to understand the underlying physical and chemical phenomena. However, such simulations are very time-consuming and neither convenient for investigations of whole circuits nor for real-time applications, e.g. emulation purposes. Instead, a concentrated model of the device can be used for both fast simulations and real-time applications, respectively. We introduce an enhanced electrical model of a valence change mechanism (VCM) based double barrier memristive device (DBMD) with a continuous resistance range. This device consists of an ultra-thin memristive layer sandwiched between a tunnel barrier and a Schottky-contact. The introduced model leads to very fast simulations by using usual circuit simulation tools while maintaining physically meaningful parameters. Kinetic Monte-Carlo simulations based on a distributed model and experimental data have been utilized as references to verify the concentrated model. △ Less

Submitted 19 January, 2017; originally announced January 2017.

Kinetic analysis of negative power deposition in low pressure plasmas

Authors: Jan Trieschmann, Thomas Mussenbrock

Abstract: The negative power absorption in low pressure plasmas is investigated by means of an analyical model which couples Boltzmann's equation and the quasi-stationary Maxwell's equation. Exploiting standard Hilbert space methods an explicit solution for both, the electric field and the distribution function of the electrons for a bounded discharge configuration subject to an unsymmetrical excitation has… ▽ More The negative power absorption in low pressure plasmas is investigated by means of an analyical model which couples Boltzmann's equation and the quasi-stationary Maxwell's equation. Exploiting standard Hilbert space methods an explicit solution for both, the electric field and the distribution function of the electrons for a bounded discharge configuration subject to an unsymmetrical excitation has been found for the first time. The model is applied to a low pressure inductively coupled plasma discharge. In this context particularly the anomalous skin effect and the effect of phase mixing is discussed. The analytical solution is compared with results from electromagnetic full wave particle in cell simulations. Excellent agreement between the analytical and the numerical results is found. △ Less

Submitted 7 August, 2016; originally announced August 2016.

Journal ref: Plasma Sources Science and Technology 26, 024004 (2017)

Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges

Authors: Jan Trieschmann, Frederik Schmidt, Thomas Mussenbrock

Abstract: The paper provides a tutorial to the conceptual layout of a self-consistently coupled Particle-In-Cell/Test-Particle model for the kinetic simulation of sputtering transport in capacitively coupled plasmas at low gas pressures. It explains when a kinetic approach is actually needed and which numerical concepts allow for the inherent nonequilibrium behavior of the charged and neutral particles. At… ▽ More The paper provides a tutorial to the conceptual layout of a self-consistently coupled Particle-In-Cell/Test-Particle model for the kinetic simulation of sputtering transport in capacitively coupled plasmas at low gas pressures. It explains when a kinetic approach is actually needed and which numerical concepts allow for the inherent nonequilibrium behavior of the charged and neutral particles. At the example of a generic sputtering discharge both the fundamentals of the applied Monte Carlo methods as well as the conceptual details in the context of the sputtering scenario are elaborated on. Finally, two in the context of sputtering transport simulations often exploited assumptions, namely on the energy distribution of im**ing ions as well as on the test particle approach, are validated for the proposed example discharge. △ Less

Submitted 14 July, 2016; originally announced July 2016.

Journal ref: Plasma Process and Polymers 14, 1600140 (2017)

A New Hybrid Scheme for Simulations of Highly Collisional RF-Driven Plasmas

Authors: Denis Eremin, Torben Hemke, Thomas Mussenbrock

Abstract: This work describes a new 1D hybrid approach for modeling atmospheric pressure discharges featuring complex chemistry. In this approach electrons are described fully kinetically using Particle-In-Cell/Monte-Carlo (PIC/MCC) scheme, whereas the heavy species are modeled within a fluid description. Validity of the popular drift-diffusion approximation is verified against a "full" fluid model accounti… ▽ More This work describes a new 1D hybrid approach for modeling atmospheric pressure discharges featuring complex chemistry. In this approach electrons are described fully kinetically using Particle-In-Cell/Monte-Carlo (PIC/MCC) scheme, whereas the heavy species are modeled within a fluid description. Validity of the popular drift-diffusion approximation is verified against a "full" fluid model accounting for the ion inertia and a fully kinetic PIC/MCC code for ions as well as electrons. The fluid models require knowledge of the momentum exchange frequency and dependence of the ion mobilities on the electric field when the ions are in equilibrium with the latter. To this end an auxiliary Monte-Carlo scheme is constructed. It is demonstrated that the drift-diffusion approximation can overestimate ion transport in simulations of RF-driven discharges with heavy ion species operated in the $γ$ mode at the atmospheric pressure or in all discharge simulations for lower pressures. This can lead to exaggerated plasma densities and incorrect profiles provided by the drift-diffusion models. Therefore, the hybrid code version featuring the full ion fluid model should be favored against the more popular drfit-diffusion model, noting that the suggested numerical scheme for the former model implies only a small additional computational cost. △ Less

Submitted 12 August, 2015; originally announced August 2015.

Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas

Authors: S. Wilczek, J. Trieschmann, D. Eremin, R. P. Brinkmann, J. Schulze, E. Schuengel, A. Derzsi, I. Korolov, P. Hartmann, Z. Donkó, T. Mussenbrock

Abstract: The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-temporal distributions of plasma parameters such as the densities of hot and cold electrons, as well as the conduction and displacement currents reveals the mechanism of the formation of multiple electron beams during shea… ▽ More The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-temporal distributions of plasma parameters such as the densities of hot and cold electrons, as well as the conduction and displacement currents reveals the mechanism of the formation of multiple electron beams during sheath expansion. The interplay between highly energetic beam electrons and low energetic bulk electrons is identified as the physical origin of the excitation of harmonics in the current. △ Less

Submitted 20 July, 2015; originally announced July 2015.

Journal ref: Physics of Plasmas 23, 063514 (2016)

Transport of Sputtered Particles in Capacitive Sputter Sources

Authors: Jan Trieschmann, Thomas Mussenbrock

Abstract: The transport of sputtered aluminum inside a multi frequency capacitively coupled plasma chamber is simulated by means of a kinetic test multi-particle approach. A novel consistent set of scattering parameters obtained for a modified variable hard sphere collision model is presented for both argon and aluminum. An angular dependent Thompson energy distribution is fitted to results from Monte Carlo… ▽ More The transport of sputtered aluminum inside a multi frequency capacitively coupled plasma chamber is simulated by means of a kinetic test multi-particle approach. A novel consistent set of scattering parameters obtained for a modified variable hard sphere collision model is presented for both argon and aluminum. An angular dependent Thompson energy distribution is fitted to results from Monte Carlo simulations and used for the kinetic simulation of the transport of sputtered aluminum. For the proposed configuration the transport of sputtered particles is characterized under typical process conditions at a gas pressure of p=0.5 Pa. It is found that -- due to the peculiar geometric conditions -- the transport can be understood in a one dimensional picture, governed by the interaction of the imposed and backscattered particle fluxes. It is shown that the precise geometric features play an important role only in proximity to the electrode edges, where the effect of backscattering from the outside chamber volume becomes the governing mechanism. △ Less

Submitted 21 July, 2015; v1 submitted 12 May, 2015; originally announced May 2015.

Journal ref: Journal of Applied Physics 118, 033302 (2015)

Analytic model of the energy distribution function for highly energetic electrons in magnetron plasmas

Authors: Sara Gallian, Jan Trieschmann, Thomas Mussenbrock, Ralf Peter Brinkmann, William N. G. Hitchon

Abstract: This paper analyzes a situation which is common for magnetized technical plasmas such as dc magnetron discharges and HiPIMS systems, where secondary electrons enter the plasma after being accelerated in the cathode fall and encounter a nearly uniform bulk. An analytic calculation of the distribution function of hot electrons is presented; these are described as an initially monoenergetic beam that… ▽ More This paper analyzes a situation which is common for magnetized technical plasmas such as dc magnetron discharges and HiPIMS systems, where secondary electrons enter the plasma after being accelerated in the cathode fall and encounter a nearly uniform bulk. An analytic calculation of the distribution function of hot electrons is presented; these are described as an initially monoenergetic beam that slows down by Coulomb collisions with a Maxwellian distribution of bulk (cold) electrons, and by inelastic collisions with neutrals. Although this analytical solution is based on a steady-state assumption, a comparison of the characteristic time-scales suggests that it may be applicable to a variety of practical time-dependent discharges, and it may be used to introduce kinetic effects into models based on the hypothesis of Maxwellian electrons. The results are verified for parameters appropriate to HiPIMS discharges, by means of time-dependent and fully-kinetic numerical calculations. △ Less

Submitted 7 January, 2015; v1 submitted 25 November, 2014; originally announced November 2014.

Journal ref: J. Appl. Phys. 117, 023305 (2015)

The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges

Authors: S. Wilczek, J. Trieschmann, J. Schulze, E. Schuengel, R. P. Brinkmann, A. Derzsi, I. Korolov, Z. Donkó, T. Mussenbrock

Abstract: The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is investigated by Particle in Cell/Monte Carlo Collisions simulations and analytical modeling. In contrast to previous assumptions the plasma density does not follow a quadratic dependence on the driving frequency in this n… ▽ More The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is investigated by Particle in Cell/Monte Carlo Collisions simulations and analytical modeling. In contrast to previous assumptions the plasma density does not follow a quadratic dependence on the driving frequency in this non-local collisionless regime. Instead, a step-like increase at a distinct driving frequency is observed. Based on the analytical power balance model, in combination with a detailed analysis of the electron kinetics, the density jump is found to be caused by an electron heating mode transition from the classical $α$-mode into a low density resonant heating mode characterized by the generation of two energetic electron beams at each electrode per sheath expansion phase. These electron beams propagate through the bulk without collisions and interact with the opposing sheath. In the low density mode, the second beam is found to hit the opposing sheath during its collapse. Consequently, a high number of energetic electrons is lost at the electrodes resulting in a poor confinement of beam electrons in contrast to the classical $α$-mode observed at higher driving frequencies. Based on the analytical model this modulated confinement quality and the related modulation of the energy lost per electron lost at the electrodes is demonstrated to cause the step-like change of the plasma density. The effects of a variation of the electrode gap, the neutral gas pressure, the electron sticking and secondary electron emission coefficients of the electrodes on this step-like increase of the plasma density are analyzed based on the simulation results. △ Less

Submitted 29 January, 2015; v1 submitted 20 October, 2014; originally announced October 2014.

Journal ref: Plasma Sources Sci. Technol. 24 024002 (2015)

An algebraic RF sheath model for all excitation waveforms and amplitudes, and all levels of collisionality

Authors: A. E. Elgendy, H. Hatefinia, T. Hemke, M. Shihab, A. Wollny, D. Eremin, T. Mussenbrock, R. P. Brinkmann

Abstract: The boundary sheath of a low temperature plasma comprises typically only a small fraction of its volume but is responsible for many aspects of the macroscopic behavior. A thorough understanding of the sheath dynamics is therefore of theoretical and practical importance. This work focusses on the so-called "algebraic" approach which strives to describe the electrical behavior of RF modulated bounda… ▽ More The boundary sheath of a low temperature plasma comprises typically only a small fraction of its volume but is responsible for many aspects of the macroscopic behavior. A thorough understanding of the sheath dynamics is therefore of theoretical and practical importance. This work focusses on the so-called "algebraic" approach which strives to describe the electrical behavior of RF modulated boundary sheaths in closed analytical form, i.e., without the need to solve differential equations. A mathematically simple, analytical expression for the charge-voltage relation of a sheath is presented which holds for all excitation wave forms and amplitudes and covers all regimes from the collision-less motion at low gas pressure to the collision dominated motion at gas high pressure. A comparison with the results of self-consistent particle-in-cell simulations is also presented. △ Less

Submitted 7 June, 2013; originally announced June 2013.

Kinetic simulation of the sheath dynamics in the intermediate radio-frequency regime

Authors: M. Shihab, A. T. Elgendy, I. Korolov, A. Derzsi, J. Schulze, D. Eremin, T. Mussenbrock, Z. Donkó, R. P. Brinkmann

Abstract: The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency are comparable. Two kinetic simulation codes are employed and their results are compared. The first code is a realization of the well-known scheme, Particle-In-Cell with Monte Carlo collisions (PIC/MCC) and simulates the e… ▽ More The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency are comparable. Two kinetic simulation codes are employed and their results are compared. The first code is a realization of the well-known scheme, Particle-In-Cell with Monte Carlo collisions (PIC/MCC) and simulates the entire discharge, a planar radio frequency capacitively coupled plasma (RF-CCP) with an additional heating source. The second code is based on the recently published scheme Ensemble-in-Spacetime (EST); it resolves only the sheath and requires the time resolved voltage across and the ion flux into the sheath as input. Ion inertia causes a temporal asymmetry (hysteresis) of the sheath charge-voltage relation; also other ion transit time effects are found. The two codes are in good agreement, both with respect to the spatial and temporal dynamics of the sheath and with respect to the ion energy distributions at the electrodes. It is concluded that the EST scheme may serve as an efficient post-processor for fluid or global simulations and for measurements: It can rapidly and accurately calculate ion distribution functions even when no genuine kinetic information is available. △ Less

Submitted 29 May, 2013; originally announced May 2013.

Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor

Authors: Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock, Nazlim Bagcivan, Ricardo Henrique Brugnara, Marcel Schäfer, Jan Trieschmann

Abstract: Magnetron sputtering used for physical vapor deposition processes often requires gas pressures well below 1 Pa. Under these conditions the gas flow in the reactor is usually determined by a Knudsen number of about one, i.e., a transition regime between the hydrodynamic and the rarefied gas regime. In the first, the gas flow is well described by the Navier-Stokes equations, while in the second a ki… ▽ More Magnetron sputtering used for physical vapor deposition processes often requires gas pressures well below 1 Pa. Under these conditions the gas flow in the reactor is usually determined by a Knudsen number of about one, i.e., a transition regime between the hydrodynamic and the rarefied gas regime. In the first, the gas flow is well described by the Navier-Stokes equations, while in the second a kinetic approach via the Boltzmann equation is necessary. In this paper the neutral gas flow of argon and molecular nitrogen gas inside an industrial scale plasma reactor was simulated using both a fluid model and a fully kinetic Direct Simulation Monte Carlo model. By comparing both model results the validity of the fluid model was checked. Although in both models a Maxwell-Boltzmann energy distribution of the neutral particles is the natural outcome, the results of the gas flow differ significantly. The fluid model description breaks down, due to the inappropriate assumption of a fluid continuum. This is due to exclusion of non-local effects in the multi dimensional velocity space, as well as invalid gas/wall interactions. Only the kinetic model is able to provide an accurate physical description of the gas flow in the transition regime. Our analysis is completed with a brief investigation of different definitions of the local Knudsen number. We conclude that the most decisive parameter - the spatial length scale L - has to be very careful chosen in order to obtain a reasonable estimate of the gas flow regime. △ Less

Submitted 20 March, 2014; v1 submitted 24 May, 2013; originally announced May 2013.

Journal ref: Surface and Coatings Technology 237 (2013) 176-181

A phenomenological model for the description of rotating spokes in HiPIMS discharges

Authors: S Gallian, W N G Hitchon, D Eremin, T Mussenbrock, R P Brinkmann

Abstract: In the ionization region above circular planar magnetrons well defined regions of high emissivity are observed, when the discharge is driven in the HiPIMS regime. Once their mode is stabilized, these structures rotate in the E x B direction with a constant rotation frequency in the hundreds of kHz range. A phenomenological model of the phenomenon is developed, in the form of a system of nonlinear… ▽ More In the ionization region above circular planar magnetrons well defined regions of high emissivity are observed, when the discharge is driven in the HiPIMS regime. Once their mode is stabilized, these structures rotate in the E x B direction with a constant rotation frequency in the hundreds of kHz range. A phenomenological model of the phenomenon is developed, in the form of a system of nonlinear coupled partial differential equations. The system is solved analytically in a frame co-moving with the structure, and its solution gives the neutral density and the plasma density once the electron density shape is imposed. From the balance of the mechanisms of ionization, electron loss and constant neutral refilling, a steady state configuration in the rotating frame is achieved for the electron and neutral densities. Therefore, the spoke experimentally observed can be sustained simply by the combination of this highly reduced number of phenomena. Finally, a study of the sensitivity of neutral and plasma densities to the physical parameters is also given. △ Less

Submitted 19 August, 2013; v1 submitted 23 May, 2013; originally announced May 2013.

Journal ref: S Gallian et al 2013 Plasma Sources Sci. Technol. 22 055012

Simulation benchmarks for low-pressure plasmas: capacitive discharges

Authors: M. M. Turner, A. Derzsi, Z. Donko, D. Eremin, S. J. Kelly, T. Lafleur, T. Mussenbrock

Abstract: Benchmarking is generally accepted as an important element in demonstrating the correctness of computer simulations. In the modern sense, a benchmark is a computer simulation result that has evidence of correctness, is accompanied by estimates of relevant errors, and which can thus be used as a basis for judging the accuracy and efficiency of other codes. In this paper, we present four benchmark c… ▽ More Benchmarking is generally accepted as an important element in demonstrating the correctness of computer simulations. In the modern sense, a benchmark is a computer simulation result that has evidence of correctness, is accompanied by estimates of relevant errors, and which can thus be used as a basis for judging the accuracy and efficiency of other codes. In this paper, we present four benchmark cases related to capacitively coupled discharges. These benchmarks prescribe all relevant physical and numerical parameters. We have simulated the benchmark conditions using five independently developed particle-in-cell codes. We show that the results of these simulations are statistically indistinguishable, within bounds of uncertainty that we define. We therefore claim that the results of these simulations represent strong benchmarks, that can be used as a basis for evaluating the accuracy of other codes. These other codes could include other approaches than particle-in-cell simulations, where benchmarking could examine not just implementation accuracy and efficiency, but also the fidelity of different physical models, such as moment or hybrid models. We discuss an example of this kind in an appendix. Of course, the methodology that we have developed can also be readily extended to a suite of benchmarks with coverage of a wider range of physical and chemical phenomena. △ Less

Submitted 28 November, 2012; v1 submitted 22 November, 2012; originally announced November 2012.

Active plasma resonance spectroscopy: A functional analytic description

Authors: Martin Lapke, Jens Oberrath, Thomas Mussenbrock, Ralf Peter Brinkmann

Abstract: The term "Active Plasma Resonance Spectroscopy" refers to a class of diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. The basic idea dates back to the early days of discharge physics: An signal in the GHz range is coupled to the plasma via an electrical probe; the spectral response is recorded, and then evaluated with a mathematical model to obtai… ▽ More The term "Active Plasma Resonance Spectroscopy" refers to a class of diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. The basic idea dates back to the early days of discharge physics: An signal in the GHz range is coupled to the plasma via an electrical probe; the spectral response is recorded, and then evaluated with a mathematical model to obtain information on the electron density and other plasma parameters. In recent years, the concept has found renewed interest as a basis of industry compatible plasma diagnostics. This paper analyzes the diagnostics technique in terms of a general description based on functional analytic (or Hilbert Space) methods which hold for arbitrary probe geometries. It is shown that the response function of the plasma-probe system can be expressed as a matrix element of the resolvent of an appropriately defined dynamical operator. A specialization of the formalism for a symmetric probe desing is given, as well as an interpreation in terms of a lumped circuit model consisting of series resonators. We present ideas for an optimized probe design based on geometric and electrical symmetry. △ Less

Submitted 5 March, 2013; v1 submitted 20 November, 2012; originally announced November 2012.

Journal ref: Plasma Sources Sci. Technol. 22 (2013) 025005

Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas

Authors: T. Hemke, D. Eremin, T. Mussenbrock, A. Derzsi, Z. Donkó, K. Dittmann, J. Meichsner, J. Schulze

Abstract: Electron heating and ionization dynamics in capacitively coupled radio frequency (RF) atmospheric pressure microplasmas operated in helium are investigated by Particle in Cell simulations and semi-analytical modeling. A strong heating of electrons and ionization in the plasma bulk due to high bulk electric fields are observed at distinct times within the RF period. Based on the model the electric… ▽ More Electron heating and ionization dynamics in capacitively coupled radio frequency (RF) atmospheric pressure microplasmas operated in helium are investigated by Particle in Cell simulations and semi-analytical modeling. A strong heating of electrons and ionization in the plasma bulk due to high bulk electric fields are observed at distinct times within the RF period. Based on the model the electric field is identified to be a drift field caused by a low electrical conductivity due to the high electron-neutral collision frequency at atmospheric pressure. Thus, the ionization is mainly caused by ohmic heating in this "Omega-mode". The phase of strongest bulk electric field and ionization is affected by the driving voltage amplitude. At high amplitudes, the plasma density is high, so that the sheath impedance is comparable to the bulk resistance. Thus, voltage and current are about 45° out of phase and maximum ionization is observed during sheath expansion with local maxima at the sheath edges. At low driving voltages, the plasma density is low and the discharge becomes more resistive resulting in a smaller phase shift of about 4°. Thus, maximum ionization occurs later within the RF period with a maximum in the discharge center. Significant analogies to electronegative low pressure macroscopic discharges operated in the Drift-Ambipolar mode are found, where similar mechanisms induced by a high electronegativity instead of a high collision frequency have been identified. △ Less

Submitted 31 May, 2013; v1 submitted 31 August, 2012; originally announced August 2012.

Journal ref: Plasma Sources Sci. Technol. 22 015012

Simulations of electromagnetic effects in high frequency capacitively coupled discharges using the Darwin approximation

Authors: Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

Abstract: The Darwin approximation is investigated for its possible use in simulation of electromagnetic effects in large size, high frequency capacitively coupled discharges. The approximation is utilized within the framework of two different fluid models which are applied to typical cases showing pronounced standing wave and skin effects. With the first model it is demonstrated that Darwin approximation i… ▽ More The Darwin approximation is investigated for its possible use in simulation of electromagnetic effects in large size, high frequency capacitively coupled discharges. The approximation is utilized within the framework of two different fluid models which are applied to typical cases showing pronounced standing wave and skin effects. With the first model it is demonstrated that Darwin approximation is valid for treatment of such effects in the range of parameters under consideration. The second approach, a reduced nonlinear Darwin approximation-based model, shows that the electromagnetic phenomena persist in a more realistic setting. The Darwin approximation offers a simple and efficient way of carrying out electromagnetic simulations as it removes the Courant condition plaguing explicit electromagnetic algorithms and can be implemented as a straightforward modification of electrostatic algorithms. The algorithm described here avoids iterative schemes needed for the divergence cleaning and represents a fast and efficient solver, which can be used in fluid and kinetic models for self-consistent description of technical plasmas exhibiting certain electromagnetic activity. △ Less

Submitted 9 November, 2012; v1 submitted 17 August, 2012; originally announced August 2012.

Ion energy distribution functions behind the sheaths of magnetized and non magnetized radio frequency discharges

Authors: Jan Trieschmann, Mohammed Shihab, Daniel Szeremley, Abd Elfattah Elgendy, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

Abstract: The effect of a magnetic field on the characteristics of capacitively coupled radio frequency discharges is investigated and found to be substantial. A one-dimensional particle-in-cell simulation shows that geometrically symmetric discharges can be asymmetrized by applying a spatially inhomogeneous magnetic field. This effect is similar to the recently discovered electrical asymmetry effect. Both… ▽ More The effect of a magnetic field on the characteristics of capacitively coupled radio frequency discharges is investigated and found to be substantial. A one-dimensional particle-in-cell simulation shows that geometrically symmetric discharges can be asymmetrized by applying a spatially inhomogeneous magnetic field. This effect is similar to the recently discovered electrical asymmetry effect. Both effects act independently, they can work in the same direction or compensate each other. Also the ion energy distribution functions at the electrodes are strongly affected by the magnetic field, although only indirectly. The field influences not the dynamics of the sheath itself but rather its operating conditions, i.e., the ion flux through it and voltage drop across it. To support this interpretation, the particle-in-cell results are compared with the outcome of the recently proposed ensemble-in-spacetime algorithm. Although that scheme resolves only the sheath and neglects magnetization, it is able to reproduce the ion energy distribution functions with very good accuracy, regardless of whether the discharge is magnetized or not. △ Less

Submitted 18 March, 2014; v1 submitted 10 August, 2012; originally announced August 2012.

Journal ref: Journal of Physics D: Applied Physics 46 (2013) 084016

Modeling and simulation of ion energy distribution functions in technological plasmas

Authors: Thomas Mussenbrock

Abstract: The highly advanced treatment of surfaces as etching and deposition is mainly enabled by the extraordinary properties of technological plasmas. The primary factors that influence these processes are the flux and the energy of various species, particularly ions, that im**e the substrate surface. These features can be theoretically described using the ion energy distribution function (IEDF). The a… ▽ More The highly advanced treatment of surfaces as etching and deposition is mainly enabled by the extraordinary properties of technological plasmas. The primary factors that influence these processes are the flux and the energy of various species, particularly ions, that im**e the substrate surface. These features can be theoretically described using the ion energy distribution function (IEDF). The article is intended to summarize the fundamental concepts of modeling and simulation of IEDFs from simplified models to self-consistent plasma simulations. Finally, concepts for controlling the IEDF are discussed. △ Less

Submitted 20 September, 2011; originally announced September 2011.

Comments: Invited paper based on an invited talk given by the author at the 15th Plasma Technology Conference (PT15) held in Stuttgart, Germany, 2011

Journal ref: T. Mussenbrock, Contributions to Plasma Physics 52, 571 (2012)

Spatial dynamics of helium metastables in sheath or bulk dominated rf micro-plasma jets

Authors: B Niermann, T Hemke, N Y Babaeva, M Böke, M J Kushner, T Mussenbrock, J Winter

Abstract: Space resolved concentrations of helium He metastable atoms in an atmospheric pressure radio-frequency micro-plasma jet were measured using tunable diode laser absorption spectroscopy. The spatial profile of metastable atoms in the volume between the electrodes was deduced for various electrode gap distances. Density profiles reveal the sheath structure and reflect the plasma excitation distributi… ▽ More Space resolved concentrations of helium He metastable atoms in an atmospheric pressure radio-frequency micro-plasma jet were measured using tunable diode laser absorption spectroscopy. The spatial profile of metastable atoms in the volume between the electrodes was deduced for various electrode gap distances. Density profiles reveal the sheath structure and reflect the plasma excitation distribution, as well as the dominance of the alpha-mode discharge. Gap width variations show the transition from a normal glow plasma to a pure sheath discharge. In order to analyze and verify the experimentally observed profiles of the metastable atoms a 2-dimensional simulation model was set up. Applying an appropriate He/N2/O2 chemistry model the correlation between the metastable profiles and the underlying excitation mechanisms was obtained. △ Less

Submitted 9 September, 2011; v1 submitted 30 May, 2011; originally announced May 2011.

Journal ref: B. Niermann et al., Journal of Physics D: Applied Physics 44, 485204 (2011)

Numerical study of secondary electron emission in a coaxial radio-frequency driven plasma jet at atmospheric pressure

Authors: Torben Hemke, Jan Trieschmann, Alexander Wollny, Ralf Peter Brinkmann, Thomas Mussenbrock

Abstract: In this work we investigate a numerical model of a coaxial RF-driven plasma jet operated at atmospheric pressure. Due to the cylindrical symmetry an adequate 2-D representation of the otherwise 3-dimensional structure is used. A helium-oxygen chemistry reaction scheme is applied. We study the effect of secondary electrons emitted at the inner electrode as well as the inserted dielectric tube and d… ▽ More In this work we investigate a numerical model of a coaxial RF-driven plasma jet operated at atmospheric pressure. Due to the cylindrical symmetry an adequate 2-D representation of the otherwise 3-dimensional structure is used. A helium-oxygen chemistry reaction scheme is applied. We study the effect of secondary electrons emitted at the inner electrode as well as the inserted dielectric tube and discuss their impact on the discharge behavior. We conclude that a proper choice of materials can improve the desired mode of operation of such plasma jets in terms of materials and surface processing. △ Less

Submitted 23 May, 2011; originally announced May 2011.

Self-pulsing of a micro thin cathode discharge

Authors: Alexander Wollny, Markus Gebhardt, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

Abstract: Microplasmas operated at atmospheric pressure show a number of peculiar dynamic phenomena. One of these phenomena is self-pulsing, which is characterized by intrinsic pulsing behavior of a DC driven plasma discharge. This work focuses on the numerical simulation of self-pulsing in a micro thin cathode discharge operated in atmospheric pressure argon. By means of a hybrid plasma model we show self-… ▽ More Microplasmas operated at atmospheric pressure show a number of peculiar dynamic phenomena. One of these phenomena is self-pulsing, which is characterized by intrinsic pulsing behavior of a DC driven plasma discharge. This work focuses on the numerical simulation of self-pulsing in a micro thin cathode discharge operated in atmospheric pressure argon. By means of a hybrid plasma model we show self-pulsing of the discharge in the expected MHz frequency range and described its actual origin. △ Less

Submitted 21 September, 2011; v1 submitted 2 May, 2011; originally announced May 2011.

Ionization wave propagation on a micro cavity plasma array

Authors: Alexander Wollny, Torben Hemke, Markus Gebhardt, Ralf Peter Brinkmann, Henrik Boettner, Joerg Winter, Volker Schulz-von der Gathen, Zhongmin Xiong, Mark J. Kushner, Thomas Mussenbrock

Abstract: Microcavity plasma arrays of inverse pyramidal cavities have been fabricated in p-Si wafers. Each cavity acts as a microscopic dielectric barrier discharge. Operated at atmospheric pressure in argon and excited with high voltage at about 10 kHz, each cavity develops a localized microplasma. Experiments have shown a strong interaction of individual cavities, leading to the propagation of wave-like… ▽ More Microcavity plasma arrays of inverse pyramidal cavities have been fabricated in p-Si wafers. Each cavity acts as a microscopic dielectric barrier discharge. Operated at atmospheric pressure in argon and excited with high voltage at about 10 kHz, each cavity develops a localized microplasma. Experiments have shown a strong interaction of individual cavities, leading to the propagation of wave-like optical emission structures along the surface of the array. This phenomenon is numerically investigated using computer simulation. The observed ionization wave propagates with a speed of about 5 km/s, which agrees well the experimental findings. It is found that the wave propagation is due to sequential contributions of a drift of electrons followed by drift of ions between cavities seeded by photoemission of electrons by the plasma in adjacent cavities. △ Less

Submitted 23 August, 2011; v1 submitted 29 April, 2011; originally announced April 2011.

Journal ref: A. Wollny et al., Applied Physics Letters 99, 141504 (2011)

Understanding Microplasmas

Authors: J. Winter, J. Benedikt, M. Böke, D. Ellerweg, T. Hemke, N. Knake, T. Mussenbrock, B. Niermann, D. Schröder, V. Schulz-von der Gathen, A. von Keudell

Abstract: Microplasmas are operated around atmospheric pressure exhibiting pronounced non-equilibrium characteristics, i.e. they possess energetic electrons while ions and neutrals remain cold. They have gained significant interest due to their enormous application potential e.g. in the biomedical, surface modification and light source areas, just to name a few. Many different configurations are in use. The… ▽ More Microplasmas are operated around atmospheric pressure exhibiting pronounced non-equilibrium characteristics, i.e. they possess energetic electrons while ions and neutrals remain cold. They have gained significant interest due to their enormous application potential e.g. in the biomedical, surface modification and light source areas, just to name a few. Many different configurations are in use. Their understanding and quantification is mandatory for further progress in applications. We report on recent progress in the diagnostics and simulation of the entire microplasma system from gas introduction, via the plasma discharge up to the samples at the example of a plasma jet operated in He/O2 in an ambient air environment. △ Less

Submitted 7 July, 2011; v1 submitted 28 April, 2011; originally announced April 2011.

Comments: submitted to Plasma Chemisty and Plasma Processing International Symposium on Plasma Chemistry 20, Philadelphia, Invited paper (plenary talk)

Fine-sorting One-dimensional Particle-In-Cell Algorithm with Monte-Carlo Collisions on a Graphics Processing Unit

Authors: Philipp Mertmann, Denis Eremin, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz

Abstract: Particle-in-cell (PIC) simulations with Monte-Carlo collisions are used in plasma science to explore a variety of kinetic effects. One major problem is the long run-time of such simulations. Even on modern computer systems, PIC codes take a considerable amount of time for convergence. Most of the computations can be massively parallelized, since particles behave independently of each other within… ▽ More Particle-in-cell (PIC) simulations with Monte-Carlo collisions are used in plasma science to explore a variety of kinetic effects. One major problem is the long run-time of such simulations. Even on modern computer systems, PIC codes take a considerable amount of time for convergence. Most of the computations can be massively parallelized, since particles behave independently of each other within one time step. Current graphics processing units (GPUs) offer an attractive means for execution of the parallelized code. In this contribution we show a one-dimensional PIC code running on Nvidia GPUs using the CUDA environment. A distinctive feature of the code is that size of the cells that the code uses to sort the particles with respect to their coordinates is comparable to size of the grid cells used for discretization of the electric field. Hence, we call the corresponding algorithm "fine-sorting". Implementation details and optimization of the code are discussed and the speed-up compared to classical CPU approaches is computed. △ Less

Submitted 20 April, 2011; originally announced April 2011.

Journal ref: P. Mertmann et al., Computer Physics Communications 182, 2161 (2011)

Spatially resolved simulation of a radio frequency driven micro atmospheric pressure plasma jet and its effluent

Authors: Torben Hemke, Alexander Wollny, Markus Gebhardt, Ralf Peter Brinkmann, Thomas Mussenbrock

Abstract: Radio frequency driven plasma jets are frequently employed as efficient plasma sources for surface modification and other processes at atmospheric pressure. The radio-frequency driven micro atmospheric pressure plasma jet ($μ$APPJ) is a particular variant of that concept whose geometry allows direct optical access. In this work, the characteristics of the $μ$APPJ operated with a helium-oxygen mixt… ▽ More Radio frequency driven plasma jets are frequently employed as efficient plasma sources for surface modification and other processes at atmospheric pressure. The radio-frequency driven micro atmospheric pressure plasma jet ($μ$APPJ) is a particular variant of that concept whose geometry allows direct optical access. In this work, the characteristics of the $μ$APPJ operated with a helium-oxygen mixture and its interaction with a helium environment are studied by numerical simulation. The density and temperature of the electrons, as well as the concentration of all reactive species are studied both in the jet itself and in its effluent. It is found that the effluent is essentially free of charge carriers but contains a substantial amount of activated oxygen (O, O$_3$ and O$_2(^1Δ)$). The simulation results are verified by comparison with experimental data. △ Less

Submitted 23 May, 2011; v1 submitted 17 April, 2011; originally announced April 2011.

Journal ref: T. Hemke et al., Journal of Physics D: Applied Physics 44, 285206 (2011)