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High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates
Authors:
Yi Zou,
Danning Zhang,
Hongtao Lin,
Lan Li,
Loise Moreel,
Jie Zhou,
Qingyang Du,
Okechukwu Ogbuu,
Sylvain Danto,
J. David Musgraves,
Kathleen Richardson,
Kevin D. Dobson,
Robert Birkmire,
Juejun Hu
Abstract:
This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss (1.6 dB/cm), sub-micron single-mode waveguides with a smooth surf…
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This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss (1.6 dB/cm), sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass micro-ring resonators are fabricated by thermal nanoimprint. The devices exhibit an ultra-high quality-factor of 400,000 near 1550 nm wavelength, which represents the highest value reported in chalcogenide glass micro-ring resonators. Furthermore, sub-micron nanoimprint of chalcogenide glass films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.
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Submitted 13 August, 2013;
originally announced August 2013.
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3-D Integrated Flexible Glass Photonics
Authors:
Lan Li,
Hongtao Lin,
Shutao Qiao,
Yi Zou,
Sylvain Danto,
Kathleen Richardson,
J. David Musgraves,
Nanshu Lu,
Juejun Hu
Abstract:
Photonic integration on plastic substrates enables emerging applications ranging from flexible interconnects to conformal sensors on biological tissues. Such devices are traditionally fabricated using pattern transfer, which is complicated and has limited integration capacity. Here we pioneered a monolithic approach to realize flexible, high-index-contrast glass photonics with significantly improv…
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Photonic integration on plastic substrates enables emerging applications ranging from flexible interconnects to conformal sensors on biological tissues. Such devices are traditionally fabricated using pattern transfer, which is complicated and has limited integration capacity. Here we pioneered a monolithic approach to realize flexible, high-index-contrast glass photonics with significantly improved processing throughput and yield. Noting that the conventional multilayer bending theory fails when laminates have large elastic mismatch, we derived a mechanics theory accounting for multiple neutral axes in one laminated structure to accurately predict its strain-optical coupling behavior. Through combining monolithic fabrication and local neutral axis designs, we fabricated devices that boast record optical performance (Q=460,000) and excellent mechanical flexibility enabling repeated bending down to sub-millimeter radius without measurable performance degradation, both of which represent major improvements over state-of-the-art. Further, we demonstrate that our technology offers a facile fabrication route for 3-D high-index-contrast photonics difficult to process using traditional methods.
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Submitted 26 July, 2013; v1 submitted 22 July, 2013;
originally announced July 2013.
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Demonstration of mid-infrared waveguide photonic crystal cavities
Authors:
Hongtao Lin,
Lan Li,
Fei Deng,
Chaoying Ni,
Sylvain Danto,
J. David Musgraves,
Kathleen Richardson,
Juejun Hu
Abstract:
We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass on CaF2 substrates by combing photolithographic patterning and focus ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 μm wavelength, and a loaded quality…
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We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass on CaF2 substrates by combing photolithographic patterning and focus ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 μm wavelength, and a loaded quality factor of ~ 2,000 was measured near the critical coupling regime.
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Submitted 20 May, 2013;
originally announced May 2013.
