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Fabrication of three-dimensional high-aspect-ratio structures by oblique-incidence Talbot lithography
Authors:
Ryu Ezaki,
Naoki Ura,
Tsutomu Uenohara,
Yasuhiro Mizutani,
Yoshihiko Makiura,
Yasuhiro Takaya
Abstract:
Develo** a suitable production method for three-dimensional periodic nanostructures with high aspect ratios is a subject of growing interest. For mass production, Talbot lithography offers many advantages. However, one disadvantage is that the minimum period of the light intensity distribution is limited by the period of the diffraction grating used. To enhance the aspect ratio of fabricated nan…
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Develo** a suitable production method for three-dimensional periodic nanostructures with high aspect ratios is a subject of growing interest. For mass production, Talbot lithography offers many advantages. However, one disadvantage is that the minimum period of the light intensity distribution is limited by the period of the diffraction grating used. To enhance the aspect ratio of fabricated nanostructures, in the present study we focus on multi-wave interference between diffracted waves created using the Talbot effect. We propose a unique exposure method to generate multi-wave interference between adjacent diffraction orders by controlling the angle of incidence of an ultraviolet (UV) light source. Using finite-difference time-domain simulations, we obtain fringe patterns with a sub-wavelength period using a one-dimensional periodic grating mask. Moreover, we demonstrate the practical application of this approach by using UV lithography to fabricate sub-wavelength periodic structures with an aspect ratio of 30 in millimeter-scale areas, indicating its suitability for mass production.
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Submitted 23 September, 2020;
originally announced September 2020.
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Refractive index sensing with temperature compensation by a multimode-interference fiber-based optical frequency comb sensing cavity
Authors:
Ryo Oe,
Takeo Minamikawa,
Shuji Taue,
Hidenori Koresawa,
Takahiko Mizuno,
Masatomo Yamagiwa,
Yasuhiro Mizutani,
Hirotsugu Yamamoto,
Tetsuo Iwata,
Takeshi Yasui
Abstract:
We proposed a refractive index (RI) sensing method with temperature compensation by using an optical frequency comb (OFC) sensing cavity employing a multimode-interference (MMI) fiber, namely, the MMI-OFC sensing cavity. The MMI-OFC sensing cavity enables simultaneous measurement of material-dependent RI and sample temperature by decoding from the comb spacing frequency shift and the wavelength sh…
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We proposed a refractive index (RI) sensing method with temperature compensation by using an optical frequency comb (OFC) sensing cavity employing a multimode-interference (MMI) fiber, namely, the MMI-OFC sensing cavity. The MMI-OFC sensing cavity enables simultaneous measurement of material-dependent RI and sample temperature by decoding from the comb spacing frequency shift and the wavelength shift of the OFC. We realized the simultaneous and continuous measurement of RI-related concentration of a liquid sample and its temperature with precisions of 1.6*10^-4 RIU and 0.08 degree. The proposed method would be a useful means for the various applications based on RI sensing.
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Submitted 13 May, 2019;
originally announced May 2019.
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Lock-in-detection dual-comb spectroscopy
Authors:
Hidenori Koresawa,
Kyuki Shibuya,
Takeo Minamikawa,
Akifumi Asahara,
Ryo Oe,
Takahiko Mizuno,
Masatomo Yamagiwa,
Yasuhiro Mizutani,
Tetsuo Iwata,
Hirotsugu Yamamoto,
Kaoru Minoshima,
Takeshi Yasui
Abstract:
Dual-comb spectroscopy (DCS) is useful for gas spectroscopy due to high potential of optical frequency comb (OFC). However, fast Fourier transform (FFT) calculation of a huge amount of temporal data spends significantly longer time than the acquisition time of an interferogram. In this article, we demonstrate frequency-domain DCS by a combination of DCS with lock-in detection, namely LID-DCS. LID-…
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Dual-comb spectroscopy (DCS) is useful for gas spectroscopy due to high potential of optical frequency comb (OFC). However, fast Fourier transform (FFT) calculation of a huge amount of temporal data spends significantly longer time than the acquisition time of an interferogram. In this article, we demonstrate frequency-domain DCS by a combination of DCS with lock-in detection, namely LID-DCS. LID-DCS directly extracts an arbitrary OFC mode from a vast number of OFC modes without the need for FFT calculation. Usefulness of LID-DCS is demonstrated in rapid monitoring of transient signal change and spectroscopy of hydrogen cyanide gas.
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Submitted 6 April, 2019;
originally announced April 2019.
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Multicascade-linked synthetic wavelength digital holography using an optical-comb-referenced frequency synthesizer
Authors:
Masatomo Yamagiwa,
Takeo Minamikawa,
Clément Trovato,
Takayuki Ogawa,
Dahi Ghareab Abdelsalam Ibrahim,
Yusuke Kawahito,
Ryo Oe,
Kyuki Shibuya,
Takahiko Mizuno,
Emmanuel Abraham,
Yasuhiro Mizutani,
Tetsuo Iwata Hirotsugu Yamamoto,
Kaoru Minoshima,
Takeshi Yasui
Abstract:
Digital holography (DH) is a promising method for non-contact surface topography because the reconstructed phase image can visualize the nanometer unevenness in a sample. However, the axial range of this method is limited to the range of the optical wavelength due to the phase wrap** ambiguity. Although the use of two different wavelengths of light and the resulting synthetic wavelength, i.e., s…
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Digital holography (DH) is a promising method for non-contact surface topography because the reconstructed phase image can visualize the nanometer unevenness in a sample. However, the axial range of this method is limited to the range of the optical wavelength due to the phase wrap** ambiguity. Although the use of two different wavelengths of light and the resulting synthetic wavelength, i.e., synthetic wavelength DH, can expand the axial range up to a few tens of microns, this method is still insufficient for practical applications. In this article, a tunable external cavity laser diode phase-locked to an optical frequency comb, namely, an optical-comb-referenced frequency synthesizer, is effectively used for multiple synthetic wavelengths within the range of 32 um to 1.20 m. A multiple cascade link of the phase images among an optical wavelength (= 1.520 um) and 5 different synthetic wavelengths (= 32.39 um, 99.98 um, 400.0 um, 1003 um, and 4021 um) enables the shape measurement of a reflective millimeter-sized stepped surface with the axial resolution of 34 nm. The axial dynamic range, defined as the ratio of the maximum axial range (= 0.60 m) to the axial resolution (= 34 nm), achieves 1.7*10^8, which is much larger than that of previous synthetic wavelength DH. Such a wide axial dynamic range capability will further expand the application field of DH for large objects with meter dimensions.
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Submitted 27 July, 2018;
originally announced August 2018.
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Refractive-index-sensing radio-frequency comb with intracavity multi-mode interference fibre sensor
Authors:
Roy Oe,
Shuji Taue,
Takeo Minamikawa,
Kosuke Nagai,
Yasuhiro Mizutani,
Tetsuo Iwata,
Hirotsugu Yamamoto,
Hideki Fukano,
Yoshiaki Nakajima,
Kaoru Minoshima,
Takeshi Yasui
Abstract:
Optical frequency combs have attracted attention as optical frequency rulers due to their tooth-like discrete spectra together with their inherent mode-locking nature and phase-locking control to a frequency standard. Based on this concept, their applications until now have been demonstrated in the fields of optical frequency metrology and optical distance metrology. However, if the utility of opt…
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Optical frequency combs have attracted attention as optical frequency rulers due to their tooth-like discrete spectra together with their inherent mode-locking nature and phase-locking control to a frequency standard. Based on this concept, their applications until now have been demonstrated in the fields of optical frequency metrology and optical distance metrology. However, if the utility of optical combs can be further expanded beyond their optical-frequency-ruler-based application by exploiting new aspects of optical combs, this will lead to new developments in optical metrology and instrumentation. Here, we report a fibre sensing application of optical combs based on a coherent frequency link between the optical and radio-frequency regions, enabling high-precision refractive index measurement of a liquid sample based on frequency measurement in radio-frequency region. Our technique encodes a refractive index change of a liquid sample into a radio-frequency comb by a combination of an intracavity multi-mode-interference fibre sensor and wavelength dispersion of a cavity fibre. Then, the change in refractive index is read out by measuring the repetition frequency of the radio-frequency comb with a frequency counter and a frequency standard. Use of an optical comb as a photonic radio-frequency converter will lead to the development of new applications in high-precision fibre sensing with the help of functional fibre sensors and precise radio-frequency measurement.
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Submitted 12 February, 2018;
originally announced February 2018.
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Dual-optical-comb spectroscopic ellipsometry
Authors:
Takeo Minamikawa,
Yi-Da Hsieh,
Kyuki Shibuya,
Eiji Hase,
Yoshiki Kaneoka,
Sho Okubo,
Hajime Inaba,
Yasuhiro Mizutani,
Hirotsugu Yamamoto,
Tetsuo Iwata,
Takeshi Yasui
Abstract:
Spectroscopic ellipsometry is a means to investigate optical and dielectric material responses. Conventional spectroscopic ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a spectr…
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Spectroscopic ellipsometry is a means to investigate optical and dielectric material responses. Conventional spectroscopic ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb spectroscopic ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-swee** acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.
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Submitted 30 May, 2017;
originally announced June 2017.
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Scan-less confocal phase microscopy based on dual comb spectroscopy of two-dimensional-image-encoding optical frequency comb
Authors:
Eiji Hase,
Takeo Minamikawa,
Shuji Miyamoto,
Ryuji Ichikawa,
Yi-Da Hsieh,
Kyuki Shibuya,
Yoshiaki Nakajima,
Akifumi Asahara,
Kaoru Minoshima,
Yasuhiro Mizutani,
Tetsuo Iwata,
Hirotsugu Yamamoto,
Takeshi Yasui
Abstract:
Confocal imaging and phase imaging are powerful tools in life science research and industrial inspection. To coherently link the two techniques with different depth resolutions, we introduce an optical frequency comb (OFC) to microscopy. Two-dimensional (2D) image pixels of a sample were encoded onto OFC modes via 2D spectral encoding, in which OFC acted as an optical carrier with a vast number of…
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Confocal imaging and phase imaging are powerful tools in life science research and industrial inspection. To coherently link the two techniques with different depth resolutions, we introduce an optical frequency comb (OFC) to microscopy. Two-dimensional (2D) image pixels of a sample were encoded onto OFC modes via 2D spectral encoding, in which OFC acted as an optical carrier with a vast number of discrete frequency channels. Then, a scan-less full-field confocal image with a depth resolution of 62.4 um was decoded from a mode-resolved OFC amplitude spectrum obtained by dual-comb spectroscopy. Furthermore, a phase image with a depth resolution of 13.7 nm was decoded from a mode-resolved OFC phase spectrum under the above confocality. The phase wrap** ambiguity can be removed by the match between the confocal depth resolution and the phase wrap** period. The proposed hybrid microscopy approach will be a powerful tool for a variety of applications.
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Submitted 19 May, 2017;
originally announced May 2017.
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Scan-less hyperspectral dual-comb single-pixel-imaging in both amplitude and phase
Authors:
Kyuki Shibuya,
Takeo Minamikawa,
Yasuhiro Mizutani,
Hirotsugu Yamamoto,
Kaoru Minoshima,
Takeshi Yasui,
Tetsuo Iwata
Abstract:
We have developed a hyperspectral imaging scheme that involves a combination of dual-comb spectroscopy and Hadamard-transform-based single-pixel imaging. The scheme enables us to obtain 12,000 hyperspectral images of amplitude and phase at a spatial resolution of 46 um without mechanical scanning. The spectral resolution is 20 MHz, as determined by the linewidth of a single comb mode, and the spec…
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We have developed a hyperspectral imaging scheme that involves a combination of dual-comb spectroscopy and Hadamard-transform-based single-pixel imaging. The scheme enables us to obtain 12,000 hyperspectral images of amplitude and phase at a spatial resolution of 46 um without mechanical scanning. The spectral resolution is 20 MHz, as determined by the linewidth of a single comb mode, and the spectral interval is 100 MHz over a spectral range of 1.2 THz centred at 191.5 THz. As an initial demonstration of our scheme, we obtained spectroscopic images of a standard test chart through an etalon plate. The thickness of an absorptive chromium-coated layer on a float-glass substrate was determined to be 70 nm from the hyperspectral phase images in the near-infrared wavelength region.
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Submitted 5 May, 2017;
originally announced May 2017.
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Real-time absolute frequency measurement of continuous-wave terahertz wave based on dual terahertz combs of photocarriers with different frequency spacings
Authors:
Takeshi Yasui,
Kenta Hayashi,
Ryuji Ichikawa,
Harsono Cahyadi,
Yi-Da Hsieh,
Yasuhiro Mizutani,
Hirotsugu Yamamoto,
Tetsuo Iwata,
Hajime Inaba,
Kaoru Minoshima
Abstract:
Real-time measurement of the absolute frequency of continuous-wave terahertz (CW-THz) waves is required for characterization and frequency calibration of practical CW-THz sources. We proposed a method for real-time monitoring of the absolute frequency of CW-THz waves involving temporally parallel, i.e., simultaneous, measurement of two pairs of beat frequencies and laser repetition frequencies bas…
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Real-time measurement of the absolute frequency of continuous-wave terahertz (CW-THz) waves is required for characterization and frequency calibration of practical CW-THz sources. We proposed a method for real-time monitoring of the absolute frequency of CW-THz waves involving temporally parallel, i.e., simultaneous, measurement of two pairs of beat frequencies and laser repetition frequencies based on dual THz combs of photocarriers (PC-THz combs) with different frequency spacings. To demonstrate the method, THz-comb-referenced spectrum analyzers were constructed with a dual configuration based on dual femtosecond lasers. Regardless of the presence or absence of frequency control in the PC-THz combs, a frequency precision of 10-11 was achieved at a measurement rate of 100 Hz. Furthermore, large fluctuation of the CW-THz frequencies, crossing several modes of the PC-THz combs, was correctly monitored in real time. The proposed method will be a powerful tool for the research and development of practical CW-THz sources, and other applications.
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Submitted 25 January, 2015;
originally announced January 2015.
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Adaptive sampling dual terahertz comb spectroscopy using free-running dual femtosecond lasers
Authors:
Takeshi Yasui,
Ryuji Ichikawa,
Yi-Da Hsieh,
Kenta Hayashi,
Harsono Cahyadi,
Francis Hindle,
Yoshiyuki Sakaguchi,
Tetsuo Iwata,
Yasuhiro Mizutani,
Hirotsugu Yamamoto,
Kaoru Minoshima,
Hajime Inaba
Abstract:
Dual terahertz (THz) comb spectroscopy is a promising methods for high accuracy, high resolution, and broadband THz spectroscopy because the mode-resolved THz comb spectrum possesses both characteristics of broadband THz radiation and narrow-linewidth continuous-wave THz radiation and all frequency mode of THz comb can be phase-locked to a microwave frequency standard. However, requirement of stab…
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Dual terahertz (THz) comb spectroscopy is a promising methods for high accuracy, high resolution, and broadband THz spectroscopy because the mode-resolved THz comb spectrum possesses both characteristics of broadband THz radiation and narrow-linewidth continuous-wave THz radiation and all frequency mode of THz comb can be phase-locked to a microwave frequency standard. However, requirement of stabilized dual femtosecond lasers has often hindered wide use of this method. In this article, we demonstrated the adaptive sampling, dual THz comb spectroscopy, enabling use of free-running dual femtosecond lasers. To correct the non-linearity of time and frequency scale caused by the laser timing jitter, an adaptive sampling clock is generated by dual THz-comb-referenced spectrum analysers and is used for a timing signal in a data acquisition board. The demonstrated results did not only indicate the implementation of dual THz comb spectroscopy with free-running dual lasers but also implied the superiority of its spectroscopic performance over the dual THz comb spectroscopy with stabilized dual lasers.
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Submitted 11 December, 2014;
originally announced December 2014.
