Showing 1–7 of 7 results for author: McEuen, P L

BLAST: A Wafer-scale Transfer Process for Heterogeneous Integration of Optics and Electronics

Authors: Yanxin Ji, Alejandro J. Cortese, Conrad L. Smart, Alyosha C. Molnar, Paul L. McEuen

Abstract: We present a general transfer method for the heterogeneous integration of different photonic and electronic materials systems and devices onto a single substrate. Called BLAST, for Bond, Lift, Align, and Slide Transfer, the process works at wafer scale and offers precision alignment, high yield, varying topographies, and suitability for subsequent lithographic processing. We demonstrate BLAST's ca… ▽ More We present a general transfer method for the heterogeneous integration of different photonic and electronic materials systems and devices onto a single substrate. Called BLAST, for Bond, Lift, Align, and Slide Transfer, the process works at wafer scale and offers precision alignment, high yield, varying topographies, and suitability for subsequent lithographic processing. We demonstrate BLAST's capabilities by integrating both GaAs and GaN microLEDs with silicon photovoltaics to fabricate optical wireless integrated circuits that up-convert photons from the red to the blue. We also show that BLAST can be applied to a variety of other devices and substrates, including CMOS electronics, vertical cavity surface emitting lasers (VCSELs), and 2D materials. BLAST further enables the modularization of optoelectronic microsystems, where optical devices fabricated on one material substrate can be lithographically integrated with electronic devices on a different substrate in a scalable process. △ Less

Submitted 11 February, 2023; originally announced February 2023.

Bidirectional Self-Folding with Atomic Layer Deposition Nanofilms for Microscale Origami

Authors: Baris Bircan, Marc Z. Miskin, Robert J. Lang, Michael C. Cao, Kyle J. Dorsey, Muhammad G. Salim, Wei Wang, David A. Muller, Paul L. McEuen, Itai Cohen

Abstract: Origami design principles are scale invariant and enable direct miniaturization of origami structures provided the sheets used for folding have equal thickness to length ratios. Recently, seminal steps have been taken to fabricate microscale origami using unidirectionally actuated sheets with nanoscale thickness. Here, we extend the full power of origami-inspired fabrication to nanoscale sheets by… ▽ More Origami design principles are scale invariant and enable direct miniaturization of origami structures provided the sheets used for folding have equal thickness to length ratios. Recently, seminal steps have been taken to fabricate microscale origami using unidirectionally actuated sheets with nanoscale thickness. Here, we extend the full power of origami-inspired fabrication to nanoscale sheets by engineering bidirectional folding with 4 nm thick atomic layer deposition (ALD) SiNx-SiO2 bilayer films. Strain differentials within these bilayers result in bending, producing microscopic radii of curvature. We lithographically pattern these bilayers and localize the bending using rigid panels to fabricate a variety of complex micro-origami devices. Upon release, these devices self-fold according to prescribed patterns. Our approach combines planar semiconductor microfabrication methods with computerized origami design, making it easy to fabricate and deploy such microstructures en masse. These devices represent an important step forward in the fabrication and assembly of deployable micromechanical systems that can interact with and manipulate micro- and nanoscale environments. △ Less

Submitted 18 June, 2020; originally announced June 2020.

Comments: This document is the unedited Author's version of a Submitted Work that was subsequently accepted for publication in Nano Letters, copyright American Chemical Society after peer review. To access the final edited and published work see: https://pubs.acs.org/articlesonrequest/AOR-JJHKJZVTJF4JFWSYZ2NW

Gate-Tunable Graphene Hall Sensors with High Magnetic Field Sensitivity

Authors: Brian T. Schaefer, Lei Wang, Alexander Jarjour, Kenji Watanabe, Takashi Taniguchi, Paul L. McEuen, Katja C. Nowack

Abstract: Solid-state magnetic field sensors are important to both modern electronics and fundamental materials science. Many types of these sensors maintain high sensitivity only in a limited range of temperature and background magnetic field, but Hall-effect sensors are in principle able to operate over a broad range of these conditions. Here, we fabricate and characterize micrometer-scale graphene Hall s… ▽ More Solid-state magnetic field sensors are important to both modern electronics and fundamental materials science. Many types of these sensors maintain high sensitivity only in a limited range of temperature and background magnetic field, but Hall-effect sensors are in principle able to operate over a broad range of these conditions. Here, we fabricate and characterize micrometer-scale graphene Hall sensors demonstrating high magnetic field sensitivity from liquid-helium to room temperature and in background magnetic field up to several Tesla. By tuning the charge carrier density with an electrostatic gate, we optimize the magnetic field sensitivity for different working conditions. From measurements of the Hall coefficient and the Hall voltage noise at 1 kHz, we estimate an optimum magnetic field sensitivity of 80 nT Hz$^{-1/2}$ at 4.2 K, 700 nT Hz$^{-1/2}$ at room temperature, and 3 $μ$T Hz$^{-1/2}$ in 3 T background magnetic field at 4.2 K. Our devices perform competitively with the best existing Hall sensor technologies at room temperature, outperform any Hall sensors reported in the literature at 4.2 K, and demonstrate high sensitivity for the first time in a few Tesla applied magnetic field. △ Less

Submitted 29 December, 2019; originally announced December 2019.

MoS$_{2}$ pixel arrays for real-time photoluminescence imaging of redox molecules

Authors: M. F. Reynolds, M. H. D. Guimaraes, H. Gao, K. Kang, A. J. Cortese, D. C. Ralph, J. Park, P. L. McEuen

Abstract: Measuring the behavior of redox-active molecules in space and time is crucial for better understanding of chemical and biological systems and for the development of new technologies. Optical schemes are non-invasive, scalable and can be applied to many different systems, but usually have a slow response compared to electrical detection methods. Furthermore, many fluorescent molecules for redox det… ▽ More Measuring the behavior of redox-active molecules in space and time is crucial for better understanding of chemical and biological systems and for the development of new technologies. Optical schemes are non-invasive, scalable and can be applied to many different systems, but usually have a slow response compared to electrical detection methods. Furthermore, many fluorescent molecules for redox detection degrade in brightness over long exposure times. Here we show that the photoluminescence of pixel arrays of an atomically thin two-dimensional (2D) material, a monolayer of MoS$_{2}$, can image spatial and temporal changes in redox molecule concentration in real time. Because of the strong dependence of MoS$_{2}$ photoluminescence on do** and sensitivity to surface changes characteristic of 2D materials, changes in the local chemical potential significantly modulate the photoluminescence of MoS$_{2}$, with a sensitivity of 0.9 mV/$\sqrt{Hz}$ on a 5 $μ$m by 5 $μ$m pixel, corresponding to better than parts-per-hundred changes in redox molecule concentration down to nanomolar concentrations at 100 ms frame rates. The real-time imaging of electrochemical potentials with a fast response time provides a new strategy for visualizing chemical reactions and biomolecules with a 2D material screen. △ Less

Submitted 9 August, 2019; originally announced August 2019.

Journal ref: Science Advances 5, eaat9476 (2019)

Synchronization of Micromechanical Oscillators Using Light

Authors: Mian Zhang, Gustavo Wiederhecker, Sasikanth Manipatruni, Arthur Barnard, Paul L. McEuen, Michal Lipson

Abstract: Synchronization, the emergence of spontaneous order in coupled systems, is of fundamental importance in both physical and biological systems. We demonstrate the synchronization of two dissimilar silicon nitride micromechanical oscillators, that are spaced apart by a few hundred nanometers and are coupled through optical radiation field. The tunability of the optical coupling between the oscillator… ▽ More Synchronization, the emergence of spontaneous order in coupled systems, is of fundamental importance in both physical and biological systems. We demonstrate the synchronization of two dissimilar silicon nitride micromechanical oscillators, that are spaced apart by a few hundred nanometers and are coupled through optical radiation field. The tunability of the optical coupling between the oscillators enables one to externally control the dynamics and switch between coupled and individual oscillation states. These results pave a path towards reconfigurable massive synchronized oscillator networks. △ Less

Submitted 4 June, 2012; v1 submitted 15 December, 2011; originally announced December 2011.

Entropic Spectral Broadening in Carbon Nanotube Resonators

Authors: Arthur W. Barnard, Vera Sazonova, Arend M. van der Zande, Paul L. McEuen

Abstract: We simulated the behavior of suspended carbon-nanotube (CNT) resonators over a broad range of temperatures to address the unexplained spectral broadening and frequency shifts seen in experiments. We find that thermal fluctuations induce strong coupling between resonance modes. This effect leads to spectral fluctuations which readily account for the experimentally observed quality factors… ▽ More We simulated the behavior of suspended carbon-nanotube (CNT) resonators over a broad range of temperatures to address the unexplained spectral broadening and frequency shifts seen in experiments. We find that thermal fluctuations induce strong coupling between resonance modes. This effect leads to spectral fluctuations which readily account for the experimentally observed quality factors $Q\sim100$ at $300\ K$. Using a mean field approach to describe entropic fluctuations we analytically calculate $Q$ and frequency shifts in tensioned and buckled CNTs and find excellent agreement with simulations. △ Less

Submitted 7 October, 2011; originally announced October 2011.

Comments: 5 pages, 4 figures

Terahertz imaging and spectroscopy of large-area single-layer graphene

Authors: J. L. Tomaino, A. D. Jameson, J. W. Kevek, M. J. Paul, A. M. van der Zande, R. A. Barton, P. L. McEuen, E. D. Minot, Yun-Shik Lee

Abstract: We demonstrate terahertz (THz) imaging and spectroscopy of a 15x15-mm^2 single-layer graphene film on Si using broadband THz pulses. The THz images clearly map out the THz carrier dynamics of the graphene-on-Si sample, allowing us to measure sheet conductivity with sub-mm resolution without fabricating electrodes. The THz carrier dynamics are dominated by intraband transitions and the THz-induced… ▽ More We demonstrate terahertz (THz) imaging and spectroscopy of a 15x15-mm^2 single-layer graphene film on Si using broadband THz pulses. The THz images clearly map out the THz carrier dynamics of the graphene-on-Si sample, allowing us to measure sheet conductivity with sub-mm resolution without fabricating electrodes. The THz carrier dynamics are dominated by intraband transitions and the THz-induced electron motion is characterized by a flat spectral response. A theoretical analysis based on the Fresnel coefficients for a metallic thin film shows that the local sheet conductivity varies across the sample from σs = 1.7x10^-3 to 2.4x10^-3 Ω^-1 (sheet resistance, ρs = 420 - 590 Ω/sq). △ Less

Submitted 17 January, 2011; v1 submitted 6 January, 2011; originally announced January 2011.

Comments: 6 pages, 5 figures

Journal ref: Optics Express, Vol. 19, Issue 1, pp. 141-146 (2011