Showing 1–1 of 1 results for author: Lowell, E

High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors

Authors: Matthias Imboden, Jackson Chang, Corey Pollock, Evan Lowell, Mehmet Akbulut, Jessica Morrison, Thomas Stark, Thomas G. Bifano, David J. Bishop

Abstract: Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS… ▽ More Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS solutions. △ Less

Submitted 24 May, 2016; v1 submitted 15 December, 2015; originally announced December 2015.

Comments: 37 pages, 20 figures

Journal ref: IEEE Control Systems, vol. 36, no. 5, pp. 48-76, Oct. 2016