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Showing 1–21 of 21 results for author: Koga, M

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  1. arXiv:2404.09920  [pdf, other

    hep-ex astro-ph.HE physics.ins-det

    Combined Pre-Supernova Alert System with Kamland and Super-Kamiokande

    Authors: KamLAND, Super-Kamiokande Collaborations, :, Seisho Abe, Minori Eizuka, Sawako Futagi, Azusa Gando, Yoshihito Gando, Shun Goto, Takahiko Hachiya, Kazumi Hata, Koichi Ichimura, Sei Ieki, Haruo Ikeda, Kunio Inoue, Koji Ishidoshiro, Yuto Kamei, Nanami Kawada, Yasuhiro Kishimoto, Masayuki Koga, Maho Kurasawa, Tadao Mitsui, Haruhiko Miyake, Daisuke Morita, Takeshi Nakahata , et al. (290 additional authors not shown)

    Abstract: Preceding a core-collapse supernova, various processes produce an increasing amount of neutrinos of all flavors characterized by mounting energies from the interior of massive stars. Among them, the electron antineutrinos are potentially detectable by terrestrial neutrino experiments such as KamLAND and Super-Kamiokande via inverse beta decay interactions. Once these pre-supernova neutrinos are ob… ▽ More

    Submitted 1 July, 2024; v1 submitted 15 April, 2024; originally announced April 2024.

    Comments: Resubmitted to ApJ. 22 pages, 16 figures, for more information about the combined pre-supernova alert system, see https://www.lowbg.org/presnalarm/

  2. arXiv:2311.09676  [pdf, other

    hep-ex physics.ins-det

    Search for Charged Excited States of Dark Matter with KamLAND-Zen

    Authors: KamLAND-Zen collaboration, :, S. Abe, M. Eizuka, S. Futagi, A. Gando, Y. Gando, S. Goto, T. Hachiya, K. Hata, K. Hosokawa, K. Ichimura, S. Ieki, H. Ikeda, K. Inoue, K. Ishidoshiro, Y. Kamei, N. Kawada, Y. Kishimoto, M. Koga, M. Kurasawa, T. Mitsui, H. Miyake, D. Morita, T. Nakahata , et al. (44 additional authors not shown)

    Abstract: Particle dark matter could belong to a multiplet that includes an electrically charged state. WIMP dark matter ($χ^{0}$) accompanied by a negatively charged excited state ($χ^{-}$) with a small mass difference (e.g. $<$ 20 MeV) can form a bound-state with a nucleus such as xenon. This bound-state formation is rare and the released energy is $\mathcal{O}(1-10$) MeV depending on the nucleus, making… ▽ More

    Submitted 3 July, 2024; v1 submitted 16 November, 2023; originally announced November 2023.

  3. arXiv:2309.13941  [pdf, other

    physics.ins-det astro-ph.IM

    Radiopurity of NaI(Tl) crystals for PICOLON dark matter experiment

    Authors: K. Kotera, D. Chernyak, H. Ejiri, K. Fushimi, K. Hata, R. Hazama, T. Iida, H. Ikeda, K. Imagawa, K. Inoue, H. Ito, T. Kishimoto, M. Koga, A. Kozlov, K. Nakamura, R. Orito, T. Shima, Y. Takemoto, S. Umehara, Y. Urano, K. Yasuda, S. Yoshida

    Abstract: The dark matter observation claim by the DAMA/LIBRA collaboration has been a long-standing puzzle within the particle physics community. Efforts of other research groups to verify the claim have been insufficient by significant radioactivity of present NaI(Tl) crystals. PICOLON (Pure Inorganic Crystal Observatory for LOw-energy Neut(ra)lino) experiment conducts independent search for Weakly Intera… ▽ More

    Submitted 25 September, 2023; originally announced September 2023.

    Comments: 14pages, 16 figures

  4. arXiv:2301.09307  [pdf, other

    hep-ex nucl-ex physics.ins-det

    Measurement of cosmic-ray muon spallation products in a xenon-loaded liquid scintillator with KamLAND

    Authors: KamLAND-Zen Collaboration, :, S. Abe, S. Asami, M. Eizuka, S. Futagi, A. Gando, Y. Gando, T. Gima, A. Goto, T. Hachiya, K. Hata, K. Hosokawa, K. Ichimura, S. Ieki, H. Ikeda, K. Inoue, K. Ishidoshiro, Y. Kamei, N. Kawada, Y. Kishimoto, M. Koga, M. Kurasawa, T. Mitsui, H. Miyake , et al. (42 additional authors not shown)

    Abstract: Cosmic-ray muons produce various radioisotopes when passing through material. These spallation products can be backgrounds for rare event searches such as in solar neutrino, double-beta decay, and dark matter search experiments. The KamLAND-Zen experiment searches for neutrinoless double-beta decay in 745kg of xenon dissolved in liquid scintillator. The experiment includes dead-time-free electroni… ▽ More

    Submitted 23 January, 2023; originally announced January 2023.

  5. arXiv:2205.14934  [pdf, other

    physics.geo-ph hep-ex

    Abundances of uranium and thorium elements in Earth estimated by geoneutrino spectroscopy

    Authors: S. Abe, S. Asami, M. Eizuka, S. Futagi, A. Gando, Y. Gando, T. Gima, A. Goto, T. Hachiya, K. Hata, K. Hosokawa, K. Ichimura, S. Ieki, H. Ikeda, K. Inoue, K. Ishidoshiro, Y. Kamei, N. Kawada, Y. Kishimoto, M. Koga, M. Kurasawa, N. Maemura, T. Mitsui, H. Miyake, T. Nakahata , et al. (43 additional authors not shown)

    Abstract: The decay of the primordial isotopes $^{238}\mathrm{U}$, $^{235}\mathrm{U}$, $^{232}\mathrm{Th}$, and $^{40}\mathrm{K}$ have contributed to the terrestrial heat budget throughout the Earth's history. Hence the individual abundance of those isotopes are key parameters in reconstructing contemporary Earth model. The geoneutrinos produced by the radioactive decays of uranium and thorium have been obs… ▽ More

    Submitted 13 August, 2022; v1 submitted 30 May, 2022; originally announced May 2022.

    Comments: 13 pages, 2 figures, accepted for publication in Geophysical Research Letters on Aug 4th, 2022

    Journal ref: Geophysical Research Letters, Volume 49, Issue 16, e2022GL099566 (2022)

  6. arXiv:2203.02139  [pdf, other

    hep-ex physics.ins-det

    Search for the Majorana Nature of Neutrinos in the Inverted Mass Ordering Region with KamLAND-Zen

    Authors: KamLAND-Zen Collaboration, :, S. Abe, S. Asami, M. Eizuka, S. Futagi, A. Gando, Y. Gando, T. Gima, A. Goto, T. Hachiya, K. Hata, S. Hayashida, K. Hosokawa, K. Ichimura, S. Ieki, H. Ikeda, K. Inoue, K. Ishidoshiro, Y. Kamei, N. Kawada, Y. Kishimoto, M. Koga, M. Kurasawa, N. Maemura , et al. (50 additional authors not shown)

    Abstract: The KamLAND-Zen experiment has provided stringent constraints on the neutrinoless double-beta ($0νββ$) decay half-life in $^{136}$Xe using a xenon-loaded liquid scintillator. We report an improved search using an upgraded detector with almost double the amount of xenon and an ultralow radioactivity container, corresponding to an exposure of 970 kg yr of $^{136}$Xe. These new data provide valuable… ▽ More

    Submitted 16 February, 2023; v1 submitted 4 March, 2022; originally announced March 2022.

    Comments: 7 pages, 3 figures

    Journal ref: Phys. Rev. Lett. 130, 051801 (2023)

  7. arXiv:2112.10116  [pdf, other

    astro-ph.IM physics.ins-det

    PICOLON dark matter search project

    Authors: K. Fushimi, D. Chernyak, H. Ejiri, K. Hata, R. Hazama, T. Iida, H. Ikeda, K. Imagawa, K. Inoue, H. Ishiura, H. Ito, T. Kishimoto, M. Koga, K. Kotera, A. Kozlov, K. Nakamura, R. Orito, T. Shima, Y. Takemoto, S. Umehara, Y. Urano, Y. Yamamoto, K. Yasuda, S. Yoshida

    Abstract: PICOLON (Pure Inorganic Crystal Observatory for LOw-energy Neutr(al)ino) aims to search for cosmic dark matter by high purity NaI(Tl) scintillator. We developed extremely pure NaI(Tl) crystal by hybrid purification method. The recent result of $^{210}$Pb in our NaI(Tl) is less than 5.7 $μ$Bq/kg. We will report the test experiment in the low-background measurement at Kamioka Underground Laboratory.… ▽ More

    Submitted 19 December, 2021; originally announced December 2021.

    Comments: To be published in the Proceedings of TAUP2021. (Journal of Physics: Conference Series (JPCS),)

  8. arXiv:2106.15235  [pdf, other

    physics.ins-det astro-ph.IM

    Dark matter search with high purity NaI(Tl) scintillator

    Authors: K. Fushimi, Y. Kanemitsu, K. Kotera, D. Chernyak, H. Ejiri, K. Hata, R. Hazama, T. Iida, H. Ikeda, K. Imagawa, K. Inoue, H. Ishiura, H. Ito, T. Kisimoto, M. Koga, A. Kozlov, K. Nakamura, R. Orito, T. Shima, Y. Takemoto, S. Umehara, Y. Urano, K. Yasuda, S. Yoshida

    Abstract: A dark matter search project needs and extremely low background radiation detector since the expected event rate of dark matter is less than a few events in one year in one tonne of the detector mass. The authors developed a highly radiopure NaI(Tl) crystal to search for dark matter. The best combination of the purification methods was developed, resulting $^{\mathrm{nat}}$K and $^{210}$Pb were le… ▽ More

    Submitted 29 June, 2021; originally announced June 2021.

    Comments: 12 pages, 7 figures, RADIATION DETECTORS AND THEIR USES Proceedings of the 35th Workshop on Radiation Detectors and Their Uses in KEK

  9. arXiv:2104.10452  [pdf, other

    physics.ins-det hep-ex nucl-ex

    The nylon balloon for xenon loaded liquid scintillator in KamLAND-Zen 800 neutrinoless double-beta decay search experiment

    Authors: KamLAND-Zen collaboration, :, Y. Gando, A. Gando, T. Hachiya, S. Hayashida, K. Hosokawa, H. Ikeda, T. Mitsui, T. Nakada, S. Obara, H. Ozaki, J. Shirai, K. Ueshima, H. Watanabe, S. Abe, K. Hata, A. Hayashi, Y. Honda, S. Ieki, K. Inoue, K. Ishidoshiro, S. Ishikawa, Y. Kamei, K. Kamizawa , et al. (49 additional authors not shown)

    Abstract: The KamLAND-Zen 800 experiment is searching for the neutrinoless double-beta decay of $^{136}$Xe by using $^{136}$Xe-loaded liquid scintillator. The liquid scintillator is enclosed inside a balloon made of thin, transparent, low-radioactivity film that we call Inner Balloon (IB). The IB, apart from guaranteeing the liquid containment, also allows to minimize the background from cosmogenic muon-spa… ▽ More

    Submitted 4 June, 2021; v1 submitted 21 April, 2021; originally announced April 2021.

    Comments: 23 pages, 16 figures, to be submitted to JINST

    Journal ref: 2021 JINST 16 P08023

  10. arXiv:2101.05269  [pdf, other

    astro-ph.IM astro-ph.HE hep-ex physics.ins-det

    Supernova Model Discrimination with Hyper-Kamiokande

    Authors: Hyper-Kamiokande Collaboration, :, K. Abe, P. Adrich, H. Aihara, R. Akutsu, I. Alekseev, A. Ali, F. Ameli, I. Anghel, L. H. V. Anthony, M. Antonova, A. Araya, Y. Asaoka, Y. Ashida, V. Aushev, F. Ballester, I. Bandac, M. Barbi, G. J. Barker, G. Barr, M. Batkiewicz-Kwasniak, M. Bellato, V. Berardi, M. Bergevin , et al. (478 additional authors not shown)

    Abstract: Core-collapse supernovae are among the most magnificent events in the observable universe. They produce many of the chemical elements necessary for life to exist and their remnants -- neutron stars and black holes -- are interesting astrophysical objects in their own right. However, despite millennia of observations and almost a century of astrophysical study, the explosion mechanism of core-colla… ▽ More

    Submitted 20 July, 2021; v1 submitted 13 January, 2021; originally announced January 2021.

    Comments: 21 pages, 7 figures. Article based on thesis published as arXiv:2002.01649. v2: added references and some explanations in response to reviewer comments

    Journal ref: Astrophys.J. 916 (2021) 15

  11. arXiv:2101.00759  [pdf, other

    physics.ins-det astro-ph.IM

    Development of highly radiopure NaI(Tl) scintillator for PICOLON dark matter search project

    Authors: K. Fushimi, Y. Kanemitsu, S. Hirata, D. Chernyak, R. Hazama, H. Ikeda, K. Imagawa, H. Ishiura, H. Ito, T. Kisimoto, A. Kozlov, Y. Takemoto, K. Yasuda, H. Ejiri, K. Hata, T. Iida, K. Inoue, M. Koga, K. Nakamura, R. Orito, T. Shima, S. Umehara, S. Yoshida

    Abstract: The highly radiopure NaI(Tl) was developed to search for particle candidates of dark matter. The optimized methods were combined to reduce various radioactive impurities. The $^{40}$K was effectively reduced by the re-crystallization method. The progenies of the decay chains of uranium and thorium were reduced by appropriate resins. The concentration of natural potassium in NaI(Tl) crystal was red… ▽ More

    Submitted 20 May, 2021; v1 submitted 3 January, 2021; originally announced January 2021.

    Comments: 11 pages, 6 figures, accepted to Progress of Theoretical and Experimental Physics

    Journal ref: Progress of Theoretical and Experimental Physics, Volume 2021, Issue 4, April 2021, 043F01

  12. arXiv:1805.04163  [pdf, other

    physics.ins-det astro-ph.SR hep-ex

    Hyper-Kamiokande Design Report

    Authors: Hyper-Kamiokande Proto-Collaboration, :, K. Abe, Ke. Abe, H. Aihara, A. Aimi, R. Akutsu, C. Andreopoulos, I. Anghel, L. H. V. Anthony, M. Antonova, Y. Ashida, V. Aushev, M. Barbi, G. J. Barker, G. Barr, P. Beltrame, V. Berardi, M. Bergevin, S. Berkman, L. Berns, T. Berry, S. Bhadra, D. Bravo-Berguño, F. d. M. Blaszczyk , et al. (291 additional authors not shown)

    Abstract: On the strength of a double Nobel prize winning experiment (Super)Kamiokande and an extremely successful long baseline neutrino programme, the third generation Water Cherenkov detector, Hyper-Kamiokande, is being developed by an international collaboration as a leading worldwide experiment based in Japan. The Hyper-Kamiokande detector will be hosted in the Tochibora mine, about 295 km away from th… ▽ More

    Submitted 28 November, 2018; v1 submitted 9 May, 2018; originally announced May 2018.

    Comments: 325 pages

  13. arXiv:1611.06118  [pdf, other

    hep-ex hep-ph physics.ins-det

    Physics Potentials with the Second Hyper-Kamiokande Detector in Korea

    Authors: Hyper-Kamiokande proto-collaboration, :, K. Abe, Ke. Abe, S. H. Ahn, H. Aihara, A. Aimi, R. Akutsu, C. Andreopoulos, I. Anghel, L. H. V. Anthony, M. Antonova, Y. Ashida, V. Aushev, M. Barbi, G. J. Barker, G. Barr, P. Beltrame, V. Berardi, M. Bergevin, S. Berkman, L. Berns, T. Berry, S. Bhadra, D. Bravo-Bergu no , et al. (331 additional authors not shown)

    Abstract: Hyper-Kamiokande consists of two identical water-Cherenkov detectors of total 520~kt with the first one in Japan at 295~km from the J-PARC neutrino beam with 2.5$^{\textrm{o}}$ Off-Axis Angles (OAAs), and the second one possibly in Korea in a later stage. Having the second detector in Korea would benefit almost all areas of neutrino oscillation physics mainly due to longer baselines. There are sev… ▽ More

    Submitted 26 March, 2018; v1 submitted 18 November, 2016; originally announced November 2016.

    Comments: 102 pages, 49 figures. Accepted by PTEP

    Journal ref: Prog Theor Exp Phys (2018)

  14. arXiv:1509.03724  [pdf, ps, other

    hep-ex physics.ins-det

    Search for double-beta decay of 136Xe to excited states of 136Ba with the KamLAND-Zen experiment

    Authors: KamLAND-Zen Collaboration, :, K. Asakura, A. Gando, Y. Gando, T. Hachiya, S. Hayashida, H. Ikeda, K. Inoue, K. Ishidoshiro, T. Ishikawa, S. Ishio, M. Koga, S. Matsuda, T. Mitsui, D. Motoki, K. Nakamura, S. Obara, M. Otani, T. Oura, I. Shimizu, Y. Shirahata, J. Shirai, A. Suzuki, H. Tachibana , et al. (21 additional authors not shown)

    Abstract: A search for double-beta decays of 136Xe to excited states of 136Ba has been performed with the first phase data set of the KamLAND-Zen experiment. The 0+1, 2+1 and 2+2 transitions of 0ν\{beta}\{beta} decay were evaluated in an exposure of 89.5kg-yr of 136Xe, while the same transitions of 2ν\{beta}\{beta} decay were evaluated in an exposure of 61.8kg-yr. No excess over background was found for all… ▽ More

    Submitted 8 December, 2015; v1 submitted 12 September, 2015; originally announced September 2015.

    Comments: 16 pages, 4 figures. Published in Nuclear Physics A

  15. arXiv:1506.01175  [pdf, ps, other

    astro-ph.HE hep-ex physics.ins-det

    KamLAND Sensitivity to Neutrinos from Pre-Supernova Stars

    Authors: K. Asakura, A. Gando, Y. Gando, T. Hachiya, S. Hayashida, H. Ikeda, K. Inoue, K. Ishidoshiro, T. Ishikawa, S. Ishio, M. Koga, S. Matsuda, T. Mitsui, D. Motoki, K. Nakamura, S. Obara, T. Oura, I. Shimizu, Y. Shirahata, J. Shirai, A. Suzuki, H. Tachibana, K. Tamae, K. Ueshima, H. Watanabe , et al. (22 additional authors not shown)

    Abstract: In the late stages of nuclear burning for massive stars ($M>8~M_{\sun}$), the production of neutrino-antineutrino pairs through various processes becomes the dominant stellar cooling mechanism. As the star evolves, the energy of these neutrinos increases and in the days preceding the supernova a significant fraction of emitted electron anti-neutrinos exceeds the energy threshold for inverse beta d… ▽ More

    Submitted 22 January, 2016; v1 submitted 3 June, 2015; originally announced June 2015.

    Comments: 19 pages, 6 figures, 1 table

  16. arXiv:1412.4673  [pdf, other

    physics.ins-det hep-ex hep-ph

    A Long Baseline Neutrino Oscillation Experiment Using J-PARC Neutrino Beam and Hyper-Kamiokande

    Authors: Hyper-Kamiokande Working Group, :, K. Abe, H. Aihara, C. Andreopoulos, I. Anghel, A. Ariga, T. Ariga, R. Asfandiyarov, M. Askins, J. J. Back, P. Ballett, M. Barbi, G. J. Barker, G. Barr, F. Bay, P. Beltrame, V. Berardi, M. Bergevin, S. Berkman, T. Berry, S. Bhadra, F. d. M. Blaszczyk, A. Blondel, S. Bolognesi , et al. (224 additional authors not shown)

    Abstract: Hyper-Kamiokande will be a next generation underground water Cherenkov detector with a total (fiducial) mass of 0.99 (0.56) million metric tons, approximately 20 (25) times larger than that of Super-Kamiokande. One of the main goals of Hyper-Kamiokande is the study of $CP$ asymmetry in the lepton sector using accelerator neutrino and anti-neutrino beams. In this document, the physics potential o… ▽ More

    Submitted 18 January, 2015; v1 submitted 15 December, 2014; originally announced December 2014.

    Comments: Document submitted to 18th J-PARC PAC meeting in May 2014. 50 pages, 41 figures

  17. arXiv:1407.0413  [pdf, other

    physics.ins-det hep-ex nucl-ex

    A compact ultra-clean system for deploying radioactive sources inside the KamLAND detector

    Authors: T. I. Banks, S. J. Freedman, J. Wallig, N. Ybarrolaza, A. Gando, Y. Gando, H. Ikeda, K. Inoue, Y. Kishimoto, M. Koga, T. Mitsui, K. Nakamura, I. Shimizu, J. Shirai, A. Suzuki, Y. Takemoto, K. Tamae, K. Ueshima, H. Watanabe, B. D. Xu, H. Yoshida, S. Yoshida, A. Kozlov, C. Grant, G. Keefer , et al. (32 additional authors not shown)

    Abstract: We describe a compact, ultra-clean device used to deploy radioactive sources along the vertical axis of the KamLAND liquid-scintillator neutrino detector for purposes of calibration. The device worked by paying out and reeling in precise lengths of a hanging, small-gauge wire rope (cable); an assortment of interchangeable radioactive sources could be attached to a weight at the end of the cable. A… ▽ More

    Submitted 11 February, 2015; v1 submitted 1 July, 2014; originally announced July 2014.

    Comments: Revised author affiliations, corrected typos, made minor improvements to text, and revised references

    Journal ref: Nuclear Instruments and Methods in Physics Research Section A, Volume 769, 1 January 2015, pages 88-96

  18. arXiv:1312.0977  [pdf, other

    physics.ins-det hep-ex nucl-ex

    Laboratory Studies on the Removal of Radon-Born Lead from KamLAND's Organic Liquid Scintillator

    Authors: G. Keefer, C. Grant, A. Piepke, T. Ebihara, H. Ikeda, Y. Kishimoto, Y. Kibe, Y. Koseki, M. Ogawa, J. Shirai, S. Takeuchi, C. Mauger, C. Zhang, G. Schweitzer, B. E. Berger, S. Dazeley, M. P. Decowski, J. A. Detwiler, Z. Djurcic, D. A. Dwyer, Y. Efremenko, S. Enomoto, S. J. Freedman, B. K. Fujikawa, K. Furuno , et al. (43 additional authors not shown)

    Abstract: The removal of radioactivity from liquid scintillator has been studied in preparation of a low background phase of KamLAND. This paper describes the methods and techniques developed to measure and efficiently extract radon decay products from liquid scintillator. We report the radio-isotope reduction factors obtained when applying various extraction methods. During this study, distillation was ide… ▽ More

    Submitted 3 December, 2013; originally announced December 2013.

    MSC Class: 85-05

  19. arXiv:1312.0896  [pdf, other

    physics.ins-det hep-ex

    CeLAND: search for a 4th light neutrino state with a 3 PBq 144Ce-144Pr electron antineutrino generator in KamLAND

    Authors: A. Gando, Y. Gando, S. Hayashida, H. Ikeda, K. Inoue, K. Ishidoshiro, H. Ishikawa, M. Koga, R. Matsuda, S. Matsuda, T. Mitsui, D. Motoki, K. Nakamura, Y. Oki, M. Otani, I. Shimizu, J. Shirai, F. Suekane, A. Suzuki, Y. Takemoto, K. Tamae, K. Ueshima, H. Watanabe, B. D. Xu, S. Yamada , et al. (41 additional authors not shown)

    Abstract: The reactor neutrino and gallium anomalies can be tested with a 3-4 PBq (75-100 kCi scale) 144Ce-144Pr antineutrino beta-source deployed at the center or next to a large low-background liquid scintillator detector. The antineutrino generator will be produced by the Russian reprocessing plant PA Mayak as early as 2014, transported to Japan, and deployed in the Kamioka Liquid Scintillator Anti-Neutr… ▽ More

    Submitted 13 April, 2014; v1 submitted 3 December, 2013; originally announced December 2013.

    Comments: 67 pages, 50 figures. Th. Lasserre thanks the European Research Council for support under the Starting Grant StG-307184

  20. arXiv:physics/0410202  [pdf

    physics.plasm-ph

    Control of fluctuations in ECR plasma by applying multipole magnetic fields

    Authors: Hayato Tsuchiya, Mayuko Koga, Masayuki Fukao, Yoshinobu Kawai

    Abstract: The control of fluctuations generated in an electron cyclotron resonance (ECR) plasma is attempted by changing microwave powers. It is found that when a cage is introduced in the vacuum chamber, the fluctuations change from turbulent state to chaotic state in the high microwave power region while it changes from chaotic state to periodic state in the low microwave power region. This result sugge… ▽ More

    Submitted 22 October, 2004; originally announced October 2004.

    Comments: 12th International Congress on Plasma Physics, 25-29 October 2004, Nice (France)

  21. arXiv:physics/0410135  [pdf

    physics.plasm-ph

    Production of a large diameter ECR plasma for plasma processing

    Authors: Mayuko Koga, Yasuhiro Hishikawa, Hayato Tsuchiya, Yoshinobu Kawai

    Abstract: A large diameter plasma over 300 mm in diameter is produced by electron cyclotron resonance (ECR) discharges using a newly developed large diameter chamber of 400 mm in inner diameter. It is found that the electron temperature decreases as nitrogen gas is added to pure argon plasma, which is considered that nitrogen molecules absorb the electron energy into the vibrational energy and lead to the… ▽ More

    Submitted 19 October, 2004; originally announced October 2004.

    Comments: 12th International Congress on Plasma Physics, 25-29 October 2004, Nice (France)