Impact of Residual Carbon Impurities and Gallium Vacancies on Trap** Effects in AlGaN/GaN MIS-HEMTs
Authors:
Martin Huber,
Marco Silvestri,
Lauri Knuuttila,
Gianmauro Pozzovivo,
Andrei Andreev,
Andrey Kadashchuk,
Alberta Bonanni,
Anders Lundskog
Abstract:
Effects of residual C impurities and Ga vacancies on the dynamic instabilities of AlN/AlGaN/GaN metal insulator semiconductor high electron mobility transistors are investigated. Secondary ion mass spectroscopy, positron annihilation spectroscopy, steady state and time-resolved photoluminescence (PL) measurements have been performed in conjunction with electrical characterization and current trans…
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Effects of residual C impurities and Ga vacancies on the dynamic instabilities of AlN/AlGaN/GaN metal insulator semiconductor high electron mobility transistors are investigated. Secondary ion mass spectroscopy, positron annihilation spectroscopy, steady state and time-resolved photoluminescence (PL) measurements have been performed in conjunction with electrical characterization and current transient analyses. The correlation between yellow luminescence (YL), C- and Ga vacancy concentration is investigated. Time-resolved PL indicating the C$_{\mathrm{N}}$O$_{\mathrm{N}}$ complex as the main source of the YL, while Ga vacancies or related complexes with C seem not to play a major role. The device dynamic performance is found to be significantly dependent on the C concentration close to the channel of the transistor. Additionally, the magnitude of the YL is found to be in agreement with the threshold voltage shift and with the on-resistance degradation. Trap analysis of the GaN buffer shows an apparent activation energy of $\sim$0.8eV for all samples, pointing to a common dominating trap** process and that the growth parameters affect solely the density of trap centres. It is inferred that the trap** process is likely to be directly related to C based defects.
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Submitted 5 February, 2020;
originally announced February 2020.
