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Contact holes in vertical electrode structures analyzed by voltage contrast-SEM and conducting AFM
Authors:
Minsun Gu,
Moon Seop Hyun,
Moonsup Han,
Gyungtae Kim,
Young Jun Chang
Abstract:
Soaring demands of multi-stacked memory devices request urgent development of backside contact electrode technologies, such as high aspect ratio etching, metallization, and inspection methods. Especially the complex metal contact process should be monitored for each manufacturing step to filter the defective samples and to maintain the high yield of production. Among the inspection methods for det…
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Soaring demands of multi-stacked memory devices request urgent development of backside contact electrode technologies, such as high aspect ratio etching, metallization, and inspection methods. Especially the complex metal contact process should be monitored for each manufacturing step to filter the defective samples and to maintain the high yield of production. Among the inspection methods for detecting the electrical connections, there is voltage contrast (VC)-SEM and conducting AFM (C-AFM). In this report, we investigated the two inspection methods for testing designed samples with different contact hole states. The VC-SEM data shows the contrast variation at the contact holes, from which one may discern the contact status with an optimum voltage. The C-AFM results clearly demonstrate a finite electrical current in the connected contact, while a negligible current in the disconnected one. Finally, we discuss insights of using the two methods for analyzing the contact hole technologies with high aspect ratios.
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Submitted 22 October, 2023;
originally announced October 2023.
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Unsupervised sequence-to-sequence learning for automatic signal quality assessment in multi-channel electrical impedance-based hemodynamic monitoring
Authors:
Chang Min Hyun,
Tae-Geun Kim,
Kyounghun Lee
Abstract:
This study proposes an unsupervised sequence-to-sequence learning approach that automatically assesses the motion-induced reliability degradation of the cardiac volume signal (CVS) in multi-channel electrical impedance-based hemodynamic monitoring. The proposed method attempts to tackle shortcomings in existing learning-based assessment approaches, such as the requirement of manual annotation for…
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This study proposes an unsupervised sequence-to-sequence learning approach that automatically assesses the motion-induced reliability degradation of the cardiac volume signal (CVS) in multi-channel electrical impedance-based hemodynamic monitoring. The proposed method attempts to tackle shortcomings in existing learning-based assessment approaches, such as the requirement of manual annotation for motion influence and the lack of explicit mechanisms for realizing motion-induced abnormalities under contextual variations in CVS over time. By utilizing long-short term memory and variational auto-encoder structures, an encoder--decoder model is trained not only to self-reproduce an input sequence of the CVS but also to extrapolate the future in a parallel fashion. By doing so, the model can capture contextual knowledge lying in a temporal CVS sequence while being regularized to explore a general relationship over the entire time-series. A motion-influenced CVS of low-quality is detected, based on the residual between the input sequence and its neural representation with a cut--off value determined from the two-sigma rule of thumb over the training set. Our experimental observations validated two claims: (i) in the learning environment of label-absence, assessment performance is achievable at a competitive level to the supervised setting, and (ii) the contextual information across a time series of CVS is advantageous for effectively realizing motion-induced unrealistic distortions in signal amplitude and morphology. We also investigated the capability as a pseudo-labeling tool to minimize human-craft annotation by preemptively providing strong candidates for motion-induced anomalies. Empirical evidence has shown that machine-guided annotation can reduce inevitable human-errors during manual assessment while minimizing cumbersome and time-consuming processes.
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Submitted 17 May, 2023; v1 submitted 16 May, 2023;
originally announced May 2023.
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Nonlinear ill-posed problem in low-dose dental cone-beam computed tomography
Authors:
Hyoung Suk Park,
Chang Min Hyun,
** Keun Seo
Abstract:
This paper describes the mathematical structure of the ill-posed nonlinear inverse problem of low-dose dental cone-beam computed tomography (CBCT) and explains the advantages of a deep learning-based approach to the reconstruction of computed tomography images over conventional regularization methods. This paper explains the underlying reasons why dental CBCT is more ill-posed than standard comput…
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This paper describes the mathematical structure of the ill-posed nonlinear inverse problem of low-dose dental cone-beam computed tomography (CBCT) and explains the advantages of a deep learning-based approach to the reconstruction of computed tomography images over conventional regularization methods. This paper explains the underlying reasons why dental CBCT is more ill-posed than standard computed tomography. Despite this severe ill-posedness, the demand for dental CBCT systems is rapidly growing because of their cost competitiveness and low radiation dose. We then describe the limitations of existing methods in the accurate restoration of the morphological structures of teeth using dental CBCT data severely damaged by metal implants. We further discuss the usefulness of panoramic images generated from CBCT data for accurate tooth segmentation. We also discuss the possibility of utilizing radiation-free intra-oral scan data as prior information in CBCT image reconstruction to compensate for the damage to data caused by metal implants.
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Submitted 2 March, 2023;
originally announced March 2023.
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Machine Learning-based Signal Quality Assessment for Cardiac Volume Monitoring in Electrical Impedance Tomography
Authors:
Chang Min Hyun,
Tae Jun Jang,
Jeongchan Nam,
Hyeuknam Kwon,
Kiwan Jeon,
Kyunghun Lee
Abstract:
Owing to recent advances in thoracic electrical impedance tomography, a patient's hemodynamic function can be noninvasively and continuously estimated in real-time by surveilling a cardiac volume signal associated with stroke volume and cardiac output. In clinical applications, however, a cardiac volume signal is often of low quality, mainly because of the patient's deliberate movements or inevita…
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Owing to recent advances in thoracic electrical impedance tomography, a patient's hemodynamic function can be noninvasively and continuously estimated in real-time by surveilling a cardiac volume signal associated with stroke volume and cardiac output. In clinical applications, however, a cardiac volume signal is often of low quality, mainly because of the patient's deliberate movements or inevitable motions during clinical interventions. This study aims to develop a signal quality indexing method that assesses the influence of motion artifacts on transient cardiac volume signals. The assessment is performed on each cardiac cycle to take advantage of the periodicity and regularity in cardiac volume changes. Time intervals are identified using the synchronized electrocardiography system. We apply divergent machine-learning methods, which can be sorted into discriminative-model and manifold-learning approaches. The use of machine-learning could be suitable for our real-time monitoring application that requires fast inference and automation as well as high accuracy. In the clinical environment, the proposed method can be utilized to provide immediate warnings so that clinicians can minimize confusion regarding patients' conditions, reduce clinical resource utilization, and improve the confidence level of the monitoring system. Numerous experiments using actual EIT data validate the capability of cardiac volume signals degraded by motion artifacts to be accurately and automatically assessed in real-time by machine learning. The best model achieved an accuracy of 0.95, positive and negative predictive values of 0.96 and 0.86, sensitivity of 0.98, specificity of 0.77, and AUC of 0.96.
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Submitted 4 January, 2023;
originally announced January 2023.
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Feasibility trade-offs in decarbonisation of power sector with high coal dependence: A case of Korea
Authors:
Minwoo Hyun,
Aleh Cherp,
Jessica Jewell,
Yeong Jae Kim,
Jiyong Eom
Abstract:
Decarbonisation of the power sector requires feasible strategies for rapid phase-out of fossil fuels and expansion of low-carbon sources. This study develops and uses a model with an explicit account of power plant stocks to explore plausible decarbonization scenarios of the power sector in the Republic of Korea through 2050 and 2060. The results show that achieving zero emissions from the power s…
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Decarbonisation of the power sector requires feasible strategies for rapid phase-out of fossil fuels and expansion of low-carbon sources. This study develops and uses a model with an explicit account of power plant stocks to explore plausible decarbonization scenarios of the power sector in the Republic of Korea through 2050 and 2060. The results show that achieving zero emissions from the power sector by the mid-century requires either ambitious expansion of renewables backed by gas-fired generation equipped with carbon capture and storage or significant expansion of nuclear power. The first strategy implies replicating and maintaining for decades maximum growth rates of solar power achieved in leading countries and becoming an early and ambitious adopter of the CCS technology. The alternative expansion of nuclear power has historical precedents in Korea and other countries but may not be acceptable in the current political and regulatory environment.
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Submitted 25 October, 2021;
originally announced November 2021.
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Analytical and empirical measurement of fiber photometry signal volume in brain tissue
Authors:
Marco Pisanello,
Filippo Pisano,
Minsuk Hyun,
Emanuela Maglie,
Antonio Balena,
Massimo De Vittorio,
Bernardo L Sabatini,
Ferruccio Pisanello
Abstract:
Fiber photometry permits monitoring fluorescent indicators of neural activity in behaving animals. Optical fibers are typically used to excite and collect fluorescence from genetically-encoded calcium indicators expressed by a subset of neurons in a circuit of interest. However, a quantitative understanding of the brain volumes from which signal is collected and how this depends on the properties…
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Fiber photometry permits monitoring fluorescent indicators of neural activity in behaving animals. Optical fibers are typically used to excite and collect fluorescence from genetically-encoded calcium indicators expressed by a subset of neurons in a circuit of interest. However, a quantitative understanding of the brain volumes from which signal is collected and how this depends on the properties of the optical fibers are lacking. Here we analytically model and experimentally measure the light emission and collection fields for optical fibers in solution and scattering tissue, providing a comprehensive characterization of fibers commonly employed for fiber photometry. Since photometry signals depend on both excitation and collection efficiency, a combined confocal/2-photon microscope was developed to evaluate these parameters independently. We find that the 80% of the effective signal arises from a 10^5-10^6 um3 volume extending ~200 um from the fiber face, and thus permitting a spatial interpretation of measurements made with fiber photometry.
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Submitted 9 July, 2018;
originally announced July 2018.
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Deep learning for undersampled MRI reconstruction
Authors:
Chang Min Hyun,
Hwa Pyung Kim,
Sung Min Lee,
Sungchul Lee,
** Keun Seo
Abstract:
This paper presents a deep learning method for faster magnetic resonance imaging (MRI) by reducing k-space data with sub-Nyquist sampling strategies and provides a rationale for why the proposed approach works well. Uniform subsampling is used in the time-consuming phase-encoding direction to capture high-resolution image information, while permitting the image-folding problem dictated by the Pois…
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This paper presents a deep learning method for faster magnetic resonance imaging (MRI) by reducing k-space data with sub-Nyquist sampling strategies and provides a rationale for why the proposed approach works well. Uniform subsampling is used in the time-consuming phase-encoding direction to capture high-resolution image information, while permitting the image-folding problem dictated by the Poisson summation formula. To deal with the localization uncertainty due to image folding, very few low-frequency k-space data are added. Training the deep learning net involves input and output images that are pairs of Fourier transforms of the subsampled and fully sampled k-space data. Numerous experiments show the remarkable performance of the proposed method; only 29% of k-space data can generate images of high quality as effectively as standard MRI reconstruction with fully sampled data.
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Submitted 12 May, 2019; v1 submitted 8 September, 2017;
originally announced September 2017.
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RRR Characteristics for SRF Cavities
Authors:
Yoochul Jung,
Myungook Hyun,
Mijoung Joung
Abstract:
The first heavy ion accelerator is being constructed by the rare isotope science project (RISP) launched by the Institute of Basic Science (IBS) in South Korea. Four different types of superconducting cavities were designed, and prototypes were fabricated such as a quarter wave resonator (QWR), a half wave resonator (HWR) and a single spoke resonator (SSR). One of the critical factors determining…
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The first heavy ion accelerator is being constructed by the rare isotope science project (RISP) launched by the Institute of Basic Science (IBS) in South Korea. Four different types of superconducting cavities were designed, and prototypes were fabricated such as a quarter wave resonator (QWR), a half wave resonator (HWR) and a single spoke resonator (SSR). One of the critical factors determining performances of the superconducting cavities is a residual resistance ratio (RRR). The RRR values essentially represent how much niobium is pure and how fast niobium can transmit heat as well. In general, the RRR degrades during electron beam welding due to the impurity incorporation. Thus it is important to maintain RRR above a certain value at which a niobium cavity shows target performance. In this study, RRR degradation related with electron beam welding conditions, for example, welding power, welding speed, and vacuum level will be discussed.
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Submitted 28 July, 2015;
originally announced July 2015.