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Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas
Authors:
Chan-Won Park,
Benedek Horváth,
Aranka Derzsi,
Julian Schulze,
J. H. Kim,
Zoltán Donkó,
Hyo-Chang Lee
Abstract:
Plasma simulations are powerful tools for understanding fundamental plasma science phenomena and for process optimization in applications. To ensure their quantitative accuracy, they must be validated against experiments. In this work, such an experimental validation is performed for a 1d3v particle-in-cell simulation complemented with the Monte Carlo treatment of collision processes of a capaciti…
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Plasma simulations are powerful tools for understanding fundamental plasma science phenomena and for process optimization in applications. To ensure their quantitative accuracy, they must be validated against experiments. In this work, such an experimental validation is performed for a 1d3v particle-in-cell simulation complemented with the Monte Carlo treatment of collision processes of a capacitively coupled radio frequency plasma driven at 13.56 MHz and operated in neon gas. In a geometrically symmetric reactor the electron density in the discharge center and the spatio-temporal distribution of the electron impact excitation rate from the ground into the Ne 2p$_1$ state are measured by a microwave cutoff probe and phase resolved optical emission spectroscopy, respectively. The measurements are conducted for electrode gaps between 50 mm and 90 mm, neutral gas pressures between 20 mTorr and 50 mTorr, and peak-to-peak values of the driving voltage waveform between 250 V and 650 V. Simulations are performed under identical discharge conditions. In the simulations, various combinations of surface coefficients characterising the interactions of electrons and heavy particles with the anodized aluminium electrode surfaces are adopted. We find, that the simulations using a constant effective heavy particle induced secondary electron emission coefficient of 0.3 and a realistic electron-surface interaction model (which considers energy-dependent and material specific elastic and inelastic electron reflection, as well as the emission of true secondary electrons from the surface) yield results which are in good quantitative agreement with the experimental data.
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Submitted 27 July, 2023;
originally announced July 2023.
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Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
Authors:
Aranka Derzsi,
Mate Vass,
Ranna Masheyeva,
Benedek Horvath,
Zoltan Donko,
Peter Hartmann
Abstract:
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations are performed to investigate the excitation dynamics in low-pressure capacitively coupled plasmas (CCPs) in argon-oxygen mixtures. The system used for this study is a geometrically symmetric CCP reactor operated in a fixed mixture gas composition, at fix…
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Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations are performed to investigate the excitation dynamics in low-pressure capacitively coupled plasmas (CCPs) in argon-oxygen mixtures. The system used for this study is a geometrically symmetric CCP reactor operated in a fixed mixture gas composition, at fixed pressure and voltage amplitude, with a wide range of driving RF frequencies (2$~$MHz$~\le f \le~15~$MHz). The measured and calculated spatio-temporal distributions of the electron impact excitation rates from the Ar ground state to the Ar$~\rm{2p_1}$ state (with a wavelength of 750.4~nm) show good qualitative agreement. The distributions show significant frequency dependence, which is generally considered to be predictive of transitions in the dominant discharge operating mode. Three frequency ranges can be distinguished, showing distinctly different excitation characteristics: (i) in the low frequency range ($f \le~3~$MHz), excitation is strong at the sheaths and weak in the bulk region; (ii) at intermediate frequencies (3.5$~$MHz$~\le f \le~5~$MHz), the excitation rate in the bulk region is enhanced and shows striation formation; (iii) above 6$~$MHz, excitation in the bulk gradually decreases with increasing frequency. Boltzmann term analysis was performed to quantify the frequency dependent contributions of the Ohmic and ambipolar terms to the electron power absorption.
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Submitted 19 July, 2023;
originally announced July 2023.
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Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Authors:
Katharina Noesges,
Maximilian Klich,
Aranka Derzsi,
Benedek Horváth,
Julian Schulze,
Ralf Peter Brinkmann,
Thomas Mussenbrock,
Sebastian Wilczek
Abstract:
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technological processes. One possible plasma-surface interaction is the generation of secondary electrons (SEs), which significantly influence the discharge when accelerated in the sheath electric field. However, SEs, in particu…
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In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technological processes. One possible plasma-surface interaction is the generation of secondary electrons (SEs), which significantly influence the discharge when accelerated in the sheath electric field. However, SEs, in particular electron-induced SEs ($\updelta$-electrons), are frequently neglected in theory and simulations. Due to the relatively high threshold energy for the effective generation of $\updelta$-electrons at surfaces, their dynamics are closely connected and entangled with the dynamics of the ion-induced SEs ($\upgamma$-electrons). Thus, a fundamental understanding of the electron dynamics has to be achieved on a nanosecond timescale, and the effects of the different electron groups have to be segregated. This work utilizes $1d3v$ Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations of a symmetric discharge in the low-pressure regime ($p\,=\, 1\,\rm{Pa}$) with the inclusion of realistic electron-surface interactions for silicon dioxide. A diagnostic framework is introduced that segregates the electrons into three groups ("bulk-electrons", "$\upgamma$-electrons", and "$\updelta$-electrons") in order to analyze and discuss their dynamics. A variation of the electrode gap size $L_\mathrm{gap}$ is then presented as a control tool to alter the dynamics of the discharge significantly. It is demonstrated that this control results in two different regimes of low and high plasma density, respectively. The fundamental electron dynamics of both regimes are explained, which requires a complete analysis starting at global parameters (e.g., densities) down to single electron trajectories.
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Submitted 27 March, 2023;
originally announced March 2023.
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Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
Authors:
A. Derzsi,
P. Hartmann,
M. Vass,
B. Horváth,
M. Gyulai,
I. Korolov,
J. Schulze,
Z. Donkó
Abstract:
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron power absorption and excitation/ionization dynamics in capacitively coupled plasmas (CCPs) in mixtures of neon and oxygen gases. The study is performed for a geometrically symmetric CCP reactor with a gap length of 2.5 cm…
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Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron power absorption and excitation/ionization dynamics in capacitively coupled plasmas (CCPs) in mixtures of neon and oxygen gases. The study is performed for a geometrically symmetric CCP reactor with a gap length of 2.5 cm at a driving frequency of 10~MHz and a peak-to-peak voltage of 350 V. The pressure of the gas mixture is varied between 15 Pa and 500 Pa, while the neon/oxygen concentration is tuned between 10% and 90%. For all discharge conditions, the spatio-temporal distribution of the electron-impact excitation rate from the Ne ground state into the Ne $\rm{2p^53p_0}$ state measured by PROES and obtained from PIC/MCC simulations show good qualitative agreement. Based on the emission/excitation patterns, multiple operation regimes are identified. Localized bright emission features at the bulk boundaries, caused by local maxima in the electronegativity are found at high pressures and high O$_2$ concentrations. The relative contributions of the ambipolar and the Ohmic electron power absorption are found to vary strongly with the discharge parameters: the Ohmic power absorption is enhanced by both the high collisionality at high pressures and the high electronegativity at low pressures. In the wide parameter regime covered in this study, the PROES measurements are found to accurately represent the ionization dynamics, i.e., the discharge operation mode. This work represents also a successful experimental validation of the discharge model developed for neon-oxygen CCPs.
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Submitted 13 May, 2022;
originally announced May 2022.
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eduPIC: an introductory particle based code for radio-frequency plasma simulation
Authors:
Zoltan Donko,
Aranka Derzsi,
Mate Vass,
Benedek Horvath,
Sebastian Wilczek,
Botond Hartmann,
Peter Hartmann
Abstract:
For the self-consistent description of various plasma sources operated in the low-pressure (nonlocal, kinetic) regime, the Particle-In-Cell simulation approach, combined with the Monte Carlo treatment of collision processes (PIC/MCC), has become an important tool during the past decades. PIC/MCC simulation codes have been developed and maintained by many research groups, some of these codes are av…
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For the self-consistent description of various plasma sources operated in the low-pressure (nonlocal, kinetic) regime, the Particle-In-Cell simulation approach, combined with the Monte Carlo treatment of collision processes (PIC/MCC), has become an important tool during the past decades. PIC/MCC simulation codes have been developed and maintained by many research groups, some of these codes are available to the community as freeware resources. While this computational approach has already been present for a number of decades, the rapid evolution of the computing infrastructure makes it increasingly more popular and accessible, as simulations of simple systems can be executed now on personal computers or laptops. During the past few years we have experienced an increasing interest in lectures and courses dealing with the basics of particle simulations, including the PIC/MCC technique. In a response to this, this paper (i) provides a tutorial on the physical basis and the algorithms of the PIC/MCC technique and (ii) presents a basic (spatially one-dimensional) electrostatic PIC/MCC simulation code for Capacitively Coupled Plasmas, whose source is made freely available in various programming languages. We share the code in C/C++ versions, as well as in a version written in Rust, which is a rapidly emerging computational language. Our code intends to be a "starting tool" for those who are interested in learning the details of the PIC/MCC technique and would like to develop the "skeleton" code further, for their research purposes.
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Submitted 17 March, 2021;
originally announced March 2021.
