Showing 1–50 of 50 results for author: Gröblacher, S

Heterogeneous integration of amorphous silicon carbide on thin film lithium niobate

Authors: Zizheng Li, Naresh Sharma, Bruno Lopez-Rodriguez, Roald van der Kolk, Thomas Scholte, Hugo Voncken, Jasper van der Boom, Simon Gröblacher, Iman Esmaeil Zadeh

Abstract: In the past decade, lithium niobate (LiNbO3 or LN) photonics, thanks to its heat-free and fast electro-optical modulation, second-order non-linearities and low loss, has been extensively investigated. Despite numerous demonstrations of high-performance LN photonics, processing lithium niobate remains challenging and suffers from incompatibilities with standard complementary metal-oxide semiconduct… ▽ More In the past decade, lithium niobate (LiNbO3 or LN) photonics, thanks to its heat-free and fast electro-optical modulation, second-order non-linearities and low loss, has been extensively investigated. Despite numerous demonstrations of high-performance LN photonics, processing lithium niobate remains challenging and suffers from incompatibilities with standard complementary metal-oxide semiconductor (CMOS) fabrication lines, limiting its scalability. Silicon carbide (SiC) is an emerging material platform with a high refractive index, a large non-linear Kerr coefficient, and a promising candidate for heterogeneous integration with LN photonics. Current approaches of SiC/LN integration require transfer-bonding techniques, which are time-consuming, expensive, and lack precision in layer thickness. Here we show that amorphous silicon carbide (a-SiC), deposited using inductively coupled plasma enhanced chemical vapor deposition (ICPCVD) at low temperatures (< 165 C), can be conveniently integrated with LiNbO3 and processed to form high-performance photonics. Most importantly, the fabrication only involves a standard, silicon-compatible, reactive ion etching step and leaves the LiNbO3 intact, hence its compatibility with standard foundry processes. As a proof-of-principle, we fabricated waveguides and ring resonators on the developed a-SiC/LN platform and achieved intrinsic quality factors higher than 106,000 and resonance electro-optic tunability of 3.4 pm/V with 3 mm tuning length. We showcase the possibility of dense integration by fabricating and testing ring resonators with 40um radius without a noticeable loss penalty. Our platform offers a CMOS-compatible and scalable approach for implementation of future fast electro-optic modulators and reconfigurable photonic circuits as well as nonlinear processes which can benefit from involving both second and third-order nonlinearities. △ Less

Submitted 12 July, 2024; originally announced July 2024.

Comments: 9 pages, 4 figures

Magic silicon dioxide for widely tunable integrated photonics

Authors: Bruno Lopez-Rodriguez, Naresh Sharma, Zizheng Li, Roald van der Kolk, Jasper van der Boom, Thomas Scholte, ** Chang, Simon Groblacher, Iman Esmaeil Zadeh

Abstract: Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging, and hold wide-ranging potential for optical computing, optical imaging and signal processing. These applications often require tunable and reconfigurable photonic components, most commonly accomplished through the thermo-optic effect. However, the resulting tuning window is limited for st… ▽ More Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging, and hold wide-ranging potential for optical computing, optical imaging and signal processing. These applications often require tunable and reconfigurable photonic components, most commonly accomplished through the thermo-optic effect. However, the resulting tuning window is limited for standard optical materials such as silicon dioxide and silicon nitride. Most importantly, bidirectional thermal tuning on a single platform has not been realized. For the first time, we show that by tuning and optimizing the deposition conditions in inductively-coupled plasma chemical vapor deposition (ICPCVD) of silicon dioxide, this material can be used to deterministically tune the thermo-optic properties of optical devices without introducing significant losses. We demonstrate that we can deterministically integrate positive and negative wavelength shifts on a single chip, validated on amorphous silicon carbide (a-SiC), silicon nitride (SiN) and silicon-on-insulator (SOI) platforms. We observe up to a 10-fold improvement of the thermo-optic tunability and, in addition, demonstrate athermal ring resonators with shifts as low as 1.5 pm/°C. This enables the fabrication of a novel tunable coupled ring optical waveguide (CROW) requiring only a single heater. In addition, the low-temperature deposition of our silicon dioxide cladding can be combined with lift-off to isolate the optical devices resulting in a decrease in thermal crosstalk by at least two orders of magnitude. Our method paves the way for novel photonic architectures incorporating bidirectional thermo-optic tunability. △ Less

Submitted 11 July, 2024; originally announced July 2024.

Phononic Crystals in Superfluid Thin-Film Helium

Authors: Alexander Rolf Korsch, Niccolò Fiaschi, Simon Gröblacher

Abstract: In recent years, nanomechanical oscillators in thin films of superfluid helium have attracted attention in the field of optomechanics due to their exceptionally low mechanical dissipation and optical scattering. Mechanical excitations in superfluid thin films - so-called third sound waves - can interact with the optical mode of an optical microresonator by modulation of its effective refractive in… ▽ More In recent years, nanomechanical oscillators in thin films of superfluid helium have attracted attention in the field of optomechanics due to their exceptionally low mechanical dissipation and optical scattering. Mechanical excitations in superfluid thin films - so-called third sound waves - can interact with the optical mode of an optical microresonator by modulation of its effective refractive index enabling optomechanical coupling. Strong confinement of third sound modes enhances their intrinsic mechanical non-linearity paving the way for strong phonon-phonon interactions with applications in quantum optomechanics. Here, we realize a phononic crystal cavity confining third sound modes in a superfluid helium film to length scales close to the third sound wavelength. A few nanometer thick superfluid film is self-assembled on top of a silicon nanobeam optical resonator. The periodic patterning of the silicon material creates a periodic modulation of the superfluid film leading to the formation of a phononic band gap. By engineering the geometry of the silicon nanobeam, the phononic band gap allows the confinement of a localized phononic mode. △ Less

Submitted 28 February, 2024; originally announced February 2024.

Broadband, High-Reflectivity Dielectric Mirrors at Wafer Scale: Combining Photonic Crystal and Metasurface Architectures for Advanced Lightsails

Authors: ** Chang, Wenye Ji, Xiong Yao, Arnold J. van Run, Simon Gröblacher

Abstract: Highly ambitious initiatives aspire to propel a miniature spacecraft to a neighboring star within a human generation, leveraging the radiation pressure of lasers for propulsion. One of the main challenges to achieving this enormous feat is to build a meter-scale, ultra-low mass lightsail with broadband reflectivity. In this work, we present the design and fabrication of such a lightsail composed o… ▽ More Highly ambitious initiatives aspire to propel a miniature spacecraft to a neighboring star within a human generation, leveraging the radiation pressure of lasers for propulsion. One of the main challenges to achieving this enormous feat is to build a meter-scale, ultra-low mass lightsail with broadband reflectivity. In this work, we present the design and fabrication of such a lightsail composed of two distinct dielectric layers and patterned with a photonic crystal structure covering a 4" wafer. We overcome the crucial challenge of achieving broad band reflection of >70% spanning over the full Doppler-shifted laser wavelength range during spacecraft acceleration, in combination with low total mass in the range of a few grams when scaled to meter size. Furthermore, we find new paths to reliably fabricate these sub-wavelength structures over macroscopic areas and then systematically characterize their optical performance, confirming their suitability for future lightsail applications. Our innovative device design and precise nanofabrication approaches represent a significant leap toward interstellar exploration. △ Less

Submitted 7 December, 2023; originally announced December 2023.

A single-phonon directional coupler

Authors: Amirparsa Zivari, Niccolò Fiaschi, Lorenzo Scarpelli, Menno Jansen, Roel Burgwal, Ewold Verhagen, Simon Gröblacher

Abstract: Integrated photonics has enabled countless technologies in telecommunications, spectroscopy, metrology, quantum optics, and quantum information processing. Using highly confined guided optical modes is the key that has made integrated circuits possible and has lead to scaling of complex designs, benefiting from their small footprint. At the same time, the field of quantum acoustics has recently ga… ▽ More Integrated photonics has enabled countless technologies in telecommunications, spectroscopy, metrology, quantum optics, and quantum information processing. Using highly confined guided optical modes is the key that has made integrated circuits possible and has lead to scaling of complex designs, benefiting from their small footprint. At the same time, the field of quantum acoustics has recently gained significant attention due to its various potential advantages over its photonic counterparts, including smaller mode volume, lower energy, and orders of magnitude slower propagation speeds, as well as the potential for interconnecting distinct quantum systems. Develo** analogous integrated phononic technology is critical for realizing the full potential of phonons and could lead to groundbreaking new applications, such as scalable quantum computing and hybrid quantum devices. In this work, we demonstrate for the first time a 4-port directional coupler for quantum mechanical excitations - a crucial component for integrated phononic circuits. Adjusting the length of the coupling region allows to realize phononic beam splitters with varying splitting ratios. By sending a single-phonon Fock state onto one of these phononic splitters, we demonstrate the capability of using the directional coupler directly in the quantum regime. Our work provides an essential step towards an integrated phononic platform for both classical and quantum technologies applications. △ Less

Submitted 7 December, 2023; originally announced December 2023.

Recent Advances in Metasurface Design and Quantum Optics Applications with Machine Learning, Physics-Informed Neural Networks, and Topology Optimization Methods

Authors: Wenye Ji, ** Chang2, He-Xiu Xu, Jian Rong Gao, Simon Gröblacher, Paul Urbach, Aurèle J. L. Adam

Abstract: As a two-dimensional planar material with low depth profile, a metasurface can generate non-classical phase distributions for the transmitted and reflected electromagnetic waves at its interface. Thus, it offers more flexibility to control the wave front. A traditional metasurface design process mainly adopts the forward prediction algorithm, such as Finite Difference Time Domain, combined with ma… ▽ More As a two-dimensional planar material with low depth profile, a metasurface can generate non-classical phase distributions for the transmitted and reflected electromagnetic waves at its interface. Thus, it offers more flexibility to control the wave front. A traditional metasurface design process mainly adopts the forward prediction algorithm, such as Finite Difference Time Domain, combined with manual parameter optimization. However, such methods are time-consuming, and it is difficult to keep the practical meta-atom spectrum being consistent with the ideal one. In addition, since the periodic boundary condition is used in the meta-atom design process, while the aperiodic condition is used in the array simulation, the coupling between neighboring meta-atoms leads to inevitable inaccuracy. In this review, representative intelligent methods for metasurface design are introduced and discussed, including machine learning, physics-information neural network, and topology optimization method. We elaborate on the principle of each approach, analyze their advantages and limitations, and discuss their potential applications. We also summarise recent advances in enabled metasurfaces for quantum optics applications. In short, this paper highlights a promising direction for intelligent metasurface designs and applications for future quantum optics research and serves as an up-to-date reference for researchers in the metasurface and metamaterial fields. △ Less

Submitted 18 July, 2023; originally announced July 2023.

High-quality amorphous Silicon Carbide for hybrid photonic integration at low temperature

Authors: Bruno Lopez-Rodriguez, Roald Van Der Kolk, Samarth Aggarwal, Naresh Sharma, Zizheng Li, Daniel Van Der Plaats, Thomas Scholte, ** Chang, Silvania F. Pereira, Simon Groeblacher, Harish Bhaskaran, Iman Esmaeil Zadeh Zadeh

Abstract: Integrated photonic platforms have proliferated in recent years, each demonstrating its own unique strengths and shortcomings. However, given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strength of different optical materials in one hybrid integrated platform. Silicon carbide is a material of g… ▽ More Integrated photonic platforms have proliferated in recent years, each demonstrating its own unique strengths and shortcomings. However, given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strength of different optical materials in one hybrid integrated platform. Silicon carbide is a material of great interest because of its high refractive index, strong second and third-order non-linearities and broad transparecy window in the visible and near infrared. However, integrating SiC has been difficult, and current approaches rely on transfer bonding techniques, that are time consuming, expensive and lacking precision in layer thickness. Here, we demonstrate high index Amorphous Silicon Carbide (a-SiC) films deposited at 150$^{\circ}$C and verify the high performance of the platform by fabricating standard photonic waveguides and ring resonators. The intrinsic quality factors of single-mode ring resonators were in the range of $Q_{int} = (4.7-5.7)\times10^5$ corresponding to optical losses between 0.78-1.06 dB/cm. We then demonstrate the potential of this platform for future heterogeneous integration with ultralow loss thin SiN and LiNbO$_3$ platforms. △ Less

Submitted 7 June, 2023; originally announced June 2023.

Frequency tunable, cavity-enhanced single erbium quantum emitter in the telecom band

Authors: Yong Yu, Dorian Oser, Gaia Da Prato, Emanuele Urbinati, Javier Carrasco Ávila, Yu Zhang, Patrick Remy, Sara Marzban, Simon Gröblacher, Wolfgang Tittel

Abstract: Single quantum emitters embedded in solid-state hosts are an ideal platform for realizing quantum information processors and quantum network nodes. Among the currently-investigated candidates, Er$^{3+}$ ions are particularly appealing due to their 1.5 $μ$m optical transition in the telecom band as well as their long spin coherence times. However, the long lifetimes of the excited state -- generall… ▽ More Single quantum emitters embedded in solid-state hosts are an ideal platform for realizing quantum information processors and quantum network nodes. Among the currently-investigated candidates, Er$^{3+}$ ions are particularly appealing due to their 1.5 $μ$m optical transition in the telecom band as well as their long spin coherence times. However, the long lifetimes of the excited state -- generally in excess of 1 ms -- along with the inhomogeneous broadening of the optical transition result in significant challenges. Photon emission rates are prohibitively small, and different emitters generally create photons with distinct spectra, thereby preventing multi-photon interference -- a requirement for building large-scale, multi-node quantum networks. Here we solve this challenge by demonstrating for the first time linear Stark tuning of the emission frequency of a single Er$^{3+}$ ion. Our ions are embedded in a lithium niobate crystal and couple evanescently to a silicon nano-photonic crystal cavity that provides an up to 143 increase of the measured decay rate. By applying an electric field along the crystal c-axis, we achieve a Stark tuning greater than the ion's linewidth without changing the single-photon emission statistics of the ion. These results are a key step towards rare earth ion-based quantum networks. △ Less

Submitted 28 April, 2023; originally announced April 2023.

Active-feedback quantum control of an integrated low-frequency mechanical resonator

Authors: **gkun Guo, ** Chang, Xiong Yao, Simon Gröblacher

Abstract: Preparing a massive mechanical resonator in a state with quantum limited motional energy provides a promising platform for studying fundamental physics with macroscopic systems and allows to realize a variety of applications, including precise sensing. While several demonstrations of such ground-state cooled systems have been achieved, in particular in sideband-resolved cavity optomechanics, for m… ▽ More Preparing a massive mechanical resonator in a state with quantum limited motional energy provides a promising platform for studying fundamental physics with macroscopic systems and allows to realize a variety of applications, including precise sensing. While several demonstrations of such ground-state cooled systems have been achieved, in particular in sideband-resolved cavity optomechanics, for many systems overcoming the heating from the thermal bath remains a major challenge. In contrast, optomechanical systems in the sideband-unresolved limit are much easier to realize due to the relaxed requirements on their optical properties, and the possibility to use a feedback control schemes to reduce the motional energy. The achievable thermal occupation is ultimately limited by the correlation between the measurement precision and the back-action from the measurement. Here, we demonstrate measurement-based feedback cooling on a fully integrated optomechanical device fabricated using a pick-and-place method, operating in the deep sideband-unresolved limit. With the large optomechanical interaction and a low thermal decoherence rate, we achieve a minimal average phonon occupation of 0.76 when pre-cooled with liquid helium and 3.5 with liquid nitrogen. Significant sideband asymmetry for both bath temperatures verifies the quantum character of the mechanical motion. Our method and device are ideally suited for sensing applications directly operating at the quantum limit, greatly simplifying the operation of an optomechanical system in this regime. △ Less

Submitted 6 August, 2023; v1 submitted 5 April, 2023; originally announced April 2023.

Journal ref: Nat Commun 14, 4721 (2023)

Surface acoustic wave resonators on thin film piezoelectric substrates in the quantum regime

Authors: Thomas Luschmann, Alexander Jung, Stephan Geprägs, Franz X. Haslbeck, Achim Marx, Stefan Filipp, Simon Gröblacher, Rudolf Gross, Hans Huebl

Abstract: Lithium niobate (LNO) is a well established material for surface acoustic wave (SAW) devices including resonators, delay lines and filters. Recently, multi-layer substrates based on LNO thin films have become commercially available. Here, we present a systematic low-temperature study of the performance of SAW devices fabricated on LNO-on-insulator and LNO-on-Silicon substrates and compare them to… ▽ More Lithium niobate (LNO) is a well established material for surface acoustic wave (SAW) devices including resonators, delay lines and filters. Recently, multi-layer substrates based on LNO thin films have become commercially available. Here, we present a systematic low-temperature study of the performance of SAW devices fabricated on LNO-on-insulator and LNO-on-Silicon substrates and compare them to bulk LNO devices. Our study aims at assessing the performance of these substrates for quantum acoustics, i.e. the integration with superconducting circuits operating in the quantum regime. To this end, we design SAW resonators with a target frequency of 5 GHz and perform experiments at millikelvin temperatures and microwave power levels corresponding to single photons or phonons. The devices are investigated regarding their internal quality factors as a function of the excitation power and temperature, which allows us to characterize and quantify losses and identify the dominating loss mechanism. For the measured devices, fitting the experimental data shows that the quality factors are limited by the coupling of the resonator to a bath of two-level-systems. Our results suggest that SAW devices on thin film LNO on silicon have comparable performance to devices on bulk LNO and are viable for use in SAW-based quantum acoustic devices. △ Less

Submitted 13 April, 2023; v1 submitted 26 January, 2023; originally announced January 2023.

Comments: 13 pages, 4 figures

Journal ref: Mater. Quantum. Technol. 3, 021001 (2023)

Dissipative Optomechanics in High-Frequency Nanomechanical Resonators

Authors: André G. Primo, Pedro V. Pinho, Rodrigo Benevides, Simon Gröblacher, Gustavo S. Wiederhecker, Thiago P. Mayer Alegre

Abstract: The coherent transduction of information between microwave and optical domains is a fundamental building block for future quantum networks. A promising way to bridge these widely different frequencies is using high-frequency nanomechanical resonators interacting with low-loss optical modes. State-of-the-art optomechanical devices rely on purely dispersive interactions that are enhanced by a large… ▽ More The coherent transduction of information between microwave and optical domains is a fundamental building block for future quantum networks. A promising way to bridge these widely different frequencies is using high-frequency nanomechanical resonators interacting with low-loss optical modes. State-of-the-art optomechanical devices rely on purely dispersive interactions that are enhanced by a large photon population in the cavity. Additionally, one could use dissipative optomechanics, where photons can be scattered directly from a waveguide into a resonator hence increasing the degree of control of the acousto-optic interplay. Hitherto, such dissipative optomechanical interaction was only demonstrated at low mechanical frequencies, precluding prominent applications such as the quantum state transfer between photonic and phononic domains. Here, we show the first dissipative optomechanical system operating in the sideband-resolved regime, where the mechanical frequency is larger than the optical linewidth. Exploring this unprecedented regime, we demonstrate the impact of dissipative optomechanical coupling in resha** both mechanical and optical spectra. Our figures represent a two-order-of-magnitude leap in the mechanical frequency and a tenfold increase in the dissipative optomechanical coupling rate compared to previous works. Further advances could enable the individual addressing of mechanical modes and help mitigate optical nonlinearities and absorption in optomechanical devices. △ Less

Submitted 1 September, 2023; v1 submitted 29 December, 2022; originally announced December 2022.

Comments: 10 pages, 4 figures, supplemental material

Silicon anisotropy in a bi-dimensional optomechanical cavity

Authors: Cauê M. Kersul, Rodrigo Benevides, Flávio Moraes, Gabriel H. M. de Aguiar, Andreas Wallucks, Simon Gröblacher, Gustavo S. Wiederhecker, Thiago P. Mayer Alegre

Abstract: In this work, we study the effects of mechanical anisotropy in a 2D optomechanical crystal geometry. We fabricate and measure devices with different orientations, showing the dependence of the mechanical spectrum and the optomechanical coupling with the relative angle of the device to the crystallography directions of silicon. Our results show that the device orientation strongly affects its mecha… ▽ More In this work, we study the effects of mechanical anisotropy in a 2D optomechanical crystal geometry. We fabricate and measure devices with different orientations, showing the dependence of the mechanical spectrum and the optomechanical coupling with the relative angle of the device to the crystallography directions of silicon. Our results show that the device orientation strongly affects its mechanical band structure, which makes the devices more susceptible to fabrication imperfections. Finally, we show that our device is compatible with cryogenic measurements reaching ground state occupancy of 0.2 phonons at mK temperature. △ Less

Submitted 18 November, 2022; originally announced November 2022.

Comments: 5 pages 4 figures

Beating ringdowns of near-degenerate mechanical resonances

Authors: Matthijs H. J. de Jong, Andrea Cupertino, Dongil Shin, Simon Gröblacher, Farbod Alijani, Peter G. Steeneken, Richard A. Norte

Abstract: Mechanical resonators that possess coupled modes with harmonic frequency relations have recently sparked interest due to their suitability for controllable energy transfer and non-Hermitian dynamics. Here, we show coupling between high Q-factor ($>\!\!10^4$) resonances with a nearly 1:1 frequency relation in spatially-symmetric microresonators. We develop and demonstrate a method to analyze their… ▽ More Mechanical resonators that possess coupled modes with harmonic frequency relations have recently sparked interest due to their suitability for controllable energy transfer and non-Hermitian dynamics. Here, we show coupling between high Q-factor ($>\!\!10^4$) resonances with a nearly 1:1 frequency relation in spatially-symmetric microresonators. We develop and demonstrate a method to analyze their dynamical behavior based on the simultaneous and resonant detection of both spectral peaks, and validate this with experimental results. The frequency difference between the peaks modulates their ringdown, and creates a beat pattern in the linear decay. This method applies both to the externally driven and the Brownian motion (thermal) regime, and allows characterization of both linear and nonlinear parameters. The mechanism behind this method renders it broadly applicable to both optical and electrical readout, as well as to different mechanical systems. This will aid studies using near-degenerate mechanical modes, for e.g., optomechanical energy transfer, synchronization and gyroscopic sensors. △ Less

Submitted 25 August, 2023; v1 submitted 17 November, 2022; originally announced November 2022.

Journal ref: Physical Review Applied 20, 024053 (2023)

An integrated microwave-to-optics interface for scalable quantum computing

Authors: Matthew J. Weaver, Pim Duivestein, Alexandra C. Bernasconi, Selim Scharmer, Mathilde Lemang, Thierry C. van Thiel, Frederick Hijazi, Bas Hensen, Simon Gröblacher, Robert Stockill

Abstract: Microwave-to-optics transduction is emerging as a vital technology for scaling quantum computers and quantum networks. To establish useful entanglement links between qubit processing units, several key conditions have to be simultaneously met: the transducer must add less than a single quantum of input referred noise and operate with high-efficiency, as well as large bandwidth and high repetition… ▽ More Microwave-to-optics transduction is emerging as a vital technology for scaling quantum computers and quantum networks. To establish useful entanglement links between qubit processing units, several key conditions have to be simultaneously met: the transducer must add less than a single quantum of input referred noise and operate with high-efficiency, as well as large bandwidth and high repetition rate. Here we present a new design for an integrated transducer based on a planar superconducting resonator coupled to a silicon photonic cavity through a mechanical oscillator made of lithium niobate on silicon. We experimentally demonstrate its unique performance and potential for simultaneously realizing all of the above conditions, measuring added noise that is limited to a few photons, transduction efficiencies as high as 0.9%, with a bandwidth of 14.8 MHz and a repetition rate of up to 100 kHz. Our device couples directly to a 50-Ohm transmission line and can easily be scaled to a large number of transducers on a single chip, paving the way for distributed quantum computing. △ Less

Submitted 27 October, 2022; originally announced October 2022.

Journal ref: Nat. Nanotechnol. 19, 166-172 (2024)

Microwave-optics Entanglement via Cavity Optomagnomechanics

Authors: Zhi-Yuan Fan, Liu Qiu, Simon Gröblacher, Jie Li

Abstract: Microwave-optics entanglement is a vital component for building hybrid quantum networks. Here, a new mechanism for preparing stationary entanglement between microwave and optical cavity fields in a cavity optomagnomechanical system is proposed. It consists of a magnon mode in a ferrimagnetic crystal that couples directly to a microwave cavity mode via the magnetic dipole interaction, and indirectl… ▽ More Microwave-optics entanglement is a vital component for building hybrid quantum networks. Here, a new mechanism for preparing stationary entanglement between microwave and optical cavity fields in a cavity optomagnomechanical system is proposed. It consists of a magnon mode in a ferrimagnetic crystal that couples directly to a microwave cavity mode via the magnetic dipole interaction, and indirectly to an optical cavity through the deformation displacement of the crystal. The mechanical displacement is induced by the magnetostrictive force and coupled to the optical cavity via radiation pressure. Both the opto- and magnomechanical couplings are dispersive. Magnon-phonon entanglement is created via magnomechanical parametric down-conversion, which is further distributed to optical and microwave photons via simultaneous optomechanical beamsplitter interaction and electromagnonic state-swap interaction, yielding stationary microwave-optics entanglement. The microwave-optics entanglement is robust against thermal noise, which will find broad potential applications in quantum networks and quantum information processing with hybrid quantum systems. △ Less

Submitted 29 September, 2023; v1 submitted 22 August, 2022; originally announced August 2022.

Comments: Accepted to Laser & Photonics Reviews, close to published version

Journal ref: Laser Photonics Rev. 17, 2200866 (2023)

Mechanical overtone frequency combs

Authors: Matthijs H. J. de Jong, Adarsh Ganesan, Andrea Cupertino, Simon Gröblacher, Richard A. Norte

Abstract: Mechanical frequency combs are poised to bring the applications and utility of optical frequency combs into the mechanical domain. So far, their main challenge has been strict requirements on drive frequencies and power, which complicate operation. We demonstrate a straightforward mechanism to create a frequency comb consisting of mechanical overtones (integer multiples) of a single eigenfrequency… ▽ More Mechanical frequency combs are poised to bring the applications and utility of optical frequency combs into the mechanical domain. So far, their main challenge has been strict requirements on drive frequencies and power, which complicate operation. We demonstrate a straightforward mechanism to create a frequency comb consisting of mechanical overtones (integer multiples) of a single eigenfrequency, by monolithically integrating a suspended dielectric membrane with a counter-propagating optical trap. The periodic optical field modulates the dielectrophoretic force on the membrane at the overtones of a membrane's motion. These overtones share a fixed frequency and phase relation, and constitute a mechanical frequency comb. The periodic optical field also creates an optothermal parametric drive that requires no additional power or external frequency reference. This combination of effects results in an easy-to-use mechanical frequency comb platform that requires no precise alignment, no additional feedback or control electronics, and only uses a single, mW continuous wave laser beam. This highlights the overtone frequency comb as the straightforward future for applications in sensing, metrology and quantum acoustics. △ Less

Submitted 20 March, 2023; v1 submitted 13 July, 2022; originally announced July 2022.

Journal ref: Nat Commun 14, 1458 (2023)

Coherent feedback in optomechanical systems in the sideband-unresolved regime

Authors: **gkun Guo, Simon Gröblacher

Abstract: Preparing macroscopic mechanical resonators close to their motional quantum groundstate and generating entanglement with light offers great opportunities in studying fundamental physics and in develo** a new generation of quantum applications. Here we propose an experimentally interesting scheme, which is particularly well suited for systems in the sideband-unresolved regime, based on coherent f… ▽ More Preparing macroscopic mechanical resonators close to their motional quantum groundstate and generating entanglement with light offers great opportunities in studying fundamental physics and in develo** a new generation of quantum applications. Here we propose an experimentally interesting scheme, which is particularly well suited for systems in the sideband-unresolved regime, based on coherent feedback with linear, passive optical components to achieve groundstate cooling and photon-phonon entanglement generation with optomechanical devices. We find that, by introducing an additional passive element - either a narrow linewidth cavity or a mirror with a delay line - an optomechanical system in the deeply sideband-unresolved regime will exhibit dynamics similar to one that is sideband-resolved. With this new approach, the experimental realization of groundstate cooling and optomechanical entanglement is well within reach of current integrated state-of-the-art high-Q mechanical resonators. △ Less

Submitted 26 October, 2022; v1 submitted 28 June, 2022; originally announced June 2022.

Journal ref: Quantum 6, 848 (2022)

Mechanical dissipation by substrate-mode coupling in SiN resonators

Authors: Matthijs H. J. de Jong, Malte A. ten Wolde, Andrea Cupertino, Simon Gröblacher, Peter G. Steeneken, Richard A. Norte

Abstract: State-of-the-art nanomechanical resonators are heralded as a central component for next-generation clocks, filters, resonant sensors and quantum technologies. To practically build these technologies will require monolithic integration of microchips, resonators and readout systems. While it is widely seen that mounting microchip substrates into a system can greatly impact the performance of high-Q… ▽ More State-of-the-art nanomechanical resonators are heralded as a central component for next-generation clocks, filters, resonant sensors and quantum technologies. To practically build these technologies will require monolithic integration of microchips, resonators and readout systems. While it is widely seen that mounting microchip substrates into a system can greatly impact the performance of high-Q resonators, a systematic study has remained elusive, owing to the variety of physical processes and factors that influence the dissipation. Here, we analytically analyze a mechanism by which substrates couple to resonators manufactured on them, and experimentally demonstrate that this coupling can increase the mechanical dissipation of nanomechanical resonators when the resonance frequencies of resonator and substrate coincide. More generally, we then show a similar coupling mechanism can exist between two adjacent resonators. Since the substrate-mode coupling mechanism strongly depends on both the resonator position on the substrate and the mounting of the substrate, this work provides key design guidelines for high-precision nanomechanical technologies. △ Less

Submitted 26 July, 2022; v1 submitted 2 June, 2022; originally announced June 2022.

Journal ref: Applied Physics Letters 121, 032201 (2022)

On-chip distribution of quantum information using traveling phonons

Authors: Amirparsa Zivari, Niccolò Fiaschi, Roel Burgwal, Ewold Verhagen, Robert Stockill, Simon Gröblacher

Abstract: Distributing quantum entanglement on a chip is a crucial step towards realizing scalable quantum processors. Using traveling phonons - quantized guided mechanical wavepackets - as a medium to transmit quantum states is currently gaining significant attention, due to their small size and low propagation speed compared to other carriers, such as electrons or photons. Moreover, phonons are highly pro… ▽ More Distributing quantum entanglement on a chip is a crucial step towards realizing scalable quantum processors. Using traveling phonons - quantized guided mechanical wavepackets - as a medium to transmit quantum states is currently gaining significant attention, due to their small size and low propagation speed compared to other carriers, such as electrons or photons. Moreover, phonons are highly promising candidates to connect heterogeneous quantum systems on a chip, such as microwave and optical photons for long-distance transmission of quantum states via optical fibers. Here, we experimentally demonstrate the feasibility of distributing quantum information using phonons, by realizing quantum entanglement between two traveling phonons and creating a time-bin encoded traveling phononic qubit. The mechanical quantum state is generated in an optomechanical cavity and then launched into a phononic waveguide in which it propagates for around two hundred micrometers. We further show how the phononic, together with a photonic qubit, can be used to violate a Bell-type inequality. △ Less

Submitted 25 November, 2022; v1 submitted 11 April, 2022; originally announced April 2022.

Journal ref: Science Adv. 8, eadd2811 (2022)

Integrated optical-readout of a high-Q mechanical out-of-plane mode

Authors: **gkun Guo, Simon Gröblacher

Abstract: The rapid development of high-Q macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-Q structures on a chip, while simultaneously achieving large coupling strengths through an optical read-out. Here,… ▽ More The rapid development of high-Q macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-Q structures on a chip, while simultaneously achieving large coupling strengths through an optical read-out. Here, we present a versatile fabrication method, which allows us to build fully integrated optomechanical structures. We place a photonic crystal cavity directly above a mechanical resonator with high-Q fundamental out-of-plane mode, separated by a small gap. The highly confined optical field has a large overlap with the mechanical mode, enabling strong optomechanical interaction strengths. Furthermore, we implement a novel photonic crystal design, which allows for a very large cavity photon number, a highly important feature for optomechanical experiments and sensor applications. Our versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device layout. Additionally, it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-Q out-of-plane modes alike. △ Less

Submitted 13 February, 2022; originally announced February 2022.

Journal ref: Light Sci. Appl. 11, 282 (2022)

Non-classical mechanical states guided in a phononic waveguide

Authors: Amirparsa Zivari, Robert Stockill, Niccolò Fiaschi, Simon Gröblacher

Abstract: The ability to create, manipulate and detect non-classical states of light has been key for many recent achievements in quantum physics and for develo** quantum technologies. Achieving the same level of control over phonons, the quanta of vibrations, could have a similar impact, in particular on the fields of quantum sensing and quantum information processing. Here we present a crucial step towa… ▽ More The ability to create, manipulate and detect non-classical states of light has been key for many recent achievements in quantum physics and for develo** quantum technologies. Achieving the same level of control over phonons, the quanta of vibrations, could have a similar impact, in particular on the fields of quantum sensing and quantum information processing. Here we present a crucial step towards this level of control and realize a single-mode waveguide for individual phonons in a suspended silicon micro-structure. We use a cavity-waveguide architecture, where the cavity is used as a source and detector for the mechanical excitations, while the waveguide has a free standing end in order to reflect the phonons. This enables us to observe multiple round-trips of the phonons between the source and the reflector. The long mechanical lifetime of almost 100 $μs$ demonstrates the possibility of nearly lossless transmission of single phonons over, in principle, tens of centimeters. Our experiment demonstrates full on-chip control over traveling single phonons strongly confined in the directions transverse to the propagation axis, potentially enabling a time-encoded multimode quantum memory at telecom wavelength and advanced quantum acoustics experiments. △ Less

Submitted 15 July, 2022; v1 submitted 13 August, 2021; originally announced August 2021.

Journal ref: Nature Phys. 18, 789-793 (2022)

Ultra-low-noise Microwave to Optics Conversion in Gallium Phosphide

Authors: Robert Stockill, Moritz Forsch, Frederick Hijazi, Grégoire Beaudoin, Konstantinos Pantzas, Isabelle Sagnes, Rémy Braive, Simon Gröblacher

Abstract: Mechanical resonators can act as excellent intermediaries to interface single photons in the microwave and optical domains due to their high quality factors. Nevertheless, the optical pump required to overcome the large energy difference between the frequencies can add significant noise to the transduced signal. Here we exploit the remarkable properties of thin-film gallium phosphide to demonstrat… ▽ More Mechanical resonators can act as excellent intermediaries to interface single photons in the microwave and optical domains due to their high quality factors. Nevertheless, the optical pump required to overcome the large energy difference between the frequencies can add significant noise to the transduced signal. Here we exploit the remarkable properties of thin-film gallium phosphide to demonstrate bi-directional on-chip conversion between microwave and optical frequencies, realized by piezoelectric actuation of a Gigahertz-frequency optomechanical resonator. The large optomechanical coupling and the suppression of two-photon absorption in the material allows us to operate the device at optomechanical cooperativities greatly exceeding one. Alternatively, when using a pulsed upconversion pump, we demonstrate that we induce less than one thermal noise phonon. We include a high-impedance on-chip matching resonator to mediate the mechanical load with the 50-Ohm source. Our results establish gallium phosphide as a versatile platform for ultra-low-noise conversion of photons between microwave and optical frequencies. △ Less

Submitted 25 November, 2022; v1 submitted 9 July, 2021; originally announced July 2021.

Journal ref: Nature Commun. 13, 6583 (2022)

Optomechanical quantum teleportation

Authors: Niccolò Fiaschi, Bas Hensen, Andreas Wallucks, Rodrigo Benevides, Jie Li, Thiago P. Mayer Alegre, Simon Gröblacher

Abstract: Quantum teleportation, the faithful transfer of an unknown input state onto a remote quantum system, is a key component in long distance quantum communication protocols and distributed quantum computing. At the same time, high frequency nano-optomechanical systems hold great promise as nodes in a future quantum network, operating on-chip at low-loss optical telecom wavelengths with long mechanical… ▽ More Quantum teleportation, the faithful transfer of an unknown input state onto a remote quantum system, is a key component in long distance quantum communication protocols and distributed quantum computing. At the same time, high frequency nano-optomechanical systems hold great promise as nodes in a future quantum network, operating on-chip at low-loss optical telecom wavelengths with long mechanical lifetimes. Recent demonstrations include entanglement between two resonators, a quantum memory and microwave to optics transduction. Despite these successes, quantum teleportation of an optical input state onto a long-lived optomechanical memory is an outstanding challenge. Here we demonstrate quantum teleportation of a polarization-encoded optical input state onto the joint state of a pair of nanomechanical resonators. Our protocol also allows for the first time to store and retrieve an arbitrary qubit state onto a dual-rail encoded optomechanical quantum memory. This work demonstrates the full functionality of a single quantum repeater node, and presents a key milestone towards applications of optomechanical systems as quantum network nodes. △ Less

Submitted 25 November, 2022; v1 submitted 5 April, 2021; originally announced April 2021.

Journal ref: Nature Photonics 15, 817-821 (2021)

Coherent mechanical noise cancellation and cooperativity competition in optomechanical arrays

Authors: Matthijs H. J. de Jong, Jie Li, Claus Gärtner, Richard A. Norte, Simon Gröblacher

Abstract: Studying the interplay between multiple coupled mechanical resonators is a promising new direction in the field of optomechanics. Understanding the dynamics of the interaction can lead to rich new effects, such as enhanced coupling and multi-body physics. In particular, multi-resonator optomechanical systems allow for distinct dynamical effects due to the optical cavity coherently coupling mechani… ▽ More Studying the interplay between multiple coupled mechanical resonators is a promising new direction in the field of optomechanics. Understanding the dynamics of the interaction can lead to rich new effects, such as enhanced coupling and multi-body physics. In particular, multi-resonator optomechanical systems allow for distinct dynamical effects due to the optical cavity coherently coupling mechanical resonators. Here, we study the mechanical response of two SiN membranes and a single optical mode, and find that the cavity induces a time delay between the local and cavity-transduced thermal noises experienced by the resonators. This results in an optomechanical phase lag that causes destructive interference, cancelling the mechanical thermal noise by up to 20 dB in a controllable fashion, matching our theoretical expectation. Based on the effective coupling between membranes, we further propose, derive and measure a collective effect, cooperativity competition on mechanical dissipation, whereby the linewidth of one resonator depends on the coupling efficiency (cooperativity) of the other resonator. △ Less

Submitted 2 February, 2022; v1 submitted 21 December, 2020; originally announced December 2020.

Journal ref: Optica 9, 170-176 (2022)

Fabrication of on-chip probes for double-tip scanning tunneling microscopy

Authors: Maarten Leeuwenhoek, Freek Groenewoud, Kees van Oosten, Tjerk Benschop, Milan P. Allan, Simon Gröblacher

Abstract: Reduction of the inter-probe distance in multi-probe and double-tip STM down to the nanometer scale has been a longstanding and technically difficult challenge. Recent multi-probe systems have allowed for significant progress by achieving distances of around 30 nm using two individually driven, traditional metal wire tips. For situations where simple alignment and a fixed separation can be advanta… ▽ More Reduction of the inter-probe distance in multi-probe and double-tip STM down to the nanometer scale has been a longstanding and technically difficult challenge. Recent multi-probe systems have allowed for significant progress by achieving distances of around 30 nm using two individually driven, traditional metal wire tips. For situations where simple alignment and a fixed separation can be advantageous, we here present the fabrication of on-chip double-tip devices that incorporate two mechanically fixed gold tips with a tip separation of only 35 nm. We utilize the excellent mechanical, insulating and dielectric properties of high quality SiN as a base material to realize easy-to-implement, lithographically defined and mechanically stable tips. With their large contact pads and adjustable footprint these novel tips can be easily integrated with most existing commercial combined STM/AFM systems. △ Less

Submitted 2 November, 2020; originally announced November 2020.

Journal ref: Microsyst. Nanoeng. 6, 99 (2020)

Hybrid integration of silicon photonic devices on lithium niobate for optomechanical wavelength conversion

Authors: Igor Marinković, Maxwell Drimmer, Bas Hensen, Simon Gröblacher

Abstract: The rapid development of quantum information processors has accelerated the demand for technologies that enable quantum networking. One promising approach uses mechanical resonators as an intermediary between microwave and optical fields. Signals from a superconducting, topological, or spin qubit processor can then be converted coherently to optical states at telecom wavelengths. However, current… ▽ More The rapid development of quantum information processors has accelerated the demand for technologies that enable quantum networking. One promising approach uses mechanical resonators as an intermediary between microwave and optical fields. Signals from a superconducting, topological, or spin qubit processor can then be converted coherently to optical states at telecom wavelengths. However, current devices built from homogeneous structures suffer from added noise and small conversion efficiency. Combining advantageous properties of different materials into a heterogeneous design should allow for superior quantum transduction devices -- so far these hybrid approaches have however been hampered by complex fabrication procedures. Here we present a novel integration method based on previous pick-and-place ideas, that can combine independently fabricated device components of different materials into a single device. The method allows for precision alignment by continuous optical monitoring during the process. Using our method, we assemble a hybrid silicon-lithium niobate device with state-of-the-art wavelength conversion characteristics. △ Less

Submitted 18 January, 2021; v1 submitted 16 October, 2020; originally announced October 2020.

Comments: The source data for the figures is available at https://doi.org/10.5281/zenodo.4446545

Journal ref: Nano Lett. 21, 529-535 (2021)

Entangling the vibrational modes of two massive ferromagnetic spheres using cavity magnomechanics

Authors: Jie Li, Simon Gröblacher

Abstract: We present a scheme to entangle the vibrational phonon modes of two massive ferromagnetic spheres in a dual-cavity magnomechanical system. In each cavity, a microwave cavity mode couples to a magnon mode (spin wave) via the magnetic dipole interaction, and the latter further couples to a deformation phonon mode of the ferromagnetic sphere via a nonlinear magnetostrictive interaction. We show that… ▽ More We present a scheme to entangle the vibrational phonon modes of two massive ferromagnetic spheres in a dual-cavity magnomechanical system. In each cavity, a microwave cavity mode couples to a magnon mode (spin wave) via the magnetic dipole interaction, and the latter further couples to a deformation phonon mode of the ferromagnetic sphere via a nonlinear magnetostrictive interaction. We show that by directly driving the magnon mode with a red-detuned microwave field to activate the magnomechanical anti-Stokes process a cavity-magnon-phonon state-swap interaction can be realized. Therefore, if the two cavities are further driven by a two-mode squeezed vacuum field, the quantum correlation of the driving fields is successively transferred to the two magnon modes and subsequently to the two phonon modes, i.e., the two ferromagnetic spheres become remotely entangled. Our work demonstrates that cavity magnomechanical systems allow to prepare quantum entangled states at a more massive scale than currently possible with other schemes. △ Less

Submitted 17 February, 2021; v1 submitted 17 July, 2020; originally announced July 2020.

Comments: QST Special issue on "Quantum Optomechanics". The source data for the figures is available at https://doi.org/10.5281/zenodo.4446839

Journal ref: Quantum Sci. Technol. 6, 024005 (2021)

Proposal for optomechanical quantum teleportation

Authors: Jie Li, Andreas Wallucks, Rodrigo Benevides, Niccolo Fiaschi, Bas Hensen, Thiago P. Mayer Alegre, Simon Gröblacher

Abstract: We present a novel discrete-variable quantum teleportation scheme using pulsed optomechanics. In our proposal, we demonstrate how an unknown optical input state can be transferred onto the joint state of a pair of mechanical oscillators, without physically interacting with one another. We further analyze how experimental imperfections will affect the fidelity of the teleportation and highlight how… ▽ More We present a novel discrete-variable quantum teleportation scheme using pulsed optomechanics. In our proposal, we demonstrate how an unknown optical input state can be transferred onto the joint state of a pair of mechanical oscillators, without physically interacting with one another. We further analyze how experimental imperfections will affect the fidelity of the teleportation and highlight how our scheme can be realized in current state-of-the-art optomechanical systems. △ Less

Submitted 3 September, 2020; v1 submitted 18 May, 2020; originally announced May 2020.

Comments: The source data for the figures is available at https://doi.org/10.5281/zenodo.4013836

Journal ref: Phys. Rev. A 102, 032402 (2020)

Stationary quantum entanglement between a massive mechanical membrane and a low frequency LC circuit

Authors: Jie Li, Simon Gröblacher

Abstract: We study electro-mechanical entanglement in a system where a massive membrane is capacitively coupled to a {\it low frequency} LC resonator. In opto- and electro-mechanics, the entanglement between a megahertz (MHz) mechanical resonator and a gigahertz (GHz) microwave LC resonator has been widely and well explored, and recently experimentally demonstrated. Typically, coupling is realized through a… ▽ More We study electro-mechanical entanglement in a system where a massive membrane is capacitively coupled to a {\it low frequency} LC resonator. In opto- and electro-mechanics, the entanglement between a megahertz (MHz) mechanical resonator and a gigahertz (GHz) microwave LC resonator has been widely and well explored, and recently experimentally demonstrated. Typically, coupling is realized through a radiation pressure-like interaction, and entanglement is generated by adopting an appropriate microwave drive. Through this approach it is however not evident how to create entanglement in the case where both the mechanical and LC oscillators are of low frequency, e.g., around 1 MHz. Here we provide an effective approach to entangling two low-frequency resonators by further coupling the membrane to an optical cavity. The cavity is strongly driven by a red-detuned laser, sequentially cooling the mechanical and electrical modes, which results in stationary electro-mechanical entanglement at experimentally achievable temperatures. The entanglement directly originates from the electro-mechanical coupling itself and due to its quantum nature will allow testing quantum theories at a more macroscopic scale than currently possible. △ Less

Submitted 24 June, 2020; v1 submitted 9 February, 2020; originally announced February 2020.

Comments: The source data for the figures is available at https://doi.org/10.5281/zenodo.3906605

Journal ref: New J. Phys. 22 (2020) 063041

Feedback cooling of a room temperature mechanical oscillator close to its motional groundstate

Authors: **gkun Guo, Richard A. Norte, Simon Gröblacher

Abstract: Preparing mechanical systems in their lowest possible entropy state, the quantum ground state, starting from a room temperature environment is a key challenge in quantum optomechanics. This would not only enable creating quantum states of truly macroscopic systems, but at the same time also lay the groundwork for a new generation of quantum-limited mechanical sensors in ambient environments. Laser… ▽ More Preparing mechanical systems in their lowest possible entropy state, the quantum ground state, starting from a room temperature environment is a key challenge in quantum optomechanics. This would not only enable creating quantum states of truly macroscopic systems, but at the same time also lay the groundwork for a new generation of quantum-limited mechanical sensors in ambient environments. Laser cooling of optomechanical devices using the radiation pressure force combined with cryogenic precooling has been successful at demonstrating ground state preparation of various devices, while a similar demonstration starting from a room temperature environment remains an outstanding goal. Here, we combine integrated nanophotonics with phononic band gap engineering to simultaneously overcome prior limitations in the isolation from the surrounding environment and the achievable mechanical frequencies, as well as limited optomechanical coupling strength, demonstrating a single-photon cooperativity of 200. This new microchip technology allows us to feedback cool a mechanical resonator to around 1 mK, near its motional ground state, from room temperature. Our experiment marks a major step toward accessible, widespread quantum technologies with mechanical resonators. △ Less

Submitted 24 June, 2020; v1 submitted 4 November, 2019; originally announced November 2019.

Comments: The source data for the figures is available at https://doi.org/10.5281/zenodo.3906185

Journal ref: Phys. Rev. Lett. 123, 223602 (2019)

A quantum memory at telecom wavelengths

Authors: Andreas Wallucks, Igor Marinković, Bas Hensen, Robert Stockill, Simon Gröblacher

Abstract: Nanofabricated mechanical resonators are gaining significant momentum among potential quantum technologies due to their unique design freedom and independence from naturally occurring resonances. With their functionality being widely detached from material choice, they constitute ideal tools to be used as transducers, i.e. intermediaries between different quantum systems, and as memory elements in… ▽ More Nanofabricated mechanical resonators are gaining significant momentum among potential quantum technologies due to their unique design freedom and independence from naturally occurring resonances. With their functionality being widely detached from material choice, they constitute ideal tools to be used as transducers, i.e. intermediaries between different quantum systems, and as memory elements in conjunction with quantum communication and computing devices. Their capability to host ultra-long lived phonon modes is particularity attractive for non-classical information storage, both for future quantum technologies as well as for fundamental tests of physics. Here we demonstrate such a mechanical quantum memory with an energy decay time of $T_1\approx2$ ms, which is controlled through an optical interface engineered to natively operate at telecom wavelengths. We further investigate the coherence of the memory, equivalent to the dephasing $T_2^*$ for qubits, which exhibits a power dependent value between 15 and 112 $μ$s. This demonstration is enabled by a novel optical scheme to create a superposition state of $\rvert{0}\rangle+\rvert{1}\rangle$ mechanical excitations, with an arbitrary ratio between the vacuum and single phonon components. △ Less

Submitted 16 October, 2019; originally announced October 2019.

Journal ref: Nature Phys. 16, 772-777 (2020)

Gallium phosphide as a piezoelectric platform for quantum optomechanics

Authors: Robert Stockill, Moritz Forsch, Grégoire Beaudoin, Konstantinos Pantzas, Isabelle Sagnes, Rémy Braive, Simon Gröblacher

Abstract: Recent years have seen extraordinary progress in creating quantum states of mechanical oscillators, leading to great interest in potential applications for such systems in both fundamental as well as applied quantum science. One example is the use of these devices as transducers between otherwise disparate quantum systems. In this regard, a promising approach is to build integrated piezoelectric o… ▽ More Recent years have seen extraordinary progress in creating quantum states of mechanical oscillators, leading to great interest in potential applications for such systems in both fundamental as well as applied quantum science. One example is the use of these devices as transducers between otherwise disparate quantum systems. In this regard, a promising approach is to build integrated piezoelectric optomechanical devices, that are then coupled to microwave circuits. Optical absorption, low quality factors and other challenges have up to now prevented operation in the quantum regime, however. Here, we design and characterize such a piezoelectric optomechanical device fabricated from gallium phosphide in which a 2.9~GHz mechanical mode is coupled to a high quality factor optical resonator in the telecom band. The large electronic bandgap and the resulting low optical absorption of this new material, on par with devices fabricated from silicon, allows us to demonstrate quantum behavior of the structure. This not only opens the way for realizing noise-free quantum transduction between microwaves and optics, but in principle also from various color centers with optical transitions in the near visible to the telecom band. △ Less

Submitted 17 September, 2019; originally announced September 2019.

Comments: 8 pages, 5 figures

Journal ref: Phys. Rev. Lett. 123, 163602 (2019)

Microwave-to-optics conversion using a mechanical oscillator in its quantum groundstate

Authors: Moritz Forsch, Robert Stockill, Andreas Wallucks, Igor Marinkovic, Claus Gärtner, Richard A. Norte, Frank van Otten, Andrea Fiore, Kartik Srinivasan, Simon Gröblacher

Abstract: Conversion between signals in the microwave and optical domains is of great interest both for classical telecommunication, as well as for connecting future superconducting quantum computers into a global quantum network. For quantum applications, the conversion has to be both efficient, as well as operate in a regime of minimal added classical noise. While efficient conversion has been demonstrate… ▽ More Conversion between signals in the microwave and optical domains is of great interest both for classical telecommunication, as well as for connecting future superconducting quantum computers into a global quantum network. For quantum applications, the conversion has to be both efficient, as well as operate in a regime of minimal added classical noise. While efficient conversion has been demonstrated using mechanical transducers, they have so far all operated with a substantial thermal noise background. Here, we overcome this limitation and demonstrate coherent conversion between GHz microwave signals and the optical telecom band with a thermal background of less than one phonon. We use an integrated, on-chip electro-opto-mechanical device that couples surface acoustic waves driven by a resonant microwave signal to an optomechanical crystal featuring a 2.7 GHz mechanical mode. We initialize the mechanical mode in its quantum groundstate, which allows us to perform the transduction process with minimal added thermal noise, while maintaining an optomechanical cooperativity >1, so that microwave photons mapped into the mechanical resonator are effectively upconverted to the optical domain. We further verify the preservation of the coherence of the microwave signal throughout the transduction process. △ Less

Submitted 2 May, 2020; v1 submitted 18 December, 2018; originally announced December 2018.

Journal ref: Nature Phys. 16, 69-74 (2020)

Integrated optomechanical arrays of two high reflectivity SiN membranes

Authors: Claus Gärtner, João P. Moura, Wouter Haaxman, Richard A. Norte, Simon Gröblacher

Abstract: Multi-element cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to on… ▽ More Multi-element cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 $μ$m-long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multi-mode quantum experiments. △ Less

Submitted 15 November, 2018; v1 submitted 17 September, 2018; originally announced September 2018.

Journal ref: Nano Lett. 18, 7171 (2018)

An optomechanical Bell test

Authors: Igor Marinkovic, Andreas Wallucks, Ralf Riedinger, Sungkun Hong, Markus Aspelmeyer, Simon Gröblacher

Abstract: Over the past few decades, experimental tests of Bell-type inequalities have been at the forefront of understanding quantum mechanics and its implications. These strong bounds on specific measurements on a physical system originate from some of the most fundamental concepts of classical physics - in particular that properties of an object are well defined independent of measurements (realism) and… ▽ More Over the past few decades, experimental tests of Bell-type inequalities have been at the forefront of understanding quantum mechanics and its implications. These strong bounds on specific measurements on a physical system originate from some of the most fundamental concepts of classical physics - in particular that properties of an object are well defined independent of measurements (realism) and only affected by local interactions (locality). The violation of these bounds unambiguously shows that the measured system does not behave classically, void of any assumption on the validity of quantum theory. It has also found applications in quantum technologies for certifying the suitability of devices for generating quantum randomness, distributing secret keys and for quantum computing. Here we report on the violation of a Bell inequality involving a massive, macroscopic mechanical system. We create light-matter entanglement between the vibrational motion of two silicon optomechanical oscillators, each comprising approx. $10^{10}$ atoms, and two optical modes. This state allows us to violate a Bell inequality by more than 4 standard deviations, directly confirming the non-classical behavior of our optomechanical system under the fair sampling assumption. △ Less

Submitted 30 November, 2018; v1 submitted 27 June, 2018; originally announced June 2018.

Journal ref: Phys. Rev. Lett. 121, 220404 (2018)

Near-field coupling of a levitated nanoparticle to a photonic crystal cavity

Authors: Lorenzo Magrini, Richard A. Norte, Ralf Riedinger, Igor Marinković, David Grass, Uroš Delić, Simon Gröblacher, Sungkun Hong, Markus Aspelmeyer

Abstract: Quantum control of levitated dielectric particles is an emerging subject in quantum optomechanics. A major challenge is to efficiently measure and manipulate the particle's motion at the Heisenberg uncertainty limit. Here we present a nanophotonic interface suited to address this problem. By optically trap** a 150 nm silica particle and placing it in the near field of a photonic crystal cavity,… ▽ More Quantum control of levitated dielectric particles is an emerging subject in quantum optomechanics. A major challenge is to efficiently measure and manipulate the particle's motion at the Heisenberg uncertainty limit. Here we present a nanophotonic interface suited to address this problem. By optically trap** a 150 nm silica particle and placing it in the near field of a photonic crystal cavity, we achieve tunable single-photon optomechanical coupling of up to $g_0/2π=9$ kHz, three orders of magnitude larger than previously reported for levitated cavity optomechanical systems. Efficient collection and guiding of light through the nanophotonic structure results in a per-photon displacement sensitivity that is increased by two orders of magnitude compared to conventional far-field detection. The demonstrated performance shows a promising route for room temperature quantum optomechanics. △ Less

Submitted 13 January, 2019; v1 submitted 18 April, 2018; originally announced April 2018.

Journal ref: Optica 5, 1597-1602 (2018)

Generation and detection of non-Gaussian phonon-added coherent states in optomechanical systems

Authors: Jie Li, Simon Gröblacher, Shi-Yao Zhu, G. S. Agarwal

Abstract: Adding excitations on a coherent state provides an effective way to observe nonclassical properties of radiation fields. Here we describe and analyse how to apply this concept to the motional state of a mechanical oscillator and present a full scheme to prepare non-Gaussian {\it phonon}-added coherent states of the mechanical motion in cavity optomechanics. We first generate a mechanical coherent… ▽ More Adding excitations on a coherent state provides an effective way to observe nonclassical properties of radiation fields. Here we describe and analyse how to apply this concept to the motional state of a mechanical oscillator and present a full scheme to prepare non-Gaussian {\it phonon}-added coherent states of the mechanical motion in cavity optomechanics. We first generate a mechanical coherent state using electromagnetically induced transparency. We then add a single phonon onto the coherent state via optomechanical parametric down-conversion combined with single photon detection. We validate this single-phonon-added coherent state by using a red-detuned beam and reading out the state of the optical output field. This approach allows us to verify nonclassical properties of the phonon state, such as sub-Poissonian character and quadrature squeezing. We further show that our scheme can be directly implemented using existing devices, and is generic in nature and hence applicable to a variety of systems in opto- and electromechanics. △ Less

Submitted 18 June, 2018; v1 submitted 18 March, 2018; originally announced March 2018.

Comments: slightly extended main text, Supp. Mat. as in v2. to appear in PRA Rapid Comm

Journal ref: Phys. Rev. A 98, 011801 (2018)

Nanofabricated tips for device-based scanning tunneling microscopy

Authors: Maarten Leeuwenhoek, Richard A. Norte, Koen M. Bastiaans, Doohee Cho, Irene Battisti, Yaroslav M. Blanter, Simon Gröblacher, Milan P. Allan

Abstract: We report on the fabrication and performance of a new kind of tip for scanning tunneling microscopy. By fully incorporating a metallic tip on a silicon chip using modern micromachining and nanofabrication techniques, we realize so-called smart tips and show the possibility of device-based STM tips. Contrary to conventional etched metal wire tips, these can be integrated into lithographically defin… ▽ More We report on the fabrication and performance of a new kind of tip for scanning tunneling microscopy. By fully incorporating a metallic tip on a silicon chip using modern micromachining and nanofabrication techniques, we realize so-called smart tips and show the possibility of device-based STM tips. Contrary to conventional etched metal wire tips, these can be integrated into lithographically defined electrical circuits. We describe a new fabrication method to create a defined apex on a silicon chip and experimentally demonstrate the high performance of the smart tips, both in stability and resolution. In situ tip preparation methods are possible and we verify that they can resolve the herringbone reconstruction and Friedel oscillations on Au(111) surfaces. We further present an overview of possible applications. △ Less

Submitted 2 May, 2020; v1 submitted 22 December, 2017; originally announced December 2017.

Journal ref: Nanotechnology 30, 335702 (2019)

Remote quantum entanglement between two micromechanical oscillators

Authors: Ralf Riedinger, Andreas Wallucks, Igor Marinkovic, Clemens Löschnauer, Markus Aspelmeyer, Sungkun Hong, Simon Gröblacher

Abstract: Entanglement, an essential feature of quantum theory that allows for inseparable quantum correlations to be shared between distant parties, is a crucial resource for quantum networks. Of particular importance is the ability to distribute entanglement between remote objects that can also serve as quantum memories. This has been previously realized using systems such as warm and cold atomic vapours,… ▽ More Entanglement, an essential feature of quantum theory that allows for inseparable quantum correlations to be shared between distant parties, is a crucial resource for quantum networks. Of particular importance is the ability to distribute entanglement between remote objects that can also serve as quantum memories. This has been previously realized using systems such as warm and cold atomic vapours, individual atoms and ions, and defects in solid-state systems. Practical communication applications require a combination of several advantageous features, such as a particular operating wavelength, high bandwidth and long memory lifetimes. Here we introduce a purely micromachined solid-state platform in the form of chip-based optomechanical resonators made of nanostructured silicon beams. We create and demonstrate entanglement between two micromechanical oscillators across two chips that are separated by 20 centimetres. The entangled quantum state is distributed by an optical field at a designed wavelength near 1550 nanometres. Therefore, our system can be directly incorporated in a realistic fibre-optic quantum network operating in the conventional optical telecommunication band. Our results are an important step towards the development of large-area quantum networks based on silicon photonics. △ Less

Submitted 6 August, 2018; v1 submitted 30 October, 2017; originally announced October 2017.

Journal ref: Nature 556, 473-477 (2018)

Centimeter-scale suspended photonic crystal mirrors

Authors: Joao P. Moura, Richard A. Norte, **gkun Guo, Clemens Schäfermeier, Simon Gröblacher

Abstract: Demand for lightweight, highly reflective and mechanically compliant mirrors for optics experiments has seen a significant surge. In this aspect, photonic crystal (PhC) membranes are ideal alternatives to conventional mirrors, as they provide high reflectivity with only a single suspended layer of patterned dielectric material. However, due to limitations in nanofabrication, these devices are usua… ▽ More Demand for lightweight, highly reflective and mechanically compliant mirrors for optics experiments has seen a significant surge. In this aspect, photonic crystal (PhC) membranes are ideal alternatives to conventional mirrors, as they provide high reflectivity with only a single suspended layer of patterned dielectric material. However, due to limitations in nanofabrication, these devices are usually not wider than 300 $μ$m. Here we experimentally demonstrate suspended PhC mirrors spanning areas up to 10$\times$10 mm. We overcome limitations imposed by the size of the PhC and measure reflectivities greater than 90% on 56 nm thick mirrors at a wavelength of 1550 nm -- an unrivaled performance compared to PhC mirrors with micro scale diameters. These structures bridge the gap between nano scale technologies and macroscopic optical elements. △ Less

Submitted 19 January, 2018; v1 submitted 25 July, 2017; originally announced July 2017.

Journal ref: Opt. Express 26, 1895-1909 (2018)

Hanbury Brown and Twiss interferometry of single phonons from an optomechanical resonator

Authors: Sungkun Hong, Ralf Riedinger, Igor Marinkovic, Andreas Wallucks, Sebastian G. Hofer, Richard A. Norte, Markus Aspelmeyer, Simon Gröblacher

Abstract: Nano- and micromechanical solid-state quantum devices have become a focus of attention. Reliably generating nonclassical states of their motion is of interest both for addressing fundamental questions about macroscopic quantum phenomena and for develo** quantum technologies in the domains of sensing and transduction. We used quantum optical control techniques to conditionally generate single-pho… ▽ More Nano- and micromechanical solid-state quantum devices have become a focus of attention. Reliably generating nonclassical states of their motion is of interest both for addressing fundamental questions about macroscopic quantum phenomena and for develo** quantum technologies in the domains of sensing and transduction. We used quantum optical control techniques to conditionally generate single-phonon Fock states of a nanomechanical resonator. We performed a Hanbury Brown and Twiss-type experiment that verified the nonclassical nature of the phonon state without requiring full state reconstruction. Our result establishes purely optical quantum control of a mechanical oscillator at the single-phonon level. △ Less

Submitted 1 May, 2018; v1 submitted 12 June, 2017; originally announced June 2017.

Journal ref: Science 358, 203-206 (2017)

Integrated optical force sensors using focusing photonic crystal arrays

Authors: **gkun Guo, Richard A. Norte, Simon Gröblacher

Abstract: Mechanical oscillators are at the heart of many sensor applications. Recently several groups have developed oscillators that are probed optically, fabricated from high-stress silicon nitride films. They exhibit outstanding force sensitivities of a few aN/Hz$^{1/2}$ and can also be made highly reflective, for efficient detection. The optical read-out usually requires complex experimental setups, in… ▽ More Mechanical oscillators are at the heart of many sensor applications. Recently several groups have developed oscillators that are probed optically, fabricated from high-stress silicon nitride films. They exhibit outstanding force sensitivities of a few aN/Hz$^{1/2}$ and can also be made highly reflective, for efficient detection. The optical read-out usually requires complex experimental setups, including positioning stages and bulky cavities, making them impractical for real applications. In this paper we propose a novel way of building fully integrated all-optical force sensors based on low-loss silicon nitride mechanical resonators with a photonic crystal reflector. We can circumvent previous limitations in stability and complexity by simulating a suspended focusing photonic crystal, purely made of silicon nitride. Our design allows for an all integrated sensor, built out of a single block that integrates a full Fabry-Pérot cavity, without the need for assembly or alignment. The presented simulations will allow for a radical simplification of sensors based on high-Q silicon nitride membranes. Our results comprise, to the best of our knowledge, the first simulations of a focusing mirror made from a mechanically suspended flat membrane with subwavelength thickness. Cavity lengths between a few hundred $μ$m and mm should be directly realizable. △ Less

Submitted 12 April, 2017; v1 submitted 9 February, 2017; originally announced February 2017.

Journal ref: Opt. Express 25, 9196-9203 (2017)

Non-classical correlations between single photons and phonons from a mechanical oscillator

Authors: Ralf Riedinger, Sungkun Hong, Richard A. Norte, Joshua A. Slater, Juying Shang, Alexander G. Krause, Vikas Anant, Markus Aspelmeyer, Simon Gröblacher

Abstract: Interfacing a single photon with another quantum system is a key capability in modern quantum information science. It allows quantum states of matter, such as spin states of atoms, atomic ensembles or solids, to be prepared and manipulated by photon counting and, in particular, to be distributed over long distances. Such light-matter interfaces have become crucial to fundamental tests of quantum p… ▽ More Interfacing a single photon with another quantum system is a key capability in modern quantum information science. It allows quantum states of matter, such as spin states of atoms, atomic ensembles or solids, to be prepared and manipulated by photon counting and, in particular, to be distributed over long distances. Such light-matter interfaces have become crucial to fundamental tests of quantum physics and realizations of quantum networks. Here we report non-classical correlations between single photons and phonons -- the quanta of mechanical motion -- from a nanomechanical resonator. We implement a full quantum protocol involving initialization of the resonator in its quantum ground state of motion and subsequent generation and read-out of correlated photonphonon pairs. The observed violation of a Cauchy-Schwarz inequality is clear evidence for the non-classical nature of the mechanical state generated. Our results demonstrate the availability of on-chip solid-state mechanical resonators as light-matter quantum interfaces. The performance we achieved will enable studies of macroscopic quantum phenomena as well as applications in quantum communication, as quantum memories and as quantum transducers. △ Less

Submitted 23 February, 2016; v1 submitted 16 December, 2015; originally announced December 2015.

Journal ref: Nature 530, 313-316 (2016)

Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature

Authors: Richard A. Norte, Joao P. Moura, Simon Gröblacher

Abstract: All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental modes with frequencies $f$ and mechanical quality factors $Q_\mathrm{m}$ sufficient to enter the optomechanical quantum regime at room temperature. We overcome pre… ▽ More All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental modes with frequencies $f$ and mechanical quality factors $Q_\mathrm{m}$ sufficient to enter the optomechanical quantum regime at room temperature. We overcome previous limitations by designing ultrathin, high-stress silicon nitride (Si$_3$N$_4$) membranes, with tensile stress in the resonators' clamps close to the ultimate yield strength of the material. By patterning a photonic crystal on the SiN membranes, we observe reflectivities greater than 99%. These on-chip resonators have remarkably low mechanical dissipation, with $Q_\mathrm{m}$$\sim$$10^8$, while at the same time exhibiting large reflectivities. This makes them a unique platform for experiments towards the observation of massive quantum behavior at room temperature. △ Less

Submitted 6 April, 2016; v1 submitted 19 November, 2015; originally announced November 2015.

Journal ref: Phys. Rev. Lett. 116, 147202 (2016)

Thermalization properties at mK temperatures of a nanoscale optomechanical resonator with acoustic-bandgap shield

Authors: Sean M. Meenehan, Justin D. Cohen, Simon Groeblacher, Jeff T. Hill, Amir H. Safavi-Naeini, Markus Aspelmeyer, Oskar Painter

Abstract: Optical measurements of a nanoscale silicon optomechanical crystal cavity with a mechanical resonance frequency of 3.6GHz are performed at sub-kelvin temperatures. We infer optical-absorption-induced heating and dam** of the mechanical resonator from measurements of phonon occupancy and motional sideband asymmetry. At the lowest probe power and lowest fridge temperature (10mK), the localized mec… ▽ More Optical measurements of a nanoscale silicon optomechanical crystal cavity with a mechanical resonance frequency of 3.6GHz are performed at sub-kelvin temperatures. We infer optical-absorption-induced heating and dam** of the mechanical resonator from measurements of phonon occupancy and motional sideband asymmetry. At the lowest probe power and lowest fridge temperature (10mK), the localized mechanical resonance is found to couple at a rate of 400Hz (Q=9x10^6) to a thermal bath of temperature 270mK. These measurements indicate that silicon optomechanical crystals cooled to millikelvin temperatures should be suitable for a variety of experiments involving coherent coupling between photons and phonons at the single quanta level. △ Less

Submitted 14 March, 2014; originally announced March 2014.

Comments: 11 pages, 9 figures

Two-dimensional phononic-photonic bandgap optomechanical crystal cavity

Authors: Amir H. Safavi-Naeini, Jeff T. Hill, Sean Meenehan, Jasper Chan, Simon Groeblacher, Oskar Painter

Abstract: We present the fabrication and characterization of an artificial crystal structure formed from a thin-film of silicon which has a full phononic bandgap for microwave X-band phonons and a two-dimensional pseudo-bandgap for near-infrared photons. An engineered defect in the crystal structure is used to localize optical and mechanical resonances in the bandgap of the planar crystal. Two-tone optical… ▽ More We present the fabrication and characterization of an artificial crystal structure formed from a thin-film of silicon which has a full phononic bandgap for microwave X-band phonons and a two-dimensional pseudo-bandgap for near-infrared photons. An engineered defect in the crystal structure is used to localize optical and mechanical resonances in the bandgap of the planar crystal. Two-tone optical spectroscopy is used to characterize the cavity system, showing a large vacuum coupling rate of 220kHz between the fundamental optical cavity resonance at 195THz and a co-localized mechanical resonance at 9.3GHz. △ Less

Submitted 7 January, 2014; originally announced January 2014.

Comments: 4 pages, 4 figures

Journal ref: Phys. Rev. Lett. 112, 153603 (2014)

Highly efficient coupling from an optical fiber to a nanoscale silicon optomechanical cavity

Authors: Simon Groeblacher, Jeff T. Hill, Amir H. Safavi-Naeini, Jasper Chan, Oskar Painter

Abstract: We demonstrate highly efficient coupling of light from an optical fiber to a silicon photonic crystal optomechanical cavity. The fiber-to-cavity coupling utilizes a compact (L ~ 25 um) intermediate adiabatic coupler. The optical coupling is lithographically controlled, broadband, relatively insensitive to fiber misalignment, and allows for light to be transferred from an optical fiber to, in princ… ▽ More We demonstrate highly efficient coupling of light from an optical fiber to a silicon photonic crystal optomechanical cavity. The fiber-to-cavity coupling utilizes a compact (L ~ 25 um) intermediate adiabatic coupler. The optical coupling is lithographically controlled, broadband, relatively insensitive to fiber misalignment, and allows for light to be transferred from an optical fiber to, in principle, any photonic chip with refractive index greater than that of the optical fiber. Here we demonstrate single-sided cavity coupling with a total fiber-to-cavity optical power coupling efficiency of 85%. △ Less

Submitted 30 October, 2013; v1 submitted 4 September, 2013; originally announced September 2013.

Comments: 4 pages, 3 figures

Journal ref: Appl. Phys. Lett. 103, 181104 (2013)

Squeezing of light via reflection from a silicon micromechanical resonator

Authors: Amir H. Safavi-Naeini, Simon Groeblacher, Jeff T. Hill, Jasper Chan, Markus Aspelmeyer, Oskar Painter

Abstract: We present the measurement of squeezed light generation using an engineered optomechanical system fabricated from a silicon microchip and composed of a micromechanical resonator coupled to a nanophotonic cavity. Laser light is used to measure the fluctuations in the position of the mechanical resonator at a measurement rate comparable to the free dynamics of the mechanical resonator, and greater t… ▽ More We present the measurement of squeezed light generation using an engineered optomechanical system fabricated from a silicon microchip and composed of a micromechanical resonator coupled to a nanophotonic cavity. Laser light is used to measure the fluctuations in the position of the mechanical resonator at a measurement rate comparable to the free dynamics of the mechanical resonator, and greater than its thermal decoherence rate. By approaching the strong continuous measurement regime we observe, through homodyne detection, non-trivial modifications of the reflected light's vacuum fluctuation spectrum. In spite of the mechanical resonator's highly excited thermal state ($10,000$ phonons), we observe squeezing at the level of $4.5 \pm 0.5%$ below that of shot-noise over a few MHz bandwidth around the mechanical resonance frequency of 28 MHz. This squeezing is interpreted as an unambiguous quantum signature of radiation pressure shot-noise. △ Less

Submitted 13 March, 2013; v1 submitted 25 February, 2013; originally announced February 2013.

Comments: 24 pages, 18 figures

Laser noise in cavity-optomechanical cooling and thermometry

Authors: Amir H. Safavi-Naeini, Jasper Chan, Jeff T. Hill, Simon Groeblacher, Haixing Miao, Yanbei Chen, Markus Aspelmeyer, Oskar Painter

Abstract: We review and study the roles of quantum and classical fluctuations in recent cavity-optomechanical experiments which have now reached the quantum regime (mechanical phonon occupancy < 1) using resolved sideband laser cooling. In particular, both the laser noise heating of the mechanical resonator and the form of the optically transduced mechanical spectra, modified by quantum and classical laser… ▽ More We review and study the roles of quantum and classical fluctuations in recent cavity-optomechanical experiments which have now reached the quantum regime (mechanical phonon occupancy < 1) using resolved sideband laser cooling. In particular, both the laser noise heating of the mechanical resonator and the form of the optically transduced mechanical spectra, modified by quantum and classical laser noise squashing, are derived under various measurement conditions. Using this theory, we analyze our recent ground-state laser cooling and motional sideband asymmetry experiments with nanoscale optomechanical crystal resonators. △ Less

Submitted 9 October, 2012; originally announced October 2012.

Comments: 36 pages, 10 figures

Journal ref: New J. Phys. 15 035007 (2013)

Monocrystalline AlGaAs heterostructures for high-reflectivity high-Q micromechanical resonators in the MHz regime

Authors: Garrett D. Cole, Simon Groeblacher, Katharina Gugler, Sylvain Gigan, Markus Aspelmeyer

Abstract: We present high-performance megahertz micromechanical oscillators based on freestanding epitaxial AlGaAs distributed Bragg reflectors. Compared with dielectric reflectors, the low mechanical loss of the monocrystalline heterostructure gives rise to significant improvements in the achievable mechanical quality factor Q while simultaneously exhibiting near unity reflectivity. Experimental characte… ▽ More We present high-performance megahertz micromechanical oscillators based on freestanding epitaxial AlGaAs distributed Bragg reflectors. Compared with dielectric reflectors, the low mechanical loss of the monocrystalline heterostructure gives rise to significant improvements in the achievable mechanical quality factor Q while simultaneously exhibiting near unity reflectivity. Experimental characterization yields an optical reflectivity exceeding 99.98% and mechanical quality factors up to 20 000 at 4 K. This materials system is not only an interesting candidate for optical coatings with ultralow thermal noise, but also provides a promising path toward quantum optical control of massive micromechanical mirrors. △ Less

Submitted 18 September, 2008; v1 submitted 4 February, 2008; originally announced February 2008.

Comments: 5 pages, 2 figures

Journal ref: Appl. Phys. Lett. 92, 261108 (2008)