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Resolving Multiphoton Coincidences in Single-Photon Detector Arrays with Row-Column Readouts
Authors:
Shashwath Bharadwaj,
Ruangrawee Kitichotkul,
Akshay Agarwal,
Vivek K Goyal
Abstract:
Row-column multiplexing has proven to be an effective strategy in scaling single-photon detector arrays to kilopixel and megapixel spatial resolutions. However, with this readout mechanism, multiphoton coincidences on the array cannot be easily resolved due to ambiguities concerning their spatial locations of incidence. In this work, we propose a method to resolve up to 4-photon coincidences in si…
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Row-column multiplexing has proven to be an effective strategy in scaling single-photon detector arrays to kilopixel and megapixel spatial resolutions. However, with this readout mechanism, multiphoton coincidences on the array cannot be easily resolved due to ambiguities concerning their spatial locations of incidence. In this work, we propose a method to resolve up to 4-photon coincidences in single-photon detector arrays with row-column readouts. By utilizing unambiguous single-photon measurements to estimate probabilities of detection at each pixel, we redistribute the ambiguous multiphoton counts among candidate pixel locations such that the peak signal-to-noise-ratio of the reconstruction is increased between 3 and 4 dB compared to conventional methods at optimal operating conditions. We also show that our method allows the operation of these arrays at higher incident photon fluxes as compared to previous methods. The application of this technique to imaging natural scenes is demonstrated using Monte Carlo experiments.
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Submitted 5 December, 2023; v1 submitted 5 December, 2023;
originally announced December 2023.
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Shot noise-mitigated secondary electron imaging with ion count-aided microscopy
Authors:
Akshay Agarwal,
Leila Kasaei,
Xinglin He,
Ruangrawee Kitichotkul,
Oguz Kagan Hitit,
Minxu Peng,
J. Albert Schultz,
Leonard C. Feldman,
Vivek K Goyal
Abstract:
Modern science is dependent on imaging on the nanoscale, often achieved through processes that detect secondary electrons created by a highly focused incident charged particle beam. Multiple types of measurement noise limit the ultimate trade-off between the image quality and the incident particle dose, which can preclude useful imaging of dose-sensitive samples. Existing methods to improve image…
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Modern science is dependent on imaging on the nanoscale, often achieved through processes that detect secondary electrons created by a highly focused incident charged particle beam. Multiple types of measurement noise limit the ultimate trade-off between the image quality and the incident particle dose, which can preclude useful imaging of dose-sensitive samples. Existing methods to improve image quality do not fundamentally mitigate the noise sources. Furthermore, barriers to assigning a physically meaningful scale make the images qualitative. Here we introduce ion count-aided microscopy (ICAM), which is a quantitative imaging technique that uses statistically principled estimation of the secondary electron yield. With a readily implemented change in data collection, ICAM substantially reduces source shot noise. In helium ion microscopy, we demonstrate 3x dose reduction and a good match between these empirical results and theoretical performance predictions. ICAM facilitates imaging of fragile samples and may make imaging with heavier particles more attractive.
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Submitted 8 July, 2024; v1 submitted 12 November, 2023;
originally announced November 2023.
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Continuous-Time Modeling and Analysis of Particle Beam Metrology
Authors:
Akshay Agarwal,
Minxu Peng,
Vivek K. Goyal
Abstract:
Particle beam microscopy (PBM) performs nanoscale imaging by pixelwise capture of scalar values representing noisy measurements of the response from secondary electrons (SEs) integrated over a dwell time. Extended to metrology, goals include estimating SE yield at each pixel and detecting differences in SE yield across pixels; obstacles include shot noise in the particle source as well as lack of…
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Particle beam microscopy (PBM) performs nanoscale imaging by pixelwise capture of scalar values representing noisy measurements of the response from secondary electrons (SEs) integrated over a dwell time. Extended to metrology, goals include estimating SE yield at each pixel and detecting differences in SE yield across pixels; obstacles include shot noise in the particle source as well as lack of knowledge of and variability in the instrument response to single SEs. A recently introduced time-resolved measurement paradigm promises mitigation of source shot noise, but its analysis and development have been largely limited to estimation problems under an idealization in which SE bursts are directly and perfectly counted. Here, analyses are extended to error exponents in feature detection problems and to degraded measurements that are representative of actual instrument behavior for estimation problems. For estimation from idealized SE counts, insights on existing estimators and a superior estimator are also provided. For estimation in a realistic PBM imaging scenario, extensions to the idealized model are introduced, methods for model parameter extraction are discussed, and large improvements from time-resolved data are presented.
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Submitted 7 March, 2023;
originally announced March 2023.
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Denoising Particle Beam Micrographs with Plug-and-Play Methods
Authors:
Minxu Peng,
Ruangrawee Kitichotkul,
Sheila W. Seidel,
Christopher Yu,
Vivek K Goyal
Abstract:
In a particle beam microscope, a raster-scanned focused beam of particles interacts with a sample to generate a secondary electron (SE) signal pixel by pixel. Conventionally formed micrographs are noisy because of limitations on acquisition time and dose. Recent work has shown that estimation methods applicable to a time-resolved measurement paradigm can greatly reduce noise, but these methods app…
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In a particle beam microscope, a raster-scanned focused beam of particles interacts with a sample to generate a secondary electron (SE) signal pixel by pixel. Conventionally formed micrographs are noisy because of limitations on acquisition time and dose. Recent work has shown that estimation methods applicable to a time-resolved measurement paradigm can greatly reduce noise, but these methods apply pixel by pixel without exploiting image structure. Raw SE count data can be modeled with a compound Poisson (Neyman Type A) likelihood, which implies data variance that is signal-dependent and greater than the variation in the underlying particle-sample interaction. These statistical properties make methods that assume additive white Gaussian noise ineffective. This paper introduces methods for particle beam micrograph denoising that use the plug-and-play framework to exploit image structure while being applicable to the unusual data likelihoods of this modality. Approximations of the data likelihood that vary in accuracy and computational complexity are combined with denoising by total variation regularization, BM3D, and DnCNN. Methods are provided for both conventional and time-resolved measurements, assuming SE counts are available. In simulations representative of helium ion microscopy and scanning electron microscopy, significant improvements in root mean-squared error (RMSE), structural similarity index measure (SSIM), and qualitative appearance are obtained. Average reductions in RMSE are by factors ranging from 2.24 to 4.11.
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Submitted 3 May, 2023; v1 submitted 30 August, 2022;
originally announced August 2022.
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Non-Line-of-Sight Tracking and Map** with an Active Corner Camera
Authors:
Sheila Seidel,
Hoover Rueda-Chacon,
Iris Cusini,
Federica Villa,
Franco Zappa,
Christopher Yu,
Vivek K Goyal
Abstract:
The ability to form non-line-of-sight (NLOS) images of changing scenes could be transformative in a variety of fields, including search and rescue, autonomous vehicle navigation, and reconnaissance. Most existing active NLOS methods illuminate the hidden scene using a pulsed laser directed at a relay surface and collect time-resolved measurements of returning light. The prevailing approaches inclu…
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The ability to form non-line-of-sight (NLOS) images of changing scenes could be transformative in a variety of fields, including search and rescue, autonomous vehicle navigation, and reconnaissance. Most existing active NLOS methods illuminate the hidden scene using a pulsed laser directed at a relay surface and collect time-resolved measurements of returning light. The prevailing approaches include raster scanning of a rectangular grid on a vertical wall opposite the volume of interest to generate a collection of confocal measurements. These are inherently limited by the need for laser scanning. Methods that avoid laser scanning track the moving parts of the hidden scene as one or two point targets. In this work, based on more complete optical response modeling yet still without multiple illumination positions, we demonstrate accurate reconstructions of objects in motion and a 'map' of the stationary scenery behind them. The ability to count, localize, and characterize the sizes of hidden objects in motion, combined with map** of the stationary hidden scene, could greatly improve indoor situational awareness in a variety of applications.
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Submitted 2 August, 2022;
originally announced August 2022.
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Online Beam Current Estimation in Particle Beam Microscopy
Authors:
Sheila W. Seidel,
Luisa Watkins,
Minxu Peng,
Akshay Agarwal,
Christopher Yu,
Vivek K Goyal
Abstract:
In conventional particle beam microscopy, knowledge of the beam current is essential for accurate micrograph formation and sample milling. This generally necessitates offline calibration of the instrument. In this work, we establish that beam current can be estimated online, from the same secondary electron count data that is used to form micrographs. Our methods depend on the recently introduced…
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In conventional particle beam microscopy, knowledge of the beam current is essential for accurate micrograph formation and sample milling. This generally necessitates offline calibration of the instrument. In this work, we establish that beam current can be estimated online, from the same secondary electron count data that is used to form micrographs. Our methods depend on the recently introduced time-resolved measurement concept, which combines multiple short measurements at a single pixel and has previously been shown to partially mitigate the effect of beam current variation on micrograph accuracy. We analyze the problem of jointly estimating beam current and secondary electron yield using the Cramer-Rao bound. Joint estimators operating at a single pixel and estimators that exploit models for inter-pixel correlation and Markov beam current variation are proposed and tested on synthetic microscopy data. Our estimates of secondary electron yield that incorporate explicit beam current estimation beat state-of-the-art methods, resulting in micrograph accuracy nearly indistinguishable from what is obtained with perfect beam current knowledge. Our novel beam current estimation could help improve milling outcomes, prevent sample damage, and enable online instrument diagnostics.
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Submitted 20 November, 2021;
originally announced November 2021.
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Secondary Electron Count Imaging in SEM
Authors:
Akshay Agarwal,
John Simonaitis,
Vivek K. Goyal,
Karl K. Berggren
Abstract:
Scanning electron microscopy (SEM) is a versatile technique used to image samples at the nanoscale. Conventional imaging by this technique relies on finding the average intensity of the signal generated on a detector by secondary electrons (SEs) emitted from the sample and is subject to noise due to variations in the voltage signal from the detector. This noise can result in degradation of the SEM…
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Scanning electron microscopy (SEM) is a versatile technique used to image samples at the nanoscale. Conventional imaging by this technique relies on finding the average intensity of the signal generated on a detector by secondary electrons (SEs) emitted from the sample and is subject to noise due to variations in the voltage signal from the detector. This noise can result in degradation of the SEM image quality for a given imaging dose. SE count imaging, which uses the direct count of SEs detected from the sample instead of the average signal intensity, would overcome this limitation and lead to improvement in SEM image quality. In this paper, we implement an SE count imaging scheme by synchronously outcoupling the detector and beam scan signals from the microscope and using custom code to count detected SEs. We demonstrate a ~30% increase in the image signal-to-noise-ratio due to SE counting compared to conventional imaging. The only external hardware requirement for this imaging scheme is an oscilloscope fast enough to accurately sample the detector signal for SE counting, making the scheme easily implementable on any SEM.
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Submitted 2 November, 2021;
originally announced November 2021.
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Time-Resolved Focused Ion Beam Microscopy: Modeling, Estimation Methods, and Analyses
Authors:
Minxu Peng,
John Murray-Bruce,
Vivek K Goyal
Abstract:
In a focused ion beam (FIB) microscope, source particles interact with a small volume of a sample to generate secondary electrons that are detected, pixel by pixel, to produce a micrograph. Randomness of the number of incident particles causes excess variation in the micrograph, beyond the variation in the underlying particle-sample interaction. We recently demonstrated that joint processing of mu…
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In a focused ion beam (FIB) microscope, source particles interact with a small volume of a sample to generate secondary electrons that are detected, pixel by pixel, to produce a micrograph. Randomness of the number of incident particles causes excess variation in the micrograph, beyond the variation in the underlying particle-sample interaction. We recently demonstrated that joint processing of multiple time-resolved measurements from a single pixel can mitigate this effect of source shot noise in helium ion microscopy. This paper is focused on establishing a rigorous framework for understanding the potential for this approach. It introduces idealized continuous- and discrete-time abstractions of FIB microscopy with direct electron detection and estimation-theoretic limits of imaging performance under these measurement models. Novel estimators for use with continuous-time measurements are introduced and analyzed, and estimators for use with discrete-time measurements are analyzed and shown to approach their continuous-time counterparts as time resolution is increased. Simulated FIB microscopy results are consistent with theoretical analyses and demonstrate that substantial improvements over conventional FIB microscopy image formation are made possible by time-resolved measurement.
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Submitted 18 February, 2022; v1 submitted 16 November, 2020;
originally announced November 2020.
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Compressively sampling the optical transmission matrix of a multimode fibre
Authors:
Shuhui Li,
Charles Saunders,
Daniel J. Lum,
John Murray-Bruce,
Vivek K Goyal,
Tomas Cizmar,
David B. Phillips
Abstract:
Measurement of the optical transmission matrix (TM) of an opaque material is an advanced form of space-variant aberration correction. Beyond imaging, TM-based methods are emerging in a range of fields including optical communications, optical micro-manipulation, and optical computing. In many cases the TM is very sensitive to perturbations in the configuration of the scattering medium it represent…
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Measurement of the optical transmission matrix (TM) of an opaque material is an advanced form of space-variant aberration correction. Beyond imaging, TM-based methods are emerging in a range of fields including optical communications, optical micro-manipulation, and optical computing. In many cases the TM is very sensitive to perturbations in the configuration of the scattering medium it represents. Therefore applications often require an up-to-the-minute characterisation of the fragile TM, typically entailing hundreds to thousands of probe measurements. In this work we explore how these measurement requirements can be relaxed using the framework of compressive sensing: incorporation of prior information enables accurate estimation from fewer measurements than the dimensionality of the TM we aim to reconstruct. Examples of such priors include knowledge of a memory effect linking input and output fields, an approximate model of the optical system, or a recent but degraded TM measurement. We demonstrate this concept by reconstructing a full-size TM of a multimode fibre supporting 754 modes at compression ratios down to ~5% with good fidelity. The level of compression achievable is dependent upon the strength of our priors. We show in this case that imaging is still possible using TMs reconstructed at compression ratios down to ~1% (8 probe measurements). This compressive TM sampling strategy is quite general and may be applied to any form of scattering system about which we have some prior knowledge, including diffusers, thin layers of tissue, fibre optics of any known refractive profile, and reflections from opaque walls. These approaches offer a route to measurement of high-dimensional TMs quickly or with access to limited numbers of measurements.
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Submitted 31 July, 2020;
originally announced July 2020.
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Seeing Around Corners with Edge-Resolved Transient Imaging
Authors:
Joshua Rapp,
Charles Saunders,
Julián Tachella,
John Murray-Bruce,
Yoann Altmann,
Jean-Yves Tourneret,
Stephen McLaughlin,
Robin M. A. Dawson,
Franco N. C. Wong,
Vivek K Goyal
Abstract:
Non-line-of-sight (NLOS) imaging is a rapidly growing field seeking to form images of objects outside the field of view, with potential applications in search and rescue, reconnaissance, and even medical imaging. The critical challenge of NLOS imaging is that diffuse reflections scatter light in all directions, resulting in weak signals and a loss of directional information. To address this proble…
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Non-line-of-sight (NLOS) imaging is a rapidly growing field seeking to form images of objects outside the field of view, with potential applications in search and rescue, reconnaissance, and even medical imaging. The critical challenge of NLOS imaging is that diffuse reflections scatter light in all directions, resulting in weak signals and a loss of directional information. To address this problem, we propose a method for seeing around corners that derives angular resolution from vertical edges and longitudinal resolution from the temporal response to a pulsed light source. We introduce an acquisition strategy, scene response model, and reconstruction algorithm that enable the formation of 2.5-dimensional representations -- a plan view plus heights -- and a 180$^{\circ}$ field of view (FOV) for large-scale scenes. Our experiments demonstrate accurate reconstructions of hidden rooms up to 3 meters in each dimension.
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Submitted 17 February, 2020;
originally announced February 2020.
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Source Shot Noise Mitigation in Focused Ion Beam Microscopy by Time-Resolved Measurement
Authors:
Minxu Peng,
John Murray-Bruce,
Karl K. Berggren,
Vivek K Goyal
Abstract:
Focused ion beam (FIB) microscopy suffers from source shot noise - random variation in the number of incident ions in any fixed dwell time - along with random variation in the number of detected secondary electrons per incident ion. This multiplicity of sources of randomness increases the variance of the measurements and thus worsens the trade-off between incident ion dose and image accuracy. Time…
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Focused ion beam (FIB) microscopy suffers from source shot noise - random variation in the number of incident ions in any fixed dwell time - along with random variation in the number of detected secondary electrons per incident ion. This multiplicity of sources of randomness increases the variance of the measurements and thus worsens the trade-off between incident ion dose and image accuracy. Time-resolved sensing combined with maximum likelihood estimation from the resulting sets of measurements greatly reduces the effect of source shot noise. Through Fisher information analysis and Monte Carlo simulations, the reduction in mean-squared error or reduction in required dose is shown to be by a factor approximately equal to the secondary electron yield. Experiments with a helium ion microscope (HIM) are consistent with the analyses and suggest accuracy improvement for a fixed source dose, or reduced source dose for a desired imaging accuracy, by a factor of about 3.
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Submitted 7 June, 2019;
originally announced June 2019.
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A Few Photons Among Many: Unmixing Signal and Noise for Photon-Efficient Active Imaging
Authors:
Joshua Rapp,
Vivek K Goyal
Abstract:
Conventional LIDAR systems require hundreds or thousands of photon detections to form accurate depth and reflectivity images. Recent photon-efficient computational imaging methods are remarkably effective with only 1.0 to 3.0 detected photons per pixel, but they are not demonstrated at signal-to-background ratio (SBR) below 1.0 because their imaging accuracies degrade significantly in the presence…
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Conventional LIDAR systems require hundreds or thousands of photon detections to form accurate depth and reflectivity images. Recent photon-efficient computational imaging methods are remarkably effective with only 1.0 to 3.0 detected photons per pixel, but they are not demonstrated at signal-to-background ratio (SBR) below 1.0 because their imaging accuracies degrade significantly in the presence of high background noise. We introduce a new approach to depth and reflectivity estimation that focuses on unmixing contributions from signal and noise sources. At each pixel in an image, short-duration range gates are adaptively determined and applied to remove detections likely to be due to noise. For pixels with too few detections to perform this censoring accurately, we borrow data from neighboring pixels to improve depth estimates, where the neighborhood formation is also adaptive to scene content. Algorithm performance is demonstrated on experimental data at varying levels of noise. Results show improved performance of both reflectivity and depth estimates over state-of-the-art methods, especially at low signal-to-background ratios. In particular, accurate imaging is demonstrated with SBR as low as 0.04. This validation of a photon-efficient, noise-tolerant method demonstrates the viability of rapid, long-range, and low-power LIDAR imaging.
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Submitted 23 September, 2016;
originally announced September 2016.
