Tuning the pH Response of Monolayer Hexagonal Boron Nitride/Graphene Field-Effect Transistors
Authors:
Nicholas E. Fuhr,
Mohamed Azize,
David J. Bishop
Abstract:
The chemical activity of ionized hydrogen describes the potency of protons in solution and is used to define the pH with wide-ranging applications in biological and materials sciences. Measuring pH with graphene field-effect transistors (FETs) has been described in the past but has yet to be characterized with a monolayer hexagonal boron nitride (hBN) cap** layer. hBN cap** is hypothesized to…
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The chemical activity of ionized hydrogen describes the potency of protons in solution and is used to define the pH with wide-ranging applications in biological and materials sciences. Measuring pH with graphene field-effect transistors (FETs) has been described in the past but has yet to be characterized with a monolayer hexagonal boron nitride (hBN) cap** layer. hBN cap** is hypothesized to lower the chemical affinity of protons to oxidized defects in the graphene crystal and lower the standard deviation of pH measurement via screening charge density. First, the electronic properties of commercial, monolayer graphene and monolayer hBN/graphene, both on four-inch 90 nm SiO2/p-type Si, were contrasted as a function of solutal pH in 10 mM phosphate buffered solution. The two-dimensional (2D) FETs were fabricated with photoresistless metallization followed by microcentrifuge tube-masking and reactive ion etching to define a quasi-pure 2D sensing mesa for pH sensing. Thereafter, the devices were exposed to phosphate buffer of varying pH and the resistance and liquid-transfer characteristics measured. The hBN/graphene/SiO2 FETs had higher linearity, and both lower standard deviation and range of Dirac voltage shifting than monolayer graphene/SiO2. Then, before microcentrifuge tube-masking, freshly metallized devices were coated with 9 nm of Al2O3 by electron beam deposition. The Al2O3/graphene/SiO2 and Al2O3/hBN/graphene/SiO2 devices showed an altered response to the pH of the phosphate buffered solutions before and after basic etching of the Al2O3 with NaOH (pH = 12). This prompted studying the pH-dependencies of the 2D devices as a function of the thickness of Al2O3 via atomic layer deposition. These results show that modifying the surface of monolayer graphene with nanoscale dielectrics enables tuning of the pH-dependent electronic properties of graphene pH sensors.
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Submitted 25 October, 2022;
originally announced October 2022.
100pTcm Sensitive MEMS Resonant Magnetometer from a Commercial Accelerometer
Authors:
Josh Javor,
Alexander Stange,
Corey Pollock,
Nicholas Fuhr,
David J. Bishop
Abstract:
Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the many benefits of the micro-electromechanical systems (MEMS) devices to fabricate a small, low power, inexpensive sensor whose resolution is in the range of weak b…
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Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the many benefits of the micro-electromechanical systems (MEMS) devices to fabricate a small, low power, inexpensive sensor whose resolution is in the range of weak biomagnetic fields. The sensor works at room temperature, and is suitable for consumer electronics integration. At present, such biomagnetic fields can only be measured by expensive mechanisms such as optical pum** and superconducting quantum interference devices (SQUIDs). Thus, our sensor suggests the opening of a large phase space for medical and consumer applications. The prototype fabrication is achieved by assembling micro-objects, including a permanent micromagnet, onto a post-release commercial MEMS accelerometer. With this system, we demonstrate a room temperature MEMS magnetometer, whose design is only sensitive to gradient magnetic fields and is generally insensitive to the Earth's uniform field. In air, the sensor's response is linear with a resolution of 1.1 nT cm-1 and spans over 3 decades of dynamic range to 4.6 μT cm-1. In 1 mTorr vacuum with 20 dB magnetic shielding, the sensor achieved 100 pT cm-1 resolution at resonance. The theoretical floor of this design is 110 fT cm-1 Hz-1/2 with a resolution of 13 fT cm-1, thus these devices hold promise for both magnetocardiography (MCG) and magnetoencephalography (MEG) applications.
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Submitted 22 November, 2019;
originally announced November 2019.
