Showing 1–35 of 35 results for author: Fröch, J E

Wide Field of View Large Aperture Meta-Doublet Eyepiece

Authors: Anna Wirth-Singh, Johannes E. Fröch, Fan Yang, Louis Martin, Hualiang Zhang, Quentin T. Tanguy, Zhihao Zhou, Luocheng Huang, Demis D. John, Biljana Stamenic, Juejun Hu, Tian Gu, Arka Majumdar

Abstract: Wide field of view and light weight optics are critical for advanced eyewear, with applications in augmented/virtual reality and night vision. Conventional refractive lenses are often stacked to correct aberrations at wide field of view, leading to limited performance and increased size and weight. In particular, simultaneously achieving wide field of view and large aperture for light collection i… ▽ More Wide field of view and light weight optics are critical for advanced eyewear, with applications in augmented/virtual reality and night vision. Conventional refractive lenses are often stacked to correct aberrations at wide field of view, leading to limited performance and increased size and weight. In particular, simultaneously achieving wide field of view and large aperture for light collection is desirable but challenging to realize in a compact form-factor. Here, we demonstrate a wide field of view (greater than 60$^\circ$) meta-optic doublet eyepiece with an entrance aperture of 2.1 cm. At the design wavelength of 633 nm, the meta-optic doublet achieves comparable performance to a refractive lens-based eyepiece system. This meta-doublet eyepiece illustrates the potential for meta-optics to play an important role in the development of high-quality monochrome near-eye display and night vision systems. △ Less

Submitted 20 June, 2024; originally announced June 2024.

Compressed Meta-Optical Encoder for Image Classification

Authors: Anna Wirth-Singh, **lin Xiang, Minho Choi, Johannes E. Fröch, Luocheng Huang, Shane Colburn, Eli Shlizerman, Arka Majumdar

Abstract: Optical and hybrid convolutional neural networks (CNNs) recently have become of increasing interest to achieve low-latency, low-power image classification and computer vision tasks. However, implementing optical nonlinearity is challenging, and omitting the nonlinear layers in a standard CNN comes at a significant reduction in accuracy. In this work, we use knowledge distillation to compress modif… ▽ More Optical and hybrid convolutional neural networks (CNNs) recently have become of increasing interest to achieve low-latency, low-power image classification and computer vision tasks. However, implementing optical nonlinearity is challenging, and omitting the nonlinear layers in a standard CNN comes at a significant reduction in accuracy. In this work, we use knowledge distillation to compress modified AlexNet to a single linear convolutional layer and an electronic backend (two fully connected layers). We obtain comparable performance to a purely electronic CNN with five convolutional layers and three fully connected layers. We implement the convolution optically via engineering the point spread function of an inverse-designed meta-optic. Using this hybrid approach, we estimate a reduction in multiply-accumulate operations from 17M in a conventional electronic modified AlexNet to only 86K in the hybrid compressed network enabled by the optical frontend. This constitutes over two orders of magnitude reduction in latency and power consumption. Furthermore, we experimentally demonstrate that the classification accuracy of the system exceeds 93% on the MNIST dataset. △ Less

Submitted 14 June, 2024; v1 submitted 22 April, 2024; originally announced June 2024.

Beating bandwidth limits for large aperture broadband nano-optics

Authors: Johannes E. Fröch, Praneeth K. Chakravarthula, Jipeng Sun, Ethan Tseng, Shane Colburn, Alan Zhan, Forrest Miller, Anna Wirth-Singh, Quentin A. A. Tanguy, Zheyi Han, Karl F. Böhringer, Felix Heide, Arka Majumdar

Abstract: Flat optics have been proposed as an attractive approach for the implementation of new imaging and sensing modalities to replace and augment refractive optics. However, chromatic aberrations impose fundamental limitations on diffractive flat optics. As such, true broadband high-quality imaging has thus far been out of reach for low f-number, large aperture, flat optics. In this work, we overcome t… ▽ More Flat optics have been proposed as an attractive approach for the implementation of new imaging and sensing modalities to replace and augment refractive optics. However, chromatic aberrations impose fundamental limitations on diffractive flat optics. As such, true broadband high-quality imaging has thus far been out of reach for low f-number, large aperture, flat optics. In this work, we overcome these intrinsic fundamental limitations, achieving broadband imaging in the visible wavelength range with a flat meta-optic, co-designed with computational reconstruction. We derive the necessary conditions for a broadband, 1 cm aperture, f/2 flat optic, with a diagonal field of view of 30° and an average system MTF contrast of 30% or larger for a spatial frequency of 100 lp/mm in the visible band (> 50 % for 70 lp/mm and below). Finally, we use a coaxial, dual-aperture system to train the broadband imaging meta-optic with a learned reconstruction method operating on pair-wise captured imaging data. Fundamentally, our work challenges the entrenched belief of the inability of capturing high-quality, full-color images using a single large aperture meta-optic. △ Less

Submitted 9 February, 2024; originally announced February 2024.

Nonlocal, Flat Band Meta-optics for Monolithic, High Efficiency, Compact Photodetectors

Authors: Minho Choi, Christopher Munley, Johannes E. Froech, Rui Chen, Arka Majumdar

Abstract: Miniaturized photodetectors are becoming increasingly sought-after components for a range of next generation technologies, such as autonomous vehicles, integrated wearable devices, or gadgets embedded in the Internet of Things. A major challenge, however, lies in shrinking the device footprint, while maintaining high efficiency. This conundrum can be solved by realizing non-trivial relation betwee… ▽ More Miniaturized photodetectors are becoming increasingly sought-after components for a range of next generation technologies, such as autonomous vehicles, integrated wearable devices, or gadgets embedded in the Internet of Things. A major challenge, however, lies in shrinking the device footprint, while maintaining high efficiency. This conundrum can be solved by realizing non-trivial relation between the energy and momentum of photons, such as dispersion-free angle-independent devices, known as flat bands. Here, we leverage flat band meta-optics to simultaneously achieve critical absorption over a wide range of incidence angles. For a monolithic silicon meta-optical photodiode, we achieved ~10-fold enhancement in the photon-to-electron conversion efficiency. Such enhancement over a large angular range of ~36 degrees allows incoming light to be collected via a large aperture lens and focused on a compact photodiode, potentially enabling high-speed and low-light operation. Our research unveils new possibilities for creating compact and efficient optoelectronic devices with far-reaching impact on various applications, including augmented reality and light detection and ranging. △ Less

Submitted 8 December, 2023; originally announced December 2023.

Comments: 34 pages, 17 figures

Non-volatile Phase-only Transmissive Spatial Light Modulators

Authors: Zhuoran Fang, Rui Chen, Johannes E. Fröch, Quentin A. A. Tanguy, Asir Intisar Khan, Xiang** Wu, Virat Tara, Arnab Manna, David Sharp, Christopher Munley, Forrest Miller, Yang Zhao, Sarah J. Geiger, Karl F. Böhringer, Matthew Reynolds, Eric Pop, Arka Majumdar

Abstract: Free-space modulation of light is crucial for many applications, from light detection and ranging to virtual or augmented reality. Traditional means of modulating free-space light involves spatial light modulators based on liquid crystals and microelectromechanical systems, which are bulky, have large pixel areas (~10 micron x 10 micron), and require high driving voltage. Recent progress in meta-o… ▽ More Free-space modulation of light is crucial for many applications, from light detection and ranging to virtual or augmented reality. Traditional means of modulating free-space light involves spatial light modulators based on liquid crystals and microelectromechanical systems, which are bulky, have large pixel areas (~10 micron x 10 micron), and require high driving voltage. Recent progress in meta-optics has shown promise to circumvent some of the limitations. By integrating active materials with sub-wavelength pixels in a meta-optic, the power consumption can be dramatically reduced while achieving a faster speed. However, these reconfiguration methods are volatile and hence require constant application of control signals, leading to phase jitter and crosstalk. Additionally, to control a large number of pixels, it is essential to implement a memory within each pixel to have a tractable number of control signals. Here, we develop a device with nonvolatile, electrically programmable, phase-only modulation of free-space infrared radiation in transmission using the low-loss phase-change material (PCM) Sb2Se3. By coupling an ultra-thin PCM layer to a high quality (Q)-factor (Q~406) diatomic metasurface, we demonstrate a phase-only modulation of ~0.25pi (~0.2pi) in simulation (experiment), ten times larger than a bare PCM layer of the same thickness. The device shows excellent endurance over 1,000 switching cycles. We then advance the device geometry, to enable independent control of 17 meta-molecules, achieving ten deterministic resonance levels with a 2pi phase shift. By independently controlling the phase delay of pixels, we further show tunable far-field beam sha**. Our work paves the way to realizing non-volatile transmissive phase-only spatial light modulators. △ Less

Submitted 22 July, 2023; originally announced July 2023.

Broadband Thermal Imaging using Meta-Optics

Authors: Luocheng Huang, Zheyi Han, Anna Wirth-Singh, Vishwanath Saragadam, Saswata Mukherjee, Johannes E. Fröch, Quentin A. A. Tanguy, Joshua Rollag, Ricky Gibson, Joshua R. Hendrickson, Phillip W. C. Hon, Orrin Kigner, Zachary Coppens, Karl F. Böhringer, Ashok Veeraraghavan, Arka Majumdar

Abstract: Subwavelength diffractive optics known as meta-optics have demonstrated the potential to significantly miniaturize imaging systems. However, despite impressive demonstrations, most meta-optical imaging systems suffer from strong chromatic aberrations, limiting their utilities. Here, we employ inverse-design to create broadband meta-optics operating in the long-wave infrared (LWIR) regime (8 - 12… ▽ More Subwavelength diffractive optics known as meta-optics have demonstrated the potential to significantly miniaturize imaging systems. However, despite impressive demonstrations, most meta-optical imaging systems suffer from strong chromatic aberrations, limiting their utilities. Here, we employ inverse-design to create broadband meta-optics operating in the long-wave infrared (LWIR) regime (8 - 12 $μ$m). Via a deep-learning assisted multi-scale differentiable framework that links meta-atoms to the phase, we maximize the wavelength-averaged volume under the modulation transfer function (MTF) of the meta-optics. Our design framework merges local phase-engineering via meta-atoms and global engineering of the scatterer within a single pipeline. We corroborate our design by fabricating and experimentally characterizing all-silicon LWIR meta-optics. Our engineered meta-optic is complemented by a simple computational backend that dramatically improves the quality of the captured image. We experimentally demonstrate a six-fold improvement of the wavelength-averaged Strehl ratio over the traditional hyperboloid metalens for broadband imaging. △ Less

Submitted 5 September, 2023; v1 submitted 21 July, 2023; originally announced July 2023.

Comments: 28 pages, 12 figures

MSC Class: 78A10

Spectrally-encoded non-scanning imaging through a fiber

Authors: Ningzhi Xie, Quentin A. A. Tanguy, Johannes E. Fröch, Karl F. Böhringer, Arka Majumdar

Abstract: With the advent of neuroimaging and microsurgery, there is a rising need for capturing images through an optical fiber. We present an approach of imaging through a single fiber without mechanical scanning by implementing spatial-spectral encoding. The spectral encoding is achieved through a microfabricated spectral filter array, where light from different spatial pixels is coded with a highly orth… ▽ More With the advent of neuroimaging and microsurgery, there is a rising need for capturing images through an optical fiber. We present an approach of imaging through a single fiber without mechanical scanning by implementing spatial-spectral encoding. The spectral encoding is achieved through a microfabricated spectral filter array, where light from different spatial pixels is coded with a highly orthogonal spectrum. The image is then computationally recovered via pseudo inverse of the encoding process. We demonstrate imaging of a $4 \times 4$ binary object at the proximity of the spectral filter array using $560-625nm$ wavelength band. The recovered image maintains an error rate of $<11\%$ when measured using a spectrometer with a spectral resolution of $1.5nm$. The image remains unchanged with fiber bending or moving. Thus our approach shows a more robust way to image through a single optical fiber, with potential applications in compact endoscopes and angioscopes. △ Less

Submitted 26 May, 2023; originally announced May 2023.

Photonic Advantage of Optical Encoders

Authors: Luocheng Huang, Quentin A. A. Tanguy, Johannes E. Froch, Saswata Mukherjee, Karl F. Bohringer, Arka Majumdar

Abstract: Light's ability to perform massive linear operations parallelly has recently inspired numerous demonstrations of optics-assisted artificial neural networks (ANN). However, a clear advantage of optics over purely digital ANN in a system-level has not yet been established. While linear operations can indeed be optically performed very efficiently, the lack of nonlinearity and signal regeneration req… ▽ More Light's ability to perform massive linear operations parallelly has recently inspired numerous demonstrations of optics-assisted artificial neural networks (ANN). However, a clear advantage of optics over purely digital ANN in a system-level has not yet been established. While linear operations can indeed be optically performed very efficiently, the lack of nonlinearity and signal regeneration require high-power, low-latency signal transduction between optics and electronics. Additionally, a large power is needed for the lasers and photodetectors, which are often neglected in the calculation of energy consumption. Here, instead of map** traditional digital operations to optics, we co-optimized a hybrid optical-digital ANN, that operates on incoherent light, and thus amenable to operations under ambient light. Kee** the latency and power constant between purely digital ANN and hybrid optical-digital ANN, we identified a low-power/ latency regime, where an optical encoder provides higher classification accuracy than a purely digital ANN. However, in that regime, the overall classification accuracy is lower than what is achievable with higher power and latency. Our results indicate that optics can be advantageous over digital ANN in applications, where the overall performance of the ANN can be relaxed to prioritize lower power and latency. △ Less

Submitted 2 May, 2023; originally announced May 2023.

Large Field-of-View Thermal Imaging via All-Silicon Meta-Optics

Authors: Anna Wirth-Singh, Johannes E. Fröch, Zheyi Han, Luocheng Huang, Saswata Mukherjee, Zhihao Zhou, Zachary Coppens, Karl F. Böhringer, Arka Majumdar

Abstract: A broad range of imaging and sensing technologies in the infrared require large Field-of-View (FoV) operation. To achieve this, traditional refractive systems often employ multiple elements to compensate for aberrations, which leads to excess size, weight, and cost. For many applications, including night vision eye-wear, air-borne surveillance, and autonomous navigation for unmanned aerial vehicle… ▽ More A broad range of imaging and sensing technologies in the infrared require large Field-of-View (FoV) operation. To achieve this, traditional refractive systems often employ multiple elements to compensate for aberrations, which leads to excess size, weight, and cost. For many applications, including night vision eye-wear, air-borne surveillance, and autonomous navigation for unmanned aerial vehicles, size and weight are highly constrained. Sub-wavelength diffractive optics, also known as meta-optics, can dramatically reduce the size, weight, and cost of these imaging systems, as meta-optics are significantly thinner and lighter than traditional refractive lenses. Here, we demonstrate 80$^\circ$ FoV thermal imaging in the long-wavelength infrared regime (8-12 $μ$m) using an all-silicon meta-optic with an entrance aperture and lens focal length of 1 cm. △ Less

Submitted 27 April, 2023; originally announced April 2023.

Comments: 9 pages, 5 figures

Rewritable Photonic Integrated Circuits Using Dielectric-assisted Phase-change Material Waveguides

Authors: Forrest Miller, Rui Chen, Johannes E. Froech, Hannah Rarick, Sarah Geiger, Arka Majumdar

Abstract: Photonic integrated circuits (PICs) have the potential to drastically expand the capabilities of optical communications, sensing, and quantum information science and engineering. However, PICs are commonly fabricated using selective material etching, a subtractive process. Thus, the chip's functionality cannot be substantially altered once fabricated. Here, we propose to exploit wide-bandgap non-v… ▽ More Photonic integrated circuits (PICs) have the potential to drastically expand the capabilities of optical communications, sensing, and quantum information science and engineering. However, PICs are commonly fabricated using selective material etching, a subtractive process. Thus, the chip's functionality cannot be substantially altered once fabricated. Here, we propose to exploit wide-bandgap non-volatile phase-change materials (PCMs) to create a rewritable PIC platform. A PCM-based PIC can be written using a nano-second pulsed laser without removing any material, akin to rewritable compact disks. The whole circuit can then be erased by heating, and a completely new circuit can be rewritten. We designed a dielectric-assisted PCM waveguide consisting of a thick dielectric layer on top of a thin layer of wide-bandgap PCMs Sb2S3 and Sb2Se3. The low-loss PCMs and our engineered waveguiding structure lead to a negligible optical loss. Furthermore, we analyzed and specified the spatio-temporal laser pulse shape to write the PCMs. Our proposed platform will enable low-cost manufacturing and have a far-reaching impact on the rapid prototy** of PICs, validation of new designs, and photonic education. △ Less

Submitted 21 April, 2023; v1 submitted 24 January, 2023; originally announced January 2023.

Large FOV short-wave infrared meta-lens for scanning fiber endoscopy

Authors: Ningzhi Xie, Matthew D. Carson, Johannes E. Fröch, Arka Majumdar, Eric Seibel, Karl F. Böhringer

Abstract: The scanning fiber endoscope (SFE), an ultra-small optical imaging device with a large field-of-view (FOV) for having a clear forward view into the interior of blood vessels, has great potential in the cardio-vascular disease diagnosis and surgery assistance, which is one of the key applications for short-wave infrared (SWIR) biomedical imaging. The state-of-the-art SFE system uses a miniaturized… ▽ More The scanning fiber endoscope (SFE), an ultra-small optical imaging device with a large field-of-view (FOV) for having a clear forward view into the interior of blood vessels, has great potential in the cardio-vascular disease diagnosis and surgery assistance, which is one of the key applications for short-wave infrared (SWIR) biomedical imaging. The state-of-the-art SFE system uses a miniaturized refractive spherical lens doublet for beam projection. A meta-lens is a promising alternative which can be made much thinner and has fewer off-axis aberrations than its refractive counterpart. We report an SFE system with meta-lens working at 1310nm to achieve a resolution ($\sim 140μm$ at the center of field and the imaging distance of $15mm$), FOV ($\sim 70 \circ$), and depth-of-focus (DOF $\sim 15mm$), which are comparable to a state-of-the-art refractive lens SFE. The use of the meta-lens reduces the length of the optical track from $1.2mm$ to $0.86mm$. The resolution of our meta-lens based SFE drops by less than a factor of $2$ at the edge of the FOV, while the refractive lens counterpart has a $\sim 3$ times resolution degradation. These results show the promise of integrating a meta-lens into an endoscope for device minimization and optical performance improvement. △ Less

Submitted 21 December, 2022; originally announced December 2022.

Comments: 9 pages, 5 figures

Large area optimization of meta-lens via data-free machine learning

Authors: Maksym V. Zhelyeznyakov, Johannes E. Froch, Anna Wirth-Singh, Jaebum Noh, Junsuk Rho, Steven L. Brunton, Arka Majumdar

Abstract: Sub-wavelength diffractive optics meta-optics present a multi-scale optical system, where the behavior of constituent sub-wavelength scatterers, or meta-atoms, need to be modelled by full-wave electromagnetic simulations, whereas the whole meta-optical system can be modelled using ray/ wave optics. Current simulation techniques for large-scale meta-optics rely on the local phase approximation (LPA… ▽ More Sub-wavelength diffractive optics meta-optics present a multi-scale optical system, where the behavior of constituent sub-wavelength scatterers, or meta-atoms, need to be modelled by full-wave electromagnetic simulations, whereas the whole meta-optical system can be modelled using ray/ wave optics. Current simulation techniques for large-scale meta-optics rely on the local phase approximation (LPA), where the coupling between dissimilar meta-atoms are completely neglected. Here we introduce a physics-informed neural network, which can efficiently model the meta-optics while still incorporating all of the coupling between meta-atoms. Unlike existing deep learning techniques which generally predict the mean transmission and reflection coefficients of meta-atoms, we predict the full electro-magnetic field distribution. We demonstrate the efficacy of our technique by designing 1mm aperture cylindrical meta-lenses exhibiting higher efficiency than the ones designed under LPA. We experimentally validated the maximum intensity improvement (up to $53\%$) of the inverse-designed meta-lens. Our reported method can design large aperture $(\sim 10^4-10^5λ)$ meta-optics in a reasonable time (approximately 15 minutes on a graphics processing unit) without relying on any approximation. △ Less

Submitted 20 December, 2022; originally announced December 2022.

Foveated Thermal Computational Imaging in the Wild Using All-Silicon Meta-Optics

Authors: Vishwanath Saragadam, Zheyi Han, Vivek Boominathan, Luocheng Huang, Shiyu Tan, Johannes E. Fröch, Karl F. Böhringer, Richard G. Baraniuk, Arka Majumdar, Ashok Veeraraghavan

Abstract: Foveated imaging provides a better tradeoff between situational awareness (field of view) and resolution and is critical in long-wavelength infrared regimes because of the size, weight, power, and cost of thermal sensors. We demonstrate computational foveated imaging by exploiting the ability of a meta-optical frontend to discriminate between different polarization states and a computational backe… ▽ More Foveated imaging provides a better tradeoff between situational awareness (field of view) and resolution and is critical in long-wavelength infrared regimes because of the size, weight, power, and cost of thermal sensors. We demonstrate computational foveated imaging by exploiting the ability of a meta-optical frontend to discriminate between different polarization states and a computational backend to reconstruct the captured image/video. The frontend is a three-element optic: the first element which we call the "foveal" element is a metalens that focuses s-polarized light at a distance of $f_1$ without affecting the p-polarized light; the second element which we call the "perifoveal" element is another metalens that focuses p-polarized light at a distance of $f_2$ without affecting the s-polarized light. The third element is a freely rotating polarizer that dynamically changes the mixing ratios between the two polarization states. Both the foveal element (focal length = 150mm; diameter = 75mm), and the perifoveal element (focal length = 25mm; diameter = 25mm) were fabricated as polarization-sensitive, all-silicon, meta surfaces resulting in a large-aperture, 1:6 foveal expansion, thermal imaging capability. A computational backend then utilizes a deep image prior to separate the resultant multiplexed image or video into a foveated image consisting of a high-resolution center and a lower-resolution large field of view context. We build a first-of-its-kind prototype system and demonstrate 12 frames per second real-time, thermal, foveated image, and video capture in the wild. △ Less

Submitted 12 December, 2022; originally announced December 2022.

Partially coherent double phase holography in visible using meta-optics

Authors: Saswata Mukherjee, Quentin A. A. Tanguy, Johannes E. Froech, Aamod Shanker, Karl F. Boehringer, Steven Brunton, Arka Majumdar

Abstract: Ultrathin flat meta-optics have shown great promise for holography in recent years. However, most of the reported meta-optical holograms rely on only phase modulation and neglect the amplitude information. Modulation of both amplitude and phase in meta-optics either requires polarization sensitive meta-atoms, or complex scatterers with stringent fabrication requirements. Additionally, almost all t… ▽ More Ultrathin flat meta-optics have shown great promise for holography in recent years. However, most of the reported meta-optical holograms rely on only phase modulation and neglect the amplitude information. Modulation of both amplitude and phase in meta-optics either requires polarization sensitive meta-atoms, or complex scatterers with stringent fabrication requirements. Additionally, almost all the meta-optical holograms were measured under laser illumination. Here we adopt the concept of double-phase holography, to report polarization-independent holography with both amplitude and phase modulation, using dielectric meta-optics. We validate the implementation of complex phase hologram by measuring an improvement of structural similarity of the reconstructed hologram by ~3x over phase-only holograms. Finally, we demonstrate that meta-optical holography can also be realized using partially incoherent light from a light emitting diode. This observation can significantly reduce the alignment complexity and speckles in laser-based meta-optical holography. △ Less

Submitted 2 December, 2022; originally announced December 2022.

Real Time Full-Color Imaging in a Meta-Optical Fiber Endoscope

Authors: Johannes E. Froech, Luocheng Huang, Quentin A. A. Tanguy, Shane Colburn, Alan Zhan, Andrea Ravagli, Eric J. Seibel, Karl Boehringer, Arka Majumdar

Abstract: Endoscopes are an important component for the development of minimally invasive surgeries. Their size is one of the most critical aspects, because smaller and less rigid endoscopes enable higher agility, facilitate larger accessibility, and induce less stress on the surrounding tissue. In all existing endoscopes, the size of the optics poses a major limitation in miniaturization of the imaging sys… ▽ More Endoscopes are an important component for the development of minimally invasive surgeries. Their size is one of the most critical aspects, because smaller and less rigid endoscopes enable higher agility, facilitate larger accessibility, and induce less stress on the surrounding tissue. In all existing endoscopes, the size of the optics poses a major limitation in miniaturization of the imaging system. Not only is making small optics difficult, but their performance also degrades with downscaling. Meta-optics have recently emerged as a promising candidate to drastically miniaturize optics while achieving similar functionalities with significantly reduced size. Herein, we report an inverse-designed meta-optic, which combined with a coherent fiber bundle enables a 33% reduction in the rigid tip length over traditional gradient-index (GRIN) lenses. We use the meta-optic fiber endoscope (MOFIE) to demonstrate real-time video capture in full visible color, the spatial resolution of which is primarily limited by the fiber itself. Our work shows the potential of meta-optics for integration and miniaturization of biomedical devices towards minimally invasive surgery. △ Less

Submitted 1 November, 2022; originally announced November 2022.

Inverse-Designed Meta-Optics with Spectral-Spatial Engineered Response to Mimic Color Perception

Authors: Chris Munley, Wenchao Ma, Johannes E. Fröch, Quentin A. A. Tanguy, Elyas Bayati, Karl F. Böhringer, Zin Lin, Raphaël Pestourie, Steven G. Johnson, Arka Majumdar

Abstract: Meta-optics have rapidly become a major research field within the optics and photonics community, strongly driven by the seemingly limitless opportunities made possible by controlling optical wavefronts through interaction with arrays of sub-wavelength scatterers. As more and more modalities are explored, the design strategies to achieve desired functionalities become increasingly demanding, neces… ▽ More Meta-optics have rapidly become a major research field within the optics and photonics community, strongly driven by the seemingly limitless opportunities made possible by controlling optical wavefronts through interaction with arrays of sub-wavelength scatterers. As more and more modalities are explored, the design strategies to achieve desired functionalities become increasingly demanding, necessitating more advanced design techniques. Herein, the inverse-design approach is utilized to create a set of single-layer meta-optics that simultaneously focus light and shape the spectra of focused light without using any filters. Thus, both spatial and spectral properties of the meta-optics are optimized, resulting in spectra that mimic the color matching functions of the CIE 1931 XYZ color space, which links the distributions of wavelengths in light and the color perception of a human eye. Experimental demonstrations of these meta-optics show qualitative agreement with the theoretical predictions and help elucidate the focusing mechanism of these devices. △ Less

Submitted 28 April, 2022; originally announced April 2022.

Monolithic Silicon Carbide Metalenses

Authors: Otto Cranwell Schaeper, Ziwei Yang, Mehran Kianinia, Johannes E. Fröch, Andrei Komar, Zhao Mu, Weibo Gao, Dragomir Neshev, Igor Aharonovich

Abstract: Silicon carbide has emerged as a promising material platform for quantum photonics and nonlinear optics. These properties make the development of integrated photonic components in high-quality silicon carbide a critical aspect for the advancement of scalable on-chip networks. In this work, we numerically design, fabricate and demonstrate the performance of monolithic metalenses from SiC suitable f… ▽ More Silicon carbide has emerged as a promising material platform for quantum photonics and nonlinear optics. These properties make the development of integrated photonic components in high-quality silicon carbide a critical aspect for the advancement of scalable on-chip networks. In this work, we numerically design, fabricate and demonstrate the performance of monolithic metalenses from SiC suitable for on-chip optical operations. We engineer two distinct lenses, with parabolic and cubic phase profiles, operating in the near infrared spectral range, which is of interest for quantum and photonic applications. We support the lens fabrication by optical transmission measurement and characterize the focal points of the lenses. Our results will accelerate the development of SiC nanophotonic devices and aid in an on chip integration of quantum emitters with meta-optical components. △ Less

Submitted 29 January, 2022; originally announced January 2022.

Broadband nonvolatile electrically programmable silicon photonic switches

Authors: Rui Chen, Zhuoran Fang, Johannes E. Fröch, Peipeng Xu, Jiajiu Zheng, Arka Majumdar

Abstract: Programmable photonic integrated circuits (PICs) have recently gained significant interest due to their potential in creating next-generation technologies ranging from artificial neural networks and microwave photonics to quantum information processing. The fundamental building block of such programmable PICs is a tunable 2 x 2 switch, traditionally controlled by the thermo-optic or free-carrier d… ▽ More Programmable photonic integrated circuits (PICs) have recently gained significant interest due to their potential in creating next-generation technologies ranging from artificial neural networks and microwave photonics to quantum information processing. The fundamental building block of such programmable PICs is a tunable 2 x 2 switch, traditionally controlled by the thermo-optic or free-carrier dispersion. Yet, these implementations are power-hungry, volatile, and have a large footprint (typically > 100 um). Therefore, a truly 'set-and-forget' type 2 x 2 switch with zero static power consumption is highly desirable for large-scale PICs. Here, we report a broadband nonvolatile electrically programmable 2 x 2 silicon photonic switch based on the phase-change material Ge2Sb2Te5. The directional coupler switch exhibits a compact coupling length (64 um), small insertion loss (<2 dB), and minimal crosstalk (<-8 dB) across the entire telecommunication C-band while maintaining a record-high endurance of over 2,800 switching cycles. This demonstrated switch constitutes a critical component for realizing future generic programmable silicon photonic systems. △ Less

Submitted 13 January, 2022; originally announced January 2022.

Purcell enhancement of a cavity-coupled emitter in hexagonal boron nitride

Authors: Johannes E. Fröch, Chi Li, Yongliang Chen, Milos Toth, Mehran Kianinia, Sejeong Kim, Igor Aharonovich

Abstract: Integration of solid state quantum emitters into nanophotonic circuits is a critical step towards fully on-chip quantum photonic based technologies. Among potential materials platforms, quantum emitters in hexagonal boron nitride have emerged over the last years as viable candidate. While the fundamental physical properties have been intensively studied over the last years, only few works have foc… ▽ More Integration of solid state quantum emitters into nanophotonic circuits is a critical step towards fully on-chip quantum photonic based technologies. Among potential materials platforms, quantum emitters in hexagonal boron nitride have emerged over the last years as viable candidate. While the fundamental physical properties have been intensively studied over the last years, only few works have focused on the emitter integration into photonic resonators. Yet, for a potential quantum photonic material platform, the integration with nanophotonic cavities is an important cornerstone, as it enables the deliberate tuning of the spontaneous emission and the improved readout of distinct transitions for that quantum emitter. In this work, we demonstrate the resonant tuning of an integrated monolithic hBN quantum emitter in a photonic crystal cavity through gas condensation at cryogenic temperature. We resonantly coupled the zero phonon line of the emitter to a cavity mode and demonstrate emission enhancement and lifetime reduction, with an estimation for the Purcell factor of ~ 15. △ Less

Submitted 11 August, 2021; originally announced August 2021.

Coupling Spin Defects in a Layered Material to Nanoscale Plasmonic Cavities

Authors: Noah Mendelson, Ritika Ritika, Mehran Kianinia, John Scott, Sejeong Kim, Johannes E. Fröch, Camilla Gazzana, Mika Westerhausen, Licheng Xiao, Seyed Sepehr Mohajerani, Stefan Strauf, Milos Toth, Igor Aharonovich, Zai-Quan Xu

Abstract: Spin defects in hexagonal boron nitride, and specifically the negatively charged boron vacancy (VB) centres, are emerging candidates for quantum sensing. However, the VB defects suffer from low quantum efficiency and as a result exhibit weak photoluminescence. In this work, we demonstrate a scalable approach to dramatically enhance the VB- emission by coupling to a plasmonic gap cavity. The plasmo… ▽ More Spin defects in hexagonal boron nitride, and specifically the negatively charged boron vacancy (VB) centres, are emerging candidates for quantum sensing. However, the VB defects suffer from low quantum efficiency and as a result exhibit weak photoluminescence. In this work, we demonstrate a scalable approach to dramatically enhance the VB- emission by coupling to a plasmonic gap cavity. The plasmonic cavity is composed of a flat gold surface and a silver cube, with few-layer hBN flakes positioned in between. Employing these plasmonic cavities, we extracted two orders of magnitude in photoluminescence enhancement associated with a corresponding 2 fold enhancement in optically detected magnetic resonance contrast. The work will be pivotal to progress in quantum sensing employing 2D materials, and realisation of nanophotonic devices with spin defects in hexagonal boron nitride. △ Less

Submitted 5 August, 2021; originally announced August 2021.

Integration of hBN quantum emitters in monolithically fabricated waveguides

Authors: Chi Li, Johannes E. Fröch, Milad Nonahal, Thinh N. Tran, Milos Toth, Sejeong Kim, Igor Aharonovich

Abstract: Hexagonal boron nitride (hBN) is gaining interest for potential applications in integrated quantum nanophotonics. Yet, to establish hBN as an integrated photonic platform several cornerstones must be established, including the integration and coupling of quantum emitters to photonic waveguides. Supported by simulations, we study the approach of monolithic integration, which is expected to have cou… ▽ More Hexagonal boron nitride (hBN) is gaining interest for potential applications in integrated quantum nanophotonics. Yet, to establish hBN as an integrated photonic platform several cornerstones must be established, including the integration and coupling of quantum emitters to photonic waveguides. Supported by simulations, we study the approach of monolithic integration, which is expected to have coupling efficiencies that are 4 times higher than those of a conventional hybrid stacking strategy. We then demonstrate the fabrication of such devices from hBN and showcase the successful integration of hBN single photon emitters with a monolithic waveguide. We demonstrate coupling of single photons from the quantum emitters to the waveguide modes and on-chip detection. Our results build a general framework for monolithically integrated hBN single photon emitter and will facilitate future works towards on-chip integrated quantum photonics with hBN. △ Less

Submitted 28 July, 2021; originally announced July 2021.

Coupling spin defects in hexagonal boron nitride to monolithic bullseye cavities

Authors: Johannes E. Fröch, Lesley Spencer, Mehran Kianinia, Daniel Totonjian, Minh Nguyen, Vladimir Dyakonov, Milos Toth, Sejeong Kim, Igor Aharonovich

Abstract: Color centers in hexagonal boron nitride (hBN) are becoming an increasingly important building block for quantum photonic applications. Herein, we demonstrate the efficient coupling of recently discovered spin defects in hBN to purposely designed bullseye cavities. We show that the all monolithic hBN cavity system exhibits an order of magnitude enhancement in the emission of the coupled boron vaca… ▽ More Color centers in hexagonal boron nitride (hBN) are becoming an increasingly important building block for quantum photonic applications. Herein, we demonstrate the efficient coupling of recently discovered spin defects in hBN to purposely designed bullseye cavities. We show that the all monolithic hBN cavity system exhibits an order of magnitude enhancement in the emission of the coupled boron vacancy spin defects. In addition, by comparative finite difference time domain modelling, we shed light on the emission dipole orientation, which has not been experimentally demonstrated at this point. Beyond that, the coupled spin system exhibits an enhanced contrast in optically detected magnetic resonance readout and improved signal to noise ratio. Thus, our experimental results supported by simulations, constitute a first step towards integration of hBN spin defects with photonic resonators for a scalable spin photon interface. △ Less

Submitted 25 May, 2021; originally announced May 2021.

Recoil Implantation Using Gas-Phase Precursor Molecules

Authors: Angus Gale, Johannes E. Fröch, Mehran Kianinia, James Bishop, Igor Aharonovich, Milos Toth

Abstract: Ion implantation underpins a vast range of devices and technologies that require precise control over the physical, chemical, electronic, magnetic and optical properties of materials. A variant termed recoil implantation - in which a precursor is deposited onto a substrate as a thin film and implanted via momentum transfer from incident energetic ions - has a number of compelling advantages, parti… ▽ More Ion implantation underpins a vast range of devices and technologies that require precise control over the physical, chemical, electronic, magnetic and optical properties of materials. A variant termed recoil implantation - in which a precursor is deposited onto a substrate as a thin film and implanted via momentum transfer from incident energetic ions - has a number of compelling advantages, particularly when performed using an inert ion nano-beam [Fröch et al., Nat Commun 11, 5039 (2020)]. However, a major drawback of this approach is that the implant species are limited to the constituents of solid thin films. Here we overcome this limitation by demonstrating recoil implantation using gas-phase precursors. Specifically, we fabricate nitrogen-vacancy (NV) color centers in diamond using an Ar ion beam and the nitrogen-containing precursor gases N2, NH3 and NF3. Our work expands the applicability of recoil implantation to most of the periodic table, and to applications in which thin film deposition or removal is impractical. △ Less

Submitted 9 February, 2021; originally announced February 2021.

Fabrication of photonic resonators in bulk 4H-SiC

Authors: Otto Cranwell Schaeper, Johannes E. Fröch, Sejeong Kim, Zhao Mu, Milos Toth, Weibo Gao, Igor Aharonovich

Abstract: The design and engineering of photonic architectures, suitable to enhance, collect and guide light on chip is needed for applications in quantum photonics and quantum optomechanics. In this work we apply a Faraday cage based oblique angle etch method to fabricate various functional photonic devices from 4H Silicon Carbide - a material that has attracted attention in recent years, due to its potent… ▽ More The design and engineering of photonic architectures, suitable to enhance, collect and guide light on chip is needed for applications in quantum photonics and quantum optomechanics. In this work we apply a Faraday cage based oblique angle etch method to fabricate various functional photonic devices from 4H Silicon Carbide - a material that has attracted attention in recent years, due to its potential in optomechanics, nonlinear optics and quantum information. We detail the processing conditions and thoroughly address the geometrical and optical characteristics of the fabricated devices. Employing photoluminescence measurements we demonstrate high quality factors for suspended microring resonators of up to 3500 in the visible range. Such devices will be applicable in the future to augment the properties of SiC in integrated on chip quantum photonics. △ Less

Submitted 24 January, 2021; originally announced January 2021.

Nanofabrication of high Q, transferable, diamond resonators

Authors: Blake Regan, Aleksandra Trycz, Johannes E. Fröch, Otto Cranwell Schaeper, Sejeong Kim, Igor Aharonovich

Abstract: Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components, including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silico… ▽ More Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components, including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q factors) approaching 10$^$4. Finally, we show that the cavities can be picked up and transferred onto a trenched substrate to realise fully suspended diamond cavities. Our fabrication process demonstrates the capability of diamond membranes as modular components for broader diamond based quantum photonic circuitry. △ Less

Submitted 15 January, 2021; originally announced January 2021.

Large few-layer hexagonal boron nitride flakes for nonlinear optics

Authors: Nils Bernhardt, Sejeong Kim, Johannes E. Froch, Simon White, Ngoc My Hanh Duong, Zhe He, Bo Chen, ** Liu, Igor Aharonovich, Alexander S. Solntsev

Abstract: Hexagonal boron nitride (hBN) is a layered dielectric material with a wide range of applications in optics and photonics. In this work, we demonstrate a fabrication method for few-layer hBN flakes with areas up to 5000 $\rm μm$. We show that hBN in this form can be integrated with photonic microstructures: as an example, we use a circular Bragg grating (CBG). The layer quality of the exfoliated hB… ▽ More Hexagonal boron nitride (hBN) is a layered dielectric material with a wide range of applications in optics and photonics. In this work, we demonstrate a fabrication method for few-layer hBN flakes with areas up to 5000 $\rm μm$. We show that hBN in this form can be integrated with photonic microstructures: as an example, we use a circular Bragg grating (CBG). The layer quality of the exfoliated hBN flake on a CBG is confirmed by second-harmonic generation (SHG) microscopy. We show that the SHG signal is uniform across the hBN sample outside the CBG and is amplified in the centre of the CBG. △ Less

Submitted 11 July, 2020; v1 submitted 3 July, 2020; originally announced July 2020.

Valley Polarization Enhancement Induced by a Single Chiral Nanoparticle

Authors: Sejeong Kim, Yae Chan Lim, Ryeong Myeong Kim, Johannes E. Fröch, Thinh N. Tran, Ki Tae Nam, Igor Aharonovich

Abstract: Valley polarization is amongst the most critical attributes of atomically thin materials. However, achieving a high contrast from monolayer transition metal dichalcogenides (TMDs) has so far been challenging. In this work, a giant valley polarization contrast up to 45% from a monolayer WS2 has been achieved at room temperature by using a single chiral plasmonic nanoparticle. The increased contrast… ▽ More Valley polarization is amongst the most critical attributes of atomically thin materials. However, achieving a high contrast from monolayer transition metal dichalcogenides (TMDs) has so far been challenging. In this work, a giant valley polarization contrast up to 45% from a monolayer WS2 has been achieved at room temperature by using a single chiral plasmonic nanoparticle. The increased contrast is attributed to the selective enhancement of both the excitation and the emission rate having one particular handedness of the circular polarization. The experimental results were corroborated by the optical simulation using finite-difference time-domain (FDTD) method. Additionally, the single chiral nanoparticle enabled the observation of valley-polarized luminescence with a linear excitation. Our results provide a promising pathway to enhance valley contrast from monolayer TMDs and utilize them for nanophotonic devices. △ Less

Submitted 26 April, 2020; originally announced April 2020.

Engineering spin defects in hexagonal boron nitride

Authors: Mehran Kianinia, Simon White, Johannes E. Fröch, Carlo Bradac, Igor Aharonovich

Abstract: Two-dimensional hexagonal boron nitride offers intriguing opportunities for advanced studies of light-matter interaction at the nanoscale, specifically for realizations in quantum nanophotonics. Here, we demonstrate the engineering of optically-addressable spin defects based on the negatively-charged boron vacancy center. We show that these centers can be created in exfoliated hexagonal boron nitr… ▽ More Two-dimensional hexagonal boron nitride offers intriguing opportunities for advanced studies of light-matter interaction at the nanoscale, specifically for realizations in quantum nanophotonics. Here, we demonstrate the engineering of optically-addressable spin defects based on the negatively-charged boron vacancy center. We show that these centers can be created in exfoliated hexagonal boron nitride using a variety of focused ion beams (nitrogen, xenon and argon), with nanoscale precision. Using a combination of laser and resonant microwave excitation, we carry out optically detected magnetic resonance spectroscopy measurements, which reveal a zero-field ground state splitting for the defect of ~3.46 GHz. We also perform photoluminescence excitation spectroscopy and temperature dependent photoluminescence measurements to elucidate the photophysical properties of the center. Our results are important for advanced quantum and nanophotonics realizations involving manipulation and readout of spin defects in hexagonal boron nitride. △ Less

Submitted 16 April, 2020; originally announced April 2020.

Photonic nanobeam cavities with nano-pockets for efficient integration of fluorescent nanoparticles

Authors: Johannes E. Fröch, Sejeong Kim, Connor Stewart, Xiaoxue Xu, Ziqing Du, Mark Lockrey, Milos Toth, Igor Aharonovich

Abstract: Integrating fluorescent nanoparticles with high-Q, small mode volume cavities is indispensable for nanophotonics and quantum technologies. To date, nanoparticles have largely been coupled to evanescent fields of cavity modes, which limits the strength of the interaction. Here, we developed both a cavity design and a fabrication method that enable efficient coupling between a fluorescent nanopartic… ▽ More Integrating fluorescent nanoparticles with high-Q, small mode volume cavities is indispensable for nanophotonics and quantum technologies. To date, nanoparticles have largely been coupled to evanescent fields of cavity modes, which limits the strength of the interaction. Here, we developed both a cavity design and a fabrication method that enable efficient coupling between a fluorescent nanoparticle and a cavity optical mode. The design consists of a fishbone-shaped, one-dimensional photonic crystal cavity with a nano-pocket located at the electric field maximum of the fundamental optical mode. Furthermore, the presence of a nanoparticle inside the pocket reduces the mode volume substantially and induces subwavelength light confinement. Our approach opens exciting pathways to achieve strong light confinement around fluorescent nanoparticles for applications in energy, sensing, lasing and quantum technologies. △ Less

Submitted 20 January, 2020; originally announced January 2020.

Versatile Direct Writing of Dopants in a Solid State Host Through Recoil Implantation

Authors: Johannes E. Fröch, Alan Bahm, Mehran Kianinia, Mu Zhao, Vijay Bhatia, Sejeong Kim, Julie M. Cairney, Weibo Gao, Carlo Bradac, Igor Aharonovich, Milos Toth

Abstract: Modifying material properties at the nanoscale is crucially important for devices in nanoelectronics, nanophotonics and quantum information. Optically active defects in wide band gap materials, for instance, are vital constituents for the realisation of quantum technologies. Yet, the introduction of atomic defects through direct ion implantation remains a fundamental challenge. Herein, we establis… ▽ More Modifying material properties at the nanoscale is crucially important for devices in nanoelectronics, nanophotonics and quantum information. Optically active defects in wide band gap materials, for instance, are vital constituents for the realisation of quantum technologies. Yet, the introduction of atomic defects through direct ion implantation remains a fundamental challenge. Herein, we establish a universal method for material do** by exploiting one of the most fundamental principles of physics - momentum transfer. As a proof of concept, we direct-write arrays of emitters into diamond via momentum transfer from a Xe+ focused ion beam (FIB) to thin films of the group IV dopants pre-deposited onto a diamond surface. We conclusively show that the technique, which we term knock-on do**, can yield ultra-shallow dopant profiles localized to the top 5 nm of the target surface, and use it to achieve sub-50 nm lateral resolution. The knock-on do** method is cost-effective, yet very versatile, powerful and universally suitable for applications such as electronic and magnetic do** of atomically thin materials and engineering of near-surface states of semiconductor devices. △ Less

Submitted 8 October, 2020; v1 submitted 20 January, 2020; originally announced January 2020.

Coupling hBN quantum emitters to 1D photonic crystal cavities

Authors: Johannes E. Fröch, Sejeong Kim, Noah Mendelson, Mehran Kianinia, Milos Toth, Igor Aharonovich

Abstract: Quantum photonics technologies require a scalable approach for integration of non-classical light sources with photonic resonators to achieve strong light confinement and enhancement of quantum light emission. Point defects from hexagonal Boron Nitride (hBN) are amongst the front runners for single photon sources due to their ultra bright emission, however, coupling of hBN defects to photonic crys… ▽ More Quantum photonics technologies require a scalable approach for integration of non-classical light sources with photonic resonators to achieve strong light confinement and enhancement of quantum light emission. Point defects from hexagonal Boron Nitride (hBN) are amongst the front runners for single photon sources due to their ultra bright emission, however, coupling of hBN defects to photonic crystal cavities has so far remained elusive. Here we demonstrate on-chip integration of hBN quantum emitters with photonic crystal cavities from silicon nitride (Si3N4) and achieve experimentally measured Q-factor of 3,300 for hBN/Si3N4 hybrid cavities. We observed 9-fold photoluminescence enhancement of a hBN single photon emission at room temperature. Our work paves the way towards hybrid integrated quantum photonics with hBN, and outlines an excellent path for further development of cavity quantum electrodynamic experiments and on-chip integration of 2D materials. △ Less

Submitted 6 November, 2019; originally announced November 2019.

Second-harmonic generation in multilayer hexagonal boron nitride flakes

Authors: Sejeong Kim, Johannes E. Fröch, Augustine Gardner, Chi Li, Igor Aharonovich, Alexander S. Solntsev

Abstract: We report second-harmonic generation (SHG) from thick hexagonal boron nitride (hBN) flakes with approximately 109-111 layers. The resulting effective second-order susceptibility is similar to previously reported few-layer experiments. This confirms that thick hBN flakes can serve as a platform for nonlinear optics, which is useful because thick flakes are easy to exfoliate while retaining a large… ▽ More We report second-harmonic generation (SHG) from thick hexagonal boron nitride (hBN) flakes with approximately 109-111 layers. The resulting effective second-order susceptibility is similar to previously reported few-layer experiments. This confirms that thick hBN flakes can serve as a platform for nonlinear optics, which is useful because thick flakes are easy to exfoliate while retaining a large flake size. We also show spatial second-harmonic maps revealing that SHG remains a useful tool for the characterization of the layer structure even in the case of a large number of layers. △ Less

Submitted 6 November, 2019; v1 submitted 24 February, 2019; originally announced February 2019.

Fabrication of photonic nanostructures from hexagonal boron nitride

Authors: Johannes E. Fröch, Yongsop Hwang, Sejeong Kim, Igor Aharonovich, Milos Toth

Abstract: Growing interest in devices based on layered van der Waals (vdW) materials is motivating the development of new nanofabrication methods. Hexagonal boron nitride (hBN) is one of the most promising materials for studies of quantum photonics and polaritonics. Here, we report in detail on a promising nanofabrication processes used to fabricate several hBN photonic devices using a hybrid electron beam… ▽ More Growing interest in devices based on layered van der Waals (vdW) materials is motivating the development of new nanofabrication methods. Hexagonal boron nitride (hBN) is one of the most promising materials for studies of quantum photonics and polaritonics. Here, we report in detail on a promising nanofabrication processes used to fabricate several hBN photonic devices using a hybrid electron beam induced etching (EBIE) and reactive ion etching (RIE) technique. We highlight the shortcomings and benefits of RIE and EBIE and demonstrate the utility of the hybrid approach for the fabrication of suspended and supported device structures with nanoscale features and highly vertical sidewalls. Functionality of the fabricated devices is proven by measurements of high quality cavity optical modes (Q~1500). Our nanofabrication approach constitutes an advance towards an integrated, monolithic quantum photonics platform based on hBN and other layered vdW materials. △ Less

Submitted 20 September, 2018; originally announced September 2018.

Hexagonal boron nitride cavity optomechanics

Authors: Prasoon K. Shandilya, Johannes E. Fröch, Matthew Mitchell, David P. Lake, Sejeong Kim, Milos Toth, Bishnupada Behera, Chris Healey, Igor Aharonovich, Paul E. Barclay

Abstract: Hexagonal boron nitride (hBN) is an emerging layered material that plays a key role in a variety of two-dimensional devices, and has potential applications in nanophotonics and nanomechanics. Here, we demonstrate the first cavity optomechanical system incorporating hBN. Nanomechanical resonators consisting of hBN beams with predicted thickness between 8 nm and 51 nm were fabricated using electron… ▽ More Hexagonal boron nitride (hBN) is an emerging layered material that plays a key role in a variety of two-dimensional devices, and has potential applications in nanophotonics and nanomechanics. Here, we demonstrate the first cavity optomechanical system incorporating hBN. Nanomechanical resonators consisting of hBN beams with predicted thickness between 8 nm and 51 nm were fabricated using electron beam induced etching and positioned in the optical nearfield of silicon microdisk cavities. A 160 fm/$\sqrt{\text{Hz}}$ sensitivity to the hBN nanobeam motion is demonstrated, allowing observation of thermally driven mechanical resonances with frequencies between 1 and 23 MHz, and mechanical quality factors reaching 1100 at room temperature in high vacuum. In addition, the role of air dam** is studied via pressure dependent measurements. Our results constitute an important step towards realizing integrated optomechanical circuits employing hBN. △ Less

Submitted 16 December, 2018; v1 submitted 11 September, 2018; originally announced September 2018.

Comments: Revised version

Photonic Crystal Cavities from Hexagonal Boron Nitride

Authors: Sejeong Kim, Johannes E. Fröch, Joe Christian, Marcus Straw, James Bishop, Daniel Totonjian, Kenji Watanabe, Takashi Taniguchi, Milos Toth, Igor Aharonovich

Abstract: Development of scalable quantum photonic technologies requires on-chip integration of components such as photonic crystal cavities and waveguides with nonclassical light sources. Recently, hexagonal boron nitride (hBN) has emerged as a promising platform for nanophotonics, following reports of hyperbolic phonon-polaritons and optically stable, ultra-bright quantum emitters. However, exploitation o… ▽ More Development of scalable quantum photonic technologies requires on-chip integration of components such as photonic crystal cavities and waveguides with nonclassical light sources. Recently, hexagonal boron nitride (hBN) has emerged as a promising platform for nanophotonics, following reports of hyperbolic phonon-polaritons and optically stable, ultra-bright quantum emitters. However, exploitation of hBN in scalable, on-chip nanophotonic circuits, quantum information processing and cavity quantum electrodynamics (QED) experiments requires robust techniques for the fabrication of monolithic optical resonators. In this letter, we design and engineer high quality photonic crystal cavities from hBN. We employ two approaches based on a focused ion beam method and a minimally-invasive electron beam induced etching (EBIE) technique to fabricate suspended two dimensional (2D) and one dimensional (1D) cavities with quality (Q) factors in excess of 2,000. Subsequently, we show deterministic, iterative tuning of individual cavities by direct-write, single-step EBIE without significant degradation of the Q-factor. The demonstration of tunable, high Q cavities made from hBN is an unprecedented advance in nanophotonics based on van der Waals materials. Our results and hBN processing methods open up promising new avenues for solid-state systems with applications in integrated quantum photonics, polaritonics and cavity QED experiments. △ Less

Submitted 13 January, 2018; originally announced January 2018.