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Contact holes in vertical electrode structures analyzed by voltage contrast-SEM and conducting AFM
Authors:
Minsun Gu,
Moon Seop Hyun,
Moonsup Han,
Gyungtae Kim,
Young Jun Chang
Abstract:
Soaring demands of multi-stacked memory devices request urgent development of backside contact electrode technologies, such as high aspect ratio etching, metallization, and inspection methods. Especially the complex metal contact process should be monitored for each manufacturing step to filter the defective samples and to maintain the high yield of production. Among the inspection methods for det…
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Soaring demands of multi-stacked memory devices request urgent development of backside contact electrode technologies, such as high aspect ratio etching, metallization, and inspection methods. Especially the complex metal contact process should be monitored for each manufacturing step to filter the defective samples and to maintain the high yield of production. Among the inspection methods for detecting the electrical connections, there is voltage contrast (VC)-SEM and conducting AFM (C-AFM). In this report, we investigated the two inspection methods for testing designed samples with different contact hole states. The VC-SEM data shows the contrast variation at the contact holes, from which one may discern the contact status with an optimum voltage. The C-AFM results clearly demonstrate a finite electrical current in the connected contact, while a negligible current in the disconnected one. Finally, we discuss insights of using the two methods for analyzing the contact hole technologies with high aspect ratios.
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Submitted 22 October, 2023;
originally announced October 2023.
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Coupling between multiple antennas through a plasma cylinder
Authors:
L. Chang,
L. P. Zhang,
X. G. Yuan,
Y. J. Chang,
J. H. Zhang,
X. Yang,
Y. Wang,
H. S. Zhou,
G. N. Luo
Abstract:
The coupling physics between multiple antennas separated axially along a plasma cylinder is investigated. Experiments are carried out on a recently built device: Physics ANd Thruster oriented HElicon Research (PANTHER), with an upgrade of second-stage antennas. Mutual induction currents are measured in detail. It is found that the existence of plasma column going through these antennas increase th…
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The coupling physics between multiple antennas separated axially along a plasma cylinder is investigated. Experiments are carried out on a recently built device: Physics ANd Thruster oriented HElicon Research (PANTHER), with an upgrade of second-stage antennas. Mutual induction currents are measured in detail. It is found that the existence of plasma column going through these antennas increase the coupling effects among them significantly. Theoretical analyses from the perspectives of transformer and magnetic permeability and moment confirm the reasonability of this phenomenon. This work is of particular interest for electrodeless plasma source or thruster which employs multiple antennas for ionisation and acceleration.
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Submitted 10 December, 2021;
originally announced December 2021.
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Enhanced passive thermal stealth properties of VO$_2$ thin films via gradient W do**
Authors:
Hyuk ** Kim,
Young Hwan Choi,
Dong Kyu Lee,
In Hak Lee,
Byoung Ki Choi,
Soo-Hyun Phark,
Young Jun Chang
Abstract:
Thermal stealth and camouflage have been intensively studied for blending objects with their surroundings against remote thermal image detection. Adaptive control of infrared emissivity has been explored extensively as a promising way of thermal stealth, but it still requires an additional feedback control. Passive modulation of emissivity, however, has been remained as a great challenge which req…
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Thermal stealth and camouflage have been intensively studied for blending objects with their surroundings against remote thermal image detection. Adaptive control of infrared emissivity has been explored extensively as a promising way of thermal stealth, but it still requires an additional feedback control. Passive modulation of emissivity, however, has been remained as a great challenge which requires a precise engineering of emissivity over wide temperature range. Here, we report a drastic improvement of passive camouflage thin films capable of concealing thermal objects at near room temperature without any feedback control, which consists of a vanadium dioxide (VO2) layer with gradient tungsten (W) concentration. The gradient W-do** widens the metal-insulator transition width, accomplishing self-adaptive thermal stealth with a smooth change of emissivity. Our simple approach, applicable to other similar thermal camouflage materials for improving their passive cloaking, will find wide applications, such as passive thermal camouflage, urban energy-saving smart windows, and improved infrared sensors.
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Submitted 12 May, 2021;
originally announced May 2021.
