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Large Scale Integration of Graphene Transistors for Potential Applications in the Back End of the Line
Authors:
A. D. Smith,
S. Vaziri,
S. Rodriguez,
M. Östling,
M. C. Lemme
Abstract:
A chip to wafer scale, CMOS compatible method of graphene device fabrication has been established, which can be integrated into the back end of the line (BEOL) of conventional semiconductor process flows. In this paper, we present experimental results of graphene field effect transistors (GFETs) which were fabricated using this wafer scalable method. The carrier mobilities in these transistors rea…
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A chip to wafer scale, CMOS compatible method of graphene device fabrication has been established, which can be integrated into the back end of the line (BEOL) of conventional semiconductor process flows. In this paper, we present experimental results of graphene field effect transistors (GFETs) which were fabricated using this wafer scalable method. The carrier mobilities in these transistors reach up to several hundred cm$^2$V$^{-1}$s$^{-1}$. Further, these devices exhibit current saturation regions similar to graphene devices fabricated using mechanical exfoliation. The overall performance of the GFETs can not yet compete with record values reported for devices based on mechanically exfoliated material. Nevertheless, this large scale approach is an important step towards reliability and variability studies as well as optimization of device aspects such as electrical contacts and dielectric interfaces with statistically relevant numbers of devices. It is also an important milestone towards introducing graphene into wafer scale process lines.
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Submitted 22 November, 2022;
originally announced November 2022.
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Chemical vapor deposited graphene: From synthesis to applications
Authors:
Satender Kataria,
Stefan Wagner,
Jasper Ruhkopf,
Aamit Gahoi,
Himadri Pandey,
Rainer Bornemann,
Sam Vaziri,
Anderson D. Smith,
Mikael Östling,
Max C. Lemme
Abstract:
Graphene is a material with enormous potential for numerous applications. Therefore, significant efforts are dedicated to large-scale graphene production using a chemical vapor deposition (CVD) technique. In addition, research is directed at develo** methods to incorporate graphene in established production technologies and process flows. In this paper, we present a brief review of available CVD…
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Graphene is a material with enormous potential for numerous applications. Therefore, significant efforts are dedicated to large-scale graphene production using a chemical vapor deposition (CVD) technique. In addition, research is directed at develo** methods to incorporate graphene in established production technologies and process flows. In this paper, we present a brief review of available CVD methods for graphene synthesis. We also discuss scalable methods to transfer graphene onto desired substrates. Finally, we discuss potential applications that would benefit from a fully scaled, semiconductor technology compatible production process.
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Submitted 27 March, 2021;
originally announced March 2021.
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Suspended graphene membranes with attached silicon proof masses as piezoresistive NEMS accelerometers
Authors:
Xuge Fan,
Fredrik Forsberg,
Anderson D. Smith,
Stephan Schröder,
Stefan Wagner,
Mikael Östling,
Max C. Lemme,
Frank Niklaus
Abstract:
Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitati…
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Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitations regarding mechanical robustness, manufacturing yield and the maximum measurement current that can be applied across the ribbons. Here, we report on suspended graphene membranes that are fully-clamped at their circumference and that have attached silicon proof masses. We demonstrate their utility as piezoresistive NEMS accelerometers and they are found to be more robust, have longer life span and higher manufacturing yield, can withstand higher measurement currents and are able to suspend larger silicon proof masses, as compared to the previously graphene ribbon devices. These findings are an important step towards bringing ultra-miniaturized piezoresistive graphene NEMS closer towards deployment in emerging applications such as in wearable electronics, biomedical implants and internet of things (IoT) devices.
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Submitted 16 March, 2020;
originally announced March 2020.
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Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications
Authors:
Xuge Fan,
Anderson D. Smith,
Fredrik Forsberg,
Stefan Wagner,
Stephan Schröder,
Sayedeh Shirin Afyouni Akbari,
Andreas C. Fischer,
Luis Guillermo Villanueva,
Mikael Östling,
Max C. Lemme,
Frank Niklaus
Abstract:
Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological…
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Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 micro meter to 110 micro meter and suspended proof masses consisting of solid silicon cubes that are from 5 micro meter multiply 5 micro meter multiply 16.4 micro meter to 100 micro meter multiply 100 micro meter multiply 16.4 micro meter in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were greater than 90%, with more than 70% of the graphene membranes having more than 90% graphene area without visible defects. The graphene membranes with suspended proof masses were extremely robust and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to ~7000 nN. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.
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Submitted 16 March, 2020;
originally announced March 2020.
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Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
Authors:
Xuge Fan,
Fredrik Forsberg,
Anderson D. Smith,
Stephan Schröder,
Stefan Wagner,
Henrik Rödjegård,
Andreas C. Fischer,
Mikael Östling,
Max C. Lemme,
Frank Niklaus
Abstract:
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring-mass…
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Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring-mass and piezoresistive transducers. The transducers, which are realized using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers.
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Submitted 16 March, 2020;
originally announced March 2020.
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Percolation thresholds of two-dimensional continuum systems of rectangles [with erratum]
Authors:
Jiantong Li,
Mikael Östling
Abstract:
The present work introduces an efficient Monte Carlo algorithm for continuum percolation composed of randomly-oriented rectangles. By conducting extensive simulations, we report high precision percolation thresholds for a variety of homogeneous systems with different rectangle aspect ratios. This work verifies and extends the excluded area theory. It is confirmed that percolation thresholds are do…
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The present work introduces an efficient Monte Carlo algorithm for continuum percolation composed of randomly-oriented rectangles. By conducting extensive simulations, we report high precision percolation thresholds for a variety of homogeneous systems with different rectangle aspect ratios. This work verifies and extends the excluded area theory. It is confirmed that percolation thresholds are dominated by the average excluded areas for both homogeneous and heterogeneous rectangle systems (except for some special heterogeneous systems where the rectangle lengths differ too much from one another). In terms of the excluded areas, generalized formulae are proposed to effectively predict precise percolation thresholds for all these rectangle systems. This work is therefore helpful for both practical applications and theoretical studies concerning relevant systems.
The Erratum addresses errors in our earlier paper "Percolation thresholds of two-dimensional continuum systems of rectangles" published in [Phys. Rev. E 88, 012101 (2013)].
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Submitted 5 April, 2016;
originally announced April 2016.
