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Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance
Authors:
Bappaditya Dey,
Anh Tuan Ngo,
Sara Sacchi,
Victor Blanco,
Philippe Leray,
Sandip Halder
Abstract:
Moore Law states that transistor density will double every two years, which is sustained until today due to continuous multi-directional innovations, such as extreme ultraviolet lithography, novel patterning techniques etc., leading the semiconductor industry towards 3nm node and beyond. For any patterning scheme, the most important metric to evaluate the quality of printed patterns is EPE, with o…
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Moore Law states that transistor density will double every two years, which is sustained until today due to continuous multi-directional innovations, such as extreme ultraviolet lithography, novel patterning techniques etc., leading the semiconductor industry towards 3nm node and beyond. For any patterning scheme, the most important metric to evaluate the quality of printed patterns is EPE, with overlay being its largest contribution. Overlay errors can lead to fatal failures of IC devices such as short circuits or broken connections in terms of P2P electrical contacts. Therefore, it is essential to develop effective overlay analysis and control techniques to ensure good functionality of fabricated semiconductor devices. In this work we have used an imec N14 BEOL process flow using LELE patterning technique to print metal layers with minimum pitch of 48nm with 193i lithography. FF structures are decomposed into two mask layers (M1A and M1B) and then the LELE flow is carried out to make the final patterns. Since a single M1 layer is decomposed into two masks, control of overlay between the two masks is critical. The goal of this work is of two-fold as, (a) to quantify the impact of overlay on capacitance and (b) to see if we can predict the final capacitance measurements with selected machine learning models at an early stage. To do so, scatterometry spectra are collected on these electrical test structures at (a)post litho, (b)post TiN hardmask etch, and (c)post Cu plating and CMP. Critical Dimension and overlay measurements for line-space pattern are done with SEM post litho, post etch and post Cu CMP. Various machine learning models are applied to do the capacitance prediction with multiple metrology inputs at different steps of wafer processing. Finally, we demonstrate that by using appropriate machine learning models we are able to do better prediction of electrical results.
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Submitted 20 November, 2023;
originally announced December 2023.
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Deep learning denoiser assisted roughness measurements extraction from thin resists with low Signal-to-Noise Ratio(SNR) SEM images: analysis with SMILE
Authors:
Sara Sacchi,
Bappaditya Dey,
Iacopo Mochi,
Sandip Halder,
Philippe Leray
Abstract:
The technological advance of High Numerical Aperture Extreme Ultraviolet Lithography (High NA EUVL) has opened the gates to extensive researches on thinner photoresists (below 30nm), necessary for the industrial implementation of High NA EUVL. Consequently, images from Scanning Electron Microscopy (SEM) suffer from reduced imaging contrast and low Signal-to-Noise Ratio (SNR), impacting the measure…
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The technological advance of High Numerical Aperture Extreme Ultraviolet Lithography (High NA EUVL) has opened the gates to extensive researches on thinner photoresists (below 30nm), necessary for the industrial implementation of High NA EUVL. Consequently, images from Scanning Electron Microscopy (SEM) suffer from reduced imaging contrast and low Signal-to-Noise Ratio (SNR), impacting the measurement of unbiased Line Edge Roughness (uLER) and Line Width Roughness (uLWR). Thus, the aim of this work is to enhance the SNR of SEM images by using a Deep Learning denoiser and enable robust roughness extraction of the thin resist. For this study, we acquired SEM images of Line-Space (L/S) patterns with a Chemically Amplified Resist (CAR) with different thicknesses (15nm, 20nm, 25nm, 30nm), underlayers (Spin-On-Glass-SOG, Organic Underlayer-OUL) and frames of averaging (4, 8, 16, 32, and 64 Fr). After denoising, a systematic analysis has been carried out on both noisy and denoised images using an open-source metrology software, SMILE 2.3.2, for investigating mean CD, SNR improvement factor, biased and unbiased LWR/LER Power Spectral Density (PSD). Denoised images with lower number of frames present unaltered Critical Dimensions (CDs), enhanced SNR (especially for low number of integration frames), and accurate measurements of uLER and uLWR, with the same accuracy as for noisy images with a consistent higher number of frames. Therefore, images with a small number of integration frames and with SNR < 2 can be successfully denoised, and advantageously used in improving metrology throughput while maintaining reliable roughness measurements for the thin resist.
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Submitted 23 October, 2023;
originally announced October 2023.
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MRI-MECH: Mechanics-informed MRI to estimate esophageal health
Authors:
Sourav Halder,
Ethan M. Johnson,
Jun Yamasaki,
Peter J. Kahrilas,
Michael Markl,
John E. Pandolfino,
Neelesh A. Patankar
Abstract:
Dynamic magnetic resonance imaging (MRI) is a popular medical imaging technique to generate image sequences of the flow of a contrast material inside tissues and organs. However, its application to imaging bolus movement through the esophagus has only been demonstrated in few feasibility studies and is relatively unexplored. In this work, we present a computational framework called mechanics-infor…
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Dynamic magnetic resonance imaging (MRI) is a popular medical imaging technique to generate image sequences of the flow of a contrast material inside tissues and organs. However, its application to imaging bolus movement through the esophagus has only been demonstrated in few feasibility studies and is relatively unexplored. In this work, we present a computational framework called mechanics-informed MRI (MRI-MECH) that enhances that capability thereby increasing the applicability of dynamic MRI for diagnosing esophageal disorders. Pineapple juice was used as the swallowed contrast material for the dynamic MRI and the MRI image sequence was used as input to the MRI-MECH. The MRI-MECH modeled the esophagus as a flexible one-dimensional tube and the elastic tube walls followed a linear tube law. Flow through the esophagus was then governed by one-dimensional mass and momentum conservation equations. These equations were solved using a physics-informed neural network (PINN). The PINN minimized the difference between the measurements from the MRI and model predictions ensuring that the physics of the fluid flow problem was always followed. MRI-MECH calculated the fluid velocity and pressure during esophageal transit and estimated the mechanical health of the esophagus by calculating wall stiffness and active relaxation. Additionally, MRI-MECH predicted missing information about the lower esophageal sphincter during the emptying process, demonstrating its applicability to scenarios with missing data or poor image resolution. In addition to potentially improving clinical decisions based on quantitative estimates of the mechanical health of the esophagus, MRI-MECH can also be enhanced for application to other medical imaging modalities to enhance their functionality as well.
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Submitted 15 September, 2022;
originally announced September 2022.
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Overview of the EEG Pilot Subtask at MediaEval 2021: Predicting Media Memorability
Authors:
Lorin Sweeney,
Ana Matran-Fernandez,
Sebastian Halder,
Alba G. Seco de Herrera,
Alan Smeaton,
Graham Healy
Abstract:
The aim of the Memorability-EEG pilot subtask at MediaEval'2021 is to promote interest in the use of neural signals -- either alone or in combination with other data sources -- in the context of predicting video memorability by highlighting the utility of EEG data. The dataset created consists of pre-extracted features from EEG recordings of subjects while watching a subset of videos from Predicti…
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The aim of the Memorability-EEG pilot subtask at MediaEval'2021 is to promote interest in the use of neural signals -- either alone or in combination with other data sources -- in the context of predicting video memorability by highlighting the utility of EEG data. The dataset created consists of pre-extracted features from EEG recordings of subjects while watching a subset of videos from Predicting Media Memorability subtask 1. This demonstration pilot gives interested researchers a sense of how neural signals can be used without any prior domain knowledge, and enables them to do so in a future memorability task. The dataset can be used to support the exploration of novel machine learning and processing strategies for predicting video memorability, while potentially increasing interdisciplinary interest in the subject of memorability, and opening the door to new combined EEG-computer vision approaches.
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Submitted 15 December, 2021;
originally announced January 2022.
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Esophageal virtual disease landscape using mechanics-informed machine learning
Authors:
Sourav Halder,
Jun Yamasaki,
Shashank Acharya,
Wenjun Kou,
Guy Elisha,
Dustin A. Carlson,
Peter J. Kahrilas,
John E. Pandolfino,
Neelesh A. Patankar
Abstract:
The pathogenesis of esophageal disorders is related to the esophageal wall mechanics. Therefore, to understand the underlying fundamental mechanisms behind various esophageal disorders, it is crucial to map the esophageal wall mechanics-based parameters onto physiological and pathophysiological conditions corresponding to altered bolus transit and supraphysiologic IBP. In this work, we present a h…
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The pathogenesis of esophageal disorders is related to the esophageal wall mechanics. Therefore, to understand the underlying fundamental mechanisms behind various esophageal disorders, it is crucial to map the esophageal wall mechanics-based parameters onto physiological and pathophysiological conditions corresponding to altered bolus transit and supraphysiologic IBP. In this work, we present a hybrid framework that combines fluid mechanics and machine learning to identify the underlying physics of the various esophageal disorders and maps them onto a parameter space which we call the virtual disease landscape (VDL). A one-dimensional inverse model processes the output from an esophageal diagnostic device called endoscopic functional lumen imaging probe (EndoFLIP) to estimate the mechanical "health" of the esophagus by predicting a set of mechanics-based parameters such as esophageal wall stiffness, muscle contraction pattern and active relaxation of esophageal walls. The mechanics-based parameters were then used to train a neural network that consists of a variational autoencoder (VAE) that generates a latent space and a side network that predicts mechanical work metrics for estimating esophagogastric junction motility. The latent vectors along with a set of discrete mechanics-based parameters define the VDL and form clusters corresponding to the various esophageal disorders. The VDL not only distinguishes different disorders but can also be used to predict disease progression in time. Finally, we also demonstrate the clinical applicability of this framework for estimating the effectiveness of a treatment and track patient condition after a treatment.
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Submitted 18 November, 2021;
originally announced November 2021.
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Enhancing Perceptual Loss with Adversarial Feature Matching for Super-Resolution
Authors:
Akella Ravi Tej,
Shirsendu Sukanta Halder,
Arunav Pratap Shandeelya,
Vinod Pankajakshan
Abstract:
Single image super-resolution (SISR) is an ill-posed problem with an indeterminate number of valid solutions. Solving this problem with neural networks would require access to extensive experience, either presented as a large training set over natural images or a condensed representation from another pre-trained network. Perceptual loss functions, which belong to the latter category, have achieved…
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Single image super-resolution (SISR) is an ill-posed problem with an indeterminate number of valid solutions. Solving this problem with neural networks would require access to extensive experience, either presented as a large training set over natural images or a condensed representation from another pre-trained network. Perceptual loss functions, which belong to the latter category, have achieved breakthrough success in SISR and several other computer vision tasks. While perceptual loss plays a central role in the generation of photo-realistic images, it also produces undesired pattern artifacts in the super-resolved outputs. In this paper, we show that the root cause of these pattern artifacts can be traced back to a mismatch between the pre-training objective of perceptual loss and the super-resolution objective. To address this issue, we propose to augment the existing perceptual loss formulation with a novel content loss function that uses the latent features of a discriminator network to filter the unwanted artifacts across several levels of adversarial similarity. Further, our modification has a stabilizing effect on non-convex optimization in adversarial training. The proposed approach offers notable gains in perceptual quality based on an extensive human evaluation study and a competent reconstruction fidelity when tested on objective evaluation metrics.
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Submitted 15 May, 2020;
originally announced May 2020.
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Physics-Based Rendering for Improving Robustness to Rain
Authors:
Shirsendu Sukanta Halder,
Jean-François Lalonde,
Raoul de Charette
Abstract:
To improve the robustness to rain, we present a physically-based rain rendering pipeline for realistically inserting rain into clear weather images. Our rendering relies on a physical particle simulator, an estimation of the scene lighting and an accurate rain photometric modeling to augment images with arbitrary amount of realistic rain or fog. We validate our rendering with a user study, proving…
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To improve the robustness to rain, we present a physically-based rain rendering pipeline for realistically inserting rain into clear weather images. Our rendering relies on a physical particle simulator, an estimation of the scene lighting and an accurate rain photometric modeling to augment images with arbitrary amount of realistic rain or fog. We validate our rendering with a user study, proving our rain is judged 40% more realistic that state-of-the-art. Using our generated weather augmented Kitti and Cityscapes dataset, we conduct a thorough evaluation of deep object detection and semantic segmentation algorithms and show that their performance decreases in degraded weather, on the order of 15% for object detection and 60% for semantic segmentation. Furthermore, we show refining existing networks with our augmented images improves the robustness of both object detection and semantic segmentation algorithms. We experiment on nuScenes and measure an improvement of 15% for object detection and 35% for semantic segmentation compared to original rainy performance. Augmented databases and code are available on the project page.
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Submitted 27 August, 2019;
originally announced August 2019.
