Showing 1–1 of 1 results for author: Swerts, J

SOT-MRAM 300mm integration for low power and ultrafast embedded memories

Authors: K. Garello, F. Yasin, S. Couet, L. Souriau, J. Swerts, S. Rao, S. Van Beek, W. Kim, E. Liu, S. Kundu, D. Tsvetanova, N. Jossart, K. Croes, E. Grimaldi, M. Baumgartner, D. Crotti, A. Furnémont, P. Gambardella, G. S. Kar

Abstract: We demonstrate for the first time full-scale integration of top-pinned perpendicular MTJ on 300 mm wafer using CMOS-compatible processes for spin-orbit torque (SOT)-MRAM architectures. We show that 62 nm devices with a W-based SOT underlayer have very large endurance (> 5x10^10), sub-ns switching time of 210 ps, and operate with power as low as 300 pJ. We demonstrate for the first time full-scale integration of top-pinned perpendicular MTJ on 300 mm wafer using CMOS-compatible processes for spin-orbit torque (SOT)-MRAM architectures. We show that 62 nm devices with a W-based SOT underlayer have very large endurance (> 5x10^10), sub-ns switching time of 210 ps, and operate with power as low as 300 pJ. △ Less

Submitted 22 October, 2018; originally announced October 2018.

Comments: presented at VLSI2018 session C8-2

Journal ref: 2018 IEEE Symposium on VLSI Circuits