An Automated System for Checking Lithography Friendliness of Standard Cells
Authors:
I-Lun Tseng,
Yongfu Li,
Valerio Perez,
Vikas Tripathi,
Zhao Chuan Lee,
Jonathan Yoong Seang Ong
Abstract:
At advanced process nodes, lithography weakpoints can exist in physical layouts of integrated circuit designs even if the layouts pass design rule checking (DRC). Existence of lithography weakpoints in a physical layout can cause manufacturability issues, which in turn can result in yield losses. In our experiments, we have found that specific standard cells have tendencies to create lithography w…
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At advanced process nodes, lithography weakpoints can exist in physical layouts of integrated circuit designs even if the layouts pass design rule checking (DRC). Existence of lithography weakpoints in a physical layout can cause manufacturability issues, which in turn can result in yield losses. In our experiments, we have found that specific standard cells have tendencies to create lithography weakpoints after their cell instances are placed and routed, even though each of these cells does not contain any lithography weakpoint before performing placement and routing. In addition, our experiments have shown that abutted standard cell instances can induce lithography weakpoints. Therefore, in this paper, we propose methodologies that are used in a novel software system for checking standard cells in terms of the aforementioned lithography issues. Specifically, the software system is capable of detecting and sorting problematic standard cells which are prone to generate lithography weakpoints, as well as reporting standard cells that should not be abutted. Methodologies proposed in this paper allow us to reduce or even prevent the generation of undesirable lithography weakpoints during the physical synthesis phase of designing a digital integrated circuit.
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Submitted 2 October, 2018;
originally announced October 2018.
Creation and Fixing of Lithography Hotspots with Synopsys Tools
Authors:
I-Lun Tseng,
Valerio Perez,
Yongfu Li,
Zhao Chuan Lee,
Vikas Tripathi,
Jonathan Yoong Seang Ong
Abstract:
At advanced process nodes, pattern matching techniques have been used in the detection of lithography hotspots, which can affect yields of manufactured integrated circuits. Although commercial pattern matching and in-design hotspot fixing tools have been developed, engineers still need to verify that specific hotspot patterns in routed designs can indeed be detected or even repaired by software to…
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At advanced process nodes, pattern matching techniques have been used in the detection of lithography hotspots, which can affect yields of manufactured integrated circuits. Although commercial pattern matching and in-design hotspot fixing tools have been developed, engineers still need to verify that specific hotspot patterns in routed designs can indeed be detected or even repaired by software tools. Therefore, there is the need to create test cases with which targeted hotspot patterns can be generated in routed layouts by using an APR (automatic placement and routing) tool. In this paper, we propose a methodology of creating hotspot patterns in the routing space by using Synopsys tools. Also, methods for repairing hotspots during the physical design phase are presented. With the use of the proposed hotspot creation methodology, we can generate routed designs containing targeted hotspot patterns. As a result, the effectiveness of hotspot detection rules, hotspot fixing guidance rules, and relevant software tool functions can be verified.
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Submitted 16 August, 2018;
originally announced August 2018.
