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High-Conductance, Ohmic-like HfZrO$_4$ Ferroelectric Memristor
Authors:
Laura Bégon-Lours,
Mattia Halter,
Youri Popoff,
Zhenming Yu,
Donato Francesco Falcone,
Bert Jan Offrein
Abstract:
The persistent and switchable polarization of ferroelectric materials based on HfO$_2$-based ferroelectric compounds, compatible with large-scale integration, are attractive synaptic elements for neuromorphic computing. To achieve a record current density of 0.01 A/cm$^2$ (at a read voltage of 80 mV) as well as ideal memristive behavior (linear current-voltage relation and analog resistive switchi…
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The persistent and switchable polarization of ferroelectric materials based on HfO$_2$-based ferroelectric compounds, compatible with large-scale integration, are attractive synaptic elements for neuromorphic computing. To achieve a record current density of 0.01 A/cm$^2$ (at a read voltage of 80 mV) as well as ideal memristive behavior (linear current-voltage relation and analog resistive switching), devices based on an ultra-thin (2.7 nm thick), polycrystalline HfZrO$_4$ ferroelectric layer are fabricated by Atomic Layer Deposition. The use of a semiconducting oxide interlayer (WO$_{x<3}$) at one of the interfaces, induces an asymmetric energy profile upon ferroelectric polarization reversal and thus the long-term potentiation / depression (conductance increase / decrease) of interest. Moreover, it favors the stable retention of both the low and the high resistive states. Thanks to the low operating voltage (<3.5 V), programming requires less than 10${^-12}$ J for 20 ns long pulses. Remarkably, the memristors show no wake-up or fatigue effect.
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Submitted 21 September, 2023;
originally announced September 2023.
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A BEOL Compatible, 2-Terminals, Ferroelectric Analog Non-Volatile Memory
Authors:
Laura Bégon-Lours,
Mattia Halter,
Diana Dávila Pineda,
Youri Popoff,
Valeria Bragaglia,
Antonio La Porta,
Daniel Jubin,
Jean Fompeyrine,
Bert Jan Offrein
Abstract:
A Ferroelectric Analog Non-Volatile Memory based on a WOx electrode and ferroelectric HfZrO$_4$ layer is fabricated at a low thermal budget (~375$^\circ$C), enabling BEOL processes and CMOS integration. The devices show suitable properties for integration in crossbar arrays and neural network inference: analog potentiation/depression with constant field or constant pulse width schemes, cycle to cy…
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A Ferroelectric Analog Non-Volatile Memory based on a WOx electrode and ferroelectric HfZrO$_4$ layer is fabricated at a low thermal budget (~375$^\circ$C), enabling BEOL processes and CMOS integration. The devices show suitable properties for integration in crossbar arrays and neural network inference: analog potentiation/depression with constant field or constant pulse width schemes, cycle to cycle and device to device variation <10%, ON/OFF ratio up to 10 and good linearity. The physical mechanisms behind the resistive switching and conduction mechanisms are discussed.
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Submitted 21 September, 2023;
originally announced September 2023.
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A Back-End-Of-Line Compatible, Ferroelectric Analog Non-Volatile Memory
Authors:
Laura Bégon-Lours,
Mattia Halter,
Diana Dávila Pineda,
Valeria Bragaglia,
Youri Popoff,
Antonio La Porta,
Daniel Jubin,
Jean Fompeyrine,
Bert Jan Offrein
Abstract:
A Ferroelectric Analog Non-Volatile Memory based on a WOx electrode and ferroelectric HfZrO4 layer is fabricated at a low thermal budget (~375C), enabling BEOL processes and CMOS integration. The devices show suitable properties for integration in crossbar arrays and neural network inference: analog potentiation/depression with constant field or constant pulse width schemes, cycle to cycle and dev…
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A Ferroelectric Analog Non-Volatile Memory based on a WOx electrode and ferroelectric HfZrO4 layer is fabricated at a low thermal budget (~375C), enabling BEOL processes and CMOS integration. The devices show suitable properties for integration in crossbar arrays and neural network inference: analog potentiation/depression with constant field or constant pulse width schemes, cycle to cycle and device to device variation <10%, ON/OFF ratio up to 10 and good linearity. The physical mechanisms behind the resistive switching and conduction mechanisms are discussed.
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Submitted 21 September, 2023;
originally announced September 2023.
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A back-end, CMOS compatible ferroelectric Field Effect Transistor for synaptic weights
Authors:
Mattia Halter,
Laura Bégon-Lours,
Valeria Bragaglia,
Marilyne Sousa,
Bert Jan Offrein,
Stefan Abel,
Mathieu Luisier,
Jean Fompeyriney
Abstract:
Neuromorphic computing architectures enable the dense co-location of memory and processing elements within a single circuit. This co-location removes the communication bottleneck of transferring data between separate memory and computing units as in standard von Neuman architectures for data-critical applications including machine learning. The essential building blocks of neuromorphic systems are…
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Neuromorphic computing architectures enable the dense co-location of memory and processing elements within a single circuit. This co-location removes the communication bottleneck of transferring data between separate memory and computing units as in standard von Neuman architectures for data-critical applications including machine learning. The essential building blocks of neuromorphic systems are non-volatile synaptic elements such as memristors. Key memristor properties include a suitable non-volatile resistance range, continuous linear resistance modulation and symmetric switching. In this work, we demonstrate voltage-controlled, symmetric and analog potentiation and depression of a ferroelectric Hf$_{57}$Zr$_{43}$O$_{2}$ (HZO) field effect transistor (FeFET) with good linearity. Our FeFET operates with a low writing energy (fJ) and fast programming time (40 ns). Retention measurements have been done over 4-bits depth with low noise (1%) in the tungsten oxide (WO$_{x}$) read out channel. By adjusting the channel thickness from 15nm to 8nm, the on/off ratio of the FeFET can be engineered from 1% to 200% with an on-resistance ideally >100 kOhm, depending on the channel geometry. The device concept is using earth-abundant materials, and is compatible with a back end of line (BEOL) integration into complementary metal-oxidesemiconductor (CMOS) processes. It has therefore a great potential for the fabrication of high density, large-scale integrated arrays of artificial analog synapses.
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Submitted 17 January, 2020;
originally announced January 2020.
