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Characterization of NbTiN films with thicknesses below 20 nm for low power kinetic inductance amplifiers
Authors:
A. Giachero,
M. R. Vissers,
J. D. Wheeler,
M. Malnou,
J. E. Austermann,
J. Hubmayr,
A. Nucciotti,
J. N. Ullom,
J. Gao
Abstract:
A quantum-limited amplification chain is a fundamental advantage for any application that may benefit from the detection of very faint signals. Reading out arrays of superconducting detectors (TESs or MKIDs), resonant cavities, or qubits, calls for large bandwidth amplifiers in addition to having the lowest possible noise. At millikelvin temperatures, Kinetic Inductance Traveling-Wave Parametric A…
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A quantum-limited amplification chain is a fundamental advantage for any application that may benefit from the detection of very faint signals. Reading out arrays of superconducting detectors (TESs or MKIDs), resonant cavities, or qubits, calls for large bandwidth amplifiers in addition to having the lowest possible noise. At millikelvin temperatures, Kinetic Inductance Traveling-Wave Parametric Amplifiers (KI-TWPAs) working in 3-wave-mixing (3WM) and fabricated from a 20 nm thick NbTiN film have shown promising noise performances, as they can operate close to the quantum limit. However, they still require fairly high pump power. Devices that would require lower pump power would be easier to implement in readout chains, could reach the quantum limit and they would be compatible with qubit readout. A possible solution for obtaining this optimal configuration is to use a thinner superconducting film. In this work we explore the properties of NbTiN films with a thickness less than 20 nm and we report the obtained experimental characterizations in terms of critical temperature, normal resistivity, and kinetic inductance. A new design for a 3WM KI-TWPA amplifier, based on these developed superconducting films, is introduced and discussed.
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Submitted 18 February, 2024;
originally announced February 2024.
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Sub-Kelvin Thermometer for On-Chip Measurements of Microwave Devices Utilizing Two-Level Systems in Superconducting Microresonators
Authors:
J. Wheeler,
M. R. Vissers,
M. Malnou,
J. Hubmayr,
J. N. Ullom,
J. Gao
Abstract:
We present a superconducting microresonator thermometer based on two-level systems (TLS) that is drop-in compatible with cryogenic microwave systems. The operational temperature range is 50-1000~mK (which may be extended to 5~mK), and the sensitivity (50-75~$μ$K/$\sqrt{\mathrm{Hz}}$) is relatively uniform across this range. The miniature footprint that conveniently attaches to the feedline of a cr…
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We present a superconducting microresonator thermometer based on two-level systems (TLS) that is drop-in compatible with cryogenic microwave systems. The operational temperature range is 50-1000~mK (which may be extended to 5~mK), and the sensitivity (50-75~$μ$K/$\sqrt{\mathrm{Hz}}$) is relatively uniform across this range. The miniature footprint that conveniently attaches to the feedline of a cryogenic microwave device facilitates the measurement of on-chip device temperature and requires no additional thermometry wiring or readout electronics. We demonstrate the practical use of these TLS thermometers to investigate static and transient chip heating in a kinetic inductance traveling-wave parametric amplifier operated with a strong pump tone. TLS thermometry may find broad application in cryogenic microwave devices such as superconducting qubits and detectors.
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Submitted 13 November, 2020;
originally announced November 2020.
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On low-energy tail distortions in the detector responsefunction of x-ray microcalorimeter spectrometers
Authors:
G. C. O'Neil,
P. Szypryt,
E. Takacs,
J. N. Tan,
S. W. Buechele,
A. S. Naing,
Y. I. Joe,
D. Swetz,
D. R. Schmidt,
W. B. Doriese,
J. D. Gard,
C. D. Reintsema,
J. N. Ullom,
J. S. Villarrubia,
Yu. Ralchenko
Abstract:
We use narrow spectral lines from the x-ray spectra of various highlycharged ions to measure low-energy tail-like deviations from a Gaussian responsefunction in a microcalorimter x-ray spectrometer with Au absorbers at energiesfrom 650 eV to 3320 eV. We review the literature on low energy tails in othermicrocalorimter x-ray spectrometers and present a model that explains all thereviewed tail fract…
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We use narrow spectral lines from the x-ray spectra of various highlycharged ions to measure low-energy tail-like deviations from a Gaussian responsefunction in a microcalorimter x-ray spectrometer with Au absorbers at energiesfrom 650 eV to 3320 eV. We review the literature on low energy tails in othermicrocalorimter x-ray spectrometers and present a model that explains all thereviewed tail fraction measurements. In this model a low energy tail arises fromthe combination of electron escape and energy trap** associated with Bi x-rayabsorbers.
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Submitted 11 May, 2020;
originally announced May 2020.
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A Model for Excess Johnson Noise in Superconducting Transition-edge Sensors
Authors:
Abigail Wessels,
Kelsey Morgan,
Daniel T. Becker,
Johnathon D. Gard,
Gene C. Hilton,
John A. B. Mates,
Carl D. Reintsema,
Daniel R. Schmidt,
Daniel S. Swetz,
Joel N. Ullom,
Leila R. Vale,
Douglas A. Bennett
Abstract:
Transition-Edge Sensors (TESs) are two-dimensional superconducting films used to detect energy or power. TESs are voltage biased in the resistive transition where the film resistance is both finite and a strong function of temperature. Electrical noise is observed in TESs that exceeds the predictions of existing noise theories. In this manuscript, we describe a model for the unexplained excess noi…
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Transition-Edge Sensors (TESs) are two-dimensional superconducting films used to detect energy or power. TESs are voltage biased in the resistive transition where the film resistance is both finite and a strong function of temperature. Electrical noise is observed in TESs that exceeds the predictions of existing noise theories. In this manuscript, we describe a model for the unexplained excess noise based on the dynamic resistance of the TES and noise mixed down from frequencies around the Josephson oscillations. We derive an expression for the power spectral density of this noise and show that its predictions match measured data.
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Submitted 25 July, 2019;
originally announced July 2019.
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Resonant soft x-ray scattering from stripe-ordered La$_{2-x}$Ba$_x$CuO$_4$ detected by a transition edge sensor array detector
Authors:
Y. I. Joe,
Y. Fang,
S. Lee,
S. X. L. Sun,
G. A. de la Peña,
W. B. Doriese,
K. M. Morgan,
J. W. Fowler,
L. R. Vale,
F. Rodolakis,
J. L. McChesney,
J. N. Ullom,
D. S. Swetz,
P. Abbamonte
Abstract:
Resonant soft x-ray scattering (RSXS) is a leading probe of valence band order in materials best known for detecting charge density wave order in the copper-oxide superconductors. One of the biggest limitations on the RSXS technique is the presence of a severe fluorescence background which, like the RSXS cross section itself, is enhanced under resonant conditions. This background prevents the stud…
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Resonant soft x-ray scattering (RSXS) is a leading probe of valence band order in materials best known for detecting charge density wave order in the copper-oxide superconductors. One of the biggest limitations on the RSXS technique is the presence of a severe fluorescence background which, like the RSXS cross section itself, is enhanced under resonant conditions. This background prevents the study of weak signals such as diffuse scattering from glassy or fluctuating order that is spread widely over momentum space. Recent advances in superconducting transition edge sensor (TES) detectors have led to major improvements in energy resolution and detection efficiency in the soft x-ray range. Here, we perform a RSXS study of stripe-ordered La$_{2-x}$Ba$_x$CuO$_4$ at the Cu $L_{3/2}$ edge (932.2 eV) using a TES detector with 1.5 eV resolution, to evaluate its utility for mitigating the fluorescence background problem. We find that, for suitable degree of detuning from the resonance, the TES rejects the fluorescence background, leading to a 5 to 10 times improvement in the statistical quality of the data compared to an equivalent, energy-integrated measurement. We conclude that a TES presents a promising approach to reducing background in RSXS studies and may lead to new discoveries in materials exhibiting valence band order that is fluctuating or glassy.
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Submitted 16 February, 2020; v1 submitted 17 July, 2019;
originally announced July 2019.
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Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors
Authors:
Christopher M. McKenney,
Jason E. Austermann,
Jim Beall,
Bradley Dober,
Shannon M. Duff,
Jiansong Gao,
Gence C. Hilton,
Johannes Hubmayr,
Dale Li,
Joel N. Ullom,
Jeff Van Lanen,
Michael R. Vissers
Abstract:
We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-ni…
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We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5\% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of $2.7 \times 10^{-3}$. We exploit this finding to increase the yield of the BLAST-TNG $250 \; μ\text{m}$ production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.
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Submitted 12 March, 2018;
originally announced March 2018.
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Superconducting micro-resonator arrays with ideal frequency spacing and extremely low frequency collision rate
Authors:
X. Liu,
W. Guo,
Y. Wang,
M. Dai,
L. F. Wei,
B. Dober,
C. McKenney,
G. C. Hilton,
J. Hubmayr,
J. E. Austermann,
J. N. Ullom,
J. Gao,
M. R. Vissers
Abstract:
We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode (LED) mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the devia…
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We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode (LED) mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the deviation of the measured frequency from its design value, from the interdigitated capacitor. We demonstrate this technique on a 127-resonator array made of titanium-nitride (TiN) and show that the uniformity of frequency spacing is greatly improved. The array yield in terms of frequency collisions improves from 84% to 97%, while the quality factors and noise properties are unaffected. The wafer trimming technique provides an easy-to-implement tool to improve the yield and multiplexing density of large resonator arrays, which is important for various applications in photon detection and quantum computing.
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Submitted 21 November, 2017;
originally announced November 2017.
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Current distribution and transition width in superconducting transition-edge sensors
Authors:
D. S. Swetz,
D. A. Bennett,
K. D. Irwin,
D. R. Schmidt,
J. N. Ullom
Abstract:
Present models of the superconducting-to-normal transition in transition-edge sensors (TESs) do not describe the current distribution within a biased TES. This distribution is complicated by normal-metal features that are integral to TES design. We present a model with one free parameter that describes the evolution of the current distribution with bias. To probe the current distribution experimen…
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Present models of the superconducting-to-normal transition in transition-edge sensors (TESs) do not describe the current distribution within a biased TES. This distribution is complicated by normal-metal features that are integral to TES design. We present a model with one free parameter that describes the evolution of the current distribution with bias. To probe the current distribution experimentally, we fabricated TES devices with different current return geometries. Devices where the current return geometry mirrors current flow within the device have sharper transitions, thus allowing for a direct test of the current-flow model. Measurements from these devices show that current meanders through a TES low in the resistive transition but flows across the normal-metal features by 40% of the normal-state resistance. Comparison of transition sharpness between device designs reveals that self-induced magnetic fields play an important role in determining the width of the superconducting transition. [http://dx.doi.org/10.1063/1.4771984]
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Submitted 14 December, 2012;
originally announced December 2012.
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Insensitivity of sub-Kelvin electron-phonon coupling to substrate properties
Authors:
Jason M. Underwood,
Peter J. Lowell,
Galen C. O'Neil,
Joel N. Ullom
Abstract:
We have examined the role of the substrate on electron-phonon coupling in normal metal films of Mn-doped Al at temperatures below 1 K. Normal metal-insulator-superconductor junctions were used to measure the electron temperature in the films as a function of Joule heating power and phonon temperature. Theory suggests that the distribution of phonons available for interaction with electrons in meta…
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We have examined the role of the substrate on electron-phonon coupling in normal metal films of Mn-doped Al at temperatures below 1 K. Normal metal-insulator-superconductor junctions were used to measure the electron temperature in the films as a function of Joule heating power and phonon temperature. Theory suggests that the distribution of phonons available for interaction with electrons in metal films may depend on the acoustic properties of the substrate, namely, that the electron-phonon coupling constant Sigma would be larger on the substrate with smaller sound speed. In contrast, our results indicate that within experimental error (typically +/- 10%), Sigma is unchanged among the two acoustically distinct substrates used in our investigation.
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Submitted 9 June, 2012; v1 submitted 10 November, 2011;
originally announced November 2011.
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Andreev Reflections in Micrometer-Scale Normal-Insulator-Superconductor Tunnel Junctions
Authors:
Peter J. Lowell,
Galen C. O'Neil,
Jason M. Underwood,
Joel N. Ullom
Abstract:
Understanding the subgap behavior of Normal-Insulator-Superconductor (NIS) tunnel junctions is important in order to be able to accurately model the thermal properties of the junctions. Hekking and Nazarov developed a theory in which NIS subgap current in thin-film structures can be modeled by multiple Andreev reflections. In their theory, the current due to Andreev reflections depends on the junc…
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Understanding the subgap behavior of Normal-Insulator-Superconductor (NIS) tunnel junctions is important in order to be able to accurately model the thermal properties of the junctions. Hekking and Nazarov developed a theory in which NIS subgap current in thin-film structures can be modeled by multiple Andreev reflections. In their theory, the current due to Andreev reflections depends on the junction area and the junction resistance area product. We have measured the current due to Andreev reflections in NIS tunnel junctions for various junction sizes and junction resistance area products and found that the multiple reflection theory is in agreement with our data.
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Submitted 21 October, 2011;
originally announced October 2011.
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Advanced code-division multiplexers for superconducting detector arrays
Authors:
K. D. Irwin,
H. M. Cho,
W. B. Doriese,
J. W. Fowler,
G. C. Hilton,
M. D. Niemack,
C. D. Reintsema,
D. R. Schmidt,
J. N. Ullom,
L. R. Vale
Abstract:
Multiplexers based on the modulation of superconducting quantum interference devices are now regularly used in multi-kilopixel arrays of superconducting detectors for astrophysics, cosmology, and materials analysis. Over the next decade, much larger arrays will be needed. These larger arrays require new modulation techniques and compact multiplexer elements that fit within each pixel. We present a…
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Multiplexers based on the modulation of superconducting quantum interference devices are now regularly used in multi-kilopixel arrays of superconducting detectors for astrophysics, cosmology, and materials analysis. Over the next decade, much larger arrays will be needed. These larger arrays require new modulation techniques and compact multiplexer elements that fit within each pixel. We present a new in-focal-plane code-division multiplexer that provides multiplexing elements with the required scalability. This code-division multiplexer uses compact lithographic modulation elements that simultaneously multiplex both signal outputs and superconducting transition-edge sensor (TES) detector bias voltages. It eliminates the shunt resistor used to voltage bias TES detectors, greatly reduces power dissipation, allows different dc bias voltages for each TES, and makes all elements sufficiently compact to fit inside the detector pixel area. These in-focal-plane code-division multiplexers can be combined with multi-gigahertz readout based on superconducting microresonators to scale to even larger arrays.
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Submitted 7 October, 2011;
originally announced October 2011.
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Observations and modeling of large area normal-metal/insulator/superconductor refrigerator cooling from 300 mK to below 100 mK
Authors:
Galen C. O'Neil,
Peter J. Lowell,
Jason M. Underwood,
Joel N. Ullom
Abstract:
In a normal-metal/insulator/superconductor (NIS) tunnel junction refrigerator, the normal-metal electrons are cooled and the dissipated power heats the superconducting electrode. This paper presents a review of the mechanisms by which heat leaves the superconductor and introduces overlayer quasiparticle traps for more effective heatsinking. A comprehensive thermal model is presented that accounts…
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In a normal-metal/insulator/superconductor (NIS) tunnel junction refrigerator, the normal-metal electrons are cooled and the dissipated power heats the superconducting electrode. This paper presents a review of the mechanisms by which heat leaves the superconductor and introduces overlayer quasiparticle traps for more effective heatsinking. A comprehensive thermal model is presented that accounts for the described physics, including the behavior of athermal phonons generated by both quasiparticle recombination and trapped quasiparticles. We compare the model to measurements of a large area (>400 um^2) NIS refrigerator with overlayer quasiparticle traps, and demonstrate that the model is in good agreement experiment. The refrigerator IV curve at a bath temperature of 300 mK is consistent with an electron temperature of 82 mK. However, evidence from independent thermometer junctions suggests that the refrigerator junction is creating an athermal electron distribution whose total excitation energy corresponds to a higher temperature than is indicated by the refrigerator IV curve.
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Submitted 12 March, 2012; v1 submitted 6 September, 2011;
originally announced September 2011.
