Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography
Authors:
Jonathan Schwartz,
Zichao Wendy Di,
Yi Jiang,
Jason Manassa,
Jacob Pietryga,
Yiwen Qian,
Min Gee Cho,
Jonathan L. Rowell,
Huihuo Zheng,
Richard D. Robinson,
Junsi Gu,
Alexey Kirilin,
Steve Rozeveld,
Peter Ercius,
Jeffrey A. Fessler,
Ting Xu,
Mary Scott,
Robert Hovden
Abstract:
Measuring the three-dimensional (3D) distribution of chemistry in nanoscale matter is a longstanding challenge for metrological science. The inelastic scattering events required for 3D chemical imaging are too rare, requiring high beam exposure that destroys the specimen before an experiment completes. Even larger doses are required to achieve high resolution. Thus, chemical map** in 3D has been…
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Measuring the three-dimensional (3D) distribution of chemistry in nanoscale matter is a longstanding challenge for metrological science. The inelastic scattering events required for 3D chemical imaging are too rare, requiring high beam exposure that destroys the specimen before an experiment completes. Even larger doses are required to achieve high resolution. Thus, chemical map** in 3D has been unachievable except at lower resolution with the most radiation-hard materials. Here, high-resolution 3D chemical imaging is achieved near or below one nanometer resolution in a Au-Fe$_3$O$_4$ metamaterial, Co$_3$O$_4$ - Mn$_3$O$_4$ core-shell nanocrystals, and ZnS-Cu$_{0.64}$S$_{0.36}$ nanomaterial using fused multi-modal electron tomography. Multi-modal data fusion enables high-resolution chemical tomography often with 99\% less dose by linking information encoded within both elastic (HAADF) and inelastic (EDX / EELS) signals. Now sub-nanometer 3D resolution of chemistry is measurable for a broad class of geometrically and compositionally complex materials.
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Submitted 18 June, 2024; v1 submitted 24 April, 2023;
originally announced April 2023.
