-
Optimizing the growth conditions of Al mirrors for superconducting nanowire single-photon detectors
Authors:
R. Flaschmann,
C. Schmid,
L. Zugliani,
S. Strohauer,
F. Wietschorke,
S. Grotowski,
B. Jonas,
M. Müller,
M. Althammer,
R. Gross,
J. J. Finley,
K. Müller
Abstract:
We investigate the growth conditions for thin (less than 200 nm) sputtered aluminum (Al) films. These coatings are needed for various applications, e.g. for advanced manufacturing processes in the aerospace industry or for nanostructures for quantum devices. Obtaining high-quality films, with low roughness, requires precise optimization of the deposition process. To this end, we tune various sputt…
▽ More
We investigate the growth conditions for thin (less than 200 nm) sputtered aluminum (Al) films. These coatings are needed for various applications, e.g. for advanced manufacturing processes in the aerospace industry or for nanostructures for quantum devices. Obtaining high-quality films, with low roughness, requires precise optimization of the deposition process. To this end, we tune various sputtering parameters such as the deposition rate, temperature, and power, which enables 50 nm thin films with a root mean square (RMS) roughness of less than 1 nm and high reflectivity. Finally, we confirm the high quality of the deposited films by realizing superconducting single-photon detectors integrated into multi-layer heterostructures consisting of an aluminum mirror and a silicon dioxide dielectric spacer. We achieve an improvement in detection efficiency at 780 nm from 40 % to 70 % by this integration approach.
△ Less
Submitted 29 May, 2023;
originally announced May 2023.
-
Site-Selective Enhancement of Superconducting Nanowire Single-Photon Detectors via Local Helium Ion Irradiation
Authors:
Stefan Strohauer,
Fabian Wietschorke,
Lucio Zugliani,
Rasmus Flaschmann,
Christian Schmid,
Stefanie Grotowski,
Manuel Müller,
Björn Jonas,
Matthias Althammer,
Rudolf Gross,
Kai Müller,
Jonathan J. Finley
Abstract:
Achieving homogeneous performance metrics between nominally identical pixels is challenging for the operation of arrays of superconducting nanowire single-photon detectors (SNSPDs). Here, we utilize local helium ion irradiation to post-process and tune single-photon detection efficiency, switching current, and critical temperature of individual devices on the same chip. For 12nm thick highly absor…
▽ More
Achieving homogeneous performance metrics between nominally identical pixels is challenging for the operation of arrays of superconducting nanowire single-photon detectors (SNSPDs). Here, we utilize local helium ion irradiation to post-process and tune single-photon detection efficiency, switching current, and critical temperature of individual devices on the same chip. For 12nm thick highly absorptive SNSPDs, which are barely single-photon sensitive prior to irradiation, we observe an increase of the system detection efficiency from $< 0.05\,\%$ to $(55.3 \pm 1.1)\,\%$ following irradiation. Moreover, the internal detection efficiency saturates at a temperature of 4.5 K after irradiation with $1800\, \mathrm{ions}\, \mathrm{nm}^{-2}$. For irradiated 10 nm thick detectors we observe a doubling of the switching current (to $20\, μ\mathrm{A}$) compared to 8 nm SNSPDs of similar detection efficiency, increasing the amplitude of detection voltage pulses. Investigations of the scaling of superconducting thin film properties with irradiation up to a fluence of $2600\, \mathrm{ions}\, \mathrm{nm}^{-2}$ revealed an increase of sheet resistance and a decrease of critical temperature towards high fluences. A physical model accounting for defect generation and sputtering during helium ion irradiation is presented and shows good qualitative agreement with experiments.
△ Less
Submitted 23 May, 2023;
originally announced May 2023.
-
The dependence of timing jitter of superconducting nanowire single-photon detectors on the multi-layer sample design and slew rate
Authors:
R. Flaschmann,
L. Zugliani,
C. Schmid,
S. Spedicato,
S. Strohauer,
F. Wietschorke,
F. Flassig,
J. J. Finley,
K. Müller
Abstract:
We investigated the timing jitter of superconducting nanowire single-photon detectors (SNSPDs) and found a strong dependence on the detector response. By varying the multi-layer structure, we observed changes in pulse shape which are attributed to capacitive behaviour affecting the pulse heights, rise times and consequently timing jitter. Moreover, we developed a technique to predict the timing ji…
▽ More
We investigated the timing jitter of superconducting nanowire single-photon detectors (SNSPDs) and found a strong dependence on the detector response. By varying the multi-layer structure, we observed changes in pulse shape which are attributed to capacitive behaviour affecting the pulse heights, rise times and consequently timing jitter. Moreover, we developed a technique to predict the timing jitter of a single device within certain limits by capturing only a single detector pulse, eliminating the need for detailed jitter measurement using a pulsed laser when a rough estimate of the timing jitter is sufficient.
△ Less
Submitted 17 December, 2022; v1 submitted 16 August, 2022;
originally announced August 2022.
-
Automated, deep reactive ion etching free fiber coupling to nanophotonic devices
Authors:
Fabian Flassig,
Rasmus Flaschmann,
Thomas Kainz,
Sven Ernst,
Stefan Strohauer,
Christian Schmid,
Lucio Zugliani,
Kai Müller,
Jonathan J. Finley
Abstract:
Rapid development in integrated optoelectronic devices and quantum photonic architectures creates a need for optical fiber to chip coupling with low losses. Here we present a fast and generic approach that allows temperature stable self-aligning connections of nanophotonic devices to optical fibers. We show that the attainable precision of our approach is equal to that of DRIE-process based coupli…
▽ More
Rapid development in integrated optoelectronic devices and quantum photonic architectures creates a need for optical fiber to chip coupling with low losses. Here we present a fast and generic approach that allows temperature stable self-aligning connections of nanophotonic devices to optical fibers. We show that the attainable precision of our approach is equal to that of DRIE-process based couplings. Specifically, the initial alignment precision is $1.2\pm 0.4μm$, the average shift caused by mating $<0.5μm$, which is in the order of the precision of the concentricity of the employed fiber, and the thermal cycling stability is $<0.2μm$. From these values the expected overall alignment offset is calculated as $1.4 \pm 0.4μm$. These results show that our process offers an easy to implement, versatile, robust and DRIE-free method for coupling photonic devices to optical fibers. It can be fully automated and is therefore scalable for coupling to novel devices for quantum photonic systems.
△ Less
Submitted 17 January, 2022;
originally announced January 2022.
