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Design, fabrication, and characterization of electrostatic comb-drive actuators for nanoelectromechanical silicon photonics
Authors:
Thor August Schimmell Weis,
Babak Vosoughi Lahijani,
Konstantinos Tsoukalas,
Marcus Albrechtsen,
Søren Stobbe
Abstract:
Nanoelectromechanical systems offer unique functionalities in photonics: The ability to elastically and reversibly deform dielectric beams with subwavelength dimensions enable electrical control of the propagation of light with a power consumption orders of magnitude below that of competing technologies, such as thermo-optic tuning. We present a study of the design, fabrication, and characterizati…
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Nanoelectromechanical systems offer unique functionalities in photonics: The ability to elastically and reversibly deform dielectric beams with subwavelength dimensions enable electrical control of the propagation of light with a power consumption orders of magnitude below that of competing technologies, such as thermo-optic tuning. We present a study of the design, fabrication, and characterization of compact electrostatic comb-drive actuators tailored for integrated nanoelectromechanical silicon photonic circuits. Our design has a footprint of $1.2 \times 10^{3} μ$m$^{2}$ and is found to reach displacements beyond 50 nm at 5 V with a mechanical resonance above 200 kHz, or, using different spring constants and skeletonization, a mechanical resonance above 2.5 MHz with displacements beyond 50 nm at 28 V. This is sufficient to induce very large phase shifts and other optical effects in nanoelectromechanical reconfigurable photonic circuits.
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Submitted 3 July, 2023;
originally announced July 2023.
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Self-assembly of atomic-scale photonic cavities
Authors:
Ali Nawaz Babar,
Thor Weis,
Konstantinos Tsoukalas,
Shima Kadkhodazadeh,
Guillermo Arregui,
Babak Vosoughi Lahijani,
Søren Stobbe
Abstract:
Despite tremendous progress in the research on self-assembled nanotechnological building blocks such as macromolecules, nanowires, and two-dimensional materials, synthetic self-assembly methods bridging nanoscopic to macroscopic dimensions remain unscalable and inferior to biological self-assembly. In contrast, planar semiconductor technology has had an immense technological impact owing to its in…
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Despite tremendous progress in the research on self-assembled nanotechnological building blocks such as macromolecules, nanowires, and two-dimensional materials, synthetic self-assembly methods bridging nanoscopic to macroscopic dimensions remain unscalable and inferior to biological self-assembly. In contrast, planar semiconductor technology has had an immense technological impact owing to its inherent scalability, yet it appears unable to reach the atomic dimensions enabled by self-assembly. Here we use surface forces including Casimir-van der Waals interactions to deterministically self-assemble and self-align suspended silicon nanostructures with void features well below the length scales possible with conventional lithography and etching, despite using nothing more than conventional lithography and etching. The method is remarkably robust and the threshold for self-assembly depends monotonically on all governing parameters across thousands of measured devices. We illustrate the potential of these concepts by fabricating nanostructures, which are impossible to make with any other known method: Waveguide-coupled high-Q silicon photonic cavities that confine telecom photons to 2 nm air gaps with an aspect ratio of 100, corresponding to mode volumes more than 100 times below the diffraction limit. Scanning transmission electron microscopy measurements confirm the ability to build devices even with subnanometer dimensions. Our work constitutes the first steps towards a new generation of fabrication technology that combines the atomic dimensions enabled by self-assembly with the scalability of planar semiconductors.
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Submitted 16 March, 2023;
originally announced March 2023.
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Electronic-photonic circuit crossings
Authors:
Babak Vosoughi Lahijani,
Marcus Albrechtsen,
Rasmus Christiansen,
Christian Rosiek,
Konstantinos Tsoukalas,
Mathias Sutherland,
Søren Stobbe
Abstract:
Electrical control of light in integrated photonics is central to a wide range of research and applications. It is conventionally achieved with thermo-optic tuning, but this suffers from high energy consumption and crosstalk. These challenges could be resolved with nanoelectromechanical photonics but scalable platforms were so far not demonstrated because of incompatibility with conventional multi…
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Electrical control of light in integrated photonics is central to a wide range of research and applications. It is conventionally achieved with thermo-optic tuning, but this suffers from high energy consumption and crosstalk. These challenges could be resolved with nanoelectromechanical photonics but scalable platforms were so far not demonstrated because of incompatibility with conventional multilayer metal architectures and because conventional approaches do not allow crossings of electrical wires and photonic waveguides. Here we use topology optimization to devise a single-layer electronic-photonic circuit crossing with up to 99.8% optical transmission across an isolation trench with excellent electrical isolation. We use the crossing to demonstrate a monolithic silicon nano-electro-mechanical add-drop switch in which the flow of photons, electrons, and mechanical motions are fully integrated within the same layer. Our work enables hitherto impossible opto-electro-mechanical topologies and may lead to new functionalities in nano-opto-electro-mechanical systems, optomechanics, and integrated quantum photonics.
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Submitted 29 April, 2022;
originally announced April 2022.
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Impact of transduction scaling laws on nanoelectromechanical systems
Authors:
Konstantinos Tsoukalas,
Babak Vosoughi Lahijani,
Søren Stobbe
Abstract:
We study the electromechanical transduction in nanoelectromechanical actuators and show that the differences in scaling for electrical and mechanical effects lead to an overall non-trivial scaling behavior. In particular, the previously neglected fringing fields considerably increase electrical forces and improve the stability of nanoscale actuators. This shows that electrostatics does not pose an…
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We study the electromechanical transduction in nanoelectromechanical actuators and show that the differences in scaling for electrical and mechanical effects lead to an overall non-trivial scaling behavior. In particular, the previously neglected fringing fields considerably increase electrical forces and improve the stability of nanoscale actuators. This shows that electrostatics does not pose any limitations to downscaling of electromechanical systems, in fact in several respects, nanosystems outperform their microscale counterparts. As a specific example, we consider in-plane actuation of ultrathin slabs and show that devices consisting of a few layers of graphene are feasible, implying that electromechanical resonators operating beyond 40 GHz are possible with currently available technology.
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Submitted 20 December, 2019;
originally announced December 2019.
