Atomic Layer Deposited Protective Coating of Aluminum Oxide on Silver-based Telescope Mirror A Comparison Between a Pure Ozone and H2O Precursor
Authors:
Søren A. Tornøe,
Brandon Cheney,
Brian Dupraw,
Yoshimasa Okamura,
Andrew C. Phillips,
Takayuki Hagiwara,
Tetsuya Nishiguchi,
Nobuhiko P. Kobayashi
Abstract:
Although silver-based telescope mirrors excel over other materials such as gold and aluminum in the visible-infrared spectral range, they require robust protective coatings to overcome their inherent low durability. Our research shows that a single-layer of aluminum oxide (AlOx) deposited through thermal atomic layer deposition (ALD) using trimethylaluminum (TMA) and water (H2O) at low temperature…
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Although silver-based telescope mirrors excel over other materials such as gold and aluminum in the visible-infrared spectral range, they require robust protective coatings to overcome their inherent low durability. Our research shows that a single-layer of aluminum oxide (AlOx) deposited through thermal atomic layer deposition (ALD) using trimethylaluminum (TMA) and water (H2O) at low temperatures (~60°C) serves as an acceptable protective coating without adversely impacting the optical performance of the mirrors. While silver-based mirrors protected with a single-layer of AlOx perform decently in the field, in environmental tests under high-humidity at high-temperature conditions that accelerate underlying failure mechanisms, they degrade quickly, suggesting that there is room for improvement. This paper describes a study that compares the performance and endurance of two sets of silver-based mirrors protected by a single-layer of AlOx prepared by thermal ALD with two types of oxygen precursors: H2O and pure ozone (PO). The study shows that while the two types of samples, regardless of their oxygen precursors, initially have comparable spectral reflectance, the reflectance of the samples with AlOx protective coatings prepared with PO remain nearly constant 1.6 times longer than those with AlOx protective coatings prepared with H2O in the environmental test, suggesting promising characteristics of AlOx protective coatings prepared with PO.
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Submitted 8 May, 2023;
originally announced May 2023.
Semiconductor-like Optical Properties Unveiled by Modeling of Short-Period Aluminum Oxide-Copper Multi-Layered Nanocomposites Deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)
Authors:
Søren A. Tornøe,
Jacob H. Sands,
Nobuhiko P. Kobayashi
Abstract:
In our previous publication, we discussed the optical properties of multi-layered nanocomposite samples consisting of 300 pairs of an AlOx layer and a Cu layer produced from sputtering atomic layer augmented deposition (SALAD). These samples displayed unusual spectral reflectance that could not be well described via conventional means and could not be explained as an interpolation of the constitue…
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In our previous publication, we discussed the optical properties of multi-layered nanocomposite samples consisting of 300 pairs of an AlOx layer and a Cu layer produced from sputtering atomic layer augmented deposition (SALAD). These samples displayed unusual spectral reflectance that could not be well described via conventional means and could not be explained as an interpolation of the constituent materials. Computational models were then needed to both describe the results that were obtained and to predict the samples' other material properties. This process was approached by using the transfer-matrix method to describe the spectral reflectance based on the constituent materials, and then the dispersion method was used to find the composite index of refraction for the samples. The models successfully described pure Cu but encountered minor difficulties when it came to AlOx, as such, more research is needed to either properly model non-holomorphic materials like AlOx with the current algorithm or to find a better model that can adequately describe both Cu and AlOx. The dispersion model implemented predicts that the samples, composed of many thin film layers of metal and dielectric, would display semiconductor-like behavior. Therefore, this indicates that SALAD's combination of sputtering and ALD permits the generation of novel metal-dielectric based semiconductors.
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Submitted 28 June, 2022;
originally announced June 2022.
