Improved Three-Dimensional Reconstructions in Electron Ptychography through Defocus Series Measurements
Authors:
Marcel Schloz,
Thomas C. Pekin,
Hamish G. Brown,
Dana O. Byrne,
Bryan D. Esser,
Emmanuel Terzoudis-Lumsden,
Takashi Taniguchi,
Kenji Watanabe,
Scott D. Findlay,
Benedikt Haas,
Jim Ciston,
Christoph T. Koch
Abstract:
A detailed analysis of ptychography for 3D phase reconstructions of thick specimens is performed. We introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam direction through a higher overdetermination ratio. This method is compared with established multi-slice ptychography techniques, such as conventional ptychogr…
▽ More
A detailed analysis of ptychography for 3D phase reconstructions of thick specimens is performed. We introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam direction through a higher overdetermination ratio. This method is compared with established multi-slice ptychography techniques, such as conventional ptychography, regularized ptychography, and multi-mode ptychography. Additionally, we contrast multi-focus ptychography with an alternative method that uses virtual optical sectioning through a reconstructed scattering matrix ($\mathcal{S}$-matrix), which offers more precise 3D structure information compared to conventional ptychography. Our findings from multiple 3D reconstructions based on simulated and experimental data demonstrate that multi-focus ptychography surpasses other techniques, particularly in accurately reconstructing the surfaces and interface regions of thick specimens.
△ Less
Submitted 3 June, 2024;
originally announced June 2024.
