Showing 1–14 of 14 results for author: Talanov, V V

Disentangling superconductor and dielectric microwave losses in sub-micron $\rm Nb$/$\rm TEOS-SiO_2$ interconnects using a multi-mode microstrip resonator

Authors: Cougar A. T. Garcia, Nancyjane Bailey, Chris Kirby, Joshua A. Strong, Anna Yu. Herr, Steven M. Anlage, Vladimir V. Talanov

Abstract: Understanding the origins of power loss in superconducting interconnects is essential for the energy efficiency and scalability of superconducting digital logic. At microwave frequencies, power dissipates in both the dielectrics and superconducting wires, and these losses can be of comparable magnitude. A novel method to accurately disentangle such losses by exploiting their frequency dependence u… ▽ More Understanding the origins of power loss in superconducting interconnects is essential for the energy efficiency and scalability of superconducting digital logic. At microwave frequencies, power dissipates in both the dielectrics and superconducting wires, and these losses can be of comparable magnitude. A novel method to accurately disentangle such losses by exploiting their frequency dependence using a multi-mode transmission line resonator, supported by a geometric factor concept and a 3D superconductor finite element method (FEM) modeling, is described. Using the method we optimized a planarized fabrication process of reciprocal quantum logic (RQL) for the interconnect loss at 4.2 K and GHz frequencies. The interconnects are composed of niobium ($\rm Nb$) insulated by silicon dioxide made with a tetraethyl orthosilicate precursor ($\rm TEOS-SiO_2$). Two process generations use damascene fabrication, and the third one uses Cloisonné fabrication. For all three, $\rm TEOS-SiO_2$ exhibits a dielectric loss tangent $\tan δ= 0.0012 \pm 0.0001$, independent of $\rm Nb$ wire width over $0.25 - 4 \: μm$. The $\rm Nb$ loss varies with both the processing and the wire width. For damascene fabrication, scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDS) reveal that Nb oxide and Nb grain growth orientation increase the loss above the Bardeen Cooper Schrieffer (BCS) minimum theoretical resistance $R _{BCS}$. For Cloisonné fabrication, the $0.25 \: μm$ wide $\rm Nb$ wires exhibit an intrinsic resistance $R_s = 13 \pm 1.4 \: μΩ$ at 10 GHz, which is below $R_{BCS} \approx 17 \: μΩ$. That is arguably the lowest resistive loss reported for $\rm Nb$. △ Less

Submitted 19 March, 2023; originally announced March 2023.

Journal ref: Phys. Rev. Applied 21, 024056 (2024)

Synchronous Chip-to-Chip Communication with a Multi-Chip Resonator Clock Distribution Network

Authors: Jonathan Egan, Max Nielsen, Joshua Strong, Vladimir V. Talanov, Ed Rudman, Brainton Song, Quentin Herr, Anna Herr

Abstract: Superconducting digital circuits are a promising approach to build packaged-level integrated systems with high energy-efficiency and computational density. In such systems, performance of the data link between chips mounted on a multi-chip module (MCM) is a critical driver of performance. In this work we report a synchronous data link using Reciprocal Quantum Logic (RQL) enabled by resonant clock… ▽ More Superconducting digital circuits are a promising approach to build packaged-level integrated systems with high energy-efficiency and computational density. In such systems, performance of the data link between chips mounted on a multi-chip module (MCM) is a critical driver of performance. In this work we report a synchronous data link using Reciprocal Quantum Logic (RQL) enabled by resonant clock distribution on the chip and on the MCM carrier. The simple physical link has only four Josephson junctions and 3 fJ/bit dissipation, including a 300 W/W cooling overhead. The driver produces a signal with 35\,GHz analog bandwidth and connects to a single-ended receiver via 20 $Ω$ Nb Passive Transmission Line (PTL). To validate this link, we have designed, fabricated and tested two 32$\times$32 mm$^2$ MCMs with eight 5$\times$5 mm$^2$ chips connected serially and powered with a meander clock, and with four 10$\times$10 mm$^2$ chips powered with a 2 GHz resonant clock. The meander clock MCM validates performance of the data link components, and achieved 5.4 dB AC bias margin with no degradation relative to individual chip test. The resonator MCM validates synchronization between chips, with a measured AC bias margin up to 4.8 dB between two chips. The resonator MCM is capable of powering circuits of 4 million Josephson junctions across the four chips with a projected 10 Gbps serial data rate. △ Less

Submitted 18 July, 2022; v1 submitted 1 September, 2021; originally announced September 2021.

Comments: 8 pages, 8 figures

Propagation of Picosecond Pulses on Superconducting Transmission Line Interconnects

Authors: Vladimir V. Talanov, Derek Knee, David Harms, Kieran Perkins, Andrew Urbanas, Jonathan Egan, Quentin Herr, Anna Herr

Abstract: Interconnects are a major discriminator for superconducting digital technology, enabling energy efficient data transfer and high-bandwidth heterogeneous integration. We report a method to simulate propagation of picosecond pulses in superconducting passive transmission lines (PTLs). A frequency-domain propagator model obtained from the Ansys High Frequency Structure Simulator (HFSS) field solver i… ▽ More Interconnects are a major discriminator for superconducting digital technology, enabling energy efficient data transfer and high-bandwidth heterogeneous integration. We report a method to simulate propagation of picosecond pulses in superconducting passive transmission lines (PTLs). A frequency-domain propagator model obtained from the Ansys High Frequency Structure Simulator (HFSS) field solver is incorporated in a Cadence Spectre circuit model, so that the particular PTL geometry can be simulated in the time-domain. The Mattis-Bardeen complex conductivity of the superconductor is encoded in the HFSS field solver as a complex-conductivity insulator. Experimental and simulation results show that Nb 20 Ohm microstrip PTLs with 1um width can support propagation of a single-flux-quantum pulse up to 7mm and a double-flux-quantum pulse up to 28mm. △ Less

Submitted 28 October, 2021; v1 submitted 15 April, 2021; originally announced April 2021.

Reproducible Operating Margins on a 72,800-Device Digital Superconducting Chip

Authors: Quentin P. Herr, Joshua Osborne, Micah J. A. Stoutimore, Harold Hearne, Ryan Selig, Jacob Vogel, Eileen Min, Vladimir V. Talanov, Anna Y. Herr

Abstract: We report the design and test of Reciprocal Quantum Logic shift-register yield vehicles consisting of up to 72,800 Josephson junction devices per die, the largest digital superconducting circuits ever reported. Multiple physical layout styles were matched to the MIT Lincoln Laboratory foundry, which supports processes with both four and eight metal layers and minimum feature size of 0.5 μm. The la… ▽ More We report the design and test of Reciprocal Quantum Logic shift-register yield vehicles consisting of up to 72,800 Josephson junction devices per die, the largest digital superconducting circuits ever reported. Multiple physical layout styles were matched to the MIT Lincoln Laboratory foundry, which supports processes with both four and eight metal layers and minimum feature size of 0.5 μm. The largest individual circuits with 40,400 junctions indicate large operating margins of $\pm$20% on AC clock amplitude. In one case the data were reproducible to the accuracy of the measurement, $\pm$1% across five thermal cycles using only the rudimentary precautions of passive mu-metal magnetic shielding and a controlled cool-down rate of 3 mK/s in the test fixture. We conclude that with proper mitigation techniques, flux-trap** is no longer a limiting consideration for very-large-scale-integration of superconductor digital logic. △ Less

Submitted 5 October, 2015; originally announced October 2015.

A near-field scanning SQUID microwave microscope

Authors: Vladimir V Talanov, Nesco M Lettsome, Jr., Valery Borzenets, Nicolas Gagliolo, Alfred B Cawthorne, Antonio Orozco

Abstract: We developed a scanning DC SQUID microscope with novel readout electronics capable of wideband sensing RF magnetic fields from 50 to 200 MHz and simultaneously providing closed-loop response at kHz frequencies. To overcome the 20 MHz bandwidth limitation of traditional closed-loop SQUIDs, a flux-modulated closed loop simultaneously locks the SQUID quasi-static flux and flux-biases the SQUID for am… ▽ More We developed a scanning DC SQUID microscope with novel readout electronics capable of wideband sensing RF magnetic fields from 50 to 200 MHz and simultaneously providing closed-loop response at kHz frequencies. To overcome the 20 MHz bandwidth limitation of traditional closed-loop SQUIDs, a flux-modulated closed loop simultaneously locks the SQUID quasi-static flux and flux-biases the SQUID for amplification of the RF flux up to $Φ_0/4$ in amplitude. Demodulating the SQUID voltage with a double lock-in technique yields a signal representative of both the amplitude and phase of the RF flux. This provides 80 dB of a linear dynamic range with the flux noise density of 4 $μΦ_0/\sqrt{Hz}$ at 200 MHz for $YBa_2Cu_3O_7$ bi-crystal SQUID at 77 K. We describe the electronics performance and present images for RF magnetic field of the travelling wave in a coplanar waveguide, the standing wave in an open-circuited microstrip, and a surface mounted device antenna. △ Less

Submitted 16 December, 2013; v1 submitted 30 September, 2013; originally announced October 2013.

Comments: 8 pages, 8 figures. Superconductor Science and Technology, 2014

Journal ref: Supercond. Sci. Technol. 27 044032

Electrodynamics of the Josephson-Coupled Parallel Plate Resonator

Authors: Vladimir V. Talanov

Abstract: Eigen oscillations in a superconducting parallel plate resonator with the Josephson-coupled plates are investigated. While the insulator thickness S changes from tens of microns down to the decay lengthscale of the superconducting wavefunction into a dielectric, ξ~1 nm, both the resonant frequency and Q-factor vary non-monotonically by up to three orders in magnitude. A crossover between the Swiha… ▽ More Eigen oscillations in a superconducting parallel plate resonator with the Josephson-coupled plates are investigated. While the insulator thickness S changes from tens of microns down to the decay lengthscale of the superconducting wavefunction into a dielectric, ξ~1 nm, both the resonant frequency and Q-factor vary non-monotonically by up to three orders in magnitude. A crossover between the Swihart waves and Josephson plasmons causes a global minimum in the resonant frequency and a local maximum in the Q-factor at S~10ξ. △ Less

Submitted 12 August, 2011; originally announced August 2011.

Near-field scanning microwave microscope for interline capacitance characterization of nanoelectronics interconnect

Authors: Vladimir V. Talanov, Andrew R. Schwartz

Abstract: We have developed a noncontact method for measurement of the interline capacitance in Cu/low-k interconnect. It is based on a miniature test vehicle with net capacitance of a few femto-Farads formed by two 20-μm-long parallel wires (lines) with widths and spacings the same as those of the interconnect wires of interest. Each line is connected to a small test pad. The vehicle impedance is measured… ▽ More We have developed a noncontact method for measurement of the interline capacitance in Cu/low-k interconnect. It is based on a miniature test vehicle with net capacitance of a few femto-Farads formed by two 20-μm-long parallel wires (lines) with widths and spacings the same as those of the interconnect wires of interest. Each line is connected to a small test pad. The vehicle impedance is measured at 4 GHz by a near-field microwave probe with 10 μm probe size via capacitive coupling of the probe to the vehicle's test pads. Full 3D finite element modeling at 4 GHz confirms that the microwave radiation is concentrated between the two wires forming the vehicle. An analytical lumped element model and a short/open calibration approach have been proposed to extract the interline capacitance value from the measured data. We have validated the technique on several test vehicles made with copper and low-k dielectric on a 300 mm wafer. The vehicles interline spacing ranges from 0.09 to 1 μm and a copper line width is 0.15 μm. This is the first time a near-field scanning microwave microscope has been applied to measure the lumped element impedance of a test vehicle. △ Less

Submitted 10 August, 2011; originally announced August 2011.

Journal ref: IEEE Trans.Microwave Theor.Tech.57:1224,2009

Noncontact electrical metrology of Cu/low-k interconnect for semiconductor production wafers

Authors: V. V. Talanov, A. Scherz, A. R. Schwartz

Abstract: We have demonstrated a technique capable of in-line measurement of dielectric constant of low-k interconnect films on patterned wafers utilizing a test key of ~50x50 μm in size. The test key consists of a low-k film backed by a Cu grid with >50% metal pattern density and <250 nm pitch, which is fully compatible with the existing dual-damascene interconnect manufacturing processes. The technique is… ▽ More We have demonstrated a technique capable of in-line measurement of dielectric constant of low-k interconnect films on patterned wafers utilizing a test key of ~50x50 μm in size. The test key consists of a low-k film backed by a Cu grid with >50% metal pattern density and <250 nm pitch, which is fully compatible with the existing dual-damascene interconnect manufacturing processes. The technique is based on a near-field scanned microwave probe and is noncontact, noninvasive, and requires no electrical contact to or grounding of the wafer under test. It yields <0.3% precision and 2% accuracy for the film dielectric constant. △ Less

Submitted 10 August, 2011; originally announced August 2011.

Journal ref: Appl.Phys.Lett.88:262901,2006

Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe

Authors: Vladimir V. Talanov, André Scherz, Robert L. Moreland, Andrew R. Schwartz

Abstract: We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-μm-thick blanket low-k interconnect films on up to 300 mm in diameter wafers. The method has about 10 micron sampling spot size, and provides <0.3% precision and <2% accuracy for k-value. It is based on a microfabricated near-field scanned microwave probe formed by a 4 GHz parallel strip trans… ▽ More We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-μm-thick blanket low-k interconnect films on up to 300 mm in diameter wafers. The method has about 10 micron sampling spot size, and provides <0.3% precision and <2% accuracy for k-value. It is based on a microfabricated near-field scanned microwave probe formed by a 4 GHz parallel strip transmission line resonator tapered down to a few-micron tip size. △ Less

Submitted 10 August, 2011; originally announced August 2011.

Comments: 8 pages, 3 figures

Journal ref: Appl. Phys. Lett. 88: 192906,2006

A near-field scanned microwave probe for spatially localized electrical metrology

Authors: Vladimir V. Talanov, Andre Scherz, Robert L. Moreland, Andrew R. Schwartz

Abstract: We have developed a near-field scanned microwave probe with a sampling volume of approximately 10 micron in diameter, which is the smallest one achieved in near-field microwave microscopy. This volume is defined to confine close to 100 percent of the probe net sampling reactive energy, thus making the response virtually independent on the sample properties outside of this region. The probe is fo… ▽ More We have developed a near-field scanned microwave probe with a sampling volume of approximately 10 micron in diameter, which is the smallest one achieved in near-field microwave microscopy. This volume is defined to confine close to 100 percent of the probe net sampling reactive energy, thus making the response virtually independent on the sample properties outside of this region. The probe is formed by a 4 GHz balanced stripline resonator with a few-micron tip size. It provides non-contact, non-invasive measurement and is uniquely suited for spatially localized electrical metrology applications, e.g. on semiconductor production wafers. △ Less

Submitted 18 November, 2005; originally announced November 2005.

Comments: 6 pages, 3 figures, submitted to Appl. Phys. Lett

Journal ref: Appl. Phys. Lett. 88(13), 134106 (2006)

Microwave Electrodynamics of Electron-Doped Cuprate Superconductors

Authors: J. David Kokales, Patrick Fournier, Lucia V. Mercaldo, Vladimir V. Talanov, Richard L. Greene, Steven M. Anlage

Abstract: We report microwave cavity perturbation measurements of the temperature dependence of the penetration depth, lambda(T), and conductivity, sigma(T) of Pr_{2-x}Ce_{x}CuO_{4-delta} (PCCO) crystals, as well as parallel-plate resonator measurements of lambda(T) in PCCO thin films. Penetration depth measurements are also presented for a Nd_{2-x}Ce_{x}CuO_{4-delta} (NCCO) crystal. We find that delta-la… ▽ More We report microwave cavity perturbation measurements of the temperature dependence of the penetration depth, lambda(T), and conductivity, sigma(T) of Pr_{2-x}Ce_{x}CuO_{4-delta} (PCCO) crystals, as well as parallel-plate resonator measurements of lambda(T) in PCCO thin films. Penetration depth measurements are also presented for a Nd_{2-x}Ce_{x}CuO_{4-delta} (NCCO) crystal. We find that delta-lambda(T) has a power-law behavior for T<T_c/3, and conclude that the electron-doped cuprate superconductors have nodes in the superconducting gap. Furthermore, using the surface impedance, we have derived the real part of the conductivity, sigma_1(T), below T_c and found a behavior similar to that observed in hole-doped cuprates. △ Less

Submitted 28 July, 2000; v1 submitted 18 February, 2000; originally announced February 2000.

Comments: 4 pages, 4 figures, 1 table. Submitted to Physical Review Letters revised version: new figures, sample characteristics added to table, general clarification given

Journal ref: Phys. Rev. Lett. 85, 3696-3699 (2000)

Microwave Electrodynamics of the Electron-Doped Cuprate Superconductors Pr_(2-x)Ce_(x)CuO_(4-y) and Nd_(2-x)Ce_(x)CuO_(4-y)

Authors: J. David Kokales, Patrick Fournier, Lucia V. Mercaldo, Vladimir V. Talanov, Richard L. Greene, Steven M. Anlage

Abstract: The pairing state symmetry of the electron-doped cuprate superconductors is thought to be s-wave in nature, in contrast with their hole-doped counterparts which exhibit a d-wave symmetry. We re-examine this issue based on recent improvements in our electron-doped materials and our measurement techniques. We report microwave cavity perturbation measurements of the temperature dependence of the pe… ▽ More The pairing state symmetry of the electron-doped cuprate superconductors is thought to be s-wave in nature, in contrast with their hole-doped counterparts which exhibit a d-wave symmetry. We re-examine this issue based on recent improvements in our electron-doped materials and our measurement techniques. We report microwave cavity perturbation measurements of the temperature dependence of the penetration depth of Pr_(2-x)Ce_(x)CuO_(4-y) and Nd_(2-x)Ce_(x)CuO_(4-y) crystals. Our data strongly suggest that the pairing symmetry in these materials is not s-wave. △ Less

Submitted 12 January, 2000; originally announced January 2000.

Comments: 4 pages, 2 figures, presented at M2S-HTSC-VI, to be published in Physica C

Journal ref: Physica C vol. 341-348, 1655-1658 (2000)

Microwave Electrodynamics of the Antiferromagnetic Superconductor GdBa_2Cu_3O_{7-δ}

Authors: Lucia V. Mercaldo, Vladimir V. Talanov, Steven M. Anlage

Abstract: The temperature dependence of the microwave surface impedance and conductivity are used to study the pairing symmetry and properties of cuprate superconductors. However, the superconducting properties can be hidden by the effects of paramagnetism and antiferromagnetic long-range order in the cuprates. To address this issue we have investigated the microwave electrodynamics of GdBa_2Cu_3O_{7-δ},… ▽ More The temperature dependence of the microwave surface impedance and conductivity are used to study the pairing symmetry and properties of cuprate superconductors. However, the superconducting properties can be hidden by the effects of paramagnetism and antiferromagnetic long-range order in the cuprates. To address this issue we have investigated the microwave electrodynamics of GdBa_2Cu_3O_{7-δ}, a rare-earth cuprate superconductor which shows long-range ordered antiferromagnetism below T_N=2.2 K, the Neel temperature of the Gd ion subsystem. We measured the temperature dependence of the surface resistance and surface reactance of c-axis oriented epitaxial thin films at 10.4, 14.7 and 17.9 GHz with the parallel plate resonator technique down to 1.4 K. Both the resistance and the reactance data show an unusual upturn at low temperature and the resistance presents a strong peak around T_N mainly due to change in magnetic permeability. △ Less

Submitted 22 December, 1999; originally announced December 1999.

Comments: M2S-HTCS-VI Conference Paper, 2 pages, 2 eps figures, using Elsevier style espcrc2.sty

Journal ref: Physica C, 341-348, 1675-1676 (2000)

Singularities on the World Sheets of Open Relativistic Strings

Authors: S. V. Klimenko, I. N. Nikitin, V. V. Talanov

Abstract: A classification of stable singular points on world sheets of open relativistic strings is carried out. A classification of stable singular points on world sheets of open relativistic strings is carried out. △ Less

Submitted 13 May, 1995; originally announced May 1995.

Comments: 25 pages, 28 uuencoded ZIP-compressed Postscript figures

Report number: Preprint IHEP 95-7