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Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit
Authors:
Sean P. Bommer,
Christopher Panuski,
Benoit Guilhabert,
Zhongyi Xia,
Jack A. Smith,
Martin D. Dawson,
Dirk Englund,
Michael J. Strain
Abstract:
Photonic crystal cavities (PhCCs) can confine optical fields in ultra-small volumes, enabling efficient light-matter interactions for quantum and non-linear optics, sensing and all-optical signal processing. The inherent nanometric tolerances of micro-fabrication platforms can induce cavity resonant wavelength shifts two-orders of magnitude larger than cavity linewidths, prohibiting fabrication of…
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Photonic crystal cavities (PhCCs) can confine optical fields in ultra-small volumes, enabling efficient light-matter interactions for quantum and non-linear optics, sensing and all-optical signal processing. The inherent nanometric tolerances of micro-fabrication platforms can induce cavity resonant wavelength shifts two-orders of magnitude larger than cavity linewidths, prohibiting fabrication of arrays of nominally identical devices. We address this device variability by fabricating PhCCs as releasable pixels that can be transferred from their native substrate to a receiver where ordered micro-assembly can overcome the inherent fabrication variance. We demonstrate the measurement, binning and transfer of 119 PhCCs in a single session, producing spatially ordered arrays of PhCCs, sorted by resonant wavelength. Furthermore, the rapid in-situ measurement of the devices enables measurements of the PhCCs dynamic response to the print process for the first time, showing plastic and elastic effects in the seconds to hours range.
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Submitted 28 June, 2024;
originally announced June 2024.
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Additive GaN solid immersion lenses for enhanced photon extraction efficiency from diamond color centers
Authors:
Xingrui Cheng,
Nils Kolja Wessling,
Saptarsi Ghosh,
Andrew R. Kirkpatrick,
Menno J. Kappers,
Yashna N. D. Lekhai,
Gavin W. Morley,
Rachel A. Oliver,
Jason M. Smith,
Martin D. Dawson,
Patrick S. Salter,
Michael J. Strain
Abstract:
Effective light extraction from optically active solid-state spin centres inside high-index semiconductor host crystals is an important factor in integrating these pseudo-atomic centres in wider quantum systems. Here we report increased fluorescent light collection efficiency from laser-written nitrogen vacancy centers (NV) in bulk diamond facilitated by micro-transfer printed GaN solid immersion…
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Effective light extraction from optically active solid-state spin centres inside high-index semiconductor host crystals is an important factor in integrating these pseudo-atomic centres in wider quantum systems. Here we report increased fluorescent light collection efficiency from laser-written nitrogen vacancy centers (NV) in bulk diamond facilitated by micro-transfer printed GaN solid immersion lenses. Both laser-writing of NV centres and transfer printing of micro-lens structures are compatible with high spatial resolution, enabling deterministic fabrication routes towards future scalable systems development. The micro-lenses are integrated in a non-invasive manner, as they are added on top of the unstructured diamond surface and bond by Van-der-Waals forces. For emitters at 5 micrometer depth, we find approximately 2x improvement of fluorescent light collection using an air objective with a numerical aperture of NA = 0.95 in good agreement with simulations. Similarly, the solid immersion lenses strongly enhance light collection when using an objective with NA = 0.5, significantly improving the signal-to-noise ratio of the NV center emission while maintaining the NV's quantum properties after integration.
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Submitted 20 June, 2023;
originally announced June 2023.
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Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing
Authors:
Zhibo Li,
Jack A. Smith,
Mark Scullion,
Nils Kolja Wessling,
Loyd J. McKnight,
Martin D. Dawson,
Michael J. Strain
Abstract:
The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format wer…
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The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 μm to 1.6 μm wavelength range, with a measured loaded Q-factor larger than 32000.
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Submitted 8 September, 2022; v1 submitted 25 August, 2022;
originally announced August 2022.
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Fabrication and transfer print based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
Authors:
Nils Kolja Wessling,
Saptarsi Ghosh,
Benoit Guilhabert,
Menno Kappers,
Miles Toon,
Rachel A. Oliver,
Martin D. Dawson,
Michael J. Strain
Abstract:
We demonstrate the back-end integration of broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel micro-fabrication process flow to suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show their subsequent transfer-printing integration. A growth process targeted at producing unbowed epitaxial wafers w…
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We demonstrate the back-end integration of broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel micro-fabrication process flow to suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show their subsequent transfer-printing integration. A growth process targeted at producing unbowed epitaxial wafers was combined with optimisation of the etching volume in order to produce flat devices for printing. Lens structures were fabricated with 6 to 11 $μ$m diameter, 2 $μ$m height and root-mean-squared surface roughness below 2 nm. The lenses were printed in a vertically coupled geometry on a single crystalline diamond substrate and with $μ$m-precise placement on a horizontally coupled photonic integrated circuit waveguide facet. Optical performance analysis shows that these lenses could be used to couple to diamond nitrogen vacancy centres at micron scale depths and demonstrates their potential for visible to infrared light-coupling applications.
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Submitted 19 September, 2022; v1 submitted 10 August, 2022;
originally announced August 2022.
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A full degree-of-freedom photonic crystal spatial light modulator
Authors:
Christopher L. Panuski,
Ian R. Christen,
Momchil Minkov,
Cole J. Brabec,
Sivan Trajtenberg-Mills,
Alexander D. Griffiths,
Jonathan J. D. McKendry,
Gerald L. Leake,
Daniel J. Coleman,
Cung Tran,
Jeffrey St Louis,
John Mucci,
Cameron Horvath,
Jocelyn N. Westwood-Bachman,
Stefan F. Preble,
Martin D. Dawson,
Michael J. Strain,
Michael L. Fanto,
Dirk R. Englund
Abstract:
Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-f…
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Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-finesse microcavities through inverse design, (ii) scalable fabrication by optimized, 300 mm full-wafer processing, (iii) picometer-precision resonance alignment using automated, closed-loop "holographic trimming", and (iv) out-of-plane cavity control via a high-speed micro-LED array. Combining each, we demonstrate near-complete spatiotemporal control of a 64-resonator, two-dimensional SLM with nanosecond- and femtojoule-order switching. Simultaneously operating wavelength-scale modes near the space- and time-bandwidth limits, this work opens a new regime of programmability at the fundamental limits of multimode optical control.
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Submitted 21 April, 2022;
originally announced April 2022.
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Ultra-high frame rate digital light projector using chipscale LED-on-CMOS technology
Authors:
Navid Bani Hassan,
Fahimeh Dehkhoda,
Enyuan Xie,
Johannes Herrnsdorf,
Michael J Strain,
Robert Henderson,
Martin D Dawson
Abstract:
Digital light projector systems are crucial components in applications including computational imaging, fluorescence microscopy and highly parallel data communications. Here we present a chip-scale projector system based on emissive micro-LED pixels directly bonded to a smart pixel CMOS drive chip. Enabled by the high modulation bandwidth of the LED devices, the 128x128 pixel array can project bin…
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Digital light projector systems are crucial components in applications including computational imaging, fluorescence microscopy and highly parallel data communications. Here we present a chip-scale projector system based on emissive micro-LED pixels directly bonded to a smart pixel CMOS drive chip. Enabled by the high modulation bandwidth of the LED devices, the 128x128 pixel array can project binary patterns at up to 0.5 Mfps and toggle between two stored frames at MHz rates. The projector has a 5-bit grayscale resolution that can be updated at rates up to 83 kfps, and can be held in memory as a constant bias for the binary pattern projection. Finally, the projector can be operated in a pulsed mode, with individual pixels emitting pulses down to a few nanoseconds in duration. Again, this mode can be used in conjunction with the high-speed spatial pattern projection. The design of the smart pixels and LED devices are presented along with measurements of each mode of operation. As a demonstration of the data throughput achievable with this system we present an optical camera communications application, exhibiting data rates of >5 Gbps, over three orders of magnitude improvement on current demonstrations.
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Submitted 24 November, 2021;
originally announced November 2021.
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Characterisation, Selection and Micro-Assembly of Nanowire Laser Systems
Authors:
Dimitars Jevtics,
John McPhillimy,
Benoit Guilhabert,
Juan A. Alanis,
Hark Hoe Tan,
Chennupati Jagadish,
Martin D. Dawson,
Antonio Hurtado,
Patrick Parkinson,
Michael J. Strain
Abstract:
Semiconductor nanowire (NW) lasers are a promising technology for the realisation of coherent optical sources with extremely small footprint. To fully realize their potential as building blocks in on-chip photonic systems, scalable methods are required for dealing with large populations of inhomogeneous devices that are typically randomly distributed on host substrates. In this work two complement…
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Semiconductor nanowire (NW) lasers are a promising technology for the realisation of coherent optical sources with extremely small footprint. To fully realize their potential as building blocks in on-chip photonic systems, scalable methods are required for dealing with large populations of inhomogeneous devices that are typically randomly distributed on host substrates. In this work two complementary, high-throughput techniques are combined: the characterisation of nanowire laser populations using automated optical microscopy, and a high accuracy transfer printing process with automatic device spatial registration and transfer. In this work a population of NW lasers is characterised, binned by threshold energy density and subsequently printed in arrays onto a secondary substrate. Statistical analysis of the transferred and control devices show that the transfer process does not incur measurable laser damage and the threshold binning can be maintained. Analysis is provided on the threshold and mode spectra of the device populations to investigate the potential for using NW lasers for integrated systems fabrication.
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Submitted 7 January, 2020;
originally announced January 2020.
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All-optical tuning of a diamond micro-disk resonator on silicon
Authors:
Paul Hill,
Charalambos Klitis,
Benoit Guilhabert,
Marc Sorel,
Erdan Gu,
Martin D. Dawson,
Michael J. Strain
Abstract:
High quality integrated diamond photonic devices have previously been demonstrated in applications from non-linear photonics to on-chip quantum optics. However, the small sample sizes of single crystal material available, and the difficulty in tuning its optical properties, are barriers to the scaling of these technologies. Both of these issues can be addressed by integrating micron scale diamond…
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High quality integrated diamond photonic devices have previously been demonstrated in applications from non-linear photonics to on-chip quantum optics. However, the small sample sizes of single crystal material available, and the difficulty in tuning its optical properties, are barriers to the scaling of these technologies. Both of these issues can be addressed by integrating micron scale diamond devices onto host photonic integrated circuits using a highly accurate micro-assembly method. In this work a diamond micro-disk resonator is integrated with a standard single mode silicon-on-insulator waveguide, exhibiting an average loaded Q-factor of 3.1x10^4 across a range of spatial modes, with a maximum loaded Q-factor of 1.05x10^5. The micron scale device size and high thermal impedance of the silica interface layer allow for significant thermal loading and continuous resonant wavelength tuning across a 450 pm range using a mW level optical pump. This diamond-on-demand integration technique paves the way for tunable devices coupled across large scale photonic circuits.
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Submitted 11 July, 2019;
originally announced July 2019.
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High-sensitivity free space optical communications using low size, weight and power hardware
Authors:
Alexander D. Griffiths,
Johannes Herrnsdorf,
Oscar Almer,
Robert K. Henderson,
Michael J. Strain,
Martin D. Dawson
Abstract:
Free space optical communication systems with extremely high detector sensitivities are attractive for various applications with low size, weight and power requirements. For these practical systems, integrated hardware elements with small form factor are needed. Here, we demonstrate a communication link using a CMOS integrated micro-LED and array of single-photon avalanche diodes. These integrated…
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Free space optical communication systems with extremely high detector sensitivities are attractive for various applications with low size, weight and power requirements. For these practical systems, integrated hardware elements with small form factor are needed. Here, we demonstrate a communication link using a CMOS integrated micro-LED and array of single-photon avalanche diodes. These integrated systems provide a data rate of 100 Mb/s at a sensitivity of -55.2 dBm, corresponding to 7.5 detected photons per bit.
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Submitted 22 January, 2019;
originally announced February 2019.
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Three-dimensional solid-state qubit arrays with long-lived spin coherence
Authors:
C. J. Stephen,
B. L. Green,
Y. N. D. Lekhai,
L. Weng,
P. Hill,
S. Johnson,
A. C. Frangeskou,
P. L. Diggle,
M. J. Strain,
E. Gu,
M. E. Newton,
J. M. Smith,
P. S. Salter,
G. W. Morley
Abstract:
Three-dimensional arrays of silicon transistors increase the density of bits. Solid-state qubits are much larger so could benefit even more from using the third dimension given that useful fault-tolerant quantum computing will require at least 100,000 physical qubits and perhaps one billion. Here we use laser writing to create 3D arrays of nitrogen-vacancy centre (NVC) qubits in diamond. This woul…
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Three-dimensional arrays of silicon transistors increase the density of bits. Solid-state qubits are much larger so could benefit even more from using the third dimension given that useful fault-tolerant quantum computing will require at least 100,000 physical qubits and perhaps one billion. Here we use laser writing to create 3D arrays of nitrogen-vacancy centre (NVC) qubits in diamond. This would allow 5 million qubits inside a commercially available 4.5x4.5x0.5 mm diamond based on five nuclear qubits per NVC and allowing $(10 μm)^3$ per NVC to leave room for our laser-written electrical control. The spin coherence times we measure are an order of magnitude longer than previous laser-written qubits and at least as long as non-laser-written NVC. As well as NVC quantum computing, quantum communication and nanoscale sensing could benefit from the same platform. Our approach could also be extended to other qubits in diamond and silicon carbide.
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Submitted 10 July, 2018;
originally announced July 2018.
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Poissonian communications: free space optical data transfer at the few-photon level
Authors:
Alexander D. Griffiths,
Johannes Herrnsdorf,
Christopher Lowe,
Malcolm Macdonald,
Robert Henderson,
Michael J. Strain,
Martin D. Dawson
Abstract:
Communicating information at the few photon level typically requires some complexity in the transmitter or receiver in order to operate in the presence of noise. This in turn incurs expense in the necessary spatial volume and power consumption of the system. In this work we present a self-synchronised free-space optical communications system based on simple, compact and low power consumption semic…
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Communicating information at the few photon level typically requires some complexity in the transmitter or receiver in order to operate in the presence of noise. This in turn incurs expense in the necessary spatial volume and power consumption of the system. In this work we present a self-synchronised free-space optical communications system based on simple, compact and low power consumption semiconductor devices. A temporal encoding method, implemented using a gallium nitride micro-LED source and a silicon single photon avalanche photo-detector (SPAD) demonstrates data transmission at rates up to 100 kb/s for 8.25 pW received power, corresponding to 27 photons per bit. Furthermore, the signals can be decoded in the presence of both constant and modulated background noise at levels significantly exceeding the signal power. The systems low power consumption and modest electronics requirements are demonstrated employing it as a communications channel between two nano-satellite simulator systems.
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Submitted 24 January, 2018;
originally announced January 2018.
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Silicon photonic processor of two-qubit entangling quantum logic
Authors:
R. Santagati,
J. W. Silverstone,
M. J. Strain,
M. Sorel,
S. Miki,
T. Yamashita,
M. Fujiwara,
M. Sasaki,
H. Terai,
M. G. Tanner,
C. M. Natarajan,
R. H. Hadfield,
J. L. O'Brien,
M. G. Thompson
Abstract:
Entanglement is a fundamental property of quantum mechanics, and is a primary resource in quantum information systems. Its manipulation remains a central challenge in the development of quantum technology. In this work, we demonstrate a device which can generate, manipulate, and analyse two-qubit entangled states, using miniature and mass-manufacturable silicon photonics. By combining four photon-…
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Entanglement is a fundamental property of quantum mechanics, and is a primary resource in quantum information systems. Its manipulation remains a central challenge in the development of quantum technology. In this work, we demonstrate a device which can generate, manipulate, and analyse two-qubit entangled states, using miniature and mass-manufacturable silicon photonics. By combining four photon-pair sources with a reconfigurable six-mode interferometer, embedding a switchable entangling gate, we generate two-qubit entangled states, manipulate their entanglement, and analyse them, all in the same silicon chip. Using quantum state tomography, we show how our source can produce a range of entangled and separable states, and how our switchable controlled-Z gate operates on them, entangling them or making them separable depending on its configuration.
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Submitted 20 October, 2017; v1 submitted 1 September, 2017;
originally announced September 2017.
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Qubit entanglement on a silicon photonic chip
Authors:
Joshua W. Silverstone,
Raffaele Santagati,
Damien Bonneau,
Michael J. Strain,
Marc Sorel,
Jeremy L. O'Brien,
Mark G. Thompson
Abstract:
Entanglement--one of the most delicate phenomena in nature--is an essential resource for quantum information applications. Large entangled cluster states have been predicted to enable universal quantum computation, with the required single- qubit measurements readily implemented with photons. Useful large-scale systems must generate and control qubit entanglement on-chip, where quantum information…
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Entanglement--one of the most delicate phenomena in nature--is an essential resource for quantum information applications. Large entangled cluster states have been predicted to enable universal quantum computation, with the required single- qubit measurements readily implemented with photons. Useful large-scale systems must generate and control qubit entanglement on-chip, where quantum information is naturally encoded in photon path. Here we report a silicon photonic chip which integrates resonant-enhanced sources, filters, and reconfigurable optics to generate a path-entangled two-qubit state--the smallest non-trivial cluster state--and analyse its entanglement. We show that ring-resonator-based spontaneous four-wave mixing sources can be made highly indistinguishable, despite their nonlinear dynamics, and the first evidence that their frequency correlations are small, as predicted. We use quantum state tomography, and the strict Bell-CHSH inequality to quantify entanglement in the device, confirming its high performance. This work integrates essential components for building devices and systems to harness quantum entanglement on the large scale.
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Submitted 21 November, 2014; v1 submitted 30 October, 2014;
originally announced October 2014.
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A micrometer-scale integrated silicon source of time-energy entangled photons
Authors:
Davide Grassani,
Stefano Azzini,
Marco Liscidini,
Matteo Galli,
Michael J. Strain,
Marc Sorel,
J. E. Sipe,
Daniele Bajoni
Abstract:
Entanglement is a fundamental resource in quantum information processing. Several studies have explored the integration of sources of entangled states on a silicon chip but the sources demonstrated so far require millimeter lengths and pump powers of the order of hundreds of mWs to produce an appreciable photon flux, hindering their scalability and dense integration.
Microring resonators have be…
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Entanglement is a fundamental resource in quantum information processing. Several studies have explored the integration of sources of entangled states on a silicon chip but the sources demonstrated so far require millimeter lengths and pump powers of the order of hundreds of mWs to produce an appreciable photon flux, hindering their scalability and dense integration.
Microring resonators have been shown to be efficient sources of photon pairs, but entangled state emission has never been demonstrated. Here we report the first demonstration of a microring resonator capable of emitting time-energy entangled photons. We use a Franson experiment to show a violation of Bell's inequality by as much as 11 standard deviations. The source is integrated on a silicon chip, operates at sub-mW pump power, emits in the telecom band with a pair generation rate exceeding 10$^7$ Hz per $nm$, and outputs into a photonic waveguide. These are all essential features of an entangled states emitter for a quantum photonic networks.
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Submitted 17 September, 2014;
originally announced September 2014.
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Ultra-low power generation of twin photons in a compact silicon ring resonator
Authors:
Stefano Azzini,
Davide Grassani,
Michael J. Strain,
Marc Sorel,
L. G. Helt,
J. E. Sipe,
Marco Liscidini,
Matteo Galli,
Daniele Bajoni
Abstract:
We demonstrate efficient generation of correlated photon pairs by spontaneous four wave mixing in a 5 μm radius silicon ring resonator in the telecom band around 1550 nm. By optically pum** our device with a 200 μW continuous wave laser, we obtain a pair generation rate of 0.2 MHz and demonstrate photon time correlations with a coincidence-to-accidental ratio as high as 250. The results are in g…
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We demonstrate efficient generation of correlated photon pairs by spontaneous four wave mixing in a 5 μm radius silicon ring resonator in the telecom band around 1550 nm. By optically pum** our device with a 200 μW continuous wave laser, we obtain a pair generation rate of 0.2 MHz and demonstrate photon time correlations with a coincidence-to-accidental ratio as high as 250. The results are in good agreement with theoretical predictions and show the potential of silicon micro-ring resonators as room temperature sources for integrated quantum optics applications.
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Submitted 10 September, 2012;
originally announced September 2012.
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From Classical Four-Wave Mixing to Parametric Fluorescence in Silicon micro-ring resonators
Authors:
Stefano Azzini,
Davide Grassani,
Matteo Galli,
Lucio Claudio Andreani,
Marc Sorel,
Michael J. Strain,
L. G. Helt,
J. E. Sipe,
Marco Liscidini,
Daniele Bajoni
Abstract:
Four-wave mixing can be stimulated or occur spontaneously. The first process is intrinsically much stronger, and well understood through classical nonlinear optics. The latter, also known as parametric fluorescence, can be explained only in the framework of a quantum theory of light. We experimentally demonstrate that, in a micro-ring resonator, there exists a simple relation between the efficienc…
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Four-wave mixing can be stimulated or occur spontaneously. The first process is intrinsically much stronger, and well understood through classical nonlinear optics. The latter, also known as parametric fluorescence, can be explained only in the framework of a quantum theory of light. We experimentally demonstrate that, in a micro-ring resonator, there exists a simple relation between the efficiencies of these two processes, which is independent of the nonlinearity and size of the ring. In particular we show that the average power generated by parametric fluorescence can be immediately estimated from a classical FWM experiment. These results suggest that classical nonlinear characterization of a photonic integrated structure can provide accurate information on its nonlinear quantum properties.
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Submitted 3 August, 2012;
originally announced August 2012.
