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Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
Authors:
Michael Klute,
Efe Kemaneci,
Horia-Rugen Porteanu,
Ilija Stefanovic,
Wolfgang Heinrich,
Peter Awakowicz,
Ralf Peter Brinkmann
Abstract:
The MMWICP (Miniature MicroWave ICP) is a new plasma source using the induction principle. Recently Klute et al. presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geo…
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The MMWICP (Miniature MicroWave ICP) is a new plasma source using the induction principle. Recently Klute et al. presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of $p=1000\,\mathrm{Pa}$ and a gas temperature of $T_\mathrm{g}=650\mbox{-}1600\,\mathrm{K}$. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive \linebreak coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at a electron density of $n_\mathrm{e} \approx 6.4 \!\times\!10^{18} \, \mathrm{m}^{-3}$ as $E/H$-hybridmode with an capacitive and inductive component.
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Submitted 15 May, 2021;
originally announced May 2021.
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Theoretical investigation of a miniature microwave driven plasma jet
Authors:
Michael Klute,
Horia-Eugen Porteanu,
Ilija Stefanovic,
Wolfgang Heinrich,
Peter Awakowicz,
Ralf Peter Brinkmann
Abstract:
Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a the…
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Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a theoretical model of the new device, based on a series representation of the electromagnetic field in the resonator and the volume integrated (global) model for the loss processes within the plasma. An infinite number of modes can be found ordered by the azimuthal wave number m. These modes essentially determine the electromagnetic behavior of the system and differ from ordinary cavity modes. The mode m=0 can be identified with the inductive mode and is called H-mode, the mode m=1 is the capacitive mode and is called E-mode. Both modes refer to different operating regimes, which are separated by different values of the plasma parameters. In a second step the matching network and its characteristics are taken into account in order to find stable equilibrium points and possible hysteresis effects. As main result, the feasibility of inductive power coupling for the MMWICP resonator is shown.
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Submitted 6 March, 2020; v1 submitted 4 March, 2020;
originally announced March 2020.
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Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices
Authors:
Horia-Eugen,
Porteanu,
Ilija Stefanović,
Michael Klute,
Ralf-Peter Brinkmann,
Peter Awakowicz,
Wolfgang Heinrich
Abstract:
Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The…
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Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The present paper shows the state of the art of the research on such sources, demonstrating their work up to atmospheric pressure.
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Submitted 3 March, 2020;
originally announced March 2020.
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Spatiotemporal profile of emission from oscillating dc micro discharges
Authors:
T. Kuschel,
N. Škoro,
D. Marić,
I. Stefanović,
G. Malović,
J. Winter,
Z. Lj. Petrović
Abstract:
The axial light distributions in parallel-plate dc microdischarges in argon show similar behavior to large scale discharges. Between the low-current Townsend mode and the high current glow mode exists a large region of currents where different oscillations appear and the dynamic Volt-Ampere characteristic shows hysteresis behavior. During the oscillations the maximum peak intensity moves closer to…
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The axial light distributions in parallel-plate dc microdischarges in argon show similar behavior to large scale discharges. Between the low-current Townsend mode and the high current glow mode exists a large region of currents where different oscillations appear and the dynamic Volt-Ampere characteristic shows hysteresis behavior. During the oscillations the maximum peak intensity moves closer to the cathode, which is characteristic for the abnormal glow regime even though the average current is considerably smaller.
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Submitted 19 May, 2011; v1 submitted 29 April, 2011;
originally announced April 2011.
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Oscillation modes of dc microdischarges with parallel-plate geometry
Authors:
Ilija Stefanović,
Thomas Kuschel,
Nikola Škoro,
Dragana Marić,
Zoran Lj Petrović,
Jörg Winter
Abstract:
Two different oscillation modes in microdischarge with parallel-plate geometry has been observed: relaxation oscillations with frequency range between 1.23 and 2.1 kHz and free-running oscillations with 7 kHz frequency. The oscillation modes are induced by increasing power supply voltage or discharge current. For a given power supply voltage, there is a spontaneous transition from one to other osc…
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Two different oscillation modes in microdischarge with parallel-plate geometry has been observed: relaxation oscillations with frequency range between 1.23 and 2.1 kHz and free-running oscillations with 7 kHz frequency. The oscillation modes are induced by increasing power supply voltage or discharge current. For a given power supply voltage, there is a spontaneous transition from one to other oscillation mode and vice versa. Before the transition from relaxation to free-running oscillations, the spontaneous increase of oscillation frequency of relaxation oscillations form 1.3 kHz to 2.1 kHz is measured. Fourier Transform Spectra of relaxation oscillations reveal chaotic behaviour of microdischarge. Volt-Ampere characteristics associated with relaxation oscillations describes periodical transition between low current, diffuse discharge and normal glow. However, free-running oscillations appear in subnormal glow only.
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Submitted 19 May, 2011; v1 submitted 29 April, 2011;
originally announced April 2011.
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Axial light emission and Ar metastable densities in a parallel plate dc micro discharge in steady state and transient regimes
Authors:
T Kuschel,
B Niermann,
I Stefanović,
M Böke,
N Škoro,
D Marić,
Z Lj Petrović,
J Winter
Abstract:
Axial emission profiles in a parallel plate dc micro discharge (feedgas: argon; discharge gap d=1mm; pressure p=10Torr) were studied by means of time resolved imaging with a fast ICCD camera. Additionally, volt-ampere (V-A) characteristics were recorded and Ar* metastable densities were measured by tunable diode laser absorption spectroscopy (TDLAS). Axial emission profiles in the steady state reg…
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Axial emission profiles in a parallel plate dc micro discharge (feedgas: argon; discharge gap d=1mm; pressure p=10Torr) were studied by means of time resolved imaging with a fast ICCD camera. Additionally, volt-ampere (V-A) characteristics were recorded and Ar* metastable densities were measured by tunable diode laser absorption spectroscopy (TDLAS). Axial emission profiles in the steady state regime are similar to corresponding profiles in standard size discharges (d=1cm, p=1Torr). For some discharge conditions relaxation oscillations are present when the micro discharge switches periodically between low current Townsend-like mode and normal glow. At the same time the axial emission profile shows transient behavior, starting with peak distribution at the anode, which gradually moves towards the cathode during the normal glow. The development of argon metastable densities highly correlates with the oscillating discharge current. Gas temperatures in the low current Townsend-like mode (T= 320-400K) and the high current glow mode (T=469-526K) were determined by the broadening of the recorded spectral profiles as a function of the discharge current.
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Submitted 12 September, 2011; v1 submitted 28 April, 2011;
originally announced April 2011.
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Gas temperature effect on the time for onset of particle nucleation in argon diluted acetylene plasma
Authors:
Ilija Stefanovic,
Eva Kovacevic,
Johannes Berndt,
Jorg Winter
Abstract:
In our work we are focused on study of powder formation in C2H2/Ar plasmas. In this scope we used a combination of FTIR and mass spectroscopy, which are the mostly used experimental techniques for plasma powder formation diagnostics. To test the proposed mechanism for particle nucleation delay we measured the particle nucleation under different plasma conditions: firstly we increased the gas tem…
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In our work we are focused on study of powder formation in C2H2/Ar plasmas. In this scope we used a combination of FTIR and mass spectroscopy, which are the mostly used experimental techniques for plasma powder formation diagnostics. To test the proposed mechanism for particle nucleation delay we measured the particle nucleation under different plasma conditions: firstly we increased the gas temperature and secondly we changed the background gas from argon to helium.
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Submitted 11 November, 2004;
originally announced November 2004.
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Nanoparticles designed from low pressure plasma as model for astrophysical dust clouds
Authors:
Ilija Stefanovic,
Eva Kovacevic,
Johannes Berndt,
Yvonne Pendleton,
Jorg Winter
Abstract:
IR spectra gained from laboratory investigations on analogue materials are an important tool for the interpretation of astronomical IR data and the understanding of the observed phenomena in DISM. Dust particles grown in argon/acetylene low pressure plasma are proposed for a new analog. We test the validity of proposed analog according to the criteria from the literature. We also present prelimi…
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IR spectra gained from laboratory investigations on analogue materials are an important tool for the interpretation of astronomical IR data and the understanding of the observed phenomena in DISM. Dust particles grown in argon/acetylene low pressure plasma are proposed for a new analog. We test the validity of proposed analog according to the criteria from the literature. We also present preliminary results of nitrogen band at 4.62 \$mu$m, which has been identified in dense cold dust.
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Submitted 13 October, 2004;
originally announced October 2004.
