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Wafer-scale uniformity of Dolan-bridge and bridgeless Manhattan-style Josephson junctions for superconducting quantum processors
Authors:
N. Muthusubramanian,
P. Duivestein,
C. Zachariadis,
M. Finkel,
S. L. M. van der Meer,
H. M. Veen,
M. W. Beekman,
T. Stavenga,
A. Bruno,
L. DiCarlo
Abstract:
We investigate die-level and wafer-scale uniformity of Dolan-bridge and bridgeless Manhattan Josephson junctions, using multiple substrates with and without through-silicon vias (TSVs). Dolan junctions fabricated on planar substrates have the highest yield and lowest room-temperature conductance spread, equivalent to ~100 MHz in transmon frequency. In TSV-integrated substrates, Dolan junctions suf…
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We investigate die-level and wafer-scale uniformity of Dolan-bridge and bridgeless Manhattan Josephson junctions, using multiple substrates with and without through-silicon vias (TSVs). Dolan junctions fabricated on planar substrates have the highest yield and lowest room-temperature conductance spread, equivalent to ~100 MHz in transmon frequency. In TSV-integrated substrates, Dolan junctions suffer most in both yield and disorder, making Manhattan junctions preferable. Manhattan junctions show pronounced conductance decrease from wafer centre to edge, which we qualitatively capture using a geometric model of spatially-dependent resist shadowing during junction electrode evaporation. Analysis of actual junction overlap areas using scanning electron micrographs supports the model, and further points to a remnant spatial dependence possibly due to contact resistance.
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Submitted 18 April, 2023;
originally announced April 2023.
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Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors
Authors:
S. Vallés-Sanclemente,
S. L. M. van der Meer,
M. Finkel,
N. Muthusubramanian,
M. Beekman,
H. Ali,
J. F. Marques,
C. Zachariadis,
H. M. Veen,
T. Stavenga,
N. Haider,
L. DiCarlo
Abstract:
We present the use of grounding airbridge arrays to trim the frequency of microwave coplanar-waveguide (CPW) resonators post fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with $100~\mathrm{MHz}$ range and $10~\mathrm{MHz}$ resolution. We showca…
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We present the use of grounding airbridge arrays to trim the frequency of microwave coplanar-waveguide (CPW) resonators post fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with $100~\mathrm{MHz}$ range and $10~\mathrm{MHz}$ resolution. We showcase two applications in circuit QED. The first is elimination of frequency crowding between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.
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Submitted 21 February, 2023;
originally announced February 2023.
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Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors
Authors:
T. Stavenga,
L. DiCarlo
Abstract:
Quantum hardware based on circuit quantum electrodynamics makes extensive use of airbridges to suppress unwanted modes of wave propagation in coplanar-waveguide transmission lines. Airbridges also provide an interconnect enabling transmission lines to cross. Traditional airbridge fabrication produces a curved profile by reflowing resist at elevated temperature prior to metallization. The elevated…
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Quantum hardware based on circuit quantum electrodynamics makes extensive use of airbridges to suppress unwanted modes of wave propagation in coplanar-waveguide transmission lines. Airbridges also provide an interconnect enabling transmission lines to cross. Traditional airbridge fabrication produces a curved profile by reflowing resist at elevated temperature prior to metallization. The elevated temperature can affect the coupling energy and even yield of pre-fabricated Josephson elements of superconducting qubits, tuneable couplers and resonators. We employ grayscale lithography in place of reflow to reduce the peak airbridge processing temperature from $200$ to $150^\circ\mathrm{C}$, showing a substantial yield increase of transmon qubits with Josephson elements realized using Al-contacted InAs nanowires.
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Submitted 10 January, 2023;
originally announced January 2023.
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Evolution of Nanowire Transmons and Their Quantum Coherence in Magnetic Field
Authors:
F. Luthi,
T. Stavenga,
O. W. Enzing,
A. Bruno,
C. Dickel,
N. K. Langford,
M. A. Rol,
T. S. Jespersen,
J. Nygard,
P. Krogstrup,
L. DiCarlo
Abstract:
We present an experimental study of nanowire transmons at zero and applied in-plane magnetic field. With Josephson non-linearities provided by the nanowires, our qubits operate at higher magnetic fields than standard transmons. Nanowire transmons exhibit coherence up to 70 mT, where the induced superconducting gap in the nanowire closes. We demonstrate that on-chip charge noise coupling to the Jos…
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We present an experimental study of nanowire transmons at zero and applied in-plane magnetic field. With Josephson non-linearities provided by the nanowires, our qubits operate at higher magnetic fields than standard transmons. Nanowire transmons exhibit coherence up to 70 mT, where the induced superconducting gap in the nanowire closes. We demonstrate that on-chip charge noise coupling to the Josephson energy plays a dominant role in the qubit dephasing. This takes the form of strongly-coupled two-level systems switching on 100 ms timescales and a more weakly coupled background producing $1/f$ noise. Several observations, including the field dependence of qubit energy relaxation and dephasing, are not fully understood, inviting further experimental investigation and theory. Using nanowires with a thinner superconducting shell will enable operation of these circuits up to 0.5 T, a regime relevant for topological quantum computation.
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Submitted 21 November, 2017;
originally announced November 2017.
