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Scalable and Robust Beam Sha** Using Apodized Fish-bone Grating Couplers
Authors:
Chad Ropp,
Dhriti Maurya,
Alexander Yulaev,
Daron Westly,
Gregory Simelgor,
Vladimir Aksyuk
Abstract:
Efficient power coupling between on-chip guided and free-space optical modes requires precision spatial mode matching with apodized grating couplers. Yet, grating apodizations are often limited by the minimum feature size of the fabrication approach. This is especially challenging when small feature sizes are required to fabricate gratings at short wavelengths or to achieve weakly scattered light…
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Efficient power coupling between on-chip guided and free-space optical modes requires precision spatial mode matching with apodized grating couplers. Yet, grating apodizations are often limited by the minimum feature size of the fabrication approach. This is especially challenging when small feature sizes are required to fabricate gratings at short wavelengths or to achieve weakly scattered light for large-area gratings. Here, we demonstrate a fish-bone grating coupler for precision beam sha** and the generation of millimeter-scale beams at 461 nm wavelength. Our design decouples the minimum feature size from the minimum achievable optical scattering strength, allowing smooth turn-on and continuous control of the emission. Our approach is compatible with commercial foundry photolithography and has reduced sensitivity to both the resolution and the variability of the fabrication approach compared to subwavelength meta-gratings, which often require electron beam lithography.
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Submitted 15 September, 2023;
originally announced September 2023.
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Integrated Buried Heaters for Efficient Spectral Control of Air-Clad Microresonator Frequency Combs
Authors:
Gregory Moille,
Daron Westly,
Edgar F. Perez,
Meredith Metzler,
Gregory Simelgor,
Kartik Srinivasan
Abstract:
Integrated heaters are a basic ingredient within the photonics toolbox, in particular for microresonator frequency tuning through the thermo-refractive effect. Resonators that are fully embedded in a solid cladding (typically SiO\textsubscript{2}) allow for straightforward lossless integration of heater elements. However, air-clad resonators, which are of great interest for short wavelength disper…
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Integrated heaters are a basic ingredient within the photonics toolbox, in particular for microresonator frequency tuning through the thermo-refractive effect. Resonators that are fully embedded in a solid cladding (typically SiO\textsubscript{2}) allow for straightforward lossless integration of heater elements. However, air-clad resonators, which are of great interest for short wavelength dispersion engineering and direct interfacing with atomic/molecular systems, do not usually have similarly low loss and efficient integrated heater integration through standard fabrication. Here, we develop a new approach in which the integrated heater is embedded in SiO$_2$ below the waveguiding layer, enabling more efficient heating and more arbitrary routing of the heater traces than possible in a lateral configuration. We incorporate these buried heaters within a stoichiometric Si$_3$N$_4$ process flow that includes high-temperature ($>$1000~$^\circ$C) annealing. Microring resonators with a 1~THz free spectral range and quality factors near 10$^6$ are demonstrated, and the resonant modes are tuned by nearly 1.5~THz, a 5$\times$ improvement compared to equivalent devices with lateral heaters\greg{.} Finally, we demonstrate broadband dissipative Kerr soliton generation in this platform, and show how the heaters can be utilized to aid in bringing relevant lock frequencies within a detectable range.
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Submitted 4 October, 2022;
originally announced October 2022.
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Impact of Stoichiometric Silicon Nitride Growth Conditions on Dispersion Engineering of Broadband Microresonator Frequency Combs
Authors:
Gregory Moille,
Daron Westly,
Gregory Simelgor,
Kartik Srinivasan
Abstract:
Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributi…
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Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributions from both material refractive index dispersion and geometric confinement. Here, we show that modifications to the LPCVD growth conditions, specifically the ratio of the gaseous precursors, has a significant impact on material dispersion and hence the overall microresonator dispersion. In contrast to the many efforts focused on comparison between Si-rich films and stoichiometric (Si$_3$N$_4$) films, here we entirely focus on films that are within the nominally stoichiometric growth regime. We further show that microresonator geometric dispersion can be tuned to compensate for changes in the material dispersion.
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Submitted 7 September, 2021;
originally announced September 2021.
