Oxide-mediated self-limiting recovery of field effect mobility in plasma-treated MoS$_2$
Authors:
Jakub Jadwiszczak,
Colin O'Callaghan,
Yangbo Zhou,
Daniel S. Fox,
Eamonn Weitz,
Darragh Keane,
Ian O'Reilly,
Clive Downing,
Aleksey Shmeliov,
Pierce Maguire,
John J. Gough,
Cormac McGuinness,
Mauro S. Ferreira,
A. Louise Bradley,
John J. Boland,
Valeria Nicolosi,
Hongzhou Zhang
Abstract:
Precise tunability of electronic properties of 2D nanomaterials is a key goal of current research in this field of materials science. Chemical modification of layered transition metal dichalcogenides leads to the creation of heterostructures of low-dimensional variants of these materials. In particular, the effect of oxygen-containing plasma treatment on molybdenum disulfide (MoS$_2$) has long bee…
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Precise tunability of electronic properties of 2D nanomaterials is a key goal of current research in this field of materials science. Chemical modification of layered transition metal dichalcogenides leads to the creation of heterostructures of low-dimensional variants of these materials. In particular, the effect of oxygen-containing plasma treatment on molybdenum disulfide (MoS$_2$) has long been thought to be detrimental to the electrical performance of the material. Here we show that the mobility and conductivity of MoS$_2$ can be precisely controlled and improved by systematic exposure to oxygen:argon plasma, and characterise the material utilising advanced spectroscopy and microscopy. Through complementary theoretical modelling which confirms conductivity enhancement, we uncover the role of a two-dimensional phase of molybdenum trioxide (2D-MoO$_3$) in improving the electronic behaviour of the material. Deduction of the beneficial role of MoO$_3$ will serve to open the field to new approaches with regard to the tunability of 2D semiconductors by their low-dimensional oxides in nano-modified heterostructures.
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Submitted 26 June, 2017;
originally announced June 2017.