Showing 1–1 of 1 results for author: Shannon, S C

Electron neutral collision frequency measurement with the hairpin resonator probe

Authors: David J Peterson, Philip Kraus, Thai Cheng Chua, Lynda Larson, Steven C Shannon

Abstract: Electron neutral collision frequency is measured using both grounded and floating hairpin resonator probes in a 27 MHz parallel plate capacitively coupled plasma (CCP). Operating conditions are 0.1-2 Torr (13.3-267 Pa) in Ar, He, and Ar-He gas mixtures. The method treats the hairpin probe as a two wire transmission line immersed in a dielectric medium. A minimization method is applied during the p… ▽ More Electron neutral collision frequency is measured using both grounded and floating hairpin resonator probes in a 27 MHz parallel plate capacitively coupled plasma (CCP). Operating conditions are 0.1-2 Torr (13.3-267 Pa) in Ar, He, and Ar-He gas mixtures. The method treats the hairpin probe as a two wire transmission line immersed in a dielectric medium. A minimization method is applied during the pressure and sheath correction process by swee** over assumed collision frequencies in order to obtain the measured collision frequency. Results are compared to hybrid plasma equipment module (HPEM) simulations and show good agreement. △ Less

Submitted 27 March, 2017; originally announced March 2017.

Comments: 8 pages, 7 figures, Submitted to Plasma Sources Science and Technology

Journal ref: 2017 Plasma Sources Sci. Technol. 26 095002