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Ultrasonic Delamination Based Adhesion Testing for High-Throughput Assembly of van der Waals Heterostructures
Authors:
Tara Peña,
Jewel Holt,
Arfan Sewaket,
Stephen M. Wu
Abstract:
Two-dimensional (2D) materials assembled into van der Waals (vdW) heterostructures contain unlimited combinations of mechanical, optical, and electrical properties that can be harnessed for potential device applications. Critically, these structures require control over interfacial adhesion in order for them to be constructed and to have enough integrity to survive industrial fabrication processes…
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Two-dimensional (2D) materials assembled into van der Waals (vdW) heterostructures contain unlimited combinations of mechanical, optical, and electrical properties that can be harnessed for potential device applications. Critically, these structures require control over interfacial adhesion in order for them to be constructed and to have enough integrity to survive industrial fabrication processes upon their integration. Here, we promptly determine the quality of adhesion of various exfoliated 2D materials on conventional SiO$_{2}$/Si substrates using ultrasonic delamination threshold testing. This test allows us to quickly infer relative substrate adhesion based on the percent area of 2D flakes that survive a fixed time in an ultrasonic bath, allowing for control over process parameters that yield high or poor adhesion. We leverage this control of adhesion to optimize the vdW heterostructure assembly process, where we show that samples with high or low substrate adhesion relative to each other can be used selectively to construct high-throughput vdW stacks. Instead of tuning the adhesion of polymer stamps to 2D materials with constant 2D-substrate adhesion, we tune the 2D-substrate adhesion with constant stamp adhesion to 2D materials. The polymer stamps may be reused without any polymer melting steps, thus avoiding high temperatures (<120°C) and allowing for high-throughput production. We show that this procedure can be used to create high-quality 2D twisted bilayer graphene on SiO$_{2}$/Si, characterized with atomic force microscopy and Raman spectroscopic map**, as well as low-angle twisted bilayer WSe$_{2}$ on h-BN/SiO$_{2}$/Si, where we show direct real-space visualization of moiré reconstruction with tilt angle-dependent scanning electron microscopy.
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Submitted 9 December, 2022; v1 submitted 7 October, 2022;
originally announced October 2022.
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Moiré Engineering in 2D Heterostructures with Process-Induced Strain
Authors:
Tara Peña,
Aditya Dey,
Shoieb A. Chowdhury,
Ahmad Azizimanesh,
Wenhui Hou,
Arfan Sewaket,
Carla L. Watson,
Hesam Askari,
Stephen M. Wu
Abstract:
We report deterministic control over moiré superlattice interference pattern in twisted bilayer graphene by implementing designable device-level heterostrain with process-induced strain engineering, a widely used technique in industrial silicon nanofabrication processes. By depositing stressed thin films onto our twisted bilayer graphene samples, heterostrain magnitude and strain directionality ca…
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We report deterministic control over moiré superlattice interference pattern in twisted bilayer graphene by implementing designable device-level heterostrain with process-induced strain engineering, a widely used technique in industrial silicon nanofabrication processes. By depositing stressed thin films onto our twisted bilayer graphene samples, heterostrain magnitude and strain directionality can be controlled by stressor film force (film stress x film thickness) and patterned stressor geometry, respectively. We examine strain and moiré interference with Raman spectroscopy through in-plane and moiré-activated phonon mode shifts. Results support systematic C$_{3}$ rotational symmetry breaking and tunable periodicity in moiré superlattices under the application of uniaxial or biaxial heterostrain. Experimental results are validated by molecular statics simulations and density functional theory based first principles calculations. This provides a method to not only tune moiré interference without additional twisting, but also allows for a systematic pathway to explore different van der Waals based moiré superlattice symmetries by deterministic design.
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Submitted 3 April, 2023; v1 submitted 7 October, 2022;
originally announced October 2022.
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Strain Engineering 2D MoS$_{2}$ with Thin Film Stress Cap** Layers
Authors:
Tara Peña,
Shoieb A. Chowdhury,
Ahmad Azizimanesh,
Arfan Sewaket,
Hesam Askari,
Stephen M. Wu
Abstract:
We demonstrate a method to induce tensile and compressive strain into two-dimensional transition metal dichalcogenide (TMDC) MoS$_{2}$ via the deposition of stressed thin films to encapsulate exfoliated flakes. With this technique we can directly engineer MoS$_{2}$ strain magnitude by changing deposited thin film stress, therefore allowing variable strain to be applied on a flake-to-flake level. T…
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We demonstrate a method to induce tensile and compressive strain into two-dimensional transition metal dichalcogenide (TMDC) MoS$_{2}$ via the deposition of stressed thin films to encapsulate exfoliated flakes. With this technique we can directly engineer MoS$_{2}$ strain magnitude by changing deposited thin film stress, therefore allowing variable strain to be applied on a flake-to-flake level. These thin film stressors are analogous to SiN$_{x}$ based stressors implemented in industrial CMOS processes to enhance Si mobility, suggesting that our concept is highly scalable and may be applied for large-scale integration of strain engineered TMDC devices. We choose optically transparent stressors to allow us to probe MoS$_{2}$ strain through Raman spectroscopy. Combining thickness dependent analyses of Raman peak shifts in MoS$_{2}$ with atomistic simulations, we can explore layer-by-layer strain transfer. MoS$_{2}$ on conventional substrates (SiO$_{2}$, MgO) show strain transfer into the top two layers of multilayer flakes with limited strain transfer to monolayers due to substrate adhesion. To mitigate this limitation, we also explore stressors on van der Waals heterostructures constructed of monolayer (1L) MoS$_{2}$ on hexagonal boron nitride (h-BN). This concept frees the 1L-MoS$_{2}$ allowing for a 0.85$\%$ strain to be applied to the monolayer with a corresponding strain induced bandgap change of 75 meV. By using thin films with higher stress, strain may be engineered to be even higher. Various stressors and deposition methods are considered, showing a stressor material independent transfer of strain that only depends on stressor film force with negligible defects induced into MoS$_{2}$ when thermal evaporation is used.
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Submitted 14 July, 2021; v1 submitted 22 September, 2020;
originally announced September 2020.
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Strain-Based Room-Temperature Non-Volatile MoTe$_2$ Ferroelectric Phase Change Transistor
Authors:
Wenhui Hou,
Ahmad Azizimanesh,
Arfan Sewaket,
Tara Peña,
Carla Watson,
Ming Liu,
Hesam Askari,
Stephen M. Wu
Abstract:
The primary mechanism of operation of almost all transistors today relies on electric-field effect in a semiconducting channel to tune its conductivity from the conducting 'on'-state to a non-conducting 'off'-state. As transistors continue to scale down to increase computational performance, physical limitations from nanoscale field-effect operation begin to cause undesirable current leakage that…
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The primary mechanism of operation of almost all transistors today relies on electric-field effect in a semiconducting channel to tune its conductivity from the conducting 'on'-state to a non-conducting 'off'-state. As transistors continue to scale down to increase computational performance, physical limitations from nanoscale field-effect operation begin to cause undesirable current leakage that is detrimental to the continued advancement of computing. Using a fundamentally different mechanism of operation, we show that through nanoscale strain engineering with thin films and ferroelectrics (FEs) the transition metal dichalcogenide (TMDC) MoTe$_2$ can be reversibly switched with electric-field induced strain between the 1T'-MoTe$_2$ (semimetallic) phase to a semiconducting MoTe$_2$ phase in a field effect transistor geometry. This alternative mechanism for transistor switching sidesteps all the static and dynamic power consumption problems in conventional field-effect transistors (FETs). Using strain, we achieve large non-volatile changes in channel conductivity (G$_{on}$/G$_{off}$~10$^7$ vs. G$_{on}$/G$_{off}$~0.04 in the control device) at room temperature. Ferroelectric devices offer the potential to reach sub-ns nonvolatile strain switching at the attojoule/bit level, having immediate applications in ultra-fast low-power non-volatile logic and memory while also transforming the landscape of computational architectures since conventional power, speed, and volatility considerations for microelectronics may no longer exist.
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Submitted 17 May, 2019;
originally announced May 2019.