Magnetron Sputter deposition of a 48-member cuprate superconductor library: Bi2Sr2YxCa1-xCu2Oy (0.5 <= x <= 1) linearly varying in steps of 0.01
Authors:
R. J. Sanderson,
K. C. Hewitt
Abstract:
Using magnetron sputtering, a spatial composition spread approach was applied successfully to obtain 48-member libraries of the Bi2Sr2YxCa1-xCu2Oy (0.5<= x <=1)cuprate superconducting system. The libraries of each system were deposited onto (100) single crystal MgO, mounted on a water cooled rotating table, using two targets: the antiferromagnetic insulator Bi2Sr2YCu2Oy (P=98 W RF) and the hole…
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Using magnetron sputtering, a spatial composition spread approach was applied successfully to obtain 48-member libraries of the Bi2Sr2YxCa1-xCu2Oy (0.5<= x <=1)cuprate superconducting system. The libraries of each system were deposited onto (100) single crystal MgO, mounted on a water cooled rotating table, using two targets: the antiferromagnetic insulator Bi2Sr2YCu2Oy (P=98 W RF) and the hole doped superconductor Bi2Sr2CaCu2Oy (P=44 W DC). A low chamber pressure of 0.81 mTorr argon is used to reduce scattering by the process gas. To minimize oxygen resputtering a substrate bias of -20 V was used as well as a process gas free of oxygen. A rapid thermal processor is used to post-anneal the amorphous deposited films. A step annealing regime was used, with a ramp rate of 5 degrees C/s for heating and cooling, with a first plateau at 780 C held for 200 s, and a second at 875 C held for 480 s. X-ray diffraction reveals that the films develop crystalline order with the c-axis lattice parameter contracting linearly from 30.55 Angstroms (x=0.5) to 30.24 Angstroms (x=1.0) with increasing Y-content, consistent with bulk values. The crystallized films are polycrystalline, develo** preferred orientation (c-axis parallel to the substrate) for thinner members of the library. There is a change of 0.01 in do** per library member which will enable further studies to densely map phase space.
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Submitted 1 February, 2007;
originally announced February 2007.
Stoichiometry control of magnetron sputtered Bi$_2$Sr$_2$Ca$_{1-x}$Y$_x$Cu$_2$O$_y$ (0$\le$x$\le$0.5) thin film, composition spread libraries: Substrate bias and gas density factors
Authors:
R. J. Sanderson,
K. C. Hewitt
Abstract:
A magnetron sputtering method for the production of thin-film libraries with a spatially varying composition, x, in Bi2Sr2Ca1-xYxCu2Oy (0<=x<=0.5) has been developed. Two targets with a composition of Bi2Sr2YCu2O_{8.5 + δ} and Bi_2Sr_2CaCu_2O_{8 + δ} are co-sputtered with appropriate masks. The target masks produce a linear variation in opposite, but co-linear radial direction, and the rotation…
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A magnetron sputtering method for the production of thin-film libraries with a spatially varying composition, x, in Bi2Sr2Ca1-xYxCu2Oy (0<=x<=0.5) has been developed. Two targets with a composition of Bi2Sr2YCu2O_{8.5 + δ} and Bi_2Sr_2CaCu_2O_{8 + δ} are co-sputtered with appropriate masks. The target masks produce a linear variation in opposite, but co-linear radial direction, and the rotation speed of the substrate table is sufficient to intimately mix the atoms. EDS/WDS composition studies of the films show a depletion of Sr and Bi that is due to oxygen anion resputtering. The depletion is most pronounced at the centre of the film (i.e. on-axis with the target) and falls off symmetrically to either side of the 75 mm substrate. At either edge of the film the stoichiometry matches the desired ratios. Using a 12 mTorr process gas of argon and oxygen in a 2:1 ratio, the strontium depletion is corrected. The bismuth depletion is eliminated by employing a rotating carbon brush apparatus which supplies a -20 V DC bias to the sample substrate. The negative substrate bias has been used successfully with an increased chamber pressure to eliminate the resputtering effect across the film. The result is a thin film composition spread library with the desired stoichiometry.
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Submitted 18 April, 2005;
originally announced April 2005.
