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Implantable silicon neural probes with nanophotonic phased arrays for single-lobe beam steering
Authors:
Fu-Der Chen,
Ankita Sharma,
Tianyuan Xue,
Youngho Jung,
Alperen Govdeli,
Jason C. C. Mak,
Homeira Moradi Chameh,
Mandana Movahed,
Michael G. K. Brunk,
Xianshu Luo,
Hongyao Chua,
Patrick Guo-Qiang Lo,
Taufik A Valiante,
Wesley D. Sacher,
Joyce K. S. Poon
Abstract:
In brain activity map** experiments using optogenetics, patterned illumination is crucial for deterministic and localized stimulation of neurons. However, due to optical scattering in brain tissue, light-emitting implantable devices are needed to bring precise patterned illumination to deep brain regions. A promising solution is silicon neural probes with integrated nanophotonic circuits that fo…
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In brain activity map** experiments using optogenetics, patterned illumination is crucial for deterministic and localized stimulation of neurons. However, due to optical scattering in brain tissue, light-emitting implantable devices are needed to bring precise patterned illumination to deep brain regions. A promising solution is silicon neural probes with integrated nanophotonic circuits that form tailored beam emission patterns without lenses. Here, we demonstrate neural probes with grating-based light emitters that generate a single steerable light beam across $> 60\%$ of the steering range with $\ge 4$ dB of background suppression for optogenetic photostimulation. The light emitters, optimized for blue or amber light, combine end-fire optical phased arrays with slab gratings to suppress higher-order sidelobes.
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Submitted 3 April, 2024;
originally announced April 2024.
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Implantable Photonic Neural Probes with Out-of-Plane Focusing Grating Emitters
Authors:
Tianyuan Xue,
Andrei Stalmashonak,
Fu-Der Chen,
Peisheng Ding,
Xianshu Luo,
Hongyao Chua,
Guo-Qiang Lo,
Wesley D. Sacher,
Joyce K. S. Poon
Abstract:
We have designed, fabricated, and characterized implantable silicon neural probes with nanophotonic grating emitters that focus the emitted light at a specified distance above the surface of the probe for spatially precise optogenetic targeting of neurons. Using the holographic principle, we designed gratings for wavelengths of 488 and 594 nm, targeting the excitation spectra of the optogenetic ac…
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We have designed, fabricated, and characterized implantable silicon neural probes with nanophotonic grating emitters that focus the emitted light at a specified distance above the surface of the probe for spatially precise optogenetic targeting of neurons. Using the holographic principle, we designed gratings for wavelengths of 488 and 594 nm, targeting the excitation spectra of the optogenetic actuators Channelrhodopsin-2 and Chrimson, respectively. The measured optical emission pattern of these emitters in non-scattering medium and tissue matched well with simulations. To our knowledge, this is the first report of focused spots with the size scale of a neuron soma in brain tissue formed from implantable neural probes.
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Submitted 10 January, 2024; v1 submitted 9 January, 2024;
originally announced January 2024.
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Room-temperature waveguide-coupled silicon single-photon avalanche diodes
Authors:
Alperen Govdeli,
John N. Straguzzi,
Zheng Yong,
Yiding Lin,
Xianshu Luo,
Hongyao Chua,
Guo-Qiang Lo,
Wesley D. Sacher,
Joyce K. S. Poon
Abstract:
Single photon detection is important for a wide range of low-light applications, including quantum information processing, spectroscopy, and light detection and ranging (LiDAR). A key challenge in these applications has been to integrate single-photon detection capability into photonic circuits for the realization of complex photonic microsystems. Short-wavelength ($λ$ < 1.1 $μ$m) integrated photo…
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Single photon detection is important for a wide range of low-light applications, including quantum information processing, spectroscopy, and light detection and ranging (LiDAR). A key challenge in these applications has been to integrate single-photon detection capability into photonic circuits for the realization of complex photonic microsystems. Short-wavelength ($λ$ < 1.1 $μ$m) integrated photonics platforms that use silicon (Si) as photodetectors offer the opportunity to achieve single-photon avalanche diodes (SPADs) that operate at or near room temperature. Here, we report the first waveguide-coupled Si SPAD. The device is monolithically integrated in a Si photonic platform and operates in the visible spectrum. The device exhibited a single photon detection efficiency of > 6% for wavelengths of 488 nm and 532 nm with an excess voltage less than 20% of the breakdown voltage. The dark count rate was below 100 kHz at room temperature, with the possibility of improving by approximately 35% by reducing the temperature to -5$^{\circ}$C.
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Submitted 25 January, 2024; v1 submitted 15 October, 2023;
originally announced October 2023.
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Implantable Photonic Neural Probes with 3D-Printed Microfluidics and Applications to Uncaging
Authors:
Xin Mu,
Fu-Der Chen,
Ka My Dang,
Michael G. K. Brunk,
Jianfeng Li,
Hannes Wahn,
Andrei Stalmashonak,
Peisheng Ding,
Xianshu Luo,
Hongyao Chua,
Guo-Qiang Lo,
Joyce K. S. Poon,
Wesley D. Sacher
Abstract:
Advances in chip-scale photonic-electronic integration are enabling a new generation of foundry-manufacturable implantable silicon neural probes incorporating nanophotonic waveguides and microelectrodes for optogenetic stimulation and electrophysiological recording in neuroscience research. Further extending neural probe functionalities with integrated microfluidics is a direct approach to achieve…
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Advances in chip-scale photonic-electronic integration are enabling a new generation of foundry-manufacturable implantable silicon neural probes incorporating nanophotonic waveguides and microelectrodes for optogenetic stimulation and electrophysiological recording in neuroscience research. Further extending neural probe functionalities with integrated microfluidics is a direct approach to achieve neurochemical injection and sampling capabilities. In this work, we use two-photon polymerization 3D printing to integrate microfluidic channels onto photonic neural probes, which include silicon nitride nanophotonic waveguides and grating emitters. The customizability of 3D printing enables a unique geometry of microfluidics that conforms to the shape of each neural probe, enabling integration of microfluidics with a variety of existing neural probes while avoiding the complexities of monolithic microfluidics integration. We demonstrate the photonic and fluidic functionalities of the neural probes via fluorescein injection in agarose gel and photoloysis of caged fluorescein in solution and in flxed brain tissue.
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Submitted 25 April, 2023; v1 submitted 20 April, 2023;
originally announced April 2023.
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Microcantilever-integrated photonic circuits for broadband laser beam scanning
Authors:
Saeed Sharif Azadeh,
Jason C. C. Mak,
Hong Chen,
Xianshu Luo,
Fu-Der Chen,
Hongyao Chua,
Frank Weiss,
Christopher Alexiev,
Andrei Stalmashonak,
Youngho Jung,
John N. Straguzzi,
Guo-Qiang Lo,
Wesley D. Sacher,
Joyce K. S. Poon
Abstract:
Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional map**, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint,…
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Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional map**, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm$^2$ areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.
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Submitted 11 October, 2022; v1 submitted 25 July, 2022;
originally announced July 2022.
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Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform
Authors:
Yiding Lin,
Zheng Yong,
Xianshu Luo,
Saeed Sharif Azadeh,
Jared Mikkelsen,
Ankita Sharma,
Hong Chen,
Jason C. C. Mak,
Patrick G. -Q. Lo,
Wesley D. Sacher,
Joyce K. S. Poon
Abstract:
Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report the first silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visib…
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Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report the first silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of > 60% across a record wavelength span from $λ$ ~400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 $\pm$ 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.
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Submitted 21 September, 2022; v1 submitted 22 March, 2022;
originally announced March 2022.
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Power-Efficient Silicon Nitride Thermo-Optic Phase Shifters for Visible Light
Authors:
Zheng Yong,
Hong Chen,
Xianshu Luo,
Alperen Govdeli,
Hongyao Chua,
Saeed S. Azadeh,
Andrei Stalmashonak,
Guo-Qiang Lo,
Joyce K. S. Poon,
Wesley D. Sacher
Abstract:
We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide design. The devices were fabricated on 200-mm silicon wafers using deep ultraviolet lithography as part of an active visible-light integrated photonics platform. T…
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We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide design. The devices were fabricated on 200-mm silicon wafers using deep ultraviolet lithography as part of an active visible-light integrated photonics platform. The measured power consumption to achieve a $π$ phase shift (averaged over multiple devices) was 0.78, 0.93, 1.09, and 1.20 mW at wavelengths of 445, 488, 532, and 561 nm, respectively. The phase shifters were integrated into Mach-Zehnder interferometer switches, and $10- 90$\% rise(fall) times of about 570(590) $μ$s were measured.
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Submitted 15 November, 2021;
originally announced November 2021.
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Optical phased array neural probes for beam-steering in brain tissue
Authors:
Wesley D. Sacher,
Fu-Der Chen,
Homeira Moradi-Chameh,
Xinyu Liu,
Ilan Felts Almog,
Thomas Lordello,
Michael Chang,
Azadeh Naderian,
Trevor M. Fowler,
Eran Segev,
Tianyuan Xue,
Sara Mahallati,
Taufik A. Valiante,
Laurent C. Moreaux,
Joyce K. S. Poon,
Michael L. Roukes
Abstract:
Implantable silicon neural probes with integrated nanophotonic waveguides can deliver patterned dynamic illumination into brain tissue at depth. Here, we introduce neural probes with integrated optical phased arrays and demonstrate optical beam steering in vitro. Beam formation in brain tissue was simulated and characterized. The probes were used for optogenetic stimulation and calcium imaging.
Implantable silicon neural probes with integrated nanophotonic waveguides can deliver patterned dynamic illumination into brain tissue at depth. Here, we introduce neural probes with integrated optical phased arrays and demonstrate optical beam steering in vitro. Beam formation in brain tissue was simulated and characterized. The probes were used for optogenetic stimulation and calcium imaging.
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Submitted 10 August, 2021;
originally announced August 2021.
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Integrated Silicon Photonic Transmitter for Polarization-Encoded Quantum Key Distribution
Authors:
Chaoxuan Ma,
Wesley D. Sacher,
Zhiyuan Tang,
Jared C. Mikkelsen,
Yisu Yang,
Feihu Xu,
Hoi-Kwong Lo,
Joyce K. S. Poon
Abstract:
We present a silicon optical transmitter for polarization-encoded quantum key distribution (QKD). The chip was fabricated in a standard silicon photonic foundry process and integrated a pulse generator, intensity modulator, variable optical attenuator, and polarization modulator in a 1.3 mm $\times$ 3 mm die area. The devices in the photonic circuit meet the requirements for QKD. The transmitter w…
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We present a silicon optical transmitter for polarization-encoded quantum key distribution (QKD). The chip was fabricated in a standard silicon photonic foundry process and integrated a pulse generator, intensity modulator, variable optical attenuator, and polarization modulator in a 1.3 mm $\times$ 3 mm die area. The devices in the photonic circuit meet the requirements for QKD. The transmitter was used in a proof-of-concept demonstration of the BB84 QKD protocol over a 5 km long fiber link.
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Submitted 14 June, 2016;
originally announced June 2016.
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Automatic Resonance Alignment of High-Order Microring Filters
Authors:
Jason C. C. Mak,
Wesley D. Sacher,
Tianyuan Xue,
Jared C. Mikkelsen,
Zheng Yong,
Joyce K. S. Poon
Abstract:
Automatic resonance alignment tuning is performed in high-order series coupled microring filters using a feedback system. By inputting only a reference wavelength, a filter is tuned such that passband ripples are dramatically reduced compared to the initial detuned state and the passband becomes centered at the reference. The method is tested on 5th order microring filters fabricated in a standard…
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Automatic resonance alignment tuning is performed in high-order series coupled microring filters using a feedback system. By inputting only a reference wavelength, a filter is tuned such that passband ripples are dramatically reduced compared to the initial detuned state and the passband becomes centered at the reference. The method is tested on 5th order microring filters fabricated in a standard silicon photonics foundry process. Repeatable tuning is demonstrated for filters on multiple dies from the wafer and for arbitrary reference wavelengths within the free spectral range of the microrings.
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Submitted 8 July, 2015;
originally announced July 2015.
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Breaking the cavity linewidth limit of resonant optical modulators
Authors:
Wesley D. Sacher,
William M. J. Green,
Solomon Assefa,
Tymon Barwicz,
Huapu Pan,
Steven M. Shank,
Yurii A. Vlasov,
Joyce K. S. Poon
Abstract:
Microring optical modulators are being explored extensively for energy-efficient photonic communication networks in future high-performance computing systems and microprocessors, because they can significantly reduce the power consumption of optical transmitters via the resonant circulation of light. However, resonant modulators have traditionally suffered from a trade-off between their power cons…
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Microring optical modulators are being explored extensively for energy-efficient photonic communication networks in future high-performance computing systems and microprocessors, because they can significantly reduce the power consumption of optical transmitters via the resonant circulation of light. However, resonant modulators have traditionally suffered from a trade-off between their power consumption and maximum operation bit rate, which were thought to depend oppositely upon the cavity linewidth. Here, we break this linewidth limitation using a silicon microring. By controlling the rate at which light enters and exits the microring, we demonstrate modulation free of the parasitic cavity linewidth limitations at up to 40 GHz, more than 6x the cavity linewidth. The device operated at 28 Gb/s using single-ended drive signals less than 1.5 V. The results show that high-Q resonant modulators can be designed to be simultaneously low-power and high-speed, features which are mutually incompatible in typical resonant modulators studied to date.
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Submitted 22 June, 2012;
originally announced June 2012.
