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Planar-type silicon thermoelectric generator with phononic nanostructures for 100 μW energy harvesting
Authors:
Ryoto Yanagisawa,
Sota Koike,
Tomoki Nawae,
Naohito Tsujii,
Yanan Wang,
Takao Mori,
Patrick Ruther,
Oliver Paul,
Yoshifumi Yoshida,
Junichi Harashima,
Takashi Kinumura,
Yuta Inada,
Masahiro Nomura
Abstract:
Energy harvesting is essential for the internet-of-things networks where a tremendous number of sensors require power. Thermoelectric generators (TEGs), especially those based on silicon (Si), are a promising source of clean and sustainable energy for these sensors. However, the reported performance of planar-type Si TEGs never exceeded power factors of 0.1 $μ Wcm^{-2} K^{-2}$ due to the poor ther…
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Energy harvesting is essential for the internet-of-things networks where a tremendous number of sensors require power. Thermoelectric generators (TEGs), especially those based on silicon (Si), are a promising source of clean and sustainable energy for these sensors. However, the reported performance of planar-type Si TEGs never exceeded power factors of 0.1 $μ Wcm^{-2} K^{-2}$ due to the poor thermoelectric performance of Si and the suboptimal design of the devices. Here, we report a planar-type Si TEG with a power factor of 1.3 $μ Wcm^{-2} K^{-2}$ around room temperature. The increase in thermoelectric performance of Si by nanostructuring based on the phonon-glass electron-crystal concept and optimized three-dimensional heat-guiding structures resulted in a significant power factor. In-field testing demonstrated that our Si TEG functions as a 100-$μW$-class harvester. This result is an essential step toward energy harvesting with a low-environmental load and cost-effective material with high throughput, a necessary condition for energy-autonomous sensor nodes for the trillion sensors universe.
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Submitted 21 July, 2023;
originally announced July 2023.
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New approaches for CMOS-based devices for large-scale neural recording
Authors:
Patrick Ruther,
Oliver Paul
Abstract:
Extracellular, large scale in vivo recording of neural activity is mandatory for elucidating the interaction of neurons within large neural networks at the level of their single unit activity. Technological achievements in MEMS-based multichannel electrode arrays offer electrophysiological recording capabilities that go far beyond those of classical wire electrodes. Despite their impressive channe…
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Extracellular, large scale in vivo recording of neural activity is mandatory for elucidating the interaction of neurons within large neural networks at the level of their single unit activity. Technological achievements in MEMS-based multichannel electrode arrays offer electrophysiological recording capabilities that go far beyond those of classical wire electrodes. Despite their impressive channel counts, recording systems with modest interconnection overhead have been demonstrated thanks to the hybrid integration of CMOS circuitry for signal preprocessing and data handling. The number of addressable channels is increased even further by a switch matrix for electrode selection co-integrated along the slender probe shafts. When realized by IC fabrication technologies, these probes offer highest recording site densities along the entire shaft length.
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Submitted 30 June, 2017;
originally announced June 2017.
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Chronic neural probe for simultaneous recording of single-unit, multi-unit, and local field potential activity from multiple brain sites
Authors:
F Pothof,
L Bonini,
M Lanzilotto,
A Livi,
L Fogassi,
G A Orban,
O Paul,
P Ruther
Abstract:
Drug resistant focal epilepsy can be treated by resecting the epileptic focus requiring a precise focus localization using stereoelectroencephalography (SEEG) probes. As commercial SEEG probes offer only a limited spatial resolution, probes of higher channel count and design freedom enabling the incorporation of macro and microelectrodes would help increasing spatial resolution and thus open new p…
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Drug resistant focal epilepsy can be treated by resecting the epileptic focus requiring a precise focus localization using stereoelectroencephalography (SEEG) probes. As commercial SEEG probes offer only a limited spatial resolution, probes of higher channel count and design freedom enabling the incorporation of macro and microelectrodes would help increasing spatial resolution and thus open new perspectives for investigating mechanisms underlying focal epilepsy and its treatment. This work describes a new fabrication process for SEEG probes with materials and dimensions similar to clinical probes enabling recording single neuron activity at high spatial resolution. Polyimide is used as a biocompatible flexible substrate into which platinum electrodes and leads are...
The resulting probe features match those of clinically approved devices. Tests in saline solution confirmed the probe stability and functionality. Probes were implanted into the brain of one monkey (Macaca mulatta), trained to perform different motor tasks. Suitable configurations including up to 128 electrode sites allow the recording of task-related neuronal signals. Probes with 32 and 64 electrode sites were implanted in the posterior parietal cortex. Local field potentials and multi-unit activity were recorded as early as one hour after implantation. Stable single-unit activity was achieved for up to 26 days after implantation of a 64-channel probe. All recorded signals showed modulation during task execution. With the novel probes it is possible to record stable biologically relevant data over a time span exceeding the usual time needed for epileptic focus localization in human patients. This is the first time that single units are recorded along cylindrical polyimide probes chronically implanted 22 mm deep into the brain of a monkey, which suggests the potential usefulness of this probe for human applications.
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Submitted 19 June, 2017;
originally announced June 2017.
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Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors
Authors:
S. Spinner,
J. Bartholomeyczik,
B. Becker,
M. Doelle,
O. Paul,
I. Polian,
R. Roth,
K. Seitz,
P. Ruther
Abstract:
This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The siliconbased sensor system consists of piezoresistive mechanicalstress transducers integrated in thin membrane hinges supporting a suspended flexible cross structure. The mechanical behavior of the fragile micromechanical structure isana…
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This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The siliconbased sensor system consists of piezoresistive mechanicalstress transducers integrated in thin membrane hinges supporting a suspended flexible cross structure. The mechanical behavior of the fragile micromechanical structure isanalyzed for both static and dynamic load cases. This work demonstrates that the silicon microstructure withstands static forces of 1.16N applied orthogonally to the front-side of the structure. A statistical Weibull analysis of the measured data shows that these values are significantly reduced if the normal force is applied to the back of the sensor. Improvements of the sensor system design for future development cycles are derived from the measurement results.
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Submitted 21 November, 2007;
originally announced November 2007.
