A Cleanroom in a Glovebox
Authors:
Mason J. Gray,
Narendra Kumar,
Ryan O'Connor,
Marcel Hoek,
Erin Sheridan,
Meaghan C. Doyle,
Marisa L. Romanelli,
Gavin B. Osterhoudt,
Yi** Wang,
Vincent Plisson,
Shiming Lei,
Ruidan Zhong,
Bryan Rachmilowitz,
He Zhao,
Hikari Kitadai,
Steven Shepard,
Leslie M. Schoop,
G. D. Gu,
Ilija Zeljkovic,
Xi Ling,
K. S. Burch
Abstract:
The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use t…
▽ More
The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system which allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Connection to a vacuum suitcase is also demonstrated to enable receiving from and transfer to various ultra-high vacuum (UHV) equipment including molecular-beam epitaxy (MBE) and scanning tunneling microscopy (STM).
△ Less
Submitted 27 July, 2020;
originally announced July 2020.
