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Characterisation of analogue Monolithic Active Pixel Sensor test structures implemented in a 65 nm CMOS imaging process
Authors:
Gianluca Aglieri Rinella,
Giacomo Alocco,
Matias Antonelli,
Roberto Baccomi,
Stefania Maria Beole,
Mihail Bogdan Blidaru,
Bent Benedikt Buttwill,
Eric Buschmann,
Paolo Camerini,
Francesca Carnesecchi,
Marielle Chartier,
Yongjun Choi,
Manuel Colocci,
Giacomo Contin,
Dominik Dannheim,
Daniele De Gruttola,
Manuel Del Rio Viera,
Andrea Dubla,
Antonello di Mauro,
Maurice Calvin Donner,
Gregor Hieronymus Eberwein,
Jan Egger,
Laura Fabbietti,
Finn Feindt,
Kunal Gautam
, et al. (69 additional authors not shown)
Abstract:
Analogue test structures were fabricated using the Tower Partners Semiconductor Co. CMOS 65 nm ISC process. The purpose was to characterise and qualify this process and to optimise the sensor for the next generation of Monolithic Active Pixels Sensors for high-energy physics. The technology was explored in several variants which differed by: do** levels, pixel geometries and pixel pitches (10-25…
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Analogue test structures were fabricated using the Tower Partners Semiconductor Co. CMOS 65 nm ISC process. The purpose was to characterise and qualify this process and to optimise the sensor for the next generation of Monolithic Active Pixels Sensors for high-energy physics. The technology was explored in several variants which differed by: do** levels, pixel geometries and pixel pitches (10-25 $μ$m). These variants have been tested following exposure to varying levels of irradiation up to 3 MGy and $10^{16}$ 1 MeV n$_\text{eq}$ cm$^{-2}$. Here the results from prototypes that feature direct analogue output of a 4$\times$4 pixel matrix are reported, allowing the systematic and detailed study of charge collection properties. Measurements were taken both using $^{55}$Fe X-ray sources and in beam tests using minimum ionizing particles. The results not only demonstrate the feasibility of using this technology for particle detection but also serve as a reference for future applications and optimisations.
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Submitted 13 March, 2024;
originally announced March 2024.
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Digital Pixel Test Structures implemented in a 65 nm CMOS process
Authors:
Gianluca Aglieri Rinella,
Anton Andronic,
Matias Antonelli,
Mauro Aresti,
Roberto Baccomi,
Pascal Becht,
Stefania Beole,
Justus Braach,
Matthew Daniel Buckland,
Eric Buschmann,
Paolo Camerini,
Francesca Carnesecchi,
Leonardo Cecconi,
Edoardo Charbon,
Giacomo Contin,
Dominik Dannheim,
Joao de Melo,
Wen**g Deng,
Antonello di Mauro,
Jan Hasenbichler,
Hartmut Hillemanns,
Geun Hee Hong,
Artem Isakov,
Antoine Junique,
Alex Kluge
, et al. (27 additional authors not shown)
Abstract:
The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65 nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Active Pixel Sensors thinned down to 20 to 40 um and bent to form truly cylindrical half barrels. Among the…
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The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65 nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Active Pixel Sensors thinned down to 20 to 40 um and bent to form truly cylindrical half barrels. Among the first critical steps towards the realisation of this detector is to validate the sensor technology through extensive characterisation both in the laboratory and with in-beam measurements. The Digital Pixel Test Structure (DPTS) is one of the prototypes produced in the first sensor submission in this technology and has undergone a systematic measurement campaign whose details are presented in this article.
The results confirm the goals of detection efficiency and non-ionising and ionising radiation hardness up to the expected levels for ALICE ITS3 and also demonstrate operation at +20 C and a detection efficiency of 99% for a DPTS irradiated with a dose of $10^{15}$ 1 MeV n$_{\mathrm{eq}}/$cm$^2$. Furthermore, spatial, timing and energy resolutions were measured at various settings and irradiation levels.
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Submitted 10 July, 2023; v1 submitted 16 December, 2022;
originally announced December 2022.
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Performance of the Electromagnetic Pixel Calorimeter Prototype EPICAL-2
Authors:
J. Alme,
R. Barthel,
A. van Bochove,
V. Borshchov,
R. Bosley,
A. van den Brink,
E. Broeils,
H. Büsching,
V. N. Eikeland,
O. S. Groettvik,
Y. H. Han,
N. van der Kolk,
J. H. Kim,
T. J. Kim,
Y. Kwon,
M. Mager,
Q. W. Malik,
E. Okkinga,
T. Y. Park,
T. Peitzmann,
F. Pliquett,
M. Protsenko,
F. Reidt,
S. van Rijk,
K. Røed
, et al. (9 additional authors not shown)
Abstract:
The first evaluation of an ultra-high granularity digital electromagnetic calorimeter prototype using 1.0-5.8 GeV/c electrons is presented. The $25\times10^6$ pixel detector consists of 24 layers of ALPIDE CMOS MAPS sensors, with a pitch of around 30~$μ$m, and has a depth of almost 20 radiation lengths of tungsten absorber. Ultra-thin cables allow for a very compact design. The properties that are…
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The first evaluation of an ultra-high granularity digital electromagnetic calorimeter prototype using 1.0-5.8 GeV/c electrons is presented. The $25\times10^6$ pixel detector consists of 24 layers of ALPIDE CMOS MAPS sensors, with a pitch of around 30~$μ$m, and has a depth of almost 20 radiation lengths of tungsten absorber. Ultra-thin cables allow for a very compact design. The properties that are critical for physics studies are measured: electromagnetic shower response, energy resolution and linearity. The stochastic energy resolution is comparable with the state-of-the art resolution for a Si-W calorimeter, with data described well by a simulation model using GEANT and Allpix$^2$. The performance achieved makes this technology a good candidate for use in the ALICE FoCal upgrade, and in general demonstrates the strong potential for future applications in high-energy physics.
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Submitted 28 December, 2022; v1 submitted 6 September, 2022;
originally announced September 2022.
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Results from the EPICAL-2 Ultra-High Granularity Electromagnetic Calorimeter Prototype
Authors:
T. Peitzmann,
J. Alme,
R. Barthel,
A. van Bochove,
V. Borshchov,
R. Bosley,
A. van den Brink,
E. Broeils,
H. Büsching,
V. N. Eikeland,
O. S. Groettvik,
Y. H. Han,
N. van der Kolk,
J. H. Kim,
T. J. Kim,
Y. Kwon,
M. Mager,
Q. W. Malik,
E. Okkinga,
T. Y. Park,
F. Pliquett,
M. Protsenko,
F. Reidt,
S. van Rijk,
K. Røed
, et al. (9 additional authors not shown)
Abstract:
A prototype of a new type of calorimeter has been designed and constructed, based on a silicon-tungsten sampling design using pixel sensors with digital readout. It makes use of the Alpide MAPS sensor developed for the ALICE ITS upgrade. A binary readout is possible due to the pixel size of $\approx 30 \times 30 \, μ\mathrm{m}^2$. This prototype has been successfully tested with cosmic muons and w…
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A prototype of a new type of calorimeter has been designed and constructed, based on a silicon-tungsten sampling design using pixel sensors with digital readout. It makes use of the Alpide MAPS sensor developed for the ALICE ITS upgrade. A binary readout is possible due to the pixel size of $\approx 30 \times 30 \, μ\mathrm{m}^2$. This prototype has been successfully tested with cosmic muons and with test beams at DESY and the CERN SPS. We report on performance results obtained at DESY, showing good energy resolution and linearity, and compare to detailed MC simulations. Also shown are preliminary results of the high-energy performance as measured at the SPS. The two-shower separation capabilities are discussed.
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Submitted 27 September, 2022; v1 submitted 5 July, 2022;
originally announced July 2022.
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The MAPS foil
Authors:
S. Beolé,
F. Carnesecchi,
G. Contin,
R. de Oliveira,
A. di Mauro,
S. Ferry,
H. Hillemanns,
A. Junique,
A. Kluge,
L. Lautner,
M. Mager,
B. Mehl,
K. Rebane,
F. Reidt,
I. Sanna,
M. Šuljić,
A. Yüncü
Abstract:
We present a method of embedding a Monolithic Active Pixel Sensor (MAPS) into a flexible printed circuit board (FPC) and its interconnection by means of through-hole copper plating. The resulting assembly, baptised "MAPS foil", is a flexible, light, protected, and fully integrated detector module. By using widely available printed circuit board manufacturing techniques, the production of these dev…
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We present a method of embedding a Monolithic Active Pixel Sensor (MAPS) into a flexible printed circuit board (FPC) and its interconnection by means of through-hole copper plating. The resulting assembly, baptised "MAPS foil", is a flexible, light, protected, and fully integrated detector module. By using widely available printed circuit board manufacturing techniques, the production of these devices can be scaled easily in size and volume, making it a compelling candidate for future large-scale applications.
A first series of prototypes that embed the ALPIDE chip has been produced, functionally tested, and shown to be working.
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Submitted 19 October, 2022; v1 submitted 25 May, 2022;
originally announced May 2022.
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Upgrade of the ALICE ITS detector
Authors:
Felix Reidt
Abstract:
The ALICE experiment at CERN has undergone a major upgrade during the Long Shutdown 2 of the LHC during 2019-2021. A key element is the installation of the new Inner Tracking System 2 (ITS2). The new ITS2 based on CMOS Monolithic Active Pixel Sensors will significantly improve the impact parameter resolution and the tracking efficiency, especially for particles with low transverse momenta, as well…
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The ALICE experiment at CERN has undergone a major upgrade during the Long Shutdown 2 of the LHC during 2019-2021. A key element is the installation of the new Inner Tracking System 2 (ITS2). The new ITS2 based on CMOS Monolithic Active Pixel Sensors will significantly improve the impact parameter resolution and the tracking efficiency, especially for particles with low transverse momenta, as well as the readout-rate capability. In the following, the upgrade and its commissioning status as well installation status will be outlined.
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Submitted 4 March, 2022; v1 submitted 16 November, 2021;
originally announced November 2021.
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First demonstration of in-beam performance of bent Monolithic Active Pixel Sensors
Authors:
ALICE ITS project,
:,
G. Aglieri Rinella,
M. Agnello,
B. Alessandro,
F. Agnese,
R. S. Akram,
J. Alme,
E. Anderssen,
D. Andreou,
F. Antinori,
N. Apadula,
P. Atkinson,
R. Baccomi,
A. Badalà,
A. Balbino,
C. Bartels,
R. Barthel,
F. Baruffaldi,
I. Belikov,
S. Beole,
P. Becht,
A. Bhatti,
M. Bhopal,
N. Bianchi
, et al. (230 additional authors not shown)
Abstract:
A novel approach for designing the next generation of vertex detectors foresees to employ wafer-scale sensors that can be bent to truly cylindrical geometries after thinning them to thicknesses of 20-40$μ$m. To solidify this concept, the feasibility of operating bent MAPS was demonstrated using 1.5$\times$3cm ALPIDE chips. Already with their thickness of 50$μ$m, they can be successfully bent to ra…
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A novel approach for designing the next generation of vertex detectors foresees to employ wafer-scale sensors that can be bent to truly cylindrical geometries after thinning them to thicknesses of 20-40$μ$m. To solidify this concept, the feasibility of operating bent MAPS was demonstrated using 1.5$\times$3cm ALPIDE chips. Already with their thickness of 50$μ$m, they can be successfully bent to radii of about 2cm without any signs of mechanical or electrical damage. During a subsequent characterisation using a 5.4GeV electron beam, it was further confirmed that they preserve their full electrical functionality as well as particle detection performance.
In this article, the bending procedure and the setup used for characterisation are detailed. Furthermore, the analysis of the beam test, including the measurement of the detection efficiency as a function of beam position and local inclination angle, is discussed. The results show that the sensors maintain their excellent performance after bending to radii of 2cm, with detection efficiencies above 99.9% at typical operating conditions, paving the way towards a new class of detectors with unprecedented low material budget and ideal geometrical properties.
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Submitted 17 August, 2021; v1 submitted 27 May, 2021;
originally announced May 2021.
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Charge collection properties of TowerJazz 180 nm CMOS Pixel Sensors in dependence of pixel geometries and bias parameters, studied using a dedicated test-vehicle: the Investigator chip
Authors:
G. Aglieri Rinella,
G. Chaosong,
A. di Mauro,
J. Eum,
H. Hillemanns,
A. Junique,
M. Keil,
D. Kim,
H. Kim,
T. Kugathasan,
S. Lee,
M. Mager,
V. Manzari,
C. A. Marin Tobon,
P. Martinengo,
H. Mugnier,
L. Musa,
F. Reidt,
J. Rousset,
K. Sielewicz,
W. Snoeys,
M. Šuljić,
J. W. van Hoorne,
Q. M. Waheed,
P. Yang
, et al. (1 additional authors not shown)
Abstract:
This paper contains a compilation of parameters influencing the charge collection process extracted from a comprehensive study of partially depleted Monolithic Active Pixel Sensors with small (<25 um$^2$) collection electrodes fabricated in the TowerJazz 180 nm CMOS process. These results gave guidance for the optimisation of the diode implemented in ALPIDE, the chip used in the second generation…
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This paper contains a compilation of parameters influencing the charge collection process extracted from a comprehensive study of partially depleted Monolithic Active Pixel Sensors with small (<25 um$^2$) collection electrodes fabricated in the TowerJazz 180 nm CMOS process. These results gave guidance for the optimisation of the diode implemented in ALPIDE, the chip used in the second generation Inner Tracking System of ALICE, and serve as reference for future simulation studies of similar devices. The studied parameters include: reverse substrate bias, epitaxial layer thickness, charge collection electrode size and the spacing of the electrode to surrounding in-pixel electronics. The results from pixels of 28 um pitch confirm that even in partially depleted circuits, charge collection can be fast (<10 ns), and quantify the influence of the parameters onto the signal sharing and amplitudes, highlighting the importance of a correct spacing between wells and of the impact of the reverse substrate bias.
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Submitted 23 September, 2020; v1 submitted 22 September, 2020;
originally announced September 2020.
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Upgrading the Inner Tracking System and the Time Projection Chamber of ALICE
Authors:
Felix Reidt
Abstract:
The ALICE experiment at CERN is undergoing a major upgrade during the Long Shutdown 2 (LS2) of the LHC during 2019-2020. The key elements regarding the central barrel are the installation of a new Inner Tracking System (ITS) and the upgrade of the large Time Projection Chamber (TPC). The TPC is currently being upgraded with a new readout system, including new GEM-based Readout Chambers and new fro…
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The ALICE experiment at CERN is undergoing a major upgrade during the Long Shutdown 2 (LS2) of the LHC during 2019-2020. The key elements regarding the central barrel are the installation of a new Inner Tracking System (ITS) and the upgrade of the large Time Projection Chamber (TPC). The TPC is currently being upgraded with a new readout system, including new GEM-based Readout Chambers and new front-end electronics enabling us to operate it in continuous mode. The new ITS based on CMOS Monolithic Active Pixel Sensors will significantly improve the impact parameter resolution and the tracking efficiency, especially for particles with low transverse momenta, as well as the readout-rate capability. In the following, the upgrades and their assembly and commissioning status will be outlined. Furthermore, an outlook will be given on plans for the upgrade of the ITS foreseen for the third long shutdown of the LHC in 2025-2026. For this upgrade, the three innermost layers could be replaced by cylindrical detector layers, made of curved wafer-scale-sized CMOS sensors, to lower even further the material budget and to improve the pointing resolution.
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Submitted 2 February, 2020;
originally announced February 2020.
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EUDAQ $-$ A Data Acquisition Software Framework for Common Beam Telescopes
Authors:
P. Ahlburg,
S. Arfaoui,
J. -H. Arling,
H. Augustin,
D. Barney,
M. Benoit,
T. Bisanz,
E. Corrin,
D. Cussans,
D. Dannheim,
J. Dreyling-Eschweiler,
T. Eichhorn,
A. Fiergolski,
I. -M. Gregor,
J. Grosse-Knetter,
D. Haas,
L. Huth,
A. Irles,
H. Jansen,
J. Janssen,
M. Keil,
J. S. Keller,
M. Kiehn,
H. J. Kim,
J. Kroll
, et al. (32 additional authors not shown)
Abstract:
EUDAQ is a generic data acquisition software developed for use in conjunction with common beam telescopes at charged particle beam lines. Providing high-precision reference tracks for performance studies of new sensors, beam telescopes are essential for the research and development towards future detectors for high-energy physics. As beam time is a highly limited resource, EUDAQ has been designed…
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EUDAQ is a generic data acquisition software developed for use in conjunction with common beam telescopes at charged particle beam lines. Providing high-precision reference tracks for performance studies of new sensors, beam telescopes are essential for the research and development towards future detectors for high-energy physics. As beam time is a highly limited resource, EUDAQ has been designed with reliability and ease-of-use in mind. It enables flexible integration of different independent devices under test via their specific data acquisition systems into a top-level framework. EUDAQ controls all components globally, handles the data flow centrally and synchronises and records the data streams. Over the past decade, EUDAQ has been deployed as part of a wide range of successful test beam campaigns and detector development applications.
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Submitted 18 November, 2019; v1 submitted 30 September, 2019;
originally announced September 2019.
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A next-generation LHC heavy-ion experiment
Authors:
D. Adamová,
G. Aglieri Rinella,
M. Agnello,
Z. Ahammed,
D. Aleksandrov,
A. Alici,
A. Alkin,
T. Alt,
I. Altsybeev,
D. Andreou,
A. Andronic,
F. Antinori,
P. Antonioli,
H. Appelshäuser,
R. Arnaldi,
I. C. Arsene,
M. Arslandok,
R. Averbeck,
M. D. Azmi,
X. Bai,
R. Bailhache,
R. Bala,
L. Barioglio,
G. G. Barnaföldi,
L. S. Barnby
, et al. (374 additional authors not shown)
Abstract:
The present document discusses plans for a compact, next-generation multi-purpose detector at the LHC as a follow-up to the present ALICE experiment. The aim is to build a nearly massless barrel detector consisting of truly cylindrical layers based on curved wafer-scale ultra-thin silicon sensors with MAPS technology, featuring an unprecedented low material budget of 0.05% X$_0$ per layer, with th…
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The present document discusses plans for a compact, next-generation multi-purpose detector at the LHC as a follow-up to the present ALICE experiment. The aim is to build a nearly massless barrel detector consisting of truly cylindrical layers based on curved wafer-scale ultra-thin silicon sensors with MAPS technology, featuring an unprecedented low material budget of 0.05% X$_0$ per layer, with the innermost layers possibly positioned inside the beam pipe. In addition to superior tracking and vertexing capabilities over a wide momentum range down to a few tens of MeV/$c$, the detector will provide particle identification via time-of-flight determination with about 20~ps resolution. In addition, electron and photon identification will be performed in a separate shower detector. The proposed detector is conceived for studies of pp, pA and AA collisions at luminosities a factor of 20 to 50 times higher than possible with the upgraded ALICE detector, enabling a rich physics program ranging from measurements with electromagnetic probes at ultra-low transverse momenta to precision physics in the charm and beauty sector.
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Submitted 2 May, 2019; v1 submitted 31 January, 2019;
originally announced February 2019.
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Upgrade of the ALICE Inner Tracking System
Authors:
Felix Reidt
Abstract:
During the Long Shutdown 2 of the LHC in 2018/2019, the ALICE experiment plans the installation of a novel Inner Tracking System. It will replace the current six layer detector system with a seven layer detector using Monolithic Active Pixel Sensors. The upgraded Inner Tracking System will have significantly improved tracking and vertexing capabilities, as well as readout rate to cope with the exp…
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During the Long Shutdown 2 of the LHC in 2018/2019, the ALICE experiment plans the installation of a novel Inner Tracking System. It will replace the current six layer detector system with a seven layer detector using Monolithic Active Pixel Sensors. The upgraded Inner Tracking System will have significantly improved tracking and vertexing capabilities, as well as readout rate to cope with the expected increased Pb-Pb luminosity of the LHC. The choice of Monolithic Active Pixel Sensors has been driven by the specific requirements of ALICE as a heavy ion experiment dealing with rare processes at low transverse momenta. This leads to stringent requirements on the material budget of 0.3$% X/X_{0}$ per layer for the three innermost layers. Furthermore, the detector will see large hit densities of $\sim 19 \mathrm{cm}^{-2}/\mathrm{event}$ on average for minimum-bias events in the inner most layer and has to stand moderate radiation loads of 700 kRad TID and $1\times 10^{13}$ 1 MeV n$_\mathrm{eq}/\mathrm{cm}^{2}$ NIEL at maximum. The Monolithic Active Pixel Sensor detectors are manufactured using the TowerJazz 0.18 $μ$m CMOS Imaging Sensor process on wafers with a high-resistivity epitaxial layer. This contribution summarises the recent R&D activities and focuses on results on the large-scale pixel sensor prototypes.
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Submitted 28 January, 2015; v1 submitted 6 November, 2014;
originally announced November 2014.
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Central Diffraction in Proton-Proton Collisions at $\sqrt{s}=7$\,TeV with ALICE at LHC
Authors:
Felix Reidt
Abstract:
A double-gap topology is used for filtering central-diffractive events from a proton-proton minimum-bias data sample at a centre-of-mass energy {$\sqrt{s}=7$\,TeV}. This topology is defined by particle activity in the ALICE central barrel and absence of particle activity outside. The fraction of events satisfying the double-gap requirement $R_{DG}$ is found to be {…
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A double-gap topology is used for filtering central-diffractive events from a proton-proton minimum-bias data sample at a centre-of-mass energy {$\sqrt{s}=7$\,TeV}. This topology is defined by particle activity in the ALICE central barrel and absence of particle activity outside. The fraction of events satisfying the double-gap requirement $R_{DG}$ is found to be {$7.63\pm0.02(stat.)\pm0.87(syst.)\times 10^{-4}$}. The background of this double-gap fraction is estimated by studying the contributions of non-diffractive, single- and double-diffractive dissociation processes as modelled by Monte Carlo event generators, and is found to be about 10%.
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Submitted 15 January, 2013;
originally announced January 2013.
