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Fabrication Tolerant Multi-Layer Integrated Photonic Topology Optimization
Authors:
Michael J. Probst,
Arjun Khurana,
Joel B. Slaby,
Alec M. Hammond,
Stephen E. Ralph
Abstract:
Optimal multi-layer device design requires consideration of fabrication uncertainties associated with inter-layer alignment and conformal layering. We present layer-restricted topology optimization (TO), a novel technique which mitigates the effects of unwanted conformal layering for multi-layer structures and enables TO in multi-etch material platforms. We explore several approaches to achieve th…
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Optimal multi-layer device design requires consideration of fabrication uncertainties associated with inter-layer alignment and conformal layering. We present layer-restricted topology optimization (TO), a novel technique which mitigates the effects of unwanted conformal layering for multi-layer structures and enables TO in multi-etch material platforms. We explore several approaches to achieve this result compatible with density-based TO projection techniques and geometric constraints. Then, we present a robust TO formulation to design devices resilient to inter-layer misalignment. The novel constraint and robust formulation are demonstrated in 2D grating couplers and a 3D polarization rotator.
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Submitted 10 April, 2024;
originally announced April 2024.
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Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures
Authors:
Philipp Hönicke,
Anna Andrle,
Yves Kayser,
Konstantin V. Nikolaev,
Jürgen Probst,
Frank Scholze,
Victor Soltwisch,
Thomas Weimann,
Burkhard Beckhoff
Abstract:
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their composition is required. In this work, we present…
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The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their composition is required. In this work, we present a soft X-ray fluorescence-based methodology that allows both of these requirements to be addressed at the same time. By applying the grazing-incidence X-ray fluorescence technique and thus utilizing the X-ray standing wave field effect, nanostructures can be investigated with a high sensitivity with respect to their dimensional and compositional characteristics. By varying the incident angles of the exciting radiation, element-sensitive fluorescence radiation is emitted from different regions inside the nanoobjects. By applying an adequate modeling scheme, these datasets can be used to determine the nanostructure characteristics. We demonstrate these capabilities by performing an element-sensitive reconstruction of a lamellar grating made of Si$_3$N$_4$, where GIXRF data for the O-K$α$ and N-K$α$ fluorescence emission allows a thin oxide layer to be reconstructed on the surface of the grating structure. In addition, we employ the technique also to three dimensional nanostructures and derive both dimensional and compositional parameters in a quantitative manner.
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Submitted 5 May, 2020;
originally announced May 2020.
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Applicability of the Debye-Waller dam** factor for the determination of the line-edge roughness of lamellar gratings
Authors:
Analía Fernández Herrero,
Mika Pflüger,
Jürgen Probst,
Frank Scholze,
Victor Soltwisch
Abstract:
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the performance. Grazing-incidence small-angle X-ray scattering is a characterization method that is sensitive to three-dimensional structures and their imp…
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Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the performance. Grazing-incidence small-angle X-ray scattering is a characterization method that is sensitive to three-dimensional structures and their imperfections. To quantify line-edge roughness, a Debye-Waller factor (DWF), which is derived for binary gratings, is usually used. In this work, we systematically analyze the effect of roughness on the diffracted intensities. Two different limits to applying the DWF are found depending on whether or not the roughness is normally distributed.
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Submitted 11 July, 2019;
originally announced July 2019.
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Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with GISAXS
Authors:
Mika Pflüger,
Victor Soltwisch,
Jolly Xavier,
Jürgen Probst,
Frank Scholze,
Christiane Becker,
Michael Krumrey
Abstract:
In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic structures produced by nanoimprint lithography. The photonic structures are composed of crystalline and locally quasicrystalline two-dimensional patterns with structure sizes between about 100 nm and 10 $μ$m to enable br…
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In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic structures produced by nanoimprint lithography. The photonic structures are composed of crystalline and locally quasicrystalline two-dimensional patterns with structure sizes between about 100 nm and 10 $μ$m to enable broadband visible light absorption for use in solar energy harvesting. These first GISAXS measurements on locally quasicrystalline samples demonstrate that GISAXS is capable of showing the locally quasicrystalline nature of the samples while at the same time revealing the long-range periodicity introduced due to the lattice design. We describe the scattering qualitatively in the framework of the distorted wave Born approximation using a hierarchical model mirroring the sample design, which consists of a rectangular and locally quasicrystalline supercell which is repeated periodically to fill the whole surface.
The nanoimprinted samples are compared to a sample manufactured using electron beam lithography and the distortions of the periodic and locally quasiperiodic samples are quantified statistically. Due to the high sensitivity of GISAXS to deviations from the perfect lattice, the misalignment of the crystallographic axes was measured with a resolution of 0.015°, showing distortions up to +/- 0.15° in the investigated samples.
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Submitted 19 March, 2019;
originally announced March 2019.
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Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
Authors:
Victor Soltwisch,
Philipp Hönicke,
Yves Kayser,
Janis Eilbracht,
Jürgen Probst,
Frank Scholze,
Burckhard Beckhoff
Abstract:
The geometry of a Si$_3$N$_4$ lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are usually treated with the matrix formalism to determine the X-ray standing wave field, this approach fails for laterally structured surfaces. Maxwell solvers based on finite elements are often used to model electrical fiel…
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The geometry of a Si$_3$N$_4$ lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are usually treated with the matrix formalism to determine the X-ray standing wave field, this approach fails for laterally structured surfaces. Maxwell solvers based on finite elements are often used to model electrical field strengths for any 2D or 3D structures in the optical spectral range. We show that this approach can also be applied in the field of X-rays. The electrical field distribution obtained with the Maxwell solver can subsequently be used to calculate the fluorescence intensities in full analogy to the X-ray standing wave field obtained by the matrix formalism. Only the effective 1D integration for the layer system has to be replaced by a 2D integration of the finite elements, taking into account the local excitation conditions. We will show that this approach is capable of reconstructing the geometric line shape of a structured surface with high elemental sensitivity. This combination of GIXRF and finite-element simulations paves the way for a versatile characterization of nanoscale-structured surfaces.
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Submitted 12 January, 2018;
originally announced January 2018.
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Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver
Authors:
Victor Soltwisch,
Analia Fernandez Herrero,
Mika Pflüger,
Anton Haase,
Jürgen Probst,
Christian Laubis,
Michael Krumrey,
Frank Scholze
Abstract:
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of the near and far field by numerically solving Maxwell's equations with a finite-element method are well established. The application of this technique to X-ray…
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Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of the near and far field by numerically solving Maxwell's equations with a finite-element method are well established. The application of this technique to X-rays is still challenging, due to the discrepancy between incident wavelength and finite-element size. This drawback vanishes for GISAXS due to the small angles of incidence, the conical scattering geometry and the periodicity of the surface structures, which allows a rigorous computation of the diffraction efficiencies with sufficient numerical precision. To develop dimensional metrology tools based on GISAXS, lamellar gratings with line widths down to 55 nm were produced by state-of-the-art e-beam lithography and then etched into silicon. The high surface sensitivity of GISAXS in conjunction with a Maxwell solver allows a detailed reconstruction of the grating line shape also for thick, non-homogeneous substrates. The reconstructed geometrical line shape models are statistically validated by applying a Markov chain Monte Carlo (MCMC) sampling technique which reveals that GISAXS is able to reconstruct critical parameters like the widths of the lines with sub-nm uncertainty.
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Submitted 4 October, 2017; v1 submitted 26 April, 2017;
originally announced April 2017.
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Grazing Incidence Small Angle X-Ray Scattering (GISAXS) on Small Targets Using Large Beams
Authors:
Mika Pflüger,
Victor Soltwisch,
Jürgen Probst,
Frank Scholze,
Michael Krumrey
Abstract:
GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and t…
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GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and the targets are surrounded by structured areas. Because the beam footprint is larger than the targets, the surrounding structures contribute parasitic scattering, burying the target signal. In this paper, GISAXS measurements of isolated as well as surrounded grating targets in Si substrates with line lengths from $50\,{\rmμm}$ down to $4\,{\rmμm}$ are presented. For the isolated grating targets, the changes in the scattering patterns due to the reduced target length are explained. For the surrounded grating targets, the scattering signal of a $15\,{\rmμm}\,\times\,15\,{\rmμm}$ target grating structure is separated from the scattering signal of $100\,{\rmμm}\,\times\,100\,{\rmμm}$ nanostructured surroundings by producing the target with a different orientation with respect to the predominant direction of the surrounding structures. The described technique allows to apply GISAXS, e.g. for characterization of metrology fields in the semiconductor industry, where up to now it has been considered impossible to use this method due to the large beam footprint.
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Submitted 3 March, 2017;
originally announced March 2017.
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A First Law of Entanglement Rates from Holography
Authors:
Andy O'Bannon,
Jonas Probst,
Ronnie Rodgers,
Christoph F. Uhlemann
Abstract:
For a perturbation of the state of a Conformal Field Theory (CFT), the response of the entanglement entropy is governed by the so-called "first law" of entanglement entropy, in which the change in entanglement entropy is proportional to the change in energy. Whether such a first law holds for other types of perturbations, such as a change to the CFT Lagrangian, remains an open question. We use hol…
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For a perturbation of the state of a Conformal Field Theory (CFT), the response of the entanglement entropy is governed by the so-called "first law" of entanglement entropy, in which the change in entanglement entropy is proportional to the change in energy. Whether such a first law holds for other types of perturbations, such as a change to the CFT Lagrangian, remains an open question. We use holography to study the evolution in time $t$ of entanglement entropy for a CFT driven by a $t$-linear source for a conserved $U(1)$ current or marginal scalar operator. We find that although the usual first law of entanglement entropy may be violated, a first law for the rates of change of entanglement entropy and energy still holds. More generally, we prove that this first law for rates holds in holography for any asymptotically $(d+1)$-dimensional Anti-de Sitter metric perturbation whose $t$ dependence first appears at order $z^d$ in the Fefferman-Graham expansion about the boundary at $z=0$.
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Submitted 1 September, 2017; v1 submitted 22 December, 2016;
originally announced December 2016.
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Two-point Functions in a Holographic Kondo Model
Authors:
Johanna Erdmenger,
Carlos Hoyos,
Andy O'Bannon,
Ioannis Papadimitriou,
Jonas Probst,
Jackson M. S. Wu
Abstract:
We develop the formalism of holographic renormalization to compute two-point functions in a holographic Kondo model. The model describes a $(0+1)$-dimensional impurity spin of a gauged $SU(N)$ interacting with a $(1+1)$-dimensional, large-$N$, strongly-coupled Conformal Field Theory (CFT). We describe the impurity using Abrikosov pseudo-fermions, and define an $SU(N)$-invariant scalar operator…
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We develop the formalism of holographic renormalization to compute two-point functions in a holographic Kondo model. The model describes a $(0+1)$-dimensional impurity spin of a gauged $SU(N)$ interacting with a $(1+1)$-dimensional, large-$N$, strongly-coupled Conformal Field Theory (CFT). We describe the impurity using Abrikosov pseudo-fermions, and define an $SU(N)$-invariant scalar operator $\mathcal{O}$ built from a pseudo-fermion and a CFT fermion. At large $N$ the Kondo interaction is of the form $\mathcal{O}^{\dagger} \mathcal{O}$, which is marginally relevant, and generates a Renormalization Group (RG) flow at the impurity. A second-order mean-field phase transition occurs in which $\mathcal{O}$ condenses below a critical temperature, leading to the Kondo effect, including screening of the impurity. Via holography, the phase transition is dual to holographic superconductivity in $(1+1)$-dimensional Anti-de Sitter space. At all temperatures, spectral functions of $\mathcal{O}$ exhibit a Fano resonance, characteristic of a continuum of states interacting with an isolated resonance. In contrast to Fano resonances observed for example in quantum dots, our continuum and resonance arise from a $(0+1)$-dimensional UV fixed point and RG flow, respectively. In the low-temperature phase, the resonance comes from a pole in the Green's function of the form $-i \langle {\cal O} \rangle^2$, which is characteristic of a Kondo resonance.
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Submitted 22 March, 2017; v1 submitted 6 December, 2016;
originally announced December 2016.
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Holographic Kondo and Fano Resonances
Authors:
Johanna Erdmenger,
Carlos Hoyos,
Andy O'Bannon,
Ioannis Papadimitriou,
Jonas Probst,
Jackson M. S. Wu
Abstract:
We use holography to study a $(1+1)$-dimensional Conformal Field Theory (CFT) coupled to an impurity. The CFT is an $SU(N)$ gauge theory at large $N$, with strong gauge interactions. The impurity is an $SU(N)$ spin. We trigger an impurity Renormalization Group (RG) flow via a Kondo coupling. The Kondo effect occurs only below the critical temperature of a large-$N$ mean-field transition. We show t…
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We use holography to study a $(1+1)$-dimensional Conformal Field Theory (CFT) coupled to an impurity. The CFT is an $SU(N)$ gauge theory at large $N$, with strong gauge interactions. The impurity is an $SU(N)$ spin. We trigger an impurity Renormalization Group (RG) flow via a Kondo coupling. The Kondo effect occurs only below the critical temperature of a large-$N$ mean-field transition. We show that at all temperatures $T$, impurity spectral functions exhibit a Fano resonance, which in the low-$T$ phase is a large-$N$ manifestation of the Kondo resonance. We thus provide an example in which the Kondo resonance survives strong correlations, and uncover a novel mechanism for generating Fano resonances, via RG flows between $(0 + 1)$-dimensional fixed points
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Submitted 12 June, 2017; v1 submitted 28 November, 2016;
originally announced November 2016.
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Second-Order Hydrodynamics and Universality in Non-Conformal Holographic Fluids
Authors:
Philipp Kleinert,
Jonas Probst
Abstract:
We study second-order hydrodynamic transport in strongly coupled non-conformal field theories with holographic gravity duals in asymptotically anti-de Sitter space. We first derive new Kubo formulae for five second-order transport coefficients in non-conformal fluids in $(3+1)$ dimensions. We then apply them to holographic RG flows induced by scalar operators of dimension $Δ=3$. For general backgr…
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We study second-order hydrodynamic transport in strongly coupled non-conformal field theories with holographic gravity duals in asymptotically anti-de Sitter space. We first derive new Kubo formulae for five second-order transport coefficients in non-conformal fluids in $(3+1)$ dimensions. We then apply them to holographic RG flows induced by scalar operators of dimension $Δ=3$. For general background solutions of the dual bulk geometry, we find explicit expressions for the five transport coefficients at infinite coupling and show that a specific combination, $\tilde{H}=2ητ_π-2(κ-κ^*)-λ_2$, always vanishes. We prove analytically that the Haack-Yarom identity $H=2ητ_π-4λ_1-λ_2=0$, which is known to be true for conformal holographic fluids, also holds when taking into account leading non-conformal corrections. The numerical results we obtain for two specific families of RG flows suggest that $H$ vanishes regardless of conformal symmetry. Our work provides further evidence that the Haack-Yarom identity $H=0$ may be universally satisfied by strongly coupled fluids.
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Submitted 27 March, 2017; v1 submitted 4 October, 2016;
originally announced October 2016.
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Deterministic aperiodic composite lattice-structured silicon thin films for photon management
Authors:
Jolly Xavier,
Juergen Probst,
Christiane Becker
Abstract:
Exotic manipulation of the flow of photons in nanoengineered semiconductor materials with an aperiodic distribution of nanostructures plays a key role in efficiency-enhanced and industrially viable broadband photonic technologies. Through a generic deterministic nanotechnological route, in addition to periodic, transversely quasicrystallographic or disordered random photonic lattices, here we show…
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Exotic manipulation of the flow of photons in nanoengineered semiconductor materials with an aperiodic distribution of nanostructures plays a key role in efficiency-enhanced and industrially viable broadband photonic technologies. Through a generic deterministic nanotechnological route, in addition to periodic, transversely quasicrystallographic or disordered random photonic lattices, here we show scalable nanostructured semiconductor thin films on large area nanoimprinted substrates up to 4cm^2 with advanced functional features of aperiodic composite nanophotonic lattices having tailorable supercell tiles. The richer Fourier spectra of the presented artificially nanostructured materials with well-defined lattice point morphologies are designed functionally akin to two-dimensional incommensurate intergrowth aperiodic lattices-comprising periodic photonic crystals and in-plane quasicrystals as subgroups. The composite photonic lattice-structured crystalline silicon thin films with tapered nanoholes or nanocone-nanoholes are presented showing up to +30 % achievable short circuit current density in comparison to a periodic counterpart where as it is up to +190 % in comparison to a reference unstructured silicon thin film of 300 nanometers of thickness. In view of scalable bottom-up integrated device fabrication processes, the structural analysis is further extended to liquid phase crystallized double-side-textured deterministic aperiodic lattice-structured 10 micrometers thick large area crystalline silicon film.
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Submitted 19 May, 2016;
originally announced May 2016.
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A Holographic Two-Impurity Kondo Model
Authors:
Andy O'Bannon,
Ioannis Papadimitriou,
Jonas Probst
Abstract:
We propose a model of a strongly-interacting two-impurity Kondo system based on the AdS/CFT correspondence, also known as holography. In a Landau Fermi Liquid, the single-impurity Kondo effect is the screening of an impurity spin at low temperature $T$. The two-impurity Kondo model then describes the competition between the Kondo interaction and the Heisenberg interaction between two impurity spin…
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We propose a model of a strongly-interacting two-impurity Kondo system based on the AdS/CFT correspondence, also known as holography. In a Landau Fermi Liquid, the single-impurity Kondo effect is the screening of an impurity spin at low temperature $T$. The two-impurity Kondo model then describes the competition between the Kondo interaction and the Heisenberg interaction between two impurity spins, also called the RKKY interaction. For spin-$1/2$ impurities, that competition leads to a quantum phase transition from a Kondo-screened phase to a phase in which the two impurity spins screen one another. Our holographic model is based on a $(1+1)$-dimensional CFT description of the two-impurity Kondo model, reliable for two impurities with negligible separation in space. We consider only impurity spins in a totally anti-symmetric representation of an $SU(N)$ spin symmetry. We employ a large-$N$ limit, in which both Kondo and RKKY couplings are double-trace, and both Kondo and inter-impurity screening appear as condensation of single-trace operators at the impurities' location. We perform the holographic renormalization of our model, which allows us to identify the Kondo and RKKY couplings as boundary conditions on fields in AdS. We numerically compute the phase diagram of our model in the plane of RKKY coupling versus $T$, finding evidence for a quantum phase transition from a trivial phase, with neither Kondo nor inter-impurity screening, to a non-trivial phase, with both Kondo and anti-ferromagnetic inter-impurity screening. More generally we show, just using $SU(N)$ representation theory, that ferromagnetic correlations must be absent at leading order in the large-$N$ limit. Our holographic model may be useful for studying many open problems involving strongly-interacting quantum impurities, including for example the Kondo lattice, relevant for describing the heavy fermion compounds.
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Submitted 27 October, 2015;
originally announced October 2015.
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Correlated Diffuse X-ray Scattering from Periodically Nano-Structured Surfaces
Authors:
Victor Soltwisch,
Anton Haase,
Jan Wernecke,
Juergen Probst,
Max Schoengen,
Sven Burger,
Michael Krumrey,
Frank Scholze
Abstract:
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering. To support an improved reconstruction of nanostructured surface geometries, we investigated the origin of the contributions to the diffuse scattering pattern which is correlated to the surface roughness. Resonant diffuse scattering leads to a palm-like structure of intensity sheets. Dynamic sca…
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Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering. To support an improved reconstruction of nanostructured surface geometries, we investigated the origin of the contributions to the diffuse scattering pattern which is correlated to the surface roughness. Resonant diffuse scattering leads to a palm-like structure of intensity sheets. Dynamic scattering generates the so-called Yoneda band caused by a resonant scatter enhancement at the critical angle of total reflection and higher-order Yoneda bands originating from a subsequent diffraction of the Yoneda enhanced scattering at the grating. Our explanations are supported by modelling using a solver for the time-harmonic Maxwell's equations based on the finite-element method.
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Submitted 20 July, 2016; v1 submitted 7 September, 2015;
originally announced September 2015.
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Key components for nano-assembled plasmon-excited single molecule non-linear devices
Authors:
Günter Kewes,
Max Schoengen,
Giacomo Mazzamuto,
Oliver Neitzke,
Rolf-Simon Schönfeld,
Andreas W. Schell,
Jürgen Probst,
Janik Wolters,
Bernd Löchel,
Costanza Toninelli,
Oliver Benson
Abstract:
Tremendous enhancement of light-matter interaction in plasmon-excited molecular hybrid devices allows for non-linearities on the level of single emitters and few photons. This promises a plethora of novel applications like single photon transistors. Nevertheless, building the components of such devices is technologically extremely challenging. We tackle this task by lithographically fabricating on…
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Tremendous enhancement of light-matter interaction in plasmon-excited molecular hybrid devices allows for non-linearities on the level of single emitters and few photons. This promises a plethora of novel applications like single photon transistors. Nevertheless, building the components of such devices is technologically extremely challenging. We tackle this task by lithographically fabricating on-chip plasmonic waveguides, efficiently connected to far-field in- and out-coupling ports via low-loss dielectric waveguides. Furthermore, a nano-assembling technology is developed, enabling the controlled coupling of single organic emitters to the plasmonic waveguides. Dibenzoterrylene fluorescent molecules hosted in anthracene crystals are investigated for this purpose. Here we present all key-components and technologies for a plasmon-excited single molecule non-linear device.
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Submitted 20 January, 2015;
originally announced January 2015.
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Thermo-optical response of photonic crystal cavities operating in the visible
Authors:
Janik Wolters,
Niko Nikolay,
Max Schoengen,
Andreas W. Schell,
Jürgen Probst,
Bernd Löchel,
Oliver Benson
Abstract:
In this paper we study thermo-optical effects in gallium phosphite photonic crystal cavities in the visible. By measuring the shift of narrow resonances we derive the temperature dependency of the local refractive index of gallium phosphide in attoliter volumina over a temperature range between 5 K and 300 K at a wavelength of about 605 nm. Additionally, the potential of photonic crystal cavities…
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In this paper we study thermo-optical effects in gallium phosphite photonic crystal cavities in the visible. By measuring the shift of narrow resonances we derive the temperature dependency of the local refractive index of gallium phosphide in attoliter volumina over a temperature range between 5 K and 300 K at a wavelength of about 605 nm. Additionally, the potential of photonic crystal cavities for thermo-optical switching of visible light is investigated. As an example we demonstrate thermo-optical switching with 13 dB contrast.
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Submitted 1 May, 2013; v1 submitted 7 March, 2012;
originally announced March 2012.