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Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
Authors:
Michael Klute,
Efe Kemaneci,
Horia-Rugen Porteanu,
Ilija Stefanovic,
Wolfgang Heinrich,
Peter Awakowicz,
Ralf Peter Brinkmann
Abstract:
The MMWICP (Miniature MicroWave ICP) is a new plasma source using the induction principle. Recently Klute et al. presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geo…
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The MMWICP (Miniature MicroWave ICP) is a new plasma source using the induction principle. Recently Klute et al. presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of $p=1000\,\mathrm{Pa}$ and a gas temperature of $T_\mathrm{g}=650\mbox{-}1600\,\mathrm{K}$. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive \linebreak coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at a electron density of $n_\mathrm{e} \approx 6.4 \!\times\!10^{18} \, \mathrm{m}^{-3}$ as $E/H$-hybridmode with an capacitive and inductive component.
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Submitted 15 May, 2021;
originally announced May 2021.
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Theoretical investigation of a miniature microwave driven plasma jet
Authors:
Michael Klute,
Horia-Eugen Porteanu,
Ilija Stefanovic,
Wolfgang Heinrich,
Peter Awakowicz,
Ralf Peter Brinkmann
Abstract:
Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a the…
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Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a theoretical model of the new device, based on a series representation of the electromagnetic field in the resonator and the volume integrated (global) model for the loss processes within the plasma. An infinite number of modes can be found ordered by the azimuthal wave number m. These modes essentially determine the electromagnetic behavior of the system and differ from ordinary cavity modes. The mode m=0 can be identified with the inductive mode and is called H-mode, the mode m=1 is the capacitive mode and is called E-mode. Both modes refer to different operating regimes, which are separated by different values of the plasma parameters. In a second step the matching network and its characteristics are taken into account in order to find stable equilibrium points and possible hysteresis effects. As main result, the feasibility of inductive power coupling for the MMWICP resonator is shown.
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Submitted 6 March, 2020; v1 submitted 4 March, 2020;
originally announced March 2020.
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Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices
Authors:
Horia-Eugen,
Porteanu,
Ilija Stefanović,
Michael Klute,
Ralf-Peter Brinkmann,
Peter Awakowicz,
Wolfgang Heinrich
Abstract:
Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The…
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Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The present paper shows the state of the art of the research on such sources, demonstrating their work up to atmospheric pressure.
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Submitted 3 March, 2020;
originally announced March 2020.
