Showing 1–1 of 1 results for author: Okawaki, S

Characterization of X-ray charge neutralizer using carbon-nanotube field emitter

Authors: Shuhei Okawaki, Satoshi Abo, Fujio Wakaya, Hayato Yamashita, Masayuki Abe, Mikio Takai

Abstract: An X-ray charge neutralizer using a screen-printed carbon-nanotube field emitter is demonstrated to show the possibility of a large-area flat-panel charge neutralizer, although the device dimensions in the present work are not very large. The X-ray yields and spectra are characterized to estimate the ion generation rate as one of the figures of merit of neutralizers. Charge neutralization characte… ▽ More An X-ray charge neutralizer using a screen-printed carbon-nanotube field emitter is demonstrated to show the possibility of a large-area flat-panel charge neutralizer, although the device dimensions in the present work are not very large. The X-ray yields and spectra are characterized to estimate the ion generation rate as one of the figures of merit of neutralizers. Charge neutralization characteristics are measured and show good performance. △ Less

Submitted 23 December, 2018; originally announced December 2018.

Comments: 5 pages, 9 figures, 28th International Microprocesses and Nanotechnology Conference (MNC 2015)

Journal ref: Jpn. J. Appl. Phys. 55, 06GF10 (2016)